[Scan]
initial_time=2016-01-27T22:38:03
final_time=2016-01-27T22:38:23
ip_count=19
run=1025
dataset=5
scan=385
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.20871E-2
qbias_imon=-3.83988E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-6.23918E-10
ql2_vset=
ql2_vmon=-3.33786E-4
ql2_imon=4.26602E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.78435E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=7.92325E-10
mult1=-1.11973E-8
mult2=-2.66871E-9
rf_tmon=-9.87179E-3
rf_agc=2.70069E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.22137E-3
ql5_imon=4.53436E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63908E0
bslens_imon=2.55034E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19742E1
lens5a_imon=1.98934E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12473E2
lens4a_imon=2.05068E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53737E1
cs_ef1b_imon=2.76427E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04595E2
lens23_imon=1.02153E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04982E1
cs_ea1_imon=2.56237E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0395E0
lens1_imon=1.49205E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64684E1
os_ef1alow_imon=2.98426E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03743E1
cs_ea2_imon=1.55293E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84429E1
cs_ef1a_imon=2.89703E-5
olens2_vset=9.7E-1
olens2_vmon=9.70602E-1
olens2_imon=4.00221E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11181E1
os_restr1_imon=2.87409E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15471E1
os_ea1_imon=1.89732E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6378E1
os_ef1bup_imon=3.0913E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.258E0
cs_ionrep_imon=1.19298E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91916E2
cs_nozzle_imon=1.93409E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01856E1
cs_anode1_imon=2.91163E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20525E0
olens4_imon=8.05163E-10
tplens_vset=1.4E-1
tplens_vmon=1.64143E0
tplens_imon=-2.38717E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25695E1
iondef3_imon=1.50374E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26753E1
iondef2_imon=1.57877E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02922E2
lens6_imon=2.98374E-4
ql6_vset=1.0E-1
ql6_vmon=9.38654E-2
ql6_imon=4.56834E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30106E0
ionrepsh_imon=1.74265E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33569E1
lens5b_imon=2.19074E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74432E1
cs_ef2b_imon=3.12883E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.06793E-1
os_ea2_imon=-5.36028E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06047E2
lens4b_imon=2.00743E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7124E1
cs_ef2a_imon=3.20389E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61639E0
os_ef2alow_imon=-2.55373E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.24251E-1
os_ef2bup_imon=-5.23663E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10706E1
os_restr2_imon=2.86089E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.31025E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.23673E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73652E1
iondef1_imon=1.0921E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68178E1
iondef4_imon=1.08677E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=2.09348E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=3.78251E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13072E0
cs_ionaccel_imon=-1.71619E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.47313E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56208E1
einzel_imon=7.64266E-6
window_vset=0.0E0
window_vmon=2.28691E-1
window_imon=-9.79441E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39195E-4
mask2_vset=0.0E0
mask2_vmon=-1.86744E1
mask2_imon=-5.93688E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.60815E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.42599E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.44888E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.70826E0
defgridb_imon=6.19947E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3384E1
os_fil1_imon=4.59409E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.1484E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62531E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30657E1
cs_fil1_imon=9.96756E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63669E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63022E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.19298E-2
os_fil2_imon=-2.40275E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.75572E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.29333E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31025E-1
cs_fil2_imon=-2.04364E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.40844E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21766E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.21181E-1
res40_imon=-2.47728E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.503E3	1.0E0	1.47E2	4.1E1	-7.24736E-2	-8.80015E1	-7.86781E-4	-8.80003E1	3.33786E-4	5.22137E-3	9.37462E-2	2.73682E1	-3.2662E1	-3.26083E1	2.67944E1	1.20055E-7	2.52169E-3	2.52169E-3	6.29665E-3	3.0071E-1
2.0E0	9.7154E4	1.06E2	3.16E2	1.6E2	-7.27828E-2	-8.80013E1	-6.91414E-4	-8.80004E1	4.05312E-4	5.126E-3	9.37462E-2	2.72218E1	-3.26493E1	-3.26395E1	2.67947E1	1.19749E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.00453E-1
3.0E0	1.3E1	0.0E0	4.85E2	2.79E2	-7.201E-2	-8.80013E1	-6.67572E-4	-8.80002E1	3.57628E-4	5.03063E-3	9.36985E-2	2.72544E1	-3.26413E1	-3.26036E1	2.67911E1	1.19872E-7	2.5147E-3	2.5147E-3	6.30182E-3	3.00676E-1
4.0E0	2.0642E4	6.0E0	6.55E2	3.98E2	-7.17007E-2	-8.80013E1	-4.76837E-4	-8.79998E1	3.33786E-4	5.19753E-3	9.34362E-2	2.73889E1	-3.26773E1	-3.26077E1	2.67995E1	1.20106E-7	2.51632E-3	2.51632E-3	6.35059E-3	2.9943E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.80015E1	-6.67572E-4	-8.80002E1	2.6226E-4	5.24521E-3	9.34362E-2	2.72558E1	-3.26446E1	-3.26494E1	2.67998E1	1.20055E-7	2.51417E-3	2.51417E-3	6.3074E-3	2.98665E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80013E1	-5.72205E-4	-8.80005E1	6.19888E-4	4.81606E-3	9.35793E-2	2.72222E1	-3.26458E1	-3.26663E1	2.6816E1	1.20174E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80013E1	-6.67572E-4	-8.80004E1	3.09944E-4	4.98295E-3	9.3627E-2	2.73859E1	-3.26531E1	-3.26036E1	2.68058E1	1.20148E-7	2.51716E-3	2.51716E-3	6.30192E-3	3.00171E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30146E-2	-8.80011E1	-6.91414E-4	-8.80002E1	5.96046E-4	5.31673E-3	9.37939E-2	2.73045E1	-3.26723E1	-3.26116E1	2.67806E1					
1.2E1	2.9E1	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.80012E1	-8.10623E-4	-8.80004E1	4.52995E-4	5.24521E-3	9.36747E-2	2.73177E1	-3.26681E1	-3.26086E1	2.6792E1	1.20042E-7	2.51393E-3	2.51393E-3	6.31798E-3	3.01104E-1
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.33239E-2	-8.80015E1	-4.76837E-4	-8.80001E1	3.33786E-4	4.81606E-3	9.33886E-2	2.73039E1	-3.26747E1	-3.2644E1	2.67986E1	1.20244E-7	2.51693E-3	2.51693E-3	6.27954E-3	3.01209E-1
1.4E1	3.221E3	3.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80013E1	-5.96046E-4	-8.80004E1	4.05312E-4	5.07832E-3	9.33886E-2	2.73198E1	-3.26419E1	-3.2629E1	2.67897E1	1.20055E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.00453E-1
1.5E1	3.6E1	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80014E1	-6.67572E-4	-8.80005E1	4.05312E-4	4.95911E-3	9.35555E-2	2.73021E1	-3.26711E1	-3.26284E1	2.68106E1	1.20122E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.00302E-1
1.6E1	2.61E2	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80013E1	-4.05312E-4	-8.80006E1	5.96046E-4	4.98295E-3	9.34839E-2	2.737E1	-3.26482E1	-3.26669E1	2.68142E1	1.20435E-7	2.52318E-3	2.52318E-3	6.33486E-3	3.00302E-1
1.7E1	3.09E2	0.0E0	6.87E2	4.7E2	-7.35556E-2	-8.80014E1	-8.10623E-4	-8.80005E1	3.8147E-4	4.673E-3	9.37462E-2	2.72781E1	-3.26885E1	-3.2602E1	2.68418E1	1.20017E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00041E-1
1.8E1	1.301E3	1.0E0	7.27E2	5.0E2	-7.23964E-2	-8.80015E1	-2.86102E-4	-8.80004E1	2.14577E-4	5.31673E-3	9.39608E-2	2.74063E1	-3.26758E1	-3.26299E1	2.6803E1	1.19861E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.00563E-1
1.9E1	1.007E3	0.0E0	7.68E2	5.29E2	-7.26282E-2	-8.80012E1	-2.38419E-4	-8.79999E1	1.90735E-4	4.98295E-3	9.36747E-2	2.7209E1	-3.26585E1	-3.26491E1	2.6792E1	1.19822E-7	2.51752E-3	2.51752E-3	6.33297E-3	3.00149E-1
2.0E1	2.3518E4	2.0E1	8.08E2	5.58E2	-7.38649E-2	-8.80013E1	-2.14577E-4	-8.80003E1	3.57628E-4	5.48363E-3	9.37939E-2	2.74319E1	-3.26494E1	-3.26735E1	2.67836E1	1.20316E-7	2.51271E-3	2.51271E-3	6.33021E-3	3.01609E-1
2.1E1	4.9E1	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80014E1	-1.43051E-4	-8.80001E1	5.48363E-4	4.74453E-3	9.37939E-2	2.7352E1	-3.26915E1	-3.26771E1	2.68099E1	1.19705E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.01871E-1
2.2E1	1.704E3	1.0E0	8.89E2	6.17E2	-7.23189E-2	-8.80014E1	-7.15256E-5	-8.79999E1	4.52995E-4	4.98295E-3	9.36031E-2	2.7224E1	-3.26789E1	-3.25731E1	2.68082E1	1.2033E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.01085E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.20871E-2	-8.80014E1	-3.33786E-4	-8.80003E1	2.6226E-4	5.22137E-3	9.38654E-2	2.73652E1	-3.26753E1	-3.25695E1	2.68178E1	1.19965E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00824E-1