[Scan]
initial_time=2016-01-27T22:38:30
final_time=2016-01-27T22:38:49
ip_count=19
run=1025
dataset=5
scan=386
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.78081E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-6.39796E-10
ql2_vset=
ql2_vmon=-2.38419E-4
ql2_imon=4.15826E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.7679E-9
ql4_vset=
ql4_vmon=-2.38419E-5
ql4_imon=8.35288E-10
mult1=-1.86848E-8
mult2=-2.83105E-9
rf_tmon=-4.23812E-3
rf_agc=3.33504E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=4.14264E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63154E0
bslens_imon=2.50085E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19847E1
lens5a_imon=1.98873E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.05154E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53716E1
cs_ef1b_imon=2.76319E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0459E2
lens23_imon=1.02258E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05007E1
cs_ea1_imon=2.58304E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02001E0
lens1_imon=1.32522E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64634E1
os_ef1alow_imon=2.98271E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03926E1
cs_ea2_imon=1.52153E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8418E1
cs_ef1a_imon=2.89358E-5
olens2_vset=9.7E-1
olens2_vmon=9.70602E-1
olens2_imon=4.11987E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=2.87762E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15637E1
os_ea1_imon=1.88796E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63661E1
os_ef1bup_imon=3.09014E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24574E0
cs_ionrep_imon=1.17724E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93473E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01601E1
cs_anode1_imon=2.90565E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20482E0
olens4_imon=7.89106E-10
tplens_vset=1.4E-1
tplens_vmon=1.60899E0
tplens_imon=-1.78686E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26337E1
iondef3_imon=1.5055E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26744E1
iondef2_imon=1.56963E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02879E2
lens6_imon=2.98468E-4
ql6_vset=1.0E-1
ql6_vmon=9.38654E-2
ql6_imon=4.29964E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.33416E0
ionrepsh_imon=1.74406E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33766E1
lens5b_imon=2.17424E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74942E1
cs_ef2b_imon=3.13179E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.36773E-1
os_ea2_imon=-6.10008E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00573E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71063E1
cs_ef2a_imon=3.19562E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64035E0
os_ef2alow_imon=-2.49048E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.42067E-1
os_ef2bup_imon=-5.254E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10799E1
os_restr2_imon=2.85777E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23027E2
cs_ionfoca_imon=6.28974E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02276E1
cs_anode2_imon=2.24902E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73735E1
iondef1_imon=1.09517E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67966E1
iondef4_imon=1.09418E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=2.02733E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82547E-1
olens1_imon=3.39615E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12949E0
cs_ionaccel_imon=-1.81322E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02107E2
cs_ionfocb_imon=1.47425E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56373E1
einzel_imon=7.84742E-6
window_vset=0.0E0
window_vmon=1.53E-1
window_imon=-1.03477E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82632E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.86681E1
mask2_imon=-6.53323E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=7.4935E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.63468E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.09653E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.58337E0
defgridb_imon=6.17282E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33839E1
os_fil1_imon=5.33988E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.06546E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62193E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30711E1
cs_fil1_imon=9.98696E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63844E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62633E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.17758E-2
os_fil2_imon=-2.34089E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.01945E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.44311E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29372E-1
cs_fil2_imon=-2.07492E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10378E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21628E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.20122E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.41222E-1
res40_imon=-2.46324E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=212
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.464E3	2.0E0	1.47E2	4.1E1	-7.19325E-2	-8.80015E1	-6.67572E-4	-8.80003E1	2.38419E-5	4.74453E-3	9.35555E-2	2.74402E1	-3.26803E1	-3.26661E1	2.67879E1	1.20208E-7	2.52407E-3	2.52407E-3	6.3245E-3	3.00251E-1
2.0E0	9.7341E4	8.9E1	3.16E2	1.6E2	-7.13915E-2	-8.80013E1	-6.91414E-4	-8.80003E1	3.09944E-4	4.60148E-3	9.37939E-2	2.74983E1	-3.26672E1	-3.25955E1	2.68249E1	1.20158E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.01738E-1
3.0E0	1.8E1	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80014E1	-9.29832E-4	-8.80003E1	7.15256E-5	4.88758E-3	9.40084E-2	2.7472E1	-3.26455E1	-3.26166E1	2.68047E1	1.20269E-7	2.51632E-3	2.51632E-3	6.32087E-3	3.02898E-1
4.0E0	2.0532E4	1.5E1	6.55E2	3.98E2	-7.33239E-2	-8.80013E1	-4.76837E-4	-8.80003E1	3.09944E-4	4.86374E-3	9.40323E-2	2.72839E1	-3.26372E1	-3.26001E1	2.68154E1	1.20142E-7	2.51603E-3	2.51603E-3	6.32328E-3	3.01609E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.80013E1	-8.82149E-4	-8.80001E1	5.00679E-4	4.72069E-3	9.37462E-2	2.72913E1	-3.26603E1	-3.26543E1	2.67854E1	1.20069E-7	2.52538E-3	2.52538E-3	6.32386E-3	3.02659E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.47149E-2	-8.80013E1	-6.4373E-4	-8.80002E1	3.09944E-4	4.36306E-3	9.38416E-2	2.73448E1	-3.26663E1	-3.26296E1	2.6795E1	1.19757E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.33239E-2	-8.80012E1	-9.29832E-4	-8.79999E1	-2.38419E-5	4.62532E-3	9.36031E-2	2.72672E1	-3.26885E1	-3.26248E1	2.68052E1	1.20414E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.0071E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80011E1	-9.05991E-4	-8.80003E1	1.90735E-4	4.81606E-3	9.37462E-2	2.738E1	-3.26667E1	-3.26272E1	2.67955E1	1.20174E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00041E-1
1.2E1	4.7E1	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.80012E1	-2.6226E-4	-8.80002E1	2.38419E-4	4.673E-3	9.34601E-2	2.72587E1	-3.2644E1	-3.26127E1	2.68169E1	1.20278E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00041E-1
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.37874E-2	-8.80015E1	-6.4373E-4	-8.80001E1	2.6226E-4	4.88758E-3	9.36985E-2	2.72209E1	-3.26441E1	-3.26042E1	2.68013E1	1.20078E-7	2.51886E-3	2.51886E-3	6.33341E-3	3.00247E-1
1.4E1	3.151E3	3.0E0	5.66E2	3.82E2	-7.40192E-2	-8.80015E1	-6.67572E-4	-8.80001E1	2.38419E-4	4.50611E-3	9.3627E-2	2.7242E1	-3.26681E1	-3.2617E1	2.68004E1	1.1984E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00639E-1
1.5E1	3.8E1	0.0E0	6.06E2	4.11E2	-7.44059E-2	-8.80013E1	-6.91414E-4	-8.8E1	9.53674E-5	4.69685E-3	9.35793E-2	2.72985E1	-3.26849E1	-3.26524E1	2.68132E1	1.20644E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00563E-1
1.6E1	3.11E2	0.0E0	6.47E2	4.41E2	-7.3401E-2	-8.80014E1	-7.15256E-4	-8.80001E1	9.53674E-5	4.64916E-3	9.3627E-2	2.73838E1	-3.26314E1	-3.26627E1	2.6801E1	1.20122E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01609E-1
1.7E1	3.11E2	0.0E0	6.87E2	4.7E2	-7.29374E-2	-8.80012E1	-6.19888E-4	-8.8E1	3.09944E-4	4.8399E-3	9.35555E-2	2.73081E1	-3.26332E1	-3.26044E1	2.68111E1	1.20226E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00041E-1
1.8E1	1.305E3	0.0E0	7.27E2	5.0E2	-7.26282E-2	-8.80014E1	-6.19888E-4	-8.8E1	2.38419E-4	4.79221E-3	9.37223E-2	2.73003E1	-3.26717E1	-3.26068E1	2.67914E1	1.19705E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.00302E-1
1.9E1	9.95E2	0.0E0	7.68E2	5.29E2	-7.3401E-2	-8.80014E1	-5.72205E-4	-8.8E1	3.33786E-4	5.10216E-3	9.38416E-2	2.72865E1	-3.26266E1	-3.26458E1	2.67878E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.01347E-1
2.0E1	2.3338E4	1.6E1	8.08E2	5.58E2	-7.32464E-2	-8.80014E1	-8.10623E-4	-8.80004E1	7.15256E-5	4.79221E-3	9.36747E-2	2.733E1	-3.26276E1	-3.26038E1	2.6752E1	1.20226E-7	2.51225E-3	2.51225E-3	6.30192E-3	3.00041E-1
2.1E1	3.9E1	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80015E1	-7.15256E-4	-8.80004E1	1.66893E-4	4.79221E-3	9.34601E-2	2.73926E1	-3.26848E1	-3.26395E1	2.67733E1	1.20085E-7	2.5199E-3	2.5199E-3	6.28279E-3	3.02317E-1
2.2E1	1.655E3	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80017E1	-5.00679E-4	-8.80004E1	3.57628E-4	5.14984E-3	9.377E-2	2.71924E1	-3.26649E1	-3.26337E1	2.6822E1	1.20383E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.02133E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80013E1	-2.38419E-4	-8.80002E1	-2.38419E-5	5.03063E-3	9.38654E-2	2.73735E1	-3.26744E1	-3.26337E1	2.67966E1	1.20122E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00563E-1