[Scan]
initial_time=2016-01-27T22:38:57
final_time=2016-01-27T22:39:16
ip_count=19
run=1025
dataset=5
scan=387
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.81057E-6
ql1_vset=
ql1_vmon=-8.8001E1
ql1_imon=-6.34682E-10
ql2_vset=
ql2_vmon=-9.29832E-4
ql2_imon=4.02796E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.72641E-9
ql4_vset=
ql4_vmon=-9.53674E-5
ql4_imon=8.5156E-10
mult1=-2.08539E-8
mult2=-2.73059E-9
rf_tmon=-5.11325E-3
rf_agc=3.25465E-2
counter1=1
counter2=2
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.00679E-3
ql5_imon=4.69804E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64026E0
bslens_imon=2.3946E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19866E1
lens5a_imon=2.00138E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.05107E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53682E1
cs_ef1b_imon=2.76718E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.01979E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04776E1
cs_ea1_imon=2.60025E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99526E0
lens1_imon=1.4248E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64698E1
os_ef1alow_imon=2.99748E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03791E1
cs_ea2_imon=1.55046E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84502E1
cs_ef1a_imon=2.89621E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=4.53937E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11123E1
os_restr1_imon=2.87062E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15241E1
os_ea1_imon=1.88953E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63647E1
os_ef1bup_imon=3.08722E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22909E0
cs_ionrep_imon=1.19687E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93597E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01857E1
cs_anode1_imon=2.90089E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20496E0
olens4_imon=8.51488E-10
tplens_vset=1.4E-1
tplens_vmon=1.60073E0
tplens_imon=2.67385E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26236E1
iondef3_imon=1.49914E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26669E1
iondef2_imon=1.57736E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02919E2
lens6_imon=2.98261E-4
ql6_vset=1.0E-1
ql6_vmon=9.38416E-2
ql6_imon=4.20463E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25859E0
ionrepsh_imon=1.74371E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34076E1
lens5b_imon=2.18153E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74459E1
cs_ef2b_imon=3.12866E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.08562E-1
os_ea2_imon=-7.27156E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00662E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71246E1
cs_ef2a_imon=3.19209E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.639E0
os_ef2alow_imon=-2.46093E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.44566E-1
os_ef2bup_imon=-5.21075E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10865E1
os_restr2_imon=2.87638E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2304E2
cs_ionfoca_imon=6.31167E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01755E1
cs_anode2_imon=2.2374E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74343E1
iondef1_imon=1.09387E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68256E1
iondef4_imon=1.09134E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=2.12266E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81975E-1
olens1_imon=3.18551E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10852E0
cs_ionaccel_imon=-1.80861E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02064E2
cs_ionfocb_imon=1.47345E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56099E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=2.03527E-1
window_imon=-1.0734E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39199E-4
mask2_vset=0.0E0
mask2_vmon=-1.87029E1
mask2_imon=-5.9047E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.39225E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.37644E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50151E3
multb_neg_imon=7.47365E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.66987E0
defgridb_imon=6.1393E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33869E1
os_fil1_imon=5.08857E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.08276E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62173E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30711E1
cs_fil1_imon=9.96804E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63747E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6233E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.16765E-2
os_fil2_imon=-2.34762E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.13972E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.53631E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3017E-1
cs_fil2_imon=-2.41369E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.25985E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21562E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=3.02659E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.92929E-1
res40_imon=-2.51859E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.482E3	0.0E0	1.47E2	4.1E1	-7.40967E-2	-8.80015E1	-7.86781E-4	-8.80002E1	3.33786E-4	4.88758E-3	9.39846E-2	2.71777E1	-3.2659E1	-3.26638E1	2.68146E1	1.20048E-7	2.51671E-3	2.51671E-3	6.32342E-3	3.00654E-1
2.0E0	9.705E4	8.3E1	3.16E2	1.6E2	-7.30918E-2	-8.80012E1	-5.48363E-4	-8.80002E1	1.66893E-4	5.05447E-3	9.38892E-2	2.72886E1	-3.26432E1	-3.26254E1	2.68063E1					
3.0E0	2.1E1	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80014E1	-8.10623E-4	-8.80004E1	2.86102E-4	5.17368E-3	9.41038E-2	2.73073E1	-3.26733E1	-3.26018E1	2.67968E1	1.201E-7	2.51498E-3	2.51498E-3	6.33021E-3	3.01065E-1
4.0E0	2.0695E4	1.3E1	6.55E2	3.98E2	-7.19325E-2	-8.80013E1	-7.62939E-4	-8.80002E1	2.86102E-4	4.76837E-3	9.41038E-2	2.73891E1	-3.2675E1	-3.26381E1	2.68037E1	1.19757E-7	2.51596E-3	2.51596E-3	6.29754E-3	2.98559E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.34782E-2	-8.80011E1	-5.24521E-4	-8.80003E1	2.14577E-4	5.17368E-3	9.38654E-2	2.71627E1	-3.26506E1	-3.2605E1	2.68196E1	1.20358E-7	2.51085E-3	2.51085E-3	6.31925E-3	2.99073E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.36328E-2	-8.80012E1	-3.8147E-4	-8.80002E1	4.29153E-4	4.98295E-3	9.40561E-2	2.73183E1	-3.26579E1	-3.26218E1	2.68016E1	1.20017E-7	2.51116E-3	2.51116E-3	6.33486E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.42513E-2	-8.80011E1	-3.33786E-4	-8.80003E1	4.76837E-4	4.91142E-3	9.36508E-2	2.71038E1	-3.26398E1	-3.2626E1	2.68202E1	1.19705E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01609E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.40967E-2	-8.80011E1	-5.24521E-4	-8.8E1	5.00679E-4	4.64916E-3	9.36985E-2	2.73279E1	-3.26771E1	-3.26068E1	2.68022E1	1.19861E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00824E-1
1.2E1	4.5E1	0.0E0	4.85E2	3.23E2	-7.33239E-2	-8.80013E1	-7.15256E-4	-8.80002E1	3.09944E-4	4.81606E-3	9.40323E-2	2.72048E1	-3.26645E1	-3.26464E1	2.6801E1	1.20069E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9952E-1
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.44059E-2	-8.80012E1	-7.86781E-4	-8.80001E1	2.6226E-4	4.95911E-3	9.36031E-2	2.7513E1	-3.26518E1	-3.26218E1	2.68052E1	1.20311E-7	2.52169E-3	2.52169E-3	6.31817E-3	2.99941E-1
1.4E1	3.139E3	0.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80013E1	-5.96046E-4	-8.79999E1	5.72205E-4	5.126E-3	9.377E-2	2.74461E1	-3.26472E1	-3.25753E1	2.68163E1	1.20174E-7	2.52099E-3	2.52099E-3	6.34037E-3	3.01085E-1
1.5E1	3.1E1	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80014E1	-9.29832E-4	-8.80001E1	4.29153E-4	5.07832E-3	9.408E-2	2.72255E1	-3.2672E1	-3.26366E1	2.67914E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01085E-1
1.6E1	2.74E2	0.0E0	6.47E2	4.41E2	-7.40192E-2	-8.80012E1	-7.62939E-4	-8.79997E1	9.53674E-5	5.05447E-3	9.38177E-2	2.73932E1	-3.26744E1	-3.26401E1	2.68034E1	1.20363E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.99941E-1
1.7E1	3.2E2	0.0E0	6.87E2	4.7E2	-7.31692E-2	-8.80014E1	-7.86781E-4	-8.8E1	3.09944E-4	5.05447E-3	9.38177E-2	2.72877E1	-3.2635E1	-3.26008E1	2.67511E1	1.19913E-7	2.51552E-3	2.51552E-3	6.29098E-3	2.9978E-1
1.8E1	1.211E3	1.0E0	7.27E2	5.0E2	-7.37874E-2	-8.80011E1	-9.29832E-4	-8.80002E1	6.19888E-4	5.24521E-3	9.40323E-2	2.73454E1	-3.26729E1	-3.26236E1	2.68148E1	1.20017E-7	2.51662E-3	2.51662E-3	6.29645E-3	2.97963E-1
1.9E1	9.98E2	0.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80013E1	-9.05991E-4	-8.8E1	3.09944E-4	5.14984E-3	9.36747E-2	2.73193E1	-3.26676E1	-3.26152E1	2.68111E1	1.19809E-7	2.51116E-3	2.51116E-3	6.33486E-3	2.9978E-1
2.0E1	2.3626E4	1.9E1	8.08E2	5.58E2	-7.3401E-2	-8.80009E1	-1.07288E-3	-8.8E1	2.86102E-4	4.95911E-3	9.37939E-2	2.72996E1	-3.26511E1	-3.26487E1	2.67391E1	1.20078E-7	2.51575E-3	2.51575E-3	6.29703E-3	3.00247E-1
2.1E1	4.9E1	0.0E0	8.49E2	5.88E2	-7.35556E-2	-8.8001E1	-1.00136E-3	-8.8E1	2.14577E-4	5.00679E-3	9.38177E-2	2.7114E1	-3.26608E1	-3.26154E1	2.68148E1	1.20208E-7	2.51725E-3	2.51725E-3	6.3131E-3	3.01881E-1
2.2E1	1.58E3	3.0E0	8.89E2	6.17E2	-7.38649E-2	-8.80013E1	-1.00136E-3	-8.80003E1	1.66893E-4	4.88758E-3	9.37939E-2	2.74703E1	-3.26627E1	-3.26332E1	2.68016E1	1.198E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.01738E-1
2.3E1	1.0E0	2.0E0	9.3E2	6.47E2	-7.34782E-2	-8.8001E1	-9.29832E-4	-8.80001E1	-9.53674E-5	5.00679E-3	9.38416E-2	2.74343E1	-3.26669E1	-3.26236E1	2.68256E1	1.19965E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.02659E-1