[Scan]
initial_time=2016-01-27T22:39:23
final_time=2016-01-27T22:39:43
ip_count=19
run=1025
dataset=5
scan=388
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.38649E-2
qbias_imon=-3.81046E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-6.90746E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=4.16172E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.84683E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=8.34012E-10
mult1=-1.30404E-8
mult2=-2.45441E-9
rf_tmon=-5.32354E-3
rf_agc=3.2486E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=4.12524E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65253E0
bslens_imon=2.62682E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19739E1
lens5a_imon=2.00324E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12459E2
lens4a_imon=2.05035E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53618E1
cs_ef1b_imon=2.7546E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02197E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0481E1
cs_ea1_imon=2.59678E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03782E0
lens1_imon=1.52752E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64596E1
os_ef1alow_imon=2.97054E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03996E1
cs_ea2_imon=1.5368E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84344E1
cs_ef1a_imon=2.88746E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=4.08196E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11348E1
os_restr1_imon=2.87548E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15414E1
os_ea1_imon=1.89064E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63567E1
os_ef1bup_imon=3.08806E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27182E0
cs_ionrep_imon=1.17838E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93447E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=2.8912E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20453E0
olens4_imon=7.6803E-10
tplens_vset=1.4E-1
tplens_vmon=1.62744E0
tplens_imon=-2.16856E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26185E1
iondef3_imon=1.50932E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26237E1
iondef2_imon=1.56428E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02954E2
lens6_imon=2.98644E-4
ql6_vset=1.0E-1
ql6_vmon=9.37223E-2
ql6_imon=4.03976E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.34243E0
ionrepsh_imon=1.71467E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33817E1
lens5b_imon=2.18264E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74651E1
cs_ef2b_imon=3.12212E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.34865E-1
os_ea2_imon=-3.39E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06082E2
lens4b_imon=2.00512E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71189E1
cs_ef2a_imon=3.18799E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6147E0
os_ef2alow_imon=-2.53315E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.45236E-1
os_ef2bup_imon=-5.3588E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1088E1
os_restr2_imon=2.8665E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23052E2
cs_ionfoca_imon=6.28287E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01609E1
cs_anode2_imon=2.24673E-5
iondef1_vset=2.763E1
iondef1_vmon=2.71753E1
iondef1_imon=1.08143E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67897E1
iondef4_imon=1.09476E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.03185E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=3.04842E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13201E0
cs_ionaccel_imon=-1.67984E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02095E2
cs_ionfocb_imon=1.47357E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56517E1
einzel_imon=7.80386E-6
window_vset=0.0E0
window_vmon=2.69369E-1
window_imon=-1.04734E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.86924E1
mask2_imon=-6.91797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.41335E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.74919E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5011E3
multb_neg_imon=7.2225E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.60884E0
defgridb_imon=6.02777E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33861E1
os_fil1_imon=4.95365E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.04326E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62049E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30677E1
cs_fil1_imon=9.96307E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.638E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62244E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.13661E-2
os_fil2_imon=-2.50032E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.17899E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.41445E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3019E-1
cs_fil2_imon=-2.38181E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17364E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2153E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.99175E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40076E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.03048E-1
res40_imon=-2.52192E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=183
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.437E3	0.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80013E1	-7.86781E-4	-8.80001E1	3.8147E-4	4.88758E-3	9.41992E-2	2.71857E1	-3.26498E1	-3.26144E1	2.67868E1	1.1995E-7	2.5199E-3	2.5199E-3	6.29002E-3	2.99811E-1
2.0E0	9.6253E4	9.8E1	3.16E2	1.6E2	-7.35556E-2	-8.80013E1	-5.72205E-4	-8.80005E1	1.43051E-4	5.07832E-3	9.37939E-2	2.731E1	-3.26432E1	-3.26811E1	2.68178E1	1.20177E-7	2.51575E-3	2.51575E-3	6.3074E-3	2.97296E-1
3.0E0	1.2E1	0.0E0	4.85E2	2.79E2	-7.35556E-2	-8.80014E1	-6.67572E-4	-8.80005E1	7.15256E-5	5.67436E-3	9.36985E-2	2.7381E1	-3.26538E1	-3.26121E1	2.67746E1	1.19925E-7	2.51581E-3	2.51581E-3	6.31299E-3	3.00144E-1
4.0E0	2.0826E4	1.2E1	6.55E2	3.98E2	-7.37103E-2	-8.80018E1	-5.24521E-4	-8.80002E1	3.09944E-4	5.17368E-3	9.39846E-2	2.72672E1	-3.26669E1	-3.26254E1	2.67896E1	1.20042E-7	2.51919E-3	2.51919E-3	6.29684E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.8002E1	-4.76837E-4	-8.80001E1	4.29153E-4	5.34058E-3	9.4223E-2	2.72967E1	-3.26693E1	-3.26068E1	2.67854E1	1.20122E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.01609E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.38649E-2	-8.80019E1	-5.72205E-4	-8.80001E1	1.43051E-4	5.36442E-3	9.37462E-2	2.73033E1	-3.26296E1	-3.26494E1	2.68196E1	1.19925E-7	2.52139E-3	2.52139E-3	6.31858E-3	3.03349E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.80017E1	-4.76837E-5	-8.8E1	2.86102E-4	5.53131E-3	9.39131E-2	2.73189E1	-3.26873E1	-3.26182E1	2.67938E1	1.20106E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.99686E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80016E1	-4.29153E-4	-8.80003E1	2.86102E-4	5.38826E-3	9.37462E-2	2.73523E1	-3.26714E1	-3.25942E1	2.68226E1	1.19913E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.9978E-1
1.2E1	3.8E1	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80016E1	-2.6226E-4	-8.79998E1	3.09944E-4	5.48363E-3	9.3627E-2	2.72234E1	-3.26554E1	-3.26573E1	2.68328E1	1.20363E-7	2.51417E-3	2.51417E-3	6.28592E-3	2.99175E-1
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.18554E-2	-8.80018E1	-6.19888E-4	-8.8E1	1.90735E-4	5.22137E-3	9.377E-2	2.72745E1	-3.26729E1	-3.26567E1	2.68004E1	1.19757E-7	2.5188E-3	2.5188E-3	6.37351E-3	2.9978E-1
1.4E1	3.293E3	0.0E0	5.66E2	3.82E2	-7.16233E-2	-8.80015E1	-4.05312E-4	-8.8E1	-9.53674E-5	4.95911E-3	9.39846E-2	2.73729E1	-3.26549E1	-3.26231E1	2.68094E1	1.20174E-7	2.51116E-3	2.51116E-3	6.3074E-3	3.02133E-1
1.5E1	3.7E1	0.0E0	6.06E2	4.11E2	-7.34782E-2	-8.80015E1	-5.72205E-4	-8.79999E1	2.38419E-4	5.03063E-3	9.36985E-2	2.73243E1	-3.26741E1	-3.26272E1	2.6807E1	1.20278E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00302E-1
1.6E1	2.73E2	0.0E0	6.47E2	4.41E2	-7.22418E-2	-8.80013E1	-5.96046E-4	-8.8E1	3.57628E-4	4.91142E-3	9.38416E-2	2.73237E1	-3.26627E1	-3.26224E1	2.681E1	1.19757E-7	2.51334E-3	2.51334E-3	6.31288E-3	2.99E-1
1.7E1	3.16E2	0.0E0	6.87E2	4.7E2	-7.23964E-2	-8.80014E1	-5.24521E-4	-8.8E1	0.0E0	4.76837E-3	9.39608E-2	2.72072E1	-3.26717E1	-3.26344E1	2.68383E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.9874E-1
1.8E1	1.332E3	1.0E0	7.27E2	5.0E2	-7.25507E-2	-8.80014E1	-6.19888E-4	-8.8E1	1.43051E-4	5.29289E-3	9.38416E-2	2.73616E1	-3.26879E1	-3.26386E1	2.67889E1	1.19861E-7	2.51334E-3	2.51334E-3	6.29645E-3	3.01347E-1
1.9E1	1.022E3	0.0E0	7.68E2	5.29E2	-7.27053E-2	-8.80013E1	-9.53674E-4	-8.79999E1	2.6226E-4	4.76837E-3	9.3627E-2	2.72751E1	-3.26488E1	-3.2626E1	2.68215E1	1.19965E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.00302E-1
2.0E1	2.3222E4	9.0E0	8.08E2	5.58E2	-7.35556E-2	-8.80015E1	-1.0252E-3	-8.79998E1	4.76837E-5	4.64916E-3	9.37223E-2	2.71967E1	-3.26627E1	-3.26591E1	2.68724E1	1.20435E-7	2.5188E-3	2.5188E-3	6.34588E-3	3.01871E-1
2.1E1	4.6E1	0.0E0	8.49E2	5.88E2	-7.33239E-2	-8.80013E1	-5.72205E-4	-8.80003E1	1.19209E-4	5.00679E-3	9.37939E-2	2.73912E1	-3.26531E1	-3.26366E1	2.67885E1	1.19861E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.01871E-1
2.2E1	1.636E3	1.0E0	8.89E2	6.17E2	-7.38649E-2	-8.80015E1	-3.8147E-4	-8.80003E1	-2.38419E-5	5.07832E-3	9.40561E-2	2.72651E1	-3.2622E1	-3.26718E1	2.6795E1	1.19851E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.99686E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.38649E-2	-8.80013E1	-6.19888E-4	-8.80003E1	1.90735E-4	5.24521E-3	9.37223E-2	2.71753E1	-3.26237E1	-3.26185E1	2.67897E1	1.19953E-7	2.52276E-3	2.52276E-3	6.32896E-3	2.99175E-1