[Scan]
initial_time=2016-01-27T22:39:50
final_time=2016-01-27T22:40:09
ip_count=19
run=1025
dataset=5
scan=389
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.83125E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-5.99587E-10
ql2_vset=
ql2_vmon=-4.29153E-4
ql2_imon=4.26102E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.78289E-9
ql4_vset=
ql4_vmon=4.52995E-4
ql4_imon=8.45659E-10
mult1=-1.95294E-8
mult2=-2.80644E-9
rf_tmon=-6.18873E-3
rf_agc=3.13629E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=4.25303E-10
bslens_vset=-6.2E0
bslens_vmon=-6.60486E0
bslens_imon=2.5291E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20243E1
lens5a_imon=1.97377E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.05061E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53609E1
cs_ef1b_imon=2.75593E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04627E2
lens23_imon=1.02043E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0477E1
cs_ea1_imon=2.58963E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0336E0
lens1_imon=1.47436E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64579E1
os_ef1alow_imon=2.99399E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03667E1
cs_ea2_imon=1.53276E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84383E1
cs_ef1a_imon=2.89633E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=4.09293E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.111E1
os_restr1_imon=2.86367E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15235E1
os_ea1_imon=1.8729E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.10137E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21965E0
cs_ionrep_imon=1.17953E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91936E2
cs_nozzle_imon=1.93519E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01722E1
cs_anode1_imon=2.89008E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=7.86698E-10
tplens_vset=1.4E-1
tplens_vmon=1.60722E0
tplens_imon=-2.52875E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26416E1
iondef3_imon=1.49843E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26446E1
iondef2_imon=1.57806E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0294E2
lens6_imon=2.98279E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=4.19962E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23499E0
ionrepsh_imon=1.75787E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33964E1
lens5b_imon=2.16915E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74698E1
cs_ef2b_imon=3.12883E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.19181E-1
os_ea2_imon=-4.44003E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00379E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71153E1
cs_ef2a_imon=3.19833E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6413E0
os_ef2alow_imon=-2.66146E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.36414E-1
os_ef2bup_imon=-5.2123E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10955E1
os_restr2_imon=2.86367E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.32477E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01688E1
cs_anode2_imon=2.24472E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72823E1
iondef1_imon=1.07936E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68304E1
iondef4_imon=1.09024E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.01944E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81808E-1
olens1_imon=3.61276E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12609E0
cs_ionaccel_imon=-1.79613E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02115E2
cs_ionfocb_imon=1.4733E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5648E1
einzel_imon=7.84075E-6
window_vset=0.0E0
window_vmon=2.87191E-1
window_imon=-1.05937E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39053E-4
mask2_vset=0.0E0
mask2_vmon=-1.86715E1
mask2_imon=-4.79005E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92623E3
multa_neg_imon=7.6577E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.7233E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50146E3
multb_neg_imon=7.3073E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.72007E0
defgridb_imon=6.25256E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33868E1
os_fil1_imon=4.95899E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.36271E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62053E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30694E1
cs_fil1_imon=9.96547E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63802E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62285E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.15499E-2
os_fil2_imon=-2.47225E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.52404E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.50087E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30026E-1
cs_fil2_imon=-2.62864E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2926E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21507E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.323E-3
inlet_lpb_pmon=3.01485E-1
chamber_ion_pmon=1.20028E-7
chamber_cvt_pmon=2.51369E-3
foreline_cvt_pmon=2.51369E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.88746E-1
res40_imon=-2.32784E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.451E3	1.0E0	1.47E2	4.1E1	-7.34782E-2	-8.80013E1	-5.96046E-4	-8.80001E1	2.86102E-4	4.86374E-3	9.40323E-2	2.73322E1	-3.26455E1	-3.26797E1	2.68412E1	1.2033E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00824E-1
2.0E0	9.6227E4	9.1E1	3.16E2	1.6E2	-7.30918E-2	-8.80013E1	-5.24521E-4	-8.79999E1	2.14577E-4	5.36442E-3	9.41038E-2	2.72941E1	-3.26548E1	-3.26389E1	2.68052E1	1.2026E-7	2.51632E-3	2.51632E-3	6.30202E-3	2.99941E-1
3.0E0	1.4E1	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80013E1	-7.39098E-4	-8.79999E1	4.05312E-4	4.93526E-3	9.41515E-2	2.72813E1	-3.26747E1	-3.2626E1	2.68256E1	1.19978E-7	2.52585E-3	2.52585E-3	6.3074E-3	3.0041E-1
4.0E0	2.0711E4	1.6E1	6.55E2	3.98E2	-7.18554E-2	-8.80012E1	-6.91414E-4	-8.8E1	3.09944E-4	4.72069E-3	9.40084E-2	2.73532E1	-3.26723E1	-3.26338E1	2.68157E1	1.20042E-7	2.51603E-3	2.51603E-3	6.31798E-3	3.00348E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.8001E1	-5.48363E-4	-8.79998E1	2.38419E-4	4.29153E-3	9.38416E-2	2.72992E1	-3.26826E1	-3.26219E1	2.67926E1	1.19953E-7	2.51417E-3	2.51417E-3	6.30202E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23189E-2	-8.80011E1	-5.00679E-4	-8.80002E1	2.38419E-4	4.88758E-3	9.38177E-2	2.73207E1	-3.26248E1	-3.26092E1	2.68058E1	1.20252E-7	2.5188E-3	2.5188E-3	6.31014E-3	3.00693E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80012E1	-3.8147E-4	-8.80001E1	4.05312E-4	4.72069E-3	9.38177E-2	2.72612E1	-3.26759E1	-3.25761E1	2.68148E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.24736E-2	-8.80015E1	-5.48363E-4	-8.79998E1	5.48363E-4	4.74453E-3	9.38654E-2	2.73033E1	-3.26741E1	-3.26561E1	2.68154E1	1.20209E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.0071E-1
1.2E1	4.6E1	0.0E0	4.85E2	3.23E2	-7.37874E-2	-8.80013E1	-8.34465E-4	-8.80001E1	5.48363E-4	4.86374E-3	9.36031E-2	2.71682E1	-3.26585E1	-3.26113E1	2.67998E1	1.20174E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9978E-1
1.3E1	6.0E0	1.0E0	5.25E2	3.53E2	-7.34782E-2	-8.80016E1	-6.19888E-4	-8.80003E1	2.86102E-4	4.64916E-3	9.35078E-2	2.7385E1	-3.26951E1	-3.25864E1	2.67891E1	1.20011E-7	2.51918E-3	2.51918E-3	6.31012E-3	3.00766E-1
1.4E1	3.02E3	0.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80017E1	-8.58307E-4	-8.80003E1	6.4373E-4	4.91142E-3	9.33647E-2	2.72496E1	-3.26685E1	-3.26431E1	2.67962E1					
1.5E1	4.7E1	0.0E0	6.06E2	4.11E2	-7.18554E-2	-8.80017E1	-5.72205E-4	-8.80002E1	7.86781E-4	4.8399E-3	9.35793E-2	2.72331E1	-3.26602E1	-3.26154E1	2.6807E1	1.19902E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.00966E-1
1.6E1	2.57E2	0.0E0	6.47E2	4.41E2	-7.22418E-2	-8.80016E1	-3.33786E-4	-8.80002E1	6.4373E-4	5.03063E-3	9.36747E-2	2.73664E1	-3.26657E1	-3.26368E1	2.67589E1	1.20311E-7	2.51954E-3	2.51954E-3	6.29665E-3	3.01738E-1
1.7E1	3.25E2	0.0E0	6.87E2	4.7E2	-7.25507E-2	-8.80016E1	-2.86102E-4	-8.80004E1	4.29153E-4	5.07832E-3	9.38416E-2	2.73093E1	-3.26506E1	-3.2605E1	2.6819E1	1.20017E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.00302E-1
1.8E1	1.263E3	0.0E0	7.27E2	5.0E2	-7.30918E-2	-8.80015E1	-4.05312E-4	-8.80004E1	4.05312E-4	5.26905E-3	9.3627E-2	2.72869E1	-3.26516E1	-3.26067E1	2.67868E1	1.20069E-7	2.52209E-3	2.52209E-3	6.29645E-3	3.00563E-1
1.9E1	1.044E3	1.0E0	7.68E2	5.29E2	-7.35556E-2	-8.80015E1	-2.86102E-4	-8.80002E1	5.48363E-4	5.126E-3	9.37223E-2	2.73519E1	-3.26772E1	-3.26429E1	2.68169E1	1.20192E-7	2.51919E-3	2.51919E-3	6.30212E-3	3.01104E-1
2.0E1	2.3232E4	1.2E1	8.08E2	5.58E2	-7.27053E-2	-8.80012E1	-4.29153E-4	-8.80002E1	5.48363E-4	5.03063E-3	9.39369E-2	2.73021E1	-3.26651E1	-3.26068E1	2.67559E1	1.19883E-7	2.51952E-3	2.51952E-3	6.3074E-3	3.01609E-1
2.1E1	3.2E1	0.0E0	8.49E2	5.88E2	-7.37874E-2	-8.80012E1	-5.96046E-4	-8.8E1	6.4373E-4	5.19753E-3	9.39608E-2	2.73204E1	-3.26543E1	-3.2616E1	2.68502E1	1.20435E-7	2.52099E-3	2.52099E-3	6.28006E-3	3.00302E-1
2.2E1	1.649E3	1.0E0	8.89E2	6.17E2	-7.34782E-2	-8.80011E1	-3.57628E-4	-8.80005E1	6.67572E-4	4.79221E-3	9.33886E-2	2.72732E1	-3.26585E1	-3.26334E1	2.68188E1	1.20106E-7	2.51632E-3	2.51632E-3	6.29665E-3	2.9943E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80015E1	-4.29153E-4	-8.80003E1	4.52995E-4	5.24521E-3	9.36985E-2	2.72823E1	-3.26446E1	-3.26416E1	2.68304E1	1.20028E-7	2.51369E-3	2.51369E-3	6.323E-3	3.01485E-1