[Scan]
initial_time=2016-01-27T22:41:10
final_time=2016-01-27T22:41:29
ip_count=19
run=1025
dataset=5
scan=392
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.201E-2
qbias_imon=-3.79266E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-6.45018E-10
ql2_vset=
ql2_vmon=-6.91414E-4
ql2_imon=4.2423E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.75543E-9
ql4_vset=
ql4_vmon=9.53674E-5
ql4_imon=8.60846E-10
mult1=-1.29673E-8
mult2=-2.59685E-9
rf_tmon=-4.60255E-3
rf_agc=3.28769E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.91142E-3
ql5_imon=4.14681E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66321E0
bslens_imon=2.49795E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19915E1
lens5a_imon=1.99363E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12475E2
lens4a_imon=2.05046E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53853E1
cs_ef1b_imon=2.74879E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02222E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05222E1
cs_ea1_imon=2.58425E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98918E0
lens1_imon=1.43118E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64725E1
os_ef1alow_imon=2.98427E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03729E1
cs_ea2_imon=1.52798E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84459E1
cs_ef1a_imon=2.89241E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=3.91817E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11214E1
os_restr1_imon=2.8714E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15267E1
os_ea1_imon=1.88461E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63746E1
os_ef1bup_imon=3.09092E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26378E0
cs_ionrep_imon=1.19043E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91856E2
cs_nozzle_imon=1.93443E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01783E1
cs_anode1_imon=2.88735E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=8.27026E-10
tplens_vset=1.4E-1
tplens_vmon=1.63949E0
tplens_imon=-1.30057E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2635E1
iondef3_imon=1.49606E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26314E1
iondef2_imon=1.5965E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02898E2
lens6_imon=2.98358E-4
ql6_vset=1.0E-1
ql6_vmon=9.38892E-2
ql6_imon=3.86727E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.34619E0
ionrepsh_imon=1.73044E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33366E1
lens5b_imon=2.16377E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74566E1
cs_ef2b_imon=3.14113E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.3788E-1
os_ea2_imon=-4.99926E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06103E2
lens4b_imon=2.00451E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71089E1
cs_ef2a_imon=3.19134E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63256E0
os_ef2alow_imon=-2.49437E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.42716E-1
os_ef2bup_imon=-5.27736E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10793E1
os_restr2_imon=2.87451E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23046E2
cs_ionfoca_imon=6.3024E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01964E1
cs_anode2_imon=2.24396E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73039E1
iondef1_imon=1.09037E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68088E1
iondef4_imon=1.08717E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=2.01992E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=3.0427E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11522E0
cs_ionaccel_imon=-1.70813E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.4732E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56347E1
einzel_imon=7.72287E-6
window_vset=0.0E0
window_vmon=2.24358E-1
window_imon=-9.10214E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82641E2
mask1_imon=2.39228E-4
mask2_vset=0.0E0
mask2_vmon=-1.86869E1
mask2_imon=-5.48232E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92663E3
multa_neg_imon=7.70726E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.88965E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50086E3
multb_neg_imon=7.71894E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.53197E0
defgridb_imon=5.8657E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33832E1
os_fil1_imon=5.00904E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.68823E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61789E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30617E1
cs_fil1_imon=9.95297E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6315E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61809E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.29175E-2
os_fil2_imon=-2.4382E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.09166E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.62907E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3077E-1
cs_fil2_imon=-2.16574E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.07134E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21349E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=3.02511E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40094E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.73756E-1
res40_imon=-2.49048E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.441E3	0.0E0	1.47E2	4.1E1	-7.27828E-2	-8.80014E1	-6.4373E-4	-8.80002E1	2.86102E-4	4.93526E-3	9.40323E-2	2.72976E1	-3.26747E1	-3.2648E1	2.67914E1	1.20358E-7	2.51793E-3	2.51793E-3	6.31925E-3	3.00761E-1
2.0E0	9.6554E4	1.01E2	3.16E2	1.6E2	-7.22418E-2	-8.80013E1	-7.86781E-4	-8.80003E1	3.33786E-4	4.98295E-3	9.37939E-2	2.73443E1	-3.26829E1	-3.26444E1	2.68001E1	1.19891E-7	2.52025E-3	2.52025E-3	6.30212E-3	3.00348E-1
3.0E0	1.4E1	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80014E1	-5.96046E-4	-8.80003E1	5.72205E-4	5.22137E-3	9.36508E-2	2.72768E1	-3.26425E1	-3.26337E1	2.6803E1	1.20154E-7	2.51498E-3	2.51498E-3	6.3131E-3	3.00794E-1
4.0E0	2.0344E4	1.4E1	6.55E2	3.98E2	-7.3401E-2	-8.80017E1	-4.05312E-4	-8.80003E1	1.90735E-4	4.93526E-3	9.37462E-2	2.73198E1	-3.2682E1	-3.2616E1	2.67992E1	1.20092E-7	2.51498E-3	2.51498E-3	6.3074E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.33239E-2	-8.80018E1	-8.34465E-4	-8.80003E1	3.57628E-4	5.14984E-3	9.377E-2	2.73033E1	-3.26738E1	-3.2603E1	2.68018E1	1.19953E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.01738E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.38649E-2	-8.80016E1	-7.15256E-4	-8.80003E1	5.72205E-4	4.8399E-3	9.35555E-2	2.7303E1	-3.26643E1	-3.26367E1	2.68233E1	1.20158E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.80018E1	-9.77516E-4	-8.79999E1	6.19888E-4	4.74453E-3	9.37939E-2	2.72989E1	-3.26274E1	-3.26453E1	2.67845E1	1.20211E-7	2.5157E-3	2.5157E-3	6.29771E-3	3.01493E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80016E1	-6.91414E-4	-8.8E1	3.8147E-4	4.88758E-3	9.38892E-2	2.73339E1	-3.26176E1	-3.26188E1	2.68136E1	1.20066E-7	2.51404E-3	2.51404E-3	6.29482E-3	2.99359E-1
1.2E1	6.5E1	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80015E1	-7.86781E-4	-8.8E1	3.8147E-4	4.79221E-3	9.38654E-2	2.72933E1	-3.26661E1	-3.25942E1	2.67986E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.9978E-1
1.3E1	4.0E0	0.0E0	5.25E2	3.53E2	-7.35556E-2	-8.80018E1	-8.82149E-4	-8.8E1	4.05312E-4	4.52995E-3	9.36031E-2	2.72925E1	-3.26554E1	-3.25785E1	2.68064E1	1.19965E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.02922E-1
1.4E1	3.138E3	1.0E0	5.66E2	3.82E2	-7.3401E-2	-8.80016E1	-1.0252E-3	-8.80002E1	5.96046E-4	4.52995E-3	9.36508E-2	2.73357E1	-3.26428E1	-3.26482E1	2.68082E1	1.20311E-7	2.51203E-3	2.51203E-3	6.32356E-3	3.01995E-1
1.5E1	5.2E1	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80016E1	-9.53674E-4	-8.8E1	9.53674E-5	5.07832E-3	9.36747E-2	2.72714E1	-3.26695E1	-3.26346E1	2.68058E1	1.19757E-7	2.52428E-3	2.52428E-3	6.30192E-3	3.00563E-1
1.6E1	2.66E2	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80016E1	-6.19888E-4	-8.8E1	4.05312E-4	5.36442E-3	9.35078E-2	2.73015E1	-3.2635E1	-3.26717E1	2.68046E1	1.2035E-7	2.5147E-3	2.5147E-3	6.31299E-3	3.00942E-1
1.7E1	3.01E2	0.0E0	6.87E2	4.7E2	-7.40967E-2	-8.80015E1	-9.53674E-4	-8.80005E1	3.09944E-4	4.86374E-3	9.36031E-2	2.7275E1	-3.26762E1	-3.25983E1	2.68142E1	1.20278E-7	2.51771E-3	2.51771E-3	6.29098E-3	2.9952E-1
1.8E1	1.266E3	0.0E0	7.27E2	5.0E2	-7.22418E-2	-8.80016E1	-1.09673E-3	-8.80003E1	1.90735E-4	5.14984E-3	9.3627E-2	2.72709E1	-3.26681E1	-3.26699E1	2.67884E1	1.20363E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.0071E-1
1.9E1	9.97E2	0.0E0	7.68E2	5.29E2	-7.19325E-2	-8.80018E1	-7.15256E-4	-8.80002E1	3.8147E-4	5.31673E-3	9.39131E-2	2.73075E1	-3.26732E1	-3.26331E1	2.68244E1	1.20017E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.01085E-1
2.0E1	2.3005E4	9.0E0	8.08E2	5.58E2	-7.17779E-2	-8.80015E1	-9.29832E-4	-8.80003E1	5.00679E-4	5.14984E-3	9.40323E-2	2.73261E1	-3.26729E1	-3.26236E1	2.68755E1	1.20004E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.9943E-1
2.1E1	6.2E1	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80012E1	-1.16825E-3	-8.80005E1	4.52995E-4	5.126E-3	9.35555E-2	2.72892E1	-3.26354E1	-3.26549E1	2.6807E1	1.2014E-7	2.51701E-3	2.51701E-3	6.29926E-3	3.00896E-1
2.2E1	1.579E3	0.0E0	8.89E2	6.17E2	-7.21643E-2	-8.80013E1	-7.62939E-4	-8.80002E1	4.52995E-4	5.07832E-3	9.36508E-2	2.72762E1	-3.26874E1	-3.26431E1	2.67926E1					
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.201E-2	-8.80014E1	-6.91414E-4	-8.80002E1	9.53674E-5	4.91142E-3	9.38892E-2	2.73039E1	-3.26314E1	-3.2635E1	2.68088E1	1.20004E-7	2.5131E-3	2.5131E-3	6.32896E-3	3.02511E-1