[Scan]
initial_time=2016-01-27T22:43:23
final_time=2016-01-27T22:43:43
ip_count=19
run=1025
dataset=5
scan=397
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.18554E-2
qbias_imon=-3.83123E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-6.46436E-10
ql2_vset=
ql2_vmon=-8.34465E-4
ql2_imon=4.25851E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.77902E-9
ql4_vset=
ql4_vmon=4.05312E-4
ql4_imon=8.33583E-10
mult1=-2.13565E-8
mult2=-2.57431E-9
rf_tmon=-4.79853E-3
rf_agc=3.41114E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=4.06039E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66971E0
bslens_imon=2.62682E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19643E1
lens5a_imon=1.99102E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.05096E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53494E1
cs_ef1b_imon=2.74622E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04596E2
lens23_imon=1.02079E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05103E1
cs_ea1_imon=2.58457E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0181E0
lens1_imon=1.47408E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64669E1
os_ef1alow_imon=2.99311E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04034E1
cs_ea2_imon=1.53718E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84168E1
cs_ef1a_imon=2.88283E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=4.22275E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11524E1
os_restr1_imon=2.88741E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1542E1
os_ea1_imon=1.8998E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6367E1
os_ef1bup_imon=3.11217E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24574E0
cs_ionrep_imon=1.18449E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91881E2
cs_nozzle_imon=1.93359E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02101E1
cs_anode1_imon=2.90076E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20525E0
olens4_imon=8.06332E-10
tplens_vset=1.4E-1
tplens_vmon=1.62426E0
tplens_imon=-2.43575E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26809E1
iondef3_imon=1.50817E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26425E1
iondef2_imon=1.59482E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02908E2
lens6_imon=2.98376E-4
ql6_vset=1.0E-1
ql6_vmon=9.39131E-2
ql6_imon=4.23348E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27436E0
ionrepsh_imon=1.71467E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33773E1
lens5b_imon=2.17882E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74444E1
cs_ef2b_imon=3.12438E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.55222E-1
os_ea2_imon=-5.33668E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06091E2
lens4b_imon=2.00726E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71003E1
cs_ef2a_imon=3.18505E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63427E0
os_ef2alow_imon=-2.57329E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.23649E-1
os_ef2bup_imon=-5.26736E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10793E1
os_restr2_imon=2.87291E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23082E2
cs_ionfoca_imon=6.29508E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0165E1
cs_anode2_imon=2.24823E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7285E1
iondef1_imon=1.10586E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68142E1
iondef4_imon=1.09429E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=2.03139E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81951E-1
olens1_imon=3.85582E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14032E0
cs_ionaccel_imon=-1.78338E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02107E2
cs_ionfocb_imon=1.47337E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56233E1
einzel_imon=7.64205E-6
window_vset=0.0E0
window_vmon=2.90871E-1
window_imon=-8.29392E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39294E-4
mask2_vset=0.0E0
mask2_vmon=-1.86719E1
mask2_imon=-6.38594E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92671E3
multa_neg_imon=7.66145E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.38657E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50146E3
multb_neg_imon=7.21486E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.41778E0
defgridb_imon=6.23007E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33869E1
os_fil1_imon=5.34014E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.22268E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61833E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30701E1
cs_fil1_imon=9.96849E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63281E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62177E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.24586E-2
os_fil2_imon=-2.32359E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.1646E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.16332E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3164E-1
cs_fil2_imon=-2.65431E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16166E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21695E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40094E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.36707E-1
res40_imon=-2.46262E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=179
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.441E3	1.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80018E1	-8.58307E-4	-8.79998E1	1.43051E-4	4.72069E-3	9.35555E-2	2.72823E1	-3.26633E1	-3.26789E1	2.67988E1	1.1984E-7	2.51642E-3	2.51642E-3	6.33065E-3	2.99811E-1
2.0E0	9.649E4	7.3E1	3.16E2	1.6E2	-7.38649E-2	-8.80014E1	-1.0252E-3	-8.80002E1	-9.53674E-5	4.55379E-3	9.35078E-2	2.72003E1	-3.26385E1	-3.2611E1	2.68176E1	1.20122E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.9978E-1
3.0E0	1.5E1	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.80016E1	-1.0252E-3	-8.80004E1	-7.15256E-5	4.98295E-3	9.35555E-2	2.73239E1	-3.26761E1	-3.26049E1	2.68146E1	1.19925E-7	2.52027E-3	2.52027E-3	6.32418E-3	3.00676E-1
4.0E0	2.0669E4	1.7E1	6.55E2	3.98E2	-7.29374E-2	-8.80022E1	-7.86781E-4	-8.80002E1	4.29153E-4	4.60148E-3	9.38892E-2	2.73309E1	-3.26699E1	-3.26128E1	2.67968E1	1.20192E-7	2.51919E-3	2.51919E-3	6.31269E-3	3.006E-1
5.0E0	0.0E0	1.0E0	8.24E2	5.17E2	-7.25507E-2	-8.80017E1	-7.62939E-4	-8.80003E1	3.33786E-4	4.93526E-3	9.36747E-2	2.72222E1	-3.26518E1	-3.26296E1	2.68202E1	1.20226E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80017E1	-5.24521E-4	-8.80004E1	4.76837E-5	4.8399E-3	9.39369E-2	2.73682E1	-3.2626E1	-3.26356E1	2.67686E1	1.19965E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.18554E-2	-8.80017E1	-7.15256E-4	-8.80003E1	3.57628E-4	4.76837E-3	9.38892E-2	2.7255E1	-3.27086E1	-3.25564E1	2.68192E1	1.20055E-7	2.52276E-3	2.52276E-3	6.30202E-3	3.00453E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.13143E-2	-8.80015E1	-5.00679E-4	-8.80005E1	4.76837E-4	4.88758E-3	9.40084E-2	2.72272E1	-3.26363E1	-3.26417E1	2.6799E1	1.20069E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00041E-1
1.2E1	6.3E1	0.0E0	4.85E2	3.23E2	-7.286E-2	-8.80017E1	-6.91414E-4	-8.80002E1	5.00679E-4	4.91142E-3	9.39131E-2	2.72355E1	-3.26558E1	-3.25746E1	2.68041E1	1.20226E-7	2.5199E-3	2.5199E-3	6.31727E-3	3.00432E-1
1.3E1	4.0E0	0.0E0	5.25E2	3.53E2	-7.201E-2	-8.80018E1	-1.14441E-3	-8.80002E1	2.38419E-4	4.95911E-3	9.38654E-2	2.73652E1	-3.26573E1	-3.25791E1	2.68106E1	1.20167E-7	2.51129E-3	2.51129E-3	6.31357E-3	3.00139E-1
1.4E1	3.138E3	4.0E0	5.66E2	3.82E2	-7.18554E-2	-8.80016E1	-7.15256E-4	-8.80002E1	3.8147E-4	4.86374E-3	9.36747E-2	2.73327E1	-3.2638E1	-3.26573E1	2.67926E1	1.19697E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.00197E-1
1.5E1	3.7E1	0.0E0	6.06E2	4.11E2	-7.23189E-2	-8.80018E1	-8.10623E-4	-8.79999E1	2.38419E-4	4.76837E-3	9.37939E-2	2.73616E1	-3.26494E1	-3.26194E1	2.67914E1	1.20137E-7	2.5147E-3	2.5147E-3	6.32978E-3	3.00144E-1
1.6E1	2.72E2	1.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80017E1	-8.82149E-4	-8.80002E1	4.52995E-4	4.62532E-3	9.39369E-2	2.73033E1	-3.26183E1	-3.26419E1	2.68088E1	1.20435E-7	2.51771E-3	2.51771E-3	6.34588E-3	3.00563E-1
1.7E1	2.84E2	0.0E0	6.87E2	4.7E2	-7.21643E-2	-8.80017E1	-8.82149E-4	-8.8E1	3.57628E-4	4.81606E-3	9.37462E-2	2.72953E1	-3.26811E1	-3.26089E1	2.68298E1	1.20055E-7	2.51954E-3	2.51954E-3	6.30202E-3	2.9943E-1
1.8E1	1.203E3	0.0E0	7.27E2	5.0E2	-7.20871E-2	-8.80015E1	-6.67572E-4	-8.80001E1	4.52995E-4	4.91142E-3	9.377E-2	2.72644E1	-3.26201E1	-3.2734E1	2.67962E1	1.2051E-7	2.50914E-3	2.50914E-3	6.32978E-3	3.02277E-1
1.9E1	1.028E3	1.0E0	7.68E2	5.29E2	-7.16233E-2	-8.80016E1	-1.07288E-3	-8.79999E1	9.53674E-5	4.64916E-3	9.38416E-2	2.72709E1	-3.2603E1	-3.26726E1	2.67787E1	1.20363E-7	2.52599E-3	2.52599E-3	6.31278E-3	2.99941E-1
2.0E1	2.3133E4	6.0E0	8.08E2	5.58E2	-7.14689E-2	-8.80018E1	-5.72205E-4	-8.79998E1	4.05312E-4	4.8399E-3	9.39846E-2	2.72823E1	-3.26591E1	-3.26182E1	2.67896E1	1.20004E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.02253E-1
2.1E1	4.9E1	0.0E0	8.49E2	5.88E2	-7.21643E-2	-8.80015E1	-5.96046E-4	-8.80002E1	4.76837E-4	4.52995E-3	9.35078E-2	2.73267E1	-3.26597E1	-3.26008E1	2.67968E1	1.19965E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.00302E-1
2.2E1	1.589E3	0.0E0	8.89E2	6.17E2	-7.22418E-2	-8.80016E1	-6.67572E-4	-8.80003E1	4.76837E-4	4.57764E-3	9.38892E-2	2.72943E1	-3.26518E1	-3.26615E1	2.68016E1	1.20122E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00302E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.18554E-2	-8.80013E1	-8.34465E-4	-8.8E1	4.05312E-4	4.74453E-3	9.39131E-2	2.7285E1	-3.26425E1	-3.26809E1	2.68142E1	1.19851E-7	2.51632E-3	2.51632E-3	6.29665E-3	3.00197E-1