[Scan]
initial_time=2016-01-27T22:43:50
final_time=2016-01-27T22:44:09
ip_count=19
run=1025
dataset=5
scan=398
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23964E-2
qbias_imon=-3.75979E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-6.50978E-10
ql2_vset=
ql2_vmon=-4.52995E-4
ql2_imon=4.21977E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.7724E-9
ql4_vset=
ql4_vmon=1.66893E-4
ql4_imon=8.30019E-10
mult1=-1.79164E-8
mult2=-2.9114E-9
rf_tmon=-4.01396E-3
rf_agc=3.26956E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.43459E-3
ql5_imon=3.94154E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6786E0
bslens_imon=2.43708E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19925E1
lens5a_imon=2.00846E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12468E2
lens4a_imon=2.05104E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5387E1
cs_ef1b_imon=2.73404E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02355E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04846E1
cs_ea1_imon=2.59671E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00882E0
lens1_imon=1.52745E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.98322E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04044E1
cs_ea2_imon=1.53559E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8418E1
cs_ef1a_imon=2.8866E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=3.94571E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11303E1
os_restr1_imon=2.8866E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15447E1
os_ea1_imon=1.89378E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63415E1
os_ef1bup_imon=3.09477E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23676E0
cs_ionrep_imon=1.17917E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91841E2
cs_nozzle_imon=1.93388E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02018E1
cs_anode1_imon=2.88973E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=8.06808E-10
tplens_vset=1.4E-1
tplens_vmon=1.62315E0
tplens_imon=-1.92705E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26107E1
iondef3_imon=1.49312E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27127E1
iondef2_imon=1.5809E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0295E2
lens6_imon=2.98431E-4
ql6_vset=1.0E-1
ql6_vmon=9.39369E-2
ql6_imon=4.80628E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.33822E0
ionrepsh_imon=1.73946E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33693E1
lens5b_imon=2.17339E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7464E1
cs_ef2b_imon=3.11632E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.10922E-1
os_ea2_imon=-3.34281E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00499E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71043E1
cs_ef2a_imon=3.19729E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63898E0
os_ef2alow_imon=-2.52593E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.38731E-1
os_ef2bup_imon=-5.19492E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10753E1
os_restr2_imon=2.85359E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.29362E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01786E1
cs_anode2_imon=2.23708E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72898E1
iondef1_imon=1.10378E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6795E1
iondef4_imon=1.10588E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.01058E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=3.40033E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10002E0
cs_ionaccel_imon=-1.7579E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02051E2
cs_ionfocb_imon=1.47299E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56301E1
einzel_imon=7.73649E-6
window_vset=0.0E0
window_vmon=1.9973E-1
window_imon=-8.2653E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39418E-4
mask2_vset=0.0E0
mask2_vmon=-1.86819E1
mask2_imon=-8.82134E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92659E3
multa_neg_imon=7.26129E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.36582E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5015E3
multb_neg_imon=7.28253E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.52518E0
defgridb_imon=6.35874E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33849E1
os_fil1_imon=4.79102E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.30479E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6193E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30661E1
cs_fil1_imon=9.96594E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64306E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61912E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.35759E-2
os_fil2_imon=-2.368E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.27701E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.68311E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29652E-1
cs_fil2_imon=-2.39696E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.56661E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21579E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33388E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.19841E-7
chamber_cvt_pmon=2.51814E-3
foreline_cvt_pmon=2.51814E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.18865E-1
res40_imon=-2.36954E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.45E3	0.0E0	1.47E2	4.1E1	-7.30146E-2	-8.80015E1	-5.24521E-4	-8.80003E1	4.29153E-4	4.62532E-3	9.377E-2	2.72979E1	-3.26639E1	-3.26218E1	2.67806E1	1.20055E-7	2.52169E-3	2.52169E-3	6.30202E-3	3.00966E-1
2.0E0	9.6737E4	1.02E2	3.16E2	1.6E2	-7.15461E-2	-8.80016E1	-1.0252E-3	-8.80003E1	3.57628E-4	4.79221E-3	9.34362E-2	2.72935E1	-3.26419E1	-3.26554E1	2.68082E1	1.20174E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01871E-1
3.0E0	1.2E1	0.0E0	4.85E2	2.79E2	-7.15461E-2	-8.80012E1	-1.16825E-3	-8.80005E1	4.29153E-4	4.81606E-3	9.36747E-2	2.72691E1	-3.26585E1	-3.26343E1	2.68053E1	1.20031E-7	2.5147E-3	2.5147E-3	6.29624E-3	3.02545E-1
4.0E0	2.0592E4	9.0E0	6.55E2	3.98E2	-7.19325E-2	-8.80012E1	-7.86781E-4	-8.80002E1	9.53674E-5	4.673E-3	9.35793E-2	2.7311E1	-3.26762E1	-3.26254E1	2.68166E1	1.19902E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.19325E-2	-8.80011E1	-8.58307E-4	-8.80003E1	3.33786E-4	4.55379E-3	9.35793E-2	2.72821E1	-3.26549E1	-3.2606E1	2.68059E1	1.19851E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80013E1	-5.72205E-4	-8.80003E1	2.6226E-4	4.81606E-3	9.3627E-2	2.72913E1	-3.26506E1	-3.26506E1	2.68244E1	1.19851E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.00453E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80011E1	-6.67572E-4	-8.80005E1	1.90735E-4	4.55379E-3	9.35078E-2	2.72775E1	-3.26194E1	-3.26206E1	2.68034E1	1.19913E-7	2.51771E-3	2.51771E-3	6.28552E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.24736E-2	-8.80009E1	-4.76837E-4	-8.80004E1	1.19209E-4	4.45843E-3	9.36985E-2	2.73219E1	-3.26518E1	-3.26344E1	2.68304E1	1.19705E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.00563E-1
1.2E1	4.6E1	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.80014E1	-5.24521E-4	-8.80005E1	2.14577E-4	4.26769E-3	9.37223E-2	2.73087E1	-3.26669E1	-3.26308E1	2.6804E1	1.20106E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.99941E-1
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.30146E-2	-8.80014E1	-2.6226E-4	-8.80005E1	2.14577E-4	4.12464E-3	9.39131E-2	2.73153E1	-3.26536E1	-3.26092E1	2.67968E1	1.19978E-7	2.5225E-3	2.5225E-3	6.31858E-3	3.00676E-1
1.4E1	3.227E3	1.0E0	5.66E2	3.82E2	-7.27828E-2	-8.80013E1	-4.05312E-4	-8.80003E1	1.66893E-4	4.62532E-3	9.40323E-2	2.73237E1	-3.26633E1	-3.26236E1	2.68094E1	1.20069E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.9952E-1
1.5E1	4.4E1	0.0E0	6.06E2	4.11E2	-7.23189E-2	-8.80014E1	-6.67572E-4	-8.80003E1	1.90735E-4	4.81606E-3	9.38892E-2	2.72817E1	-3.26621E1	-3.25894E1	2.68028E1	1.20209E-7	2.5131E-3	2.5131E-3	6.33977E-3	2.99175E-1
1.6E1	2.71E2	1.0E0	6.47E2	4.41E2	-7.40192E-2	-8.80015E1	-5.72205E-4	-8.80002E1	4.29153E-4	4.60148E-3	9.38177E-2	2.73275E1	-3.26838E1	-3.26178E1	2.67986E1	1.19978E-7	2.51693E-3	2.51693E-3	6.29624E-3	2.98819E-1
1.7E1	3.13E2	0.0E0	6.87E2	4.7E2	-7.40192E-2	-8.80015E1	-3.33786E-4	-8.8E1	3.09944E-4	4.14848E-3	9.36747E-2	2.73051E1	-3.26711E1	-3.25918E1	2.68148E1	1.20311E-7	2.51525E-3	2.51525E-3	6.33436E-3	2.97647E-1
1.8E1	1.25E3	1.0E0	7.27E2	5.0E2	-7.36328E-2	-8.80012E1	-5.96046E-4	-8.8E1	2.86102E-4	4.55379E-3	9.377E-2	2.72648E1	-3.26777E1	-3.2596E1	2.67926E1	1.20122E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.00563E-1
1.9E1	9.56E2	1.0E0	7.68E2	5.29E2	-7.31692E-2	-8.80013E1	-7.86781E-4	-8.80001E1	4.52995E-4	4.36306E-3	9.40323E-2	2.72913E1	-3.26801E1	-3.25936E1	2.68382E1	1.2033E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.02133E-1
2.0E1	2.2985E4	1.2E1	8.08E2	5.58E2	-7.36328E-2	-8.80015E1	-6.67572E-4	-8.80003E1	5.24521E-4	4.93526E-3	9.377E-2	2.73387E1	-3.26777E1	-3.26476E1	2.68484E1	1.20017E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.01085E-1
2.1E1	5.8E1	0.0E0	8.49E2	5.88E2	-7.40967E-2	-8.80014E1	-4.05312E-4	-8.80003E1	5.72205E-4	4.48227E-3	9.36747E-2	2.72947E1	-3.26872E1	-3.25942E1	2.68124E1	1.20122E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9926E-1
2.2E1	1.635E3	3.0E0	8.89E2	6.17E2	-7.34782E-2	-8.80013E1	-3.09944E-4	-8.8E1	3.09944E-4	4.91142E-3	9.38416E-2	2.73462E1	-3.26249E1	-3.25976E1	2.68041E1	1.20174E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.01871E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.23964E-2	-8.80015E1	-4.52995E-4	-8.8E1	1.66893E-4	4.43459E-3	9.39369E-2	2.72898E1	-3.27127E1	-3.26107E1	2.6795E1	1.19841E-7	2.51814E-3	2.51814E-3	6.33388E-3	3.01609E-1