[Scan]
initial_time=2016-01-27T22:47:07
final_time=2016-01-27T22:47:26
ip_count=19
run=1025
dataset=6
scan=405
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.08806E-4
ql1_vset=
ql1_vmon=-8.18205E-1
ql1_imon=1.11904E-9
ql2_vset=
ql2_vmon=-7.9875E-1
ql2_imon=2.8652E-10
ql3_vset=
ql3_vmon=-9.13105E0
ql3_imon=2.2324E-9
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=4.15087E-10
mult1=-9.7949E-9
mult2=-2.80165E-9
rf_tmon=-5.18786E-3
rf_agc=3.26366E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.50611E-3
ql5_imon=3.46363E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66854E0
bslens_imon=2.57741E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20145E1
lens5a_imon=2.00074E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.05295E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53592E1
cs_ef1b_imon=2.77043E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04592E2
lens23_imon=1.0198E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04844E1
cs_ea1_imon=2.5732E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3984E0
lens1_imon=2.63148E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64753E1
os_ef1alow_imon=2.99712E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04285E1
cs_ea2_imon=1.51226E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84316E1
cs_ef1a_imon=2.88683E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=3.98636E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11346E1
os_restr1_imon=2.88035E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15366E1
os_ea1_imon=1.88646E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6381E1
os_ef1bup_imon=3.08974E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2545E0
cs_ionrep_imon=1.19106E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91897E2
cs_nozzle_imon=1.93384E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01671E1
cs_anode1_imon=2.89332E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=7.27117E-10
tplens_vset=1.4E-1
tplens_vmon=1.64444E0
tplens_imon=-4.18309E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26396E1
iondef3_imon=1.50001E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26767E1
iondef2_imon=1.59193E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0293E2
lens6_imon=2.98158E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=3.70669E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23948E0
ionrepsh_imon=1.73289E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33562E1
lens5b_imon=2.19E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74693E1
cs_ef2b_imon=3.13335E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.58333E-1
os_ea2_imon=-4.0389E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.0054E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71276E1
cs_ef2a_imon=3.19533E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62819E0
os_ef2alow_imon=-2.45372E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.42163E-1
os_ef2bup_imon=-5.13868E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10799E1
os_restr2_imon=2.87134E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23021E2
cs_ionfoca_imon=6.29964E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01737E1
cs_anode2_imon=2.24569E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73063E1
iondef1_imon=1.07751E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6825E1
iondef4_imon=1.08846E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=1.96297E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=2.5537E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11993E0
cs_ionaccel_imon=-1.74374E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47331E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56165E1
einzel_imon=7.72748E-6
window_vset=0.0E0
window_vmon=2.64795E-1
window_imon=-7.92292E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.39308E-4
mask2_vset=0.0E0
mask2_vmon=-1.86813E1
mask2_imon=-5.50827E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92666E3
multa_neg_imon=7.28548E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.67263E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=7.25303E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.669E0
defgridb_imon=6.24364E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33798E1
os_fil1_imon=4.43385E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.47319E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61914E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30683E1
cs_fil1_imon=9.97501E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63711E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62363E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.26028E-2
os_fil2_imon=-2.36564E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.77932E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.61871E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28228E-1
cs_fil2_imon=-2.18544E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17826E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21642E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34518E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.20209E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.49992E-1
res40_imon=-2.41408E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09333E0	-8.19016E-1	-7.98941E-1	-9.13088E0	-9.14199E0	4.72069E-3	9.39369E-2	2.7347E1	-3.26543E1	-3.26502E1	2.68262E1	1.20158E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.01223E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0934E0	-8.18801E-1	-7.99084E-1	-9.13084E0	-9.14202E0	4.98295E-3	9.35316E-2	2.73025E1	-3.26596E1	-3.26581E1	2.6803E1	1.20414E-7	2.52384E-3	2.52384E-3	6.32356E-3	3.02253E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09333E0	-8.18634E-1	-7.9906E-1	-9.13079E0	-9.1418E0	4.95911E-3	9.34839E-2	2.72993E1	-3.26382E1	-3.26185E1	2.68123E1	1.20226E-7	2.5199E-3	2.5199E-3	6.3108E-3	3.00068E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09302E0	-8.18539E-1	-7.98774E-1	-9.13064E0	-9.14166E0	4.45843E-3	9.35793E-2	2.72799E1	-3.26386E1	-3.2626E1	2.68052E1	1.20106E-7	2.52384E-3	2.52384E-3	6.28592E-3	2.97647E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.18229E-1	-7.98845E-1	-9.13084E0	-9.14173E0	4.74453E-3	9.39846E-2	2.73321E1	-3.26873E1	-3.26356E1	2.68298E1	1.20158E-7	2.51847E-3	2.51847E-3	6.28592E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.18348E-1	-7.9875E-1	-9.13079E0	-9.1418E0	4.57764E-3	9.40323E-2	2.73369E1	-3.26603E1	-3.2614E1	2.67986E1	1.20383E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.18348E-1	-7.98678E-1	-9.13072E0	-9.14199E0	4.48227E-3	9.38177E-2	2.72931E1	-3.26434E1	-3.26242E1	2.68172E1	1.20122E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.18729E-1	-7.9906E-1	-9.13119E0	-9.14209E0	4.76837E-3	9.37223E-2	2.73151E1	-3.2659E1	-3.26502E1	2.6819E1	1.20278E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09418E0	-8.18419E-1	-7.98583E-1	-9.13095E0	-9.14166E0	4.79221E-3	9.38416E-2	2.73413E1	-3.26653E1	-3.26004E1	2.68051E1	1.20209E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.00453E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.18229E-1	-7.98464E-1	-9.13095E0	-9.1418E0	4.88758E-3	9.37223E-2	2.72732E1	-3.26531E1	-3.26649E1	2.67881E1	1.19937E-7	2.52066E-3	2.52066E-3	6.28468E-3	2.99981E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.18324E-1	-7.98488E-1	-9.13098E0	-9.14199E0	4.62532E-3	9.39369E-2	2.73598E1	-3.26783E1	-3.26326E1	2.68064E1	1.20004E-7	2.5131E-3	2.5131E-3	6.28056E-3	3.00197E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0941E0	-8.183E-1	-7.98774E-1	-9.1311E0	-9.14204E0	4.673E-3	9.377E-2	2.72454E1	-3.26689E1	-3.26596E1	2.67497E1	1.20278E-7	2.52428E-3	2.52428E-3	6.29645E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09426E0	-8.18133E-1	-7.9906E-1	-9.1311E0	-9.14216E0	4.57764E-3	9.36031E-2	2.73263E1	-3.26516E1	-3.26541E1	2.67988E1	1.19991E-7	2.52131E-3	2.52131E-3	6.2863E-3	3.00852E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09371E0	-8.18205E-1	-7.99394E-1	-9.13134E0	-9.1418E0	4.48227E-3	9.37939E-2	2.72943E1	-3.26434E1	-3.26068E1	2.67992E1	1.20154E-7	2.51384E-3	2.51384E-3	6.29603E-3	3.01609E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09402E0	-8.17919E-1	-7.98798E-1	-9.13129E0	-9.14223E0	4.36306E-3	9.35555E-2	2.72999E1	-3.26503E1	-3.2644E1	2.67816E1	1.19965E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.18324E-1	-7.98965E-1	-9.13098E0	-9.14207E0	5.00679E-3	9.34601E-2	2.73261E1	-3.26837E1	-3.26212E1	2.67986E1	1.19891E-7	2.52553E-3	2.52553E-3	6.32328E-3	2.98342E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.18801E-1	-7.98655E-1	-9.13076E0	-9.14204E0	4.60148E-3	9.40323E-2	2.73682E1	-3.26555E1	-3.26508E1	2.68076E1	1.2033E-7	2.5188E-3	2.5188E-3	6.29098E-3	2.98222E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.18038E-1	-7.98893E-1	-9.13081E0	-9.14209E0	4.60148E-3	9.37462E-2	2.72462E1	-3.26693E1	-3.26579E1	2.67848E1	1.20158E-7	2.52061E-3	2.52061E-3	6.32896E-3	2.9892E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.18515E-1	-7.99274E-1	-9.13084E0	-9.14209E0	4.36306E-3	9.36747E-2	2.73564E1	-3.26195E1	-3.25995E1	2.68337E1	1.20017E-7	2.51771E-3	2.51771E-3	6.29645E-3	2.99E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.18205E-1	-7.9875E-1	-9.13105E0	-9.14195E0	4.50611E-3	9.34362E-2	2.73063E1	-3.26767E1	-3.26396E1	2.6825E1	1.20209E-7	2.51632E-3	2.51632E-3	6.34518E-3	3.0148E-1