[Scan]
initial_time=2016-01-27T22:47:33
final_time=2016-01-27T22:47:53
ip_count=19
run=1025
dataset=6
scan=406
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08789E-4
ql1_vset=
ql1_vmon=-8.18229E-1
ql1_imon=1.06481E-9
ql2_vset=
ql2_vmon=-7.99012E-1
ql2_imon=2.99549E-10
ql3_vset=
ql3_vmon=-9.13081E0
ql3_imon=1.91972E-9
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=4.44889E-10
mult1=-1.03424E-8
mult2=-2.96812E-9
rf_tmon=-4.06181E-3
rf_agc=3.38803E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=3.5634E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64616E0
bslens_imon=2.62466E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19913E1
lens5a_imon=1.98616E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12501E2
lens4a_imon=2.05015E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53673E1
cs_ef1b_imon=2.74759E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04575E2
lens23_imon=1.02001E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04894E1
cs_ea1_imon=2.58821E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39085E0
lens1_imon=2.69545E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64637E1
os_ef1alow_imon=2.99573E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03991E1
cs_ea2_imon=1.53524E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=2.89599E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=3.67606E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11303E1
os_restr1_imon=2.87791E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15158E1
os_ea1_imon=1.87821E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63409E1
os_ef1bup_imon=3.0972E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24797E0
cs_ionrep_imon=1.16997E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91871E2
cs_nozzle_imon=1.93455E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0156E1
cs_anode1_imon=2.89807E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2047E0
olens4_imon=7.2819E-10
tplens_vset=1.4E-1
tplens_vmon=1.63612E0
tplens_imon=-2.52875E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27269E1
iondef3_imon=1.51259E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27005E1
iondef2_imon=1.58231E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0293E2
lens6_imon=2.98388E-4
ql6_vset=1.0E-1
ql6_vmon=9.37223E-2
ql6_imon=3.64733E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23381E0
ionrepsh_imon=1.72814E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33681E1
lens5b_imon=2.18684E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74681E1
cs_ef2b_imon=3.12396E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.45136E-1
os_ea2_imon=-5.39567E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06112E2
lens4b_imon=2.0046E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71281E1
cs_ef2a_imon=3.19833E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6216E0
os_ef2alow_imon=-2.42862E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.4684E-1
os_ef2bup_imon=-5.24705E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11013E1
os_restr2_imon=2.87896E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.31344E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01914E1
cs_anode2_imon=2.2416E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72853E1
iondef1_imon=1.10662E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68088E1
iondef4_imon=1.08677E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=1.92812E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=2.67875E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10755E0
cs_ionaccel_imon=-1.73705E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47306E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56307E1
einzel_imon=7.70522E-6
window_vset=0.0E0
window_vmon=1.7772E-1
window_imon=-1.05937E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82654E2
mask1_imon=2.39237E-4
mask2_vset=0.0E0
mask2_vmon=-1.86668E1
mask2_imon=-5.93688E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.19404E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93697E3
defgrida_imon=6.56757E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5015E3
multb_neg_imon=7.3073E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.37458E0
defgridb_imon=6.17823E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33821E1
os_fil1_imon=4.43771E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.33954E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62055E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30652E1
cs_fil1_imon=9.96964E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63681E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62304E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.09167E-2
os_fil2_imon=-2.33324E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.11859E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.32243E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.309E-1
cs_fil2_imon=-2.38537E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13042E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21559E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28552E-3
inlet_lpb_pmon=2.97704E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.55731E-1
res40_imon=-2.49118E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=204
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.18229E-1	-7.99155E-1	-9.13095E0	-9.1423E0	4.62532E-3	9.39131E-2	2.73234E1	-3.26685E1	-3.26248E1	2.68034E1	1.20243E-7	2.51972E-3	2.51972E-3	6.31283E-3	3.00637E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.18229E-1	-7.98702E-1	-9.13112E0	-9.14242E0	4.72069E-3	9.40323E-2	2.73247E1	-3.2678E1	-3.26603E1	2.68076E1					
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.18563E-1	-7.98893E-1	-9.13095E0	-9.14228E0	4.79221E-3	9.39608E-2	2.73181E1	-3.26455E1	-3.26172E1	2.68076E1	1.20069E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.9926E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09371E0	-8.18563E-1	-7.98941E-1	-9.1311E0	-9.14187E0	4.88758E-3	9.38892E-2	2.73141E1	-3.26404E1	-3.2644E1	2.68111E1	1.20363E-7	2.52276E-3	2.52276E-3	6.32896E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.18682E-1	-7.99203E-1	-9.13117E0	-9.14223E0	5.36442E-3	9.41038E-2	2.72692E1	-3.26608E1	-3.26202E1	2.68058E1	1.19965E-7	2.51443E-3	2.51443E-3	6.29098E-3	3.01609E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.18515E-1	-7.98702E-1	-9.13107E0	-9.14199E0	4.62532E-3	9.377E-2	2.72935E1	-3.26776E1	-3.26109E1	2.6815E1	1.1979E-7	2.51603E-3	2.51603E-3	6.32328E-3	3.006E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09286E0	-8.18324E-1	-7.98941E-1	-9.1311E0	-9.14204E0	4.86374E-3	9.4223E-2	2.72851E1	-3.26285E1	-3.26385E1	2.6798E1	1.19991E-7	2.51814E-3	2.51814E-3	6.32328E-3	2.98342E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.18205E-1	-7.98893E-1	-9.13093E0	-9.14187E0	4.98295E-3	9.3627E-2	2.72744E1	-3.26543E1	-3.26301E1	2.6836E1	1.201E-7	2.51952E-3	2.51952E-3	6.33021E-3	2.989E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09379E0	-8.18157E-1	-7.98988E-1	-9.13086E0	-9.14187E0	4.45843E-3	9.38654E-2	2.72702E1	-3.26689E1	-3.26536E1	2.68107E1	1.20055E-7	2.52276E-3	2.52276E-3	6.34518E-3	2.98156E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.18348E-1	-7.98726E-1	-9.13115E0	-9.14195E0	4.72069E-3	9.38177E-2	2.73358E1	-3.2662E1	-3.26467E1	2.68065E1	1.20191E-7	2.5147E-3	2.5147E-3	6.34661E-3	3.01209E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.18062E-1	-7.98202E-1	-9.13131E0	-9.14209E0	4.41074E-3	9.377E-2	2.73424E1	-3.26651E1	-3.26536E1	2.6789E1	1.20466E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.00197E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.18181E-1	-7.98631E-1	-9.13112E0	-9.14216E0	4.79221E-3	9.37223E-2	2.7263E1	-3.26591E1	-3.26512E1	2.68058E1	1.19965E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.02922E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.1811E-1	-7.98512E-1	-9.13122E0	-9.14195E0	4.55379E-3	9.37462E-2	2.72835E1	-3.26254E1	-3.265E1	2.67758E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.02396E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-8.17966E-1	-7.98655E-1	-9.131E0	-9.14199E0	4.29153E-3	9.34839E-2	2.73198E1	-3.2662E1	-3.26744E1	2.68034E1	1.20017E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00824E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.17966E-1	-7.98202E-1	-9.13107E0	-9.14199E0	4.29153E-3	9.38892E-2	2.73249E1	-3.26488E1	-3.25966E1	2.68088E1	1.20209E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00197E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-8.17919E-1	-7.98559E-1	-9.13119E0	-9.1418E0	4.72069E-3	9.35078E-2	2.72955E1	-3.26693E1	-3.26326E1	2.67956E1	1.20122E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00302E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.17871E-1	-7.9875E-1	-9.1311E0	-9.1418E0	4.55379E-3	9.37939E-2	2.72871E1	-3.26633E1	-3.26326E1	2.68448E1	1.19965E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.02396E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.18038E-1	-7.98893E-1	-9.131E0	-9.14187E0	4.72069E-3	9.408E-2	2.72968E1	-3.26585E1	-3.26325E1	2.68157E1	1.20278E-7	2.51552E-3	2.51552E-3	6.34588E-3	3.02396E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-8.18276E-1	-7.99203E-1	-9.13084E0	-9.14211E0	4.98295E-3	9.37223E-2	2.73411E1	-3.26795E1	-3.26368E1	2.68112E1	1.19953E-7	2.52276E-3	2.52276E-3	6.32896E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.18229E-1	-7.99012E-1	-9.13081E0	-9.14195E0	4.57764E-3	9.37223E-2	2.72853E1	-3.27005E1	-3.27269E1	2.68088E1	1.20017E-7	2.51771E-3	2.51771E-3	6.28552E-3	2.97704E-1