[Scan]
initial_time=2016-01-27T22:48:26
final_time=2016-01-27T22:48:46
ip_count=19
run=1025
dataset=6
scan=408
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08825E-4
ql1_vset=
ql1_vmon=-8.17585E-1
ql1_imon=9.30345E-10
ql2_vset=
ql2_vmon=-7.98726E-1
ql2_imon=2.88212E-10
ql3_vset=
ql3_vmon=-9.13088E0
ql3_imon=1.58138E-9
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=4.7152E-10
mult1=-9.4755E-9
mult2=-2.85634E-9
rf_tmon=-4.2E-3
rf_agc=3.31293E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=3.5913E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67388E0
bslens_imon=2.69545E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19854E1
lens5a_imon=1.99819E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.05043E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53563E1
cs_ef1b_imon=2.76427E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04637E2
lens23_imon=1.02064E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04929E1
cs_ea1_imon=2.60166E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36784E0
lens1_imon=2.65652E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64788E1
os_ef1alow_imon=2.98217E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03909E1
cs_ea2_imon=1.5186E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84637E1
cs_ef1a_imon=2.91406E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=3.82328E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11315E1
os_restr1_imon=2.89807E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1573E1
os_ea1_imon=1.89838E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63624E1
os_ef1bup_imon=3.084E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24974E0
cs_ionrep_imon=1.18661E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93544E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01612E1
cs_anode1_imon=2.8946E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20496E0
olens4_imon=6.82199E-10
tplens_vset=1.4E-1
tplens_vmon=1.66267E0
tplens_imon=-2.56414E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26146E1
iondef3_imon=1.49383E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26524E1
iondef2_imon=1.57205E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02916E2
lens6_imon=2.98424E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=3.96538E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.20491E0
ionrepsh_imon=1.74973E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33876E1
lens5b_imon=2.17941E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74687E1
cs_ef2b_imon=3.13647E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.32158E-1
os_ea2_imon=-5.96198E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06079E2
lens4b_imon=2.00757E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71223E1
cs_ef2a_imon=3.19277E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65578E0
os_ef2alow_imon=-2.55026E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.41048E-1
os_ef2bup_imon=-5.36521E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10967E1
os_restr2_imon=2.87027E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.32158E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01954E1
cs_anode2_imon=2.22839E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73063E1
iondef1_imon=1.11157E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68166E1
iondef4_imon=1.08017E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=1.98553E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81951E-1
olens1_imon=2.61784E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12609E0
cs_ionaccel_imon=-1.77875E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02108E2
cs_ionfocb_imon=1.47581E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56446E1
einzel_imon=7.81642E-6
window_vset=0.0E0
window_vmon=2.68656E-1
window_imon=-8.96035E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.39122E-4
mask2_vset=0.0E0
mask2_vmon=-1.87016E1
mask2_imon=-6.35391E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92656E3
multa_neg_imon=7.71433E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.04373E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.21882E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.47498E0
defgridb_imon=6.14638E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3385E1
os_fil1_imon=5.74093E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.40326E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62041E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30654E1
cs_fil1_imon=9.98099E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64156E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62276E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.19298E-2
os_fil2_imon=-2.34483E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.00879E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.59453E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29152E-1
cs_fil2_imon=-1.93938E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.91414E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21519E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.9978E-1
chamber_ion_pmon=1.20122E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.44726E-1
res40_imon=-2.40429E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=189
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09394E0	-8.18062E-1	-7.99131E-1	-9.13141E0	-9.14183E0	4.86374E-3	9.41277E-2	2.72874E1	-3.26555E1	-3.26531E1	2.68154E1	1.20042E-7	2.51498E-3	2.51498E-3	6.30212E-3	2.99845E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.1799E-1	-7.98774E-1	-9.13129E0	-9.14161E0	4.74453E-3	9.408E-2	2.73454E1	-3.26771E1	-3.265E1	2.67938E1	1.20069E-7	2.5188E-3	2.5188E-3	6.28552E-3	3.00302E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.17895E-1	-7.98368E-1	-9.13122E0	-9.14164E0	4.98295E-3	9.39131E-2	2.72815E1	-3.26706E1	-3.26321E1	2.67825E1	1.19809E-7	2.51771E-3	2.51771E-3	6.33486E-3	2.9952E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09394E0	-8.17966E-1	-7.99012E-1	-9.13086E0	-9.14202E0	4.93526E-3	9.38892E-2	2.72657E1	-3.26686E1	-3.26165E1	2.6802E1	1.20051E-7	2.51523E-3	2.51523E-3	6.34261E-3	3.0101E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.18014E-1	-7.9906E-1	-9.13095E0	-9.14197E0	4.79221E-3	9.40084E-2	2.73255E1	-3.26464E1	-3.26392E1	2.6804E1	1.20725E-7	2.52454E-3	2.52454E-3	6.31902E-3	3.01193E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-8.17752E-1	-7.98941E-1	-9.13093E0	-9.14202E0	4.62532E-3	9.39131E-2	2.72953E1	-3.26438E1	-3.26113E1	2.68219E1	1.2033E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09371E0	-8.17347E-1	-7.99108E-1	-9.13088E0	-9.14197E0	4.36306E-3	9.36747E-2	2.7257E1	-3.2653E1	-3.2608E1	2.68016E1	1.20191E-7	2.52139E-3	2.52139E-3	6.34661E-3	3.00676E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09402E0	-8.17609E-1	-7.98678E-1	-9.13119E0	-9.14192E0	4.33922E-3	9.36747E-2	2.73676E1	-3.26378E1	-3.26254E1	2.68447E1	1.20174E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09418E0	-8.17966E-1	-7.98583E-1	-9.13112E0	-9.1419E0	4.48227E-3	9.40323E-2	2.72835E1	-3.26524E1	-3.26224E1	2.67956E1	1.20209E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.99686E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.17823E-1	-7.9906E-1	-9.13129E0	-9.1419E0	4.69685E-3	9.38654E-2	2.71753E1	-3.26438E1	-3.26156E1	2.68094E1	1.20069E-7	2.52428E-3	2.52428E-3	6.29645E-3	3.00302E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.17847E-1	-7.99155E-1	-9.13129E0	-9.14209E0	4.74453E-3	9.38654E-2	2.73488E1	-3.26809E1	-3.26231E1	2.67908E1	1.20137E-7	2.51693E-3	2.51693E-3	6.31858E-3	3.00942E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.17847E-1	-7.99251E-1	-9.13129E0	-9.14209E0	4.69685E-3	9.37223E-2	2.73297E1	-3.26861E1	-3.26512E1	2.67938E1	1.20158E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.03027E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.17728E-1	-7.99084E-1	-9.13141E0	-9.14192E0	4.72069E-3	9.39608E-2	2.72823E1	-3.2623E1	-3.262E1	2.67944E1	1.20069E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.1768E-1	-7.99203E-1	-9.13153E0	-9.14237E0	4.62532E-3	9.39369E-2	2.7252E1	-3.26832E1	-3.26006E1	2.67592E1	1.19861E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.9952E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.17871E-1	-7.98941E-1	-9.13124E0	-9.14223E0	4.07696E-3	9.38416E-2	2.73183E1	-3.26639E1	-3.26729E1	2.68119E1	1.20209E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.01738E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-8.17895E-1	-7.98845E-1	-9.13136E0	-9.14199E0	4.48227E-3	9.408E-2	2.73538E1	-3.26536E1	-3.26158E1	2.68316E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00824E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.17847E-1	-7.98774E-1	-9.13112E0	-9.14226E0	4.48227E-3	9.35555E-2	2.72679E1	-3.26585E1	-3.26325E1	2.67937E1	1.20069E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09588E0	-8.17943E-1	-7.98774E-1	-9.13105E0	-9.14202E0	4.55379E-3	9.37223E-2	2.72668E1	-3.26508E1	-3.26242E1	2.67854E1	1.20055E-7	2.51739E-3	2.51739E-3	6.35601E-3	3.0071E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09588E0	-8.17585E-1	-7.98678E-1	-9.13126E0	-9.14195E0	4.69685E-3	9.36985E-2	2.72793E1	-3.26482E1	-3.2617E1	2.68082E1	1.19902E-7	2.52276E-3	2.52276E-3	6.31817E-3	2.9943E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.17585E-1	-7.98726E-1	-9.13088E0	-9.14187E0	4.57764E-3	9.36031E-2	2.73063E1	-3.26524E1	-3.26146E1	2.68166E1	1.20122E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9978E-1