[Scan]
initial_time=2016-01-27T22:51:06
final_time=2016-01-27T22:51:26
ip_count=19
run=1025
dataset=6
scan=414
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08819E-4
ql1_vset=
ql1_vmon=-8.17227E-1
ql1_imon=7.93254E-10
ql2_vset=
ql2_vmon=-7.99036E-1
ql2_imon=3.16036E-10
ql3_vset=
ql3_vmon=-9.13146E0
ql3_imon=1.10905E-9
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=5.16486E-10
mult1=-9.31021E-9
mult2=-2.77225E-9
rf_tmon=-4.14374E-3
rf_agc=3.28844E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.31538E-3
ql5_imon=3.96144E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6556E0
bslens_imon=2.56095E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19553E1
lens5a_imon=1.97943E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12471E2
lens4a_imon=2.05153E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5355E1
cs_ef1b_imon=2.76358E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04588E2
lens23_imon=1.02114E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05006E1
cs_ea1_imon=2.5868E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37079E0
lens1_imon=2.56803E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64819E1
os_ef1alow_imon=2.99351E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04097E1
cs_ea2_imon=1.54125E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8425E1
cs_ef1a_imon=2.89116E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=3.92306E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11424E1
os_restr1_imon=2.88287E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15229E1
os_ea1_imon=1.88493E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63677E1
os_ef1bup_imon=3.08289E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23853E0
cs_ionrep_imon=1.19368E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93431E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01563E1
cs_anode1_imon=2.88828E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=6.9952E-10
tplens_vset=1.4E-1
tplens_vmon=1.66267E0
tplens_imon=-2.06863E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26478E1
iondef3_imon=1.50091E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26366E1
iondef2_imon=1.58833E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0292E2
lens6_imon=2.98371E-4
ql6_vset=1.0E-1
ql6_vmon=9.40084E-2
ql6_imon=3.66366E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28749E0
ionrepsh_imon=1.74336E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33433E1
lens5b_imon=2.17339E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74838E1
cs_ef2b_imon=3.1283E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.32158E-1
os_ea2_imon=-5.14791E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.00481E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70975E1
cs_ef2a_imon=3.19497E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64741E0
os_ef2alow_imon=-2.37083E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.5778E-1
os_ef2bup_imon=-5.40897E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10925E1
os_restr2_imon=2.86233E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.30919E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01653E1
cs_anode2_imon=2.24172E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73375E1
iondef1_imon=1.096E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67872E1
iondef4_imon=1.09819E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=1.96064E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=2.96223E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11873E0
cs_ionaccel_imon=-1.75095E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02106E2
cs_ionfocb_imon=1.4732E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55967E1
einzel_imon=7.61216E-6
window_vset=0.0E0
window_vmon=1.65085E-1
window_imon=-9.43659E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39062E-4
mask2_vset=0.0E0
mask2_vmon=-1.86825E1
mask2_imon=-5.43619E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=7.7108E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.64543E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.33208E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.599E0
defgridb_imon=6.2384E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33815E1
os_fil1_imon=4.93239E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.22692E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61866E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30667E1
cs_fil1_imon=9.97777E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63237E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62083E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.06635E-2
os_fil2_imon=-2.37765E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.95952E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.53631E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30558E-1
cs_fil2_imon=-2.38966E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17226E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21506E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.14553E-1
res40_imon=-2.35281E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-8.17013E-1	-7.98869E-1	-9.13115E0	-9.14192E0	4.72069E-3	9.36985E-2	2.73381E1	-3.26856E1	-3.26231E1	2.67648E1	1.20192E-7	2.51919E-3	2.51919E-3	6.30212E-3	2.99093E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.1718E-1	-7.98297E-1	-9.1311E0	-9.14192E0	4.31538E-3	9.36508E-2	2.72873E1	-3.26468E1	-3.26529E1	2.68176E1	1.20414E-7	2.51847E-3	2.51847E-3	6.29128E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.17013E-1	-7.98893E-1	-9.13122E0	-9.1418E0	4.52995E-3	9.36747E-2	2.73219E1	-3.26561E1	-3.26296E1	2.67914E1	1.20191E-7	2.51581E-3	2.51581E-3	6.32418E-3	3.00144E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-8.17227E-1	-7.99131E-1	-9.13084E0	-9.14183E0	4.17233E-3	9.39846E-2	2.7288E1	-3.26496E1	-3.26573E1	2.68178E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01609E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.17132E-1	-7.99012E-1	-9.13115E0	-9.14204E0	4.05312E-3	9.37462E-2	2.73051E1	-3.26771E1	-3.26326E1	2.67998E1	1.2026E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.99686E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.16989E-1	-7.9906E-1	-9.13072E0	-9.14187E0	4.19617E-3	9.37462E-2	2.72912E1	-3.26573E1	-3.26376E1	2.68372E1	1.19965E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.16798E-1	-7.98655E-1	-9.13067E0	-9.14176E0	4.26769E-3	9.34601E-2	2.72789E1	-3.26703E1	-3.26535E1	2.6835E1	1.19991E-7	2.51498E-3	2.51498E-3	6.32328E-3	3.00852E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.17251E-1	-7.98464E-1	-9.13098E0	-9.14183E0	4.48227E-3	9.37223E-2	2.72744E1	-3.26496E1	-3.25953E1	2.67812E1	1.20045E-7	2.52066E-3	2.52066E-3	6.3245E-3	2.989E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.1706E-1	-7.98583E-1	-9.13126E0	-9.14176E0	4.17233E-3	9.36031E-2	2.73147E1	-3.26867E1	-3.26272E1	2.67998E1	1.19965E-7	2.52538E-3	2.52538E-3	6.30192E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09394E0	-8.17347E-1	-7.9875E-1	-9.13124E0	-9.14168E0	4.31538E-3	9.36031E-2	2.73045E1	-3.26128E1	-3.2587E1	2.68172E1	1.20017E-7	2.51552E-3	2.51552E-3	6.34588E-3	3.00563E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.17251E-1	-7.98917E-1	-9.13119E0	-9.14192E0	4.02927E-3	9.377E-2	2.73399E1	-3.26585E1	-3.26332E1	2.67878E1	1.20226E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.03976E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0941E0	-8.17657E-1	-7.98774E-1	-9.1311E0	-9.14197E0	4.33922E-3	9.36985E-2	2.73123E1	-3.26146E1	-3.26573E1	2.67818E1	1.20122E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.17204E-1	-7.98631E-1	-9.13126E0	-9.14173E0	4.31538E-3	9.35316E-2	2.73772E1	-3.26579E1	-3.26068E1	2.68111E1	1.19913E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01609E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.17347E-1	-7.98726E-1	-9.13086E0	-9.14166E0	4.36306E-3	9.33886E-2	2.7285E1	-3.26868E1	-3.26166E1	2.67974E1	1.20209E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.03027E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09426E0	-8.17037E-1	-7.98774E-1	-9.13076E0	-9.14173E0	4.31538E-3	9.35078E-2	2.73135E1	-3.26663E1	-3.26416E1	2.68142E1	1.2033E-7	2.51007E-3	2.51007E-3	6.34588E-3	3.02659E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.17251E-1	-7.98845E-1	-9.13107E0	-9.14207E0	4.19617E-3	9.36031E-2	2.72597E1	-3.26744E1	-3.26012E1	2.68142E1	1.20209E-7	2.51632E-3	2.51632E-3	6.29128E-3	3.00453E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-8.16989E-1	-7.98774E-1	-9.13129E0	-9.14195E0	4.17233E-3	9.38416E-2	2.73364E1	-3.26484E1	-3.26183E1	2.68186E1	1.19913E-7	2.52209E-3	2.52209E-3	6.34037E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0965E0	-8.17156E-1	-7.98917E-1	-9.13115E0	-9.14159E0	4.55379E-3	9.39369E-2	2.73099E1	-3.26639E1	-3.26344E1	2.67974E1	1.20055E-7	2.51632E-3	2.51632E-3	6.29665E-3	2.9841E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.17466E-1	-7.98845E-1	-9.13119E0	-9.14152E0	4.50611E-3	9.40323E-2	2.7298E1	-3.27045E1	-3.26054E1	2.68082E1	1.20209E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.17227E-1	-7.99036E-1	-9.13146E0	-9.14183E0	4.31538E-3	9.40084E-2	2.73375E1	-3.26366E1	-3.26478E1	2.67872E1	1.20158E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.00453E-1