[Scan]
initial_time=2016-01-27T22:52:00
final_time=2016-01-27T22:52:19
ip_count=19
run=1025
dataset=6
scan=416
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08776E-4
ql1_vset=
ql1_vmon=-8.17251E-1
ql1_imon=7.7213E-10
ql2_vset=
ql2_vmon=-7.98583E-1
ql2_imon=2.97272E-10
ql3_vset=
ql3_vmon=-9.13124E0
ql3_imon=9.92787E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=5.29194E-10
mult1=-8.96506E-9
mult2=-2.80665E-9
rf_tmon=-4.61671E-3
rf_agc=3.2428E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=3.72756E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62052E0
bslens_imon=2.58681E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20054E1
lens5a_imon=1.9874E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.05215E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5365E1
cs_ef1b_imon=2.75628E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04586E2
lens23_imon=1.02031E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04988E1
cs_ea1_imon=2.57835E-5
lens1_vset=-5.0E0
lens1_vmon=-5.321E0
lens1_imon=2.60419E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64406E1
os_ef1alow_imon=2.98426E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04084E1
cs_ea2_imon=1.55183E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84522E1
cs_ef1a_imon=2.89772E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=3.93271E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11135E1
os_restr1_imon=2.86054E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15276E1
os_ea1_imon=1.89493E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63902E1
os_ef1bup_imon=3.09408E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23472E0
cs_ionrep_imon=1.20317E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9187E2
cs_nozzle_imon=1.93253E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01665E1
cs_anode1_imon=2.91441E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=7.24649E-10
tplens_vset=1.4E-1
tplens_vmon=1.65592E0
tplens_imon=-2.18492E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25953E1
iondef3_imon=1.50351E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27054E1
iondef2_imon=1.59598E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02912E2
lens6_imon=2.98388E-4
ql6_vset=1.0E-1
ql6_vmon=9.38416E-2
ql6_imon=4.06301E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30076E0
ionrepsh_imon=1.75797E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33484E1
lens5b_imon=2.18346E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74924E1
cs_ef2b_imon=3.13856E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.64276E-1
os_ea2_imon=-4.06207E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06078E2
lens4b_imon=2.00664E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71107E1
cs_ef2a_imon=3.20181E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63087E0
os_ef2alow_imon=-2.51898E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.45681E-1
os_ef2bup_imon=-5.254E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10938E1
os_restr2_imon=2.86645E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.31319E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01844E1
cs_anode2_imon=2.25341E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73213E1
iondef1_imon=1.10027E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6829E1
iondef4_imon=1.08086E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=2.00464E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=2.71666E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12029E0
cs_ionaccel_imon=-1.7996E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02126E2
cs_ionfocb_imon=1.47386E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56423E1
einzel_imon=7.69827E-6
window_vset=0.0E0
window_vmon=2.90666E-1
window_imon=-9.09936E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.39265E-4
mask2_vset=0.0E0
mask2_vmon=-1.8701E1
mask2_imon=-6.28441E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.73506E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9374E3
defgrida_imon=6.84168E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50147E3
multb_neg_imon=6.96682E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.55471E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3387E1
os_fil1_imon=5.05167E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.36271E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6219E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30685E1
cs_fil1_imon=9.95267E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63519E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62323E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.14051E-2
os_fil2_imon=-2.44909E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.07602E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.49538E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32648E-1
cs_fil2_imon=-2.34483E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.38528E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21672E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=2.98222E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.0786E-1
res40_imon=-2.22706E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09402E0	-8.16798E-1	-7.98726E-1	-9.13117E0	-9.14197E0	4.62532E-3	9.38892E-2	2.73135E1	-3.26795E1	-3.26543E1	2.68088E1	1.19902E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.98665E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09394E0	-8.1687E-1	-7.9844E-1	-9.13095E0	-9.14204E0	4.52995E-3	9.39608E-2	2.72755E1	-3.26636E1	-3.26118E1	2.67839E1	1.20158E-7	2.51954E-3	2.51954E-3	6.33977E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-8.16584E-1	-7.98845E-1	-9.13057E0	-9.14204E0	4.8399E-3	9.39846E-2	2.72845E1	-3.26734E1	-3.25898E1	2.67882E1	1.20276E-7	2.51679E-3	2.51679E-3	6.3282E-3	2.98031E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-8.16965E-1	-7.98249E-1	-9.13107E0	-9.14176E0	4.3869E-3	9.39608E-2	2.7349E1	-3.26362E1	-3.26446E1	2.68094E1	1.19883E-7	2.51611E-3	2.51611E-3	6.31879E-3	3.00522E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.16751E-1	-7.98559E-1	-9.13081E0	-9.14197E0	4.22001E-3	9.41277E-2	2.73285E1	-3.27023E1	-3.25791E1	2.6825E1	1.20174E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.99E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.16798E-1	-7.98512E-1	-9.13081E0	-9.14204E0	4.33922E-3	9.408E-2	2.72839E1	-3.26537E1	-3.26307E1	2.67989E1	1.20122E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.02659E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.16417E-1	-7.98416E-1	-9.13084E0	-9.14216E0	4.62532E-3	9.39369E-2	2.73363E1	-3.26579E1	-3.26212E1	2.68082E1	1.20017E-7	2.52318E-3	2.52318E-3	6.29645E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.17418E-1	-7.98297E-1	-9.13093E0	-9.14242E0	4.45843E-3	9.36985E-2	2.72997E1	-3.26579E1	-3.26398E1	2.68244E1	1.20069E-7	2.5188E-3	2.5188E-3	6.29098E-3	2.9874E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09387E0	-8.16917E-1	-7.98631E-1	-9.13074E0	-9.14202E0	4.76837E-3	9.38177E-2	2.72468E1	-3.26831E1	-3.26242E1	2.67878E1	1.19902E-7	2.51417E-3	2.51417E-3	6.29665E-3	2.99175E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09387E0	-8.17227E-1	-7.98917E-1	-9.13084E0	-9.14199E0	4.74453E-3	9.34124E-2	2.72618E1	-3.26597E1	-3.25779E1	2.67968E1	1.20226E-7	2.52318E-3	2.52318E-3	6.34037E-3	2.9952E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0941E0	-8.17347E-1	-7.98607E-1	-9.13122E0	-9.1419E0	5.07832E-3	9.37939E-2	2.7355E1	-3.26807E1	-3.2632E1	2.67992E1	1.19965E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09394E0	-8.16941E-1	-7.98702E-1	-9.13126E0	-9.14166E0	4.93526E-3	9.32932E-2	2.7239E1	-3.26608E1	-3.26071E1	2.68256E1	1.20069E-7	2.51552E-3	2.51552E-3	6.3514E-3	3.02133E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09387E0	-8.17156E-1	-7.98535E-1	-9.13143E0	-9.14187E0	5.14984E-3	9.34362E-2	2.73688E1	-3.26891E1	-3.26212E1	2.67926E1	1.20017E-7	2.52538E-3	2.52538E-3	6.30192E-3	3.02133E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09433E0	-8.16965E-1	-7.98774E-1	-9.13129E0	-9.14218E0	4.72069E-3	9.377E-2	2.73492E1	-3.27001E1	-3.26052E1	2.67541E1	1.20106E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.98665E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.16751E-1	-7.98965E-1	-9.13146E0	-9.14195E0	5.00679E-3	9.36985E-2	2.72603E1	-3.26803E1	-3.25694E1	2.6792E1	1.19978E-7	2.5225E-3	2.5225E-3	6.31858E-3	2.99348E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.16798E-1	-7.98726E-1	-9.13129E0	-9.14197E0	4.57764E-3	9.37223E-2	2.73375E1	-3.26681E1	-3.26579E1	2.67956E1	1.20069E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.00563E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0941E0	-8.16846E-1	-7.98821E-1	-9.13136E0	-9.14195E0	4.673E-3	9.41515E-2	2.72984E1	-3.26517E1	-3.26389E1	2.68028E1	1.20226E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01871E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-8.17037E-1	-7.98774E-1	-9.13167E0	-9.14154E0	4.74453E-3	9.3627E-2	2.72628E1	-3.26225E1	-3.26162E1	2.68175E1	1.19965E-7	2.51116E-3	2.51116E-3	6.3074E-3	3.03712E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.17347E-1	-7.98869E-1	-9.13136E0	-9.14197E0	4.673E-3	9.39608E-2	2.7376E1	-3.26446E1	-3.26002E1	2.68004E1	1.19891E-7	2.52025E-3	2.52025E-3	6.29684E-3	3.01104E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.17251E-1	-7.98583E-1	-9.13124E0	-9.14195E0	4.48227E-3	9.38416E-2	2.73213E1	-3.27054E1	-3.25953E1	2.6829E1	1.19913E-7	2.51552E-3	2.51552E-3	6.29098E-3	2.98222E-1