[Scan]
initial_time=2016-01-27T22:52:27
final_time=2016-01-27T22:52:46
ip_count=19
run=1025
dataset=6
scan=417
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08812E-4
ql1_vset=
ql1_vmon=-8.17108E-1
ql1_imon=8.25799E-10
ql2_vset=
ql2_vmon=-7.98607E-1
ql2_imon=3.10087E-10
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=9.85193E-10
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=5.12111E-10
mult1=-9.41529E-9
mult2=-2.81243E-9
rf_tmon=-5.35959E-3
rf_agc=3.24804E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=3.88396E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65E0
bslens_imon=2.6591E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19695E1
lens5a_imon=1.9704E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.05074E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5386E1
cs_ef1b_imon=2.75922E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.02312E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04884E1
cs_ea1_imon=2.58179E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38136E0
lens1_imon=2.68549E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64944E1
os_ef1alow_imon=3.01087E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03635E1
cs_ea2_imon=1.53059E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83919E1
cs_ef1a_imon=2.87062E-5
olens2_vset=9.7E-1
olens2_vmon=9.69791E-1
olens2_imon=4.12881E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11263E1
os_restr1_imon=2.87162E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15459E1
os_ea1_imon=1.88198E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63529E1
os_ef1bup_imon=3.07362E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24055E0
cs_ionrep_imon=1.18547E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91898E2
cs_nozzle_imon=1.93374E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01737E1
cs_anode1_imon=2.91323E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20473E0
olens4_imon=7.99525E-10
tplens_vset=1.4E-1
tplens_vmon=1.59634E0
tplens_imon=-1.55331E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26392E1
iondef3_imon=1.49561E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26909E1
iondef2_imon=1.58965E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02945E2
lens6_imon=2.98392E-4
ql6_vset=1.0E-1
ql6_vmon=9.39846E-2
ql6_imon=3.96109E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22735E0
ionrepsh_imon=1.74274E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33564E1
lens5b_imon=2.18454E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74401E1
cs_ef2b_imon=3.12865E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.19371E-1
os_ea2_imon=-5.8096E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06083E2
lens4b_imon=2.00507E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71101E1
cs_ef2a_imon=3.21723E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63057E0
os_ef2alow_imon=-2.48914E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.3218E-1
os_ef2bup_imon=-5.30098E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10687E1
os_restr2_imon=2.87565E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23031E2
cs_ionfoca_imon=6.31578E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01854E1
cs_anode2_imon=2.22705E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73003E1
iondef1_imon=1.09407E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67475E1
iondef4_imon=1.09493E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=1.99778E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=2.62582E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0882E0
cs_ionaccel_imon=-1.65028E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02104E2
cs_ionfocb_imon=1.47334E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56187E1
einzel_imon=7.64422E-6
window_vset=0.0E0
window_vmon=2.35342E-1
window_imon=-9.38937E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39064E-4
mask2_vset=0.0E0
mask2_vmon=-1.86562E1
mask2_imon=-5.49708E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92615E3
multa_neg_imon=7.23543E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.95828E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.4466E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.4969E0
defgridb_imon=6.15651E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33825E1
os_fil1_imon=3.40112E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.76876E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6201E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30661E1
cs_fil1_imon=9.97354E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64038E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62419E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.31252E-2
os_fil2_imon=-2.45408E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.34229E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.40806E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29893E-1
cs_fil2_imon=-2.56033E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.53327E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21543E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.51225E-3
foreline_cvt_pmon=2.51225E-3
chamber_tmon=1.40071E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.91665E-1
res40_imon=-2.39519E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=414
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.1718E-1	-7.98559E-1	-9.13124E0	-9.14173E0	4.55379E-3	9.38654E-2	2.73177E1	-3.26771E1	-3.2644E1	2.68256E1	1.1987E-7	2.51752E-3	2.51752E-3	6.31761E-3	2.99421E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09611E0	-8.17227E-1	-7.98941E-1	-9.13131E0	-9.14176E0	4.57764E-3	9.38892E-2	2.72975E1	-3.26985E1	-3.25577E1	2.68109E1	1.19851E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.02511E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09665E0	-8.17013E-1	-7.99084E-1	-9.13141E0	-9.14183E0	4.45843E-3	9.36985E-2	2.72877E1	-3.26609E1	-3.26092E1	2.68028E1	1.19961E-7	2.51819E-3	2.51819E-3	6.3074E-3	3.02225E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09634E0	-8.16989E-1	-7.98988E-1	-9.13141E0	-9.14152E0	4.26769E-3	9.35555E-2	2.73247E1	-3.26696E1	-3.26372E1	2.68485E1	1.20055E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.02253E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09588E0	-8.16989E-1	-7.98988E-1	-9.13141E0	-9.14178E0	4.26769E-3	9.38892E-2	2.73006E1	-3.26839E1	-3.26585E1	2.67693E1	1.19967E-7	2.52262E-3	2.52262E-3	6.33297E-3	3.00878E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.1737E-1	-7.98965E-1	-9.13126E0	-9.14176E0	4.52995E-3	9.40084E-2	2.72925E1	-3.26543E1	-3.26278E1	2.6781E1	1.20392E-7	2.52106E-3	2.52106E-3	6.31902E-3	3.00363E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.1706E-1	-7.98917E-1	-9.13131E0	-9.1418E0	4.43459E-3	9.408E-2	2.7203E1	-3.26783E1	-3.26476E1	2.68124E1	1.19705E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.16917E-1	-7.99131E-1	-9.13138E0	-9.14195E0	4.55379E-3	9.39369E-2	2.74126E1	-3.26777E1	-3.26248E1	2.67884E1	1.20017E-7	2.51007E-3	2.51007E-3	6.32386E-3	2.9978E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.16679E-1	-7.98821E-1	-9.13138E0	-9.14161E0	4.52995E-3	9.41277E-2	2.72662E1	-3.26726E1	-3.26284E1	2.68052E1	1.19861E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-8.16989E-1	-7.9875E-1	-9.13146E0	-9.14173E0	4.72069E-3	9.40084E-2	2.72727E1	-3.27233E1	-3.26338E1	2.6804E1	1.19595E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.00453E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09611E0	-8.1718E-1	-7.98774E-1	-9.13122E0	-9.14171E0	4.72069E-3	9.39369E-2	2.73399E1	-3.26338E1	-3.262E1	2.67649E1	1.20226E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.9952E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09634E0	-8.1687E-1	-7.98726E-1	-9.13112E0	-9.14168E0	4.57764E-3	9.38177E-2	2.73411E1	-3.26703E1	-3.26408E1	2.6786E1	1.19913E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.16822E-1	-7.98321E-1	-9.13107E0	-9.14185E0	4.43459E-3	9.39846E-2	2.72721E1	-3.26482E1	-3.26873E1	2.67908E1	1.20158E-7	2.51525E-3	2.51525E-3	6.29665E-3	3.01223E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0958E0	-8.17227E-1	-7.9813E-1	-9.13124E0	-9.14197E0	4.52995E-3	9.377E-2	2.73116E1	-3.26496E1	-3.26236E1	2.67897E1	1.20069E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.01609E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0968E0	-8.17442E-1	-7.98488E-1	-9.13117E0	-9.14197E0	4.24385E-3	9.38892E-2	2.73265E1	-3.26848E1	-3.26095E1	2.68064E1	1.20209E-7	2.51739E-3	2.51739E-3	6.29665E-3	3.03027E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.17132E-1	-7.98535E-1	-9.13074E0	-9.1418E0	4.55379E-3	9.39608E-2	2.72721E1	-3.26472E1	-3.26467E1	2.67902E1	1.20191E-7	2.51804E-3	2.51804E-3	6.32418E-3	3.00942E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09627E0	-8.17323E-1	-7.98202E-1	-9.13129E0	-9.14211E0	4.76837E-3	9.38416E-2	2.72732E1	-3.26738E1	-3.2662E1	2.68058E1	1.19953E-7	2.52384E-3	2.52384E-3	6.32896E-3	3.00197E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09696E0	-8.17299E-1	-7.98535E-1	-9.13124E0	-9.14171E0	4.57764E-3	9.35555E-2	2.73898E1	-3.26819E1	-3.26098E1	2.67956E1	1.19902E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.99941E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.16679E-1	-7.98631E-1	-9.13095E0	-9.14197E0	4.74453E-3	9.38416E-2	2.73346E1	-3.26608E1	-3.25995E1	2.68221E1	1.20226E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00824E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.17108E-1	-7.98607E-1	-9.1311E0	-9.14187E0	4.62532E-3	9.39846E-2	2.73003E1	-3.26909E1	-3.26392E1	2.67475E1	1.19965E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.00824E-1