[Scan]
initial_time=2016-01-27T22:53:47
final_time=2016-01-27T22:54:06
ip_count=19
run=1025
dataset=6
scan=420
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09595E0
qbias_imon=-1.08776E-4
ql1_vset=
ql1_vmon=-8.1687E-1
ql1_imon=7.95019E-10
ql2_vset=
ql2_vmon=-7.98559E-1
ql2_imon=3.01921E-10
ql3_vset=
ql3_vmon=-9.13148E0
ql3_imon=8.2258E-10
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=5.51021E-10
mult1=-8.8253E-9
mult2=-2.7246E-9
rf_tmon=-5.82222E-3
rf_agc=3.19757E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=3.77297E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64992E0
bslens_imon=2.41518E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19965E1
lens5a_imon=1.98632E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.05241E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53514E1
cs_ef1b_imon=2.76538E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02132E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04862E1
cs_ea1_imon=2.59519E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34312E0
lens1_imon=2.67474E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64524E1
os_ef1alow_imon=2.97297E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03846E1
cs_ea2_imon=1.53678E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84208E1
cs_ef1a_imon=2.90738E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=3.95668E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11129E1
os_restr1_imon=2.87674E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15035E1
os_ea1_imon=1.87745E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63689E1
os_ef1bup_imon=3.09659E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2551E0
cs_ionrep_imon=1.19863E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93337E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01959E1
cs_anode1_imon=2.89008E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20475E0
olens4_imon=7.51483E-10
tplens_vset=1.4E-1
tplens_vmon=1.65345E0
tplens_imon=-1.19098E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25809E1
iondef3_imon=1.50505E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26777E1
iondef2_imon=1.58797E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02931E2
lens6_imon=2.98522E-4
ql6_vset=1.0E-1
ql6_vmon=9.40561E-2
ql6_imon=3.54469E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29536E0
ionrepsh_imon=1.74911E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3388E1
lens5b_imon=2.19E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74766E1
cs_ef2b_imon=3.14164E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.19279E-1
os_ea2_imon=-4.97618E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.061E2
lens4b_imon=2.00695E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71143E1
cs_ef2a_imon=3.19389E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62278E0
os_ef2alow_imon=-2.5222E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.43364E-1
os_ef2bup_imon=-5.18192E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10829E1
os_restr2_imon=2.88251E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.29568E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01581E1
cs_anode2_imon=2.241E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73442E1
iondef1_imon=1.12005E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68526E1
iondef4_imon=1.09314E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=1.9941E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=2.75815E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14215E0
cs_ionaccel_imon=-1.59237E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47367E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56291E1
einzel_imon=7.79236E-6
window_vset=0.0E0
window_vmon=1.93917E-1
window_imon=-1.1671E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8261E2
mask1_imon=2.39217E-4
mask2_vset=0.0E0
mask2_vmon=-1.86692E1
mask2_imon=-3.88648E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92607E3
multa_neg_imon=7.87308E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.84928E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=6.97545E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.59982E0
defgridb_imon=6.32656E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33851E1
os_fil1_imon=4.77022E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.49121E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62169E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30662E1
cs_fil1_imon=9.97122E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64877E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62163E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.23448E-2
os_fil2_imon=-2.39567E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.11859E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.42794E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30299E-1
cs_fil2_imon=-2.13138E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04612E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21572E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.20069E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.31371E-1
res40_imon=-2.36362E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=205
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.16822E-1	-7.99417E-1	-9.13119E0	-9.14159E0	4.3869E-3	9.34601E-2	2.73027E1	-3.26478E1	-3.2636E1	2.67884E1	1.20069E-7	2.52538E-3	2.52538E-3	6.29645E-3	2.98481E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.16441E-1	-7.99036E-1	-9.13119E0	-9.14202E0	4.88758E-3	9.38416E-2	2.7233E1	-3.26272E1	-3.26645E1	2.67938E1	1.20209E-7	2.51417E-3	2.51417E-3	6.33436E-3	3.0071E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.16822E-1	-7.98702E-1	-9.13093E0	-9.14187E0	4.33922E-3	9.377E-2	2.73862E1	-3.26939E1	-3.25918E1	2.68328E1	1.20017E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.00302E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09619E0	-8.17037E-1	-7.98988E-1	-9.13115E0	-9.14183E0	4.60148E-3	9.35078E-2	2.7215E1	-3.26897E1	-3.2593E1	2.67908E1	1.20069E-7	2.51334E-3	2.51334E-3	6.31288E-3	2.9874E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.17156E-1	-7.98941E-1	-9.13091E0	-9.14185E0	4.52995E-3	9.36031E-2	2.73452E1	-3.26596E1	-3.26449E1	2.68346E1	1.19809E-7	2.51116E-3	2.51116E-3	6.30192E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-8.17013E-1	-7.98631E-1	-9.13119E0	-9.14207E0	4.50611E-3	9.38892E-2	2.72877E1	-3.26651E1	-3.26056E1	2.67782E1	1.20055E-7	2.52384E-3	2.52384E-3	6.31278E-3	2.9892E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.16393E-1	-7.98917E-1	-9.13105E0	-9.14202E0	4.64916E-3	9.37939E-2	2.72961E1	-3.26843E1	-3.26536E1	2.6789E1	1.20122E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-8.16822E-1	-7.98655E-1	-9.13112E0	-9.14211E0	4.60148E-3	9.39131E-2	2.72949E1	-3.26753E1	-3.26404E1	2.67938E1	1.2026E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.00197E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.16917E-1	-7.98917E-1	-9.131E0	-9.1424E0	4.86374E-3	9.39131E-2	2.73021E1	-3.26536E1	-3.26164E1	2.6795E1	1.20084E-7	2.51804E-3	2.51804E-3	6.29624E-3	3.02545E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-8.16655E-1	-7.98535E-1	-9.13115E0	-9.14226E0	4.50611E-3	9.39846E-2	2.73015E1	-3.26939E1	-3.26482E1	2.68034E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00041E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.16727E-1	-7.98631E-1	-9.13107E0	-9.14211E0	4.60148E-3	9.40561E-2	2.73122E1	-3.26508E1	-3.26219E1	2.68134E1	1.19953E-7	2.52169E-3	2.52169E-3	6.31817E-3	2.9892E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.16894E-1	-7.98893E-1	-9.13115E0	-9.14197E0	4.57764E-3	9.36747E-2	2.72532E1	-3.26679E1	-3.26408E1	2.68262E1	1.19861E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.99E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09418E0	-8.16941E-1	-7.98941E-1	-9.13115E0	-9.14214E0	4.93526E-3	9.377E-2	2.73423E1	-3.26874E1	-3.26408E1	2.68046E1	1.20106E-7	2.51739E-3	2.51739E-3	6.35601E-3	3.00966E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09433E0	-8.1656E-1	-7.9906E-1	-9.13129E0	-9.14197E0	4.41074E-3	9.39608E-2	2.72907E1	-3.26446E1	-3.25948E1	2.6807E1	1.19902E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.99686E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.16655E-1	-7.99084E-1	-9.131E0	-9.14204E0	5.17368E-3	9.42945E-2	2.72962E1	-3.26762E1	-3.26071E1	2.68707E1	1.20055E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.99941E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09379E0	-8.16751E-1	-7.98607E-1	-9.1311E0	-9.14211E0	4.8399E-3	9.38416E-2	2.74126E1	-3.2644E1	-3.26302E1	2.67872E1	1.20122E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.01085E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.16464E-1	-7.98726E-1	-9.13093E0	-9.14214E0	4.74453E-3	9.38654E-2	2.72721E1	-3.26567E1	-3.26597E1	2.67926E1	1.19965E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.02396E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-8.16584E-1	-7.98512E-1	-9.13117E0	-9.14197E0	4.69685E-3	9.40323E-2	2.73248E1	-3.27233E1	-3.25756E1	2.68163E1	1.20069E-7	2.51443E-3	2.51443E-3	6.28006E-3	3.02396E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.16488E-1	-7.98845E-1	-9.13126E0	-9.14154E0	4.52995E-3	9.36985E-2	2.73051E1	-3.26801E1	-3.26428E1	2.68136E1	1.19841E-7	2.52025E-3	2.52025E-3	6.29684E-3	3.006E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09595E0	-8.1687E-1	-7.98559E-1	-9.13148E0	-9.14192E0	4.62532E-3	9.40561E-2	2.73442E1	-3.26777E1	-3.25809E1	2.68526E1	1.20069E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00302E-1