[Scan]
initial_time=2016-01-27T22:54:40
final_time=2016-01-27T22:54:59
ip_count=19
run=1025
dataset=6
scan=422
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09364E0
qbias_imon=-1.08702E-4
ql1_vset=
ql1_vmon=-8.16655E-1
ql1_imon=7.4892E-10
ql2_vset=
ql2_vmon=-7.99108E-1
ql2_imon=3.4852E-10
ql3_vset=
ql3_vmon=-9.13138E0
ql3_imon=7.68363E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=5.44262E-10
mult1=-9.3575E-9
mult2=-2.82909E-9
rf_tmon=-4.24992E-3
rf_agc=3.27369E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=3.97551E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6963E0
bslens_imon=2.71669E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19848E1
lens5a_imon=1.98156E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12505E2
lens4a_imon=2.0504E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5382E1
cs_ef1b_imon=2.73979E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02146E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05212E1
cs_ea1_imon=2.58963E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35014E0
lens1_imon=2.70961E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64512E1
os_ef1alow_imon=3.00072E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04162E1
cs_ea2_imon=1.50905E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8422E1
cs_ef1a_imon=2.88431E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=4.01926E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10955E1
os_restr1_imon=2.89296E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15341E1
os_ea1_imon=1.89661E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63617E1
os_ef1bup_imon=3.07893E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27215E0
cs_ionrep_imon=1.18696E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93544E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01779E1
cs_anode1_imon=2.89332E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20492E0
olens4_imon=7.54797E-10
tplens_vset=1.4E-1
tplens_vmon=1.60368E0
tplens_imon=-2.2456E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26455E1
iondef3_imon=1.50728E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26927E1
iondef2_imon=1.56709E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02927E2
lens6_imon=2.98417E-4
ql6_vset=1.0E-1
ql6_vmon=9.39369E-2
ql6_imon=3.62647E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24266E0
ionrepsh_imon=1.73946E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34071E1
lens5b_imon=2.19392E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74838E1
cs_ef2b_imon=3.1265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.43367E-1
os_ea2_imon=-7.48392E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00594E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71017E1
cs_ef2a_imon=3.1838E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.66183E0
os_ef2alow_imon=-2.5222E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.01919E-1
os_ef2bup_imon=-5.29004E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10673E1
os_restr2_imon=2.87098E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23036E2
cs_ionfoca_imon=6.30636E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01557E1
cs_anode2_imon=2.24209E-5
iondef1_vset=2.763E1
iondef1_vmon=2.71553E1
iondef1_imon=1.08892E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68082E1
iondef4_imon=1.10864E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=1.99289E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=3.1085E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11452E0
cs_ionaccel_imon=-1.77978E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47421E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56333E1
einzel_imon=7.69505E-6
window_vset=0.0E0
window_vmon=2.5999E-1
window_imon=-1.11305E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.39099E-4
mask2_vset=0.0E0
mask2_vmon=-1.86927E1
mask2_imon=-6.51738E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=8.02226E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.472E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.501E3
multb_neg_imon=7.13741E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.42773E0
defgridb_imon=6.20301E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33858E1
os_fil1_imon=4.40982E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.64738E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62075E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3074E1
cs_fil1_imon=9.97537E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63915E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62545E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.01569E-2
os_fil2_imon=-2.36564E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.77932E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.5072E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29911E-1
cs_fil2_imon=-2.31758E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.20229E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21665E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.03286E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.19959E-1
res40_imon=-2.46453E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09402E0	-8.16655E-1	-7.98821E-1	-9.13136E0	-9.14218E0	4.673E-3	9.377E-2	2.72935E1	-3.26318E1	-3.26532E1	2.67821E1	1.19953E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.99686E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.16226E-1	-7.9875E-1	-9.13136E0	-9.14199E0	4.57764E-3	9.377E-2	2.73451E1	-3.26712E1	-3.26254E1	2.68244E1	1.20092E-7	2.52236E-3	2.52236E-3	6.32328E-3	3.01356E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09387E0	-8.16679E-1	-7.9906E-1	-9.13107E0	-9.14202E0	4.79221E-3	9.38177E-2	2.73868E1	-3.26541E1	-3.26004E1	2.68038E1	1.19991E-7	2.52131E-3	2.52131E-3	6.31269E-3	3.02875E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09379E0	-8.16631E-1	-7.98607E-1	-9.13126E0	-9.14178E0	4.95911E-3	9.41277E-2	2.72889E1	-3.26903E1	-3.26176E1	2.67722E1	1.20208E-7	2.52407E-3	2.52407E-3	6.31879E-3	3.02699E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09379E0	-8.16631E-1	-7.98774E-1	-9.13153E0	-9.14161E0	4.52995E-3	9.377E-2	2.72727E1	-3.26693E1	-3.26116E1	2.68232E1	1.20383E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.01609E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09402E0	-8.16679E-1	-7.98774E-1	-9.13122E0	-9.14192E0	4.62532E-3	9.3627E-2	2.72835E1	-3.26573E1	-3.26428E1	2.68064E1	1.20226E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.02922E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09387E0	-8.16631E-1	-7.99251E-1	-9.13124E0	-9.1419E0	3.98159E-3	9.38177E-2	2.72986E1	-3.26543E1	-3.26514E1	2.67984E1	1.2033E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.02396E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09394E0	-8.16512E-1	-7.99203E-1	-9.13138E0	-9.1419E0	4.57764E-3	9.39369E-2	2.72708E1	-3.26487E1	-3.26456E1	2.6802E1	1.20106E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.02769E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09418E0	-8.16774E-1	-7.99417E-1	-9.13105E0	-9.14207E0	4.52995E-3	9.35555E-2	2.73652E1	-3.2641E1	-3.26194E1	2.6803E1	1.20031E-7	2.52139E-3	2.52139E-3	6.27399E-3	3.00144E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09418E0	-8.16321E-1	-7.98821E-1	-9.13136E0	-9.14185E0	4.79221E-3	9.38416E-2	2.72847E1	-3.26146E1	-3.26554E1	2.67963E1	1.20174E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.97445E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.16917E-1	-7.98798E-1	-9.13115E0	-9.14192E0	4.45843E-3	9.39131E-2	2.73009E1	-3.27029E1	-3.26344E1	2.68148E1	1.20069E-7	2.5199E-3	2.5199E-3	6.33486E-3	2.99E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.17013E-1	-7.98631E-1	-9.13115E0	-9.14233E0	4.62532E-3	9.38177E-2	2.72907E1	-3.26705E1	-3.26374E1	2.67908E1	1.19913E-7	2.51225E-3	2.51225E-3	6.32386E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0941E0	-8.16989E-1	-7.9875E-1	-9.13122E0	-9.14221E0	4.41074E-3	9.37462E-2	2.72492E1	-3.26308E1	-3.27516E1	2.67873E1	1.20069E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09387E0	-8.16822E-1	-7.98821E-1	-9.13119E0	-9.14209E0	4.45843E-3	9.39608E-2	2.73075E1	-3.26726E1	-3.26119E1	2.68094E1	1.19749E-7	2.5131E-3	2.5131E-3	6.3074E-3	2.9943E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09348E0	-8.16822E-1	-7.98965E-1	-9.13124E0	-9.14209E0	4.86374E-3	9.36031E-2	2.73504E1	-3.2656E1	-3.26787E1	2.68232E1	1.20069E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09309E0	-8.16631E-1	-7.98512E-1	-9.1316E0	-9.14176E0	4.57764E-3	9.3627E-2	2.73051E1	-3.26461E1	-3.2629E1	2.67884E1	1.2033E-7	2.52099E-3	2.52099E-3	6.34037E-3	2.99E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09317E0	-8.16798E-1	-7.98583E-1	-9.13153E0	-9.14195E0	4.57764E-3	9.37462E-2	2.73339E1	-3.26578E1	-3.26511E1	2.67926E1	1.19913E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09364E0	-8.16607E-1	-7.98297E-1	-9.1315E0	-9.14233E0	4.50611E-3	9.36508E-2	2.73022E1	-3.26631E1	-3.26301E1	2.67864E1	1.2033E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.01085E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09426E0	-8.16822E-1	-7.98845E-1	-9.13148E0	-9.14199E0	4.19617E-3	9.377E-2	2.73748E1	-3.2647E1	-3.26014E1	2.68259E1	1.20106E-7	2.52923E-3	2.52923E-3	6.32356E-3	3.01738E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09364E0	-8.16655E-1	-7.99108E-1	-9.13138E0	-9.14195E0	4.76837E-3	9.39369E-2	2.71553E1	-3.26927E1	-3.26455E1	2.68082E1	1.19953E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.03286E-1