[Scan]
initial_time=2016-01-27T22:55:33
final_time=2016-01-27T22:55:53
ip_count=19
run=1025
dataset=6
scan=424
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08759E-4
ql1_vset=
ql1_vmon=-8.16607E-1
ql1_imon=7.30002E-10
ql2_vset=
ql2_vmon=-7.98988E-1
ql2_imon=2.95722E-10
ql3_vset=
ql3_vmon=-9.13115E0
ql3_imon=7.64239E-10
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=5.0683E-10
mult1=-9.9812E-9
mult2=-2.66871E-9
rf_tmon=-5.23942E-3
rf_agc=3.2883E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.60148E-3
ql5_imon=3.7986E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67208E0
bslens_imon=2.43385E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19822E1
lens5a_imon=1.97454E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.0501E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53634E1
cs_ef1b_imon=2.74268E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02194E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04988E1
cs_ea1_imon=2.59017E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3546E0
lens1_imon=2.57985E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64837E1
os_ef1alow_imon=2.98486E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03881E1
cs_ea2_imon=1.5188E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84292E1
cs_ef1a_imon=2.89909E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=4.071E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11304E1
os_restr1_imon=2.88431E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15543E1
os_ea1_imon=1.90571E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63761E1
os_ef1bup_imon=3.0901E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20633E0
cs_ionrep_imon=1.18231E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93368E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01737E1
cs_anode1_imon=2.89584E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20456E0
olens4_imon=7.47979E-10
tplens_vset=1.4E-1
tplens_vmon=1.63158E0
tplens_imon=-2.60206E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26254E1
iondef3_imon=1.50177E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26831E1
iondef2_imon=1.59111E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02943E2
lens6_imon=2.98464E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=4.09663E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29671E0
ionrepsh_imon=1.73224E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33675E1
lens5b_imon=2.1845E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74669E1
cs_ef2b_imon=3.13479E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.20824E-1
os_ea2_imon=-5.8697E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.00647E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7133E1
cs_ef2a_imon=3.18488E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62098E0
os_ef2alow_imon=-2.6159E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.58381E-1
os_ef2bup_imon=-5.22157E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10841E1
os_restr2_imon=2.86665E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23034E2
cs_ionfoca_imon=6.30693E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01887E1
cs_anode2_imon=2.24136E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73141E1
iondef1_imon=1.0961E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67968E1
iondef4_imon=1.08125E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=1.99635E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=2.75135E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10191E0
cs_ionaccel_imon=-1.75095E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47273E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56357E1
einzel_imon=7.84641E-6
window_vset=0.0E0
window_vmon=1.50069E-1
window_imon=-1.21756E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82613E2
mask1_imon=2.39127E-4
mask2_vset=0.0E0
mask2_vmon=-1.8659E1
mask2_imon=-4.85955E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92607E3
multa_neg_imon=7.67597E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.58097E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.1754E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.53151E0
defgridb_imon=6.19511E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33863E1
os_fil1_imon=5.02249E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.52124E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62122E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30764E1
cs_fil1_imon=9.96852E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61843E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62533E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.04102E-2
os_fil2_imon=-2.56386E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.71925E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.47923E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3263E-1
cs_fil2_imon=-2.77409E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.5747E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21686E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=3.01347E-1
chamber_ion_pmon=1.20174E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.98335E-1
res40_imon=-2.37083E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09348E0	-8.1625E-1	-7.98917E-1	-9.1315E0	-9.14176E0	4.55379E-3	9.35793E-2	2.73588E1	-3.2659E1	-3.26732E1	2.68007E1	1.198E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.00966E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09387E0	-8.16393E-1	-7.98678E-1	-9.13155E0	-9.1418E0	4.88758E-3	9.36031E-2	2.73472E1	-3.26723E1	-3.26248E1	2.67836E1	1.198E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-8.16321E-1	-7.98631E-1	-9.13122E0	-9.14178E0	4.57764E-3	9.37223E-2	2.7269E1	-3.26627E1	-3.26272E1	2.68142E1	1.20017E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00824E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.16298E-1	-7.98392E-1	-9.13126E0	-9.1418E0	4.88758E-3	9.36985E-2	2.73163E1	-3.26614E1	-3.26526E1	2.68128E1	1.19902E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.9943E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.16083E-1	-7.9875E-1	-9.13131E0	-9.14164E0	4.86374E-3	9.37939E-2	2.73454E1	-3.27011E1	-3.25785E1	2.68064E1	1.20158E-7	2.52169E-3	2.52169E-3	6.32356E-3	2.99175E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.16202E-1	-7.98488E-1	-9.13093E0	-9.14156E0	4.57764E-3	9.377E-2	2.73099E1	-3.26464E1	-3.26398E1	2.6825E1	1.19965E-7	2.52757E-3	2.52757E-3	6.32386E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-8.16154E-1	-7.98583E-1	-9.13124E0	-9.14209E0	4.48227E-3	9.34839E-2	2.72709E1	-3.26867E1	-3.26386E1	2.67878E1	1.19861E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-8.16369E-1	-7.9844E-1	-9.13124E0	-9.14223E0	4.55379E-3	9.35555E-2	2.72967E1	-3.26645E1	-3.2614E1	2.67926E1	1.20226E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.02396E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0941E0	-8.16369E-1	-7.98583E-1	-9.13095E0	-9.14187E0	4.79221E-3	9.36985E-2	2.73111E1	-3.26579E1	-3.26044E1	2.68172E1	1.20383E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.9952E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09402E0	-8.16369E-1	-7.98535E-1	-9.13136E0	-9.14195E0	4.33922E-3	9.39608E-2	2.72603E1	-3.26697E1	-3.26124E1	2.68016E1	1.19861E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.98222E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.16154E-1	-7.98512E-1	-9.13103E0	-9.14202E0	4.50611E-3	9.36985E-2	2.73081E1	-3.26621E1	-3.265E1	2.68292E1	1.19646E-7	2.51417E-3	2.51417E-3	6.3074E-3	2.98665E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.16607E-1	-7.98512E-1	-9.13076E0	-9.14195E0	4.45843E-3	9.40084E-2	2.73151E1	-3.26596E1	-3.26006E1	2.68094E1	1.20069E-7	2.52538E-3	2.52538E-3	6.31288E-3	2.9874E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09394E0	-8.16607E-1	-7.98583E-1	-9.13138E0	-9.14166E0	4.95911E-3	9.39369E-2	2.73306E1	-3.27007E1	-3.25663E1	2.68167E1	1.20278E-7	2.5199E-3	2.5199E-3	6.34037E-3	3.00824E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09387E0	-8.16274E-1	-7.98821E-1	-9.13126E0	-9.14173E0	4.72069E-3	9.38892E-2	2.73069E1	-3.26536E1	-3.26951E1	2.67923E1	1.20394E-7	2.52448E-3	2.52448E-3	6.33388E-3	3.03383E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.16655E-1	-7.98655E-1	-9.13146E0	-9.14164E0	4.45843E-3	9.36985E-2	2.73032E1	-3.26788E1	-3.25796E1	2.68169E1	1.20174E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.02922E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-8.16655E-1	-7.98607E-1	-9.13105E0	-9.14204E0	4.95911E-3	9.38177E-2	2.73346E1	-3.26927E1	-3.26266E1	2.67992E1	1.201E-7	2.51952E-3	2.51952E-3	6.29035E-3	3.01065E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09426E0	-8.16393E-1	-7.98583E-1	-9.13126E0	-9.14192E0	4.91142E-3	9.38416E-2	2.73321E1	-3.26561E1	-3.26284E1	2.68053E1	1.20278E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01347E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09387E0	-8.16202E-1	-7.9906E-1	-9.13105E0	-9.14199E0	4.98295E-3	9.36747E-2	2.7312E1	-3.26683E1	-3.26086E1	2.67833E1	1.20055E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.02769E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09426E0	-8.16607E-1	-7.98821E-1	-9.13112E0	-9.14218E0	4.48227E-3	9.36985E-2	2.7311E1	-3.26844E1	-3.26531E1	2.68004E1	1.19941E-7	2.52025E-3	2.52025E-3	6.3074E-3	3.01862E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.16607E-1	-7.98988E-1	-9.13115E0	-9.14211E0	4.60148E-3	9.35555E-2	2.73141E1	-3.26831E1	-3.26254E1	2.67968E1	1.20174E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.01347E-1