[Scan]
initial_time=2016-01-27T22:56:00
final_time=2016-01-27T22:56:19
ip_count=19
run=1025
dataset=6
scan=425
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09402E0
qbias_imon=-1.08742E-4
ql1_vset=
ql1_vmon=-8.16059E-1
ql1_imon=6.90162E-10
ql2_vset=
ql2_vmon=-7.98798E-1
ql2_imon=3.09587E-10
ql3_vset=
ql3_vmon=-9.13124E0
ql3_imon=7.71141E-10
ql4_vset=
ql4_vmon=-9.1418E0
ql4_imon=5.23424E-10
mult1=-1.04628E-8
mult2=-2.65844E-9
rf_tmon=-5.21925E-3
rf_agc=3.29553E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.69685E-3
ql5_imon=3.81589E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63009E0
bslens_imon=2.27099E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19701E1
lens5a_imon=2.00542E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.04963E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53736E1
cs_ef1b_imon=2.75998E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.02341E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05018E1
cs_ea1_imon=2.57284E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34552E0
lens1_imon=2.80812E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64638E1
os_ef1alow_imon=2.98234E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03774E1
cs_ea2_imon=1.51803E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83769E1
cs_ef1a_imon=2.89404E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=4.14264E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11292E1
os_restr1_imon=2.87098E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1545E1
os_ea1_imon=1.87781E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63659E1
os_ef1bup_imon=3.0955E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24008E0
cs_ionrep_imon=1.18638E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91917E2
cs_nozzle_imon=1.93427E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01761E1
cs_anode1_imon=2.87782E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20475E0
olens4_imon=7.42519E-10
tplens_vset=1.4E-1
tplens_vmon=1.61079E0
tplens_imon=-4.36334E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26324E1
iondef3_imon=1.50109E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26399E1
iondef2_imon=1.58076E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.98479E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=4.11975E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3236E0
ionrepsh_imon=1.72712E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3382E1
lens5b_imon=2.19937E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74603E1
cs_ef2b_imon=3.13911E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.9825E-1
os_ea2_imon=-6.67051E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0612E2
lens4b_imon=2.00652E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71071E1
cs_ef2a_imon=3.18344E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61317E0
os_ef2alow_imon=-2.53301E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.09127E-1
os_ef2bup_imon=-5.30085E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10715E1
os_restr2_imon=2.86593E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23026E2
cs_ionfoca_imon=6.2982E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01761E1
cs_anode2_imon=2.25037E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72286E1
iondef1_imon=1.08868E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67966E1
iondef4_imon=1.0899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=1.95434E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=3.17669E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12654E0
cs_ionaccel_imon=-1.83384E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02056E2
cs_ionfocb_imon=1.47269E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=7.69505E-6
window_vset=0.0E0
window_vmon=2.5158E-1
window_imon=-8.39144E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39095E-4
mask2_vset=0.0E0
mask2_vmon=-1.87059E1
mask2_imon=-5.65243E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=7.06197E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9374E3
defgrida_imon=6.25085E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.26385E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.47952E0
defgridb_imon=6.30493E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33872E1
os_fil1_imon=5.44296E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.299E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62049E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30716E1
cs_fil1_imon=9.95807E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63003E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62426E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.09261E-2
os_fil2_imon=-2.55184E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.44005E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.43568E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30817E-1
cs_fil2_imon=-2.37164E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.09417E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21594E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.20209E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40038E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=2.56579E-1
res40_imon=-2.36362E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09394E0	-8.1594E-1	-7.98607E-1	-9.13124E0	-9.14204E0	4.45843E-3	9.40084E-2	2.73428E1	-3.26747E1	-3.26144E1	2.67949E1	1.19965E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.00302E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09441E0	-8.16298E-1	-7.98702E-1	-9.13148E0	-9.1418E0	4.91142E-3	9.38654E-2	2.73351E1	-3.26682E1	-3.26468E1	2.67995E1	1.19851E-7	2.52492E-3	2.52492E-3	6.31817E-3	2.99686E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-8.16035E-1	-7.98798E-1	-9.13134E0	-9.14185E0	4.3869E-3	9.39131E-2	2.72997E1	-3.26615E1	-3.26248E1	2.68064E1	1.20031E-7	2.51693E-3	2.51693E-3	6.3074E-3	3.01475E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.15773E-1	-7.98941E-1	-9.13117E0	-9.14171E0	4.86374E-3	9.3627E-2	2.72868E1	-3.2672E1	-3.25888E1	2.67914E1	1.20174E-7	2.52318E-3	2.52318E-3	6.28552E-3	3.00302E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09364E0	-8.16107E-1	-7.98821E-1	-9.13138E0	-9.14192E0	4.36306E-3	9.37223E-2	2.72715E1	-3.26609E1	-3.26308E1	2.68172E1	1.2026E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.0148E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.16178E-1	-7.98798E-1	-9.13138E0	-9.14202E0	4.69685E-3	9.36031E-2	2.72967E1	-3.26855E1	-3.25846E1	2.6798E1	1.20055E-7	2.52492E-3	2.52492E-3	6.28592E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.15845E-1	-7.98631E-1	-9.13134E0	-9.14152E0	4.673E-3	9.38892E-2	2.73039E1	-3.26554E1	-3.26416E1	2.6813E1	1.19925E-7	2.51693E-3	2.51693E-3	6.3074E-3	2.99613E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.16178E-1	-7.98965E-1	-9.13141E0	-9.14185E0	4.55379E-3	9.37939E-2	2.73051E1	-3.26609E1	-3.25846E1	2.68124E1	1.20209E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.00197E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.16441E-1	-7.98798E-1	-9.13143E0	-9.1423E0	4.48227E-3	9.39131E-2	2.73333E1	-3.26669E1	-3.25791E1	2.68304E1	1.20297E-7	2.51804E-3	2.51804E-3	6.32978E-3	3.00144E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-8.16417E-1	-7.98154E-1	-9.13136E0	-9.14228E0	4.74453E-3	9.38892E-2	2.72282E1	-3.26735E1	-3.26729E1	2.67902E1	1.19913E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.00302E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09387E0	-8.16631E-1	-7.9875E-1	-9.13124E0	-9.14199E0	4.673E-3	9.377E-2	2.73333E1	-3.26848E1	-3.25844E1	2.67908E1	1.20435E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.99E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09356E0	-8.15821E-1	-7.98559E-1	-9.13119E0	-9.14173E0	4.62532E-3	9.38892E-2	2.72961E1	-3.26148E1	-3.26338E1	2.68238E1	1.20174E-7	2.5188E-3	2.5188E-3	6.30192E-3	2.99E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09379E0	-8.16202E-1	-7.98202E-1	-9.13136E0	-9.14185E0	4.3869E-3	9.3627E-2	2.73763E1	-3.26979E1	-3.26877E1	2.6802E1	1.20078E-7	2.52093E-3	2.52093E-3	6.3074E-3	2.99753E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.16083E-1	-7.98559E-1	-9.13138E0	-9.14173E0	4.64916E-3	9.38177E-2	2.73381E1	-3.26885E1	-3.26482E1	2.68148E1	1.20116E-7	2.52222E-3	2.52222E-3	6.31321E-3	3.00639E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-8.16226E-1	-7.98678E-1	-9.13112E0	-9.14199E0	4.673E-3	9.36508E-2	2.72973E1	-3.27113E1	-3.25701E1	2.67824E1	1.20311E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.00453E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09418E0	-8.16464E-1	-7.98845E-1	-9.1311E0	-9.14195E0	4.62532E-3	9.39131E-2	2.73267E1	-3.26819E1	-3.26633E1	2.68358E1	1.20226E-7	2.52538E-3	2.52538E-3	6.29098E-3	3.03976E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09364E0	-8.16083E-1	-7.98512E-1	-9.13146E0	-9.14202E0	4.36306E-3	9.38416E-2	2.73231E1	-3.26851E1	-3.26677E1	2.68233E1	1.19913E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.01609E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09387E0	-8.16154E-1	-7.9844E-1	-9.13136E0	-9.14161E0	4.62532E-3	9.37462E-2	2.73124E1	-3.26407E1	-3.2615E1	2.67992E1	1.19902E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.00197E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-8.16298E-1	-7.98535E-1	-9.13131E0	-9.14149E0	4.79221E-3	9.38416E-2	2.7334E1	-3.26703E1	-3.25947E1	2.68184E1	1.19705E-7	2.52757E-3	2.52757E-3	6.33486E-3	3.01085E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09402E0	-8.16059E-1	-7.98798E-1	-9.13124E0	-9.1418E0	4.69685E-3	9.34362E-2	2.72286E1	-3.26399E1	-3.26324E1	2.67966E1	1.20209E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.99686E-1