[Scan]
initial_time=2016-01-27T22:56:27
final_time=2016-01-27T22:56:46
ip_count=19
run=1025
dataset=6
scan=426
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08715E-4
ql1_vset=
ql1_vmon=-8.15964E-1
ql1_imon=6.95157E-10
ql2_vset=
ql2_vmon=-7.9875E-1
ql2_imon=2.98965E-10
ql3_vset=
ql3_vmon=-9.13146E0
ql3_imon=8.01647E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=5.46002E-10
mult1=-9.5959E-9
mult2=-2.70863E-9
rf_tmon=-4.84889E-3
rf_agc=3.35859E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=3.71897E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67093E0
bslens_imon=2.7981E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19706E1
lens5a_imon=1.9812E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.05135E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53796E1
cs_ef1b_imon=2.74736E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04592E2
lens23_imon=1.021E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05265E1
cs_ea1_imon=2.56945E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34189E0
lens1_imon=2.745E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64626E1
os_ef1alow_imon=2.99279E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04404E1
cs_ea2_imon=1.54338E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84172E1
cs_ef1a_imon=2.88864E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=3.83937E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11153E1
os_restr1_imon=2.86773E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14946E1
os_ea1_imon=1.89661E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63575E1
os_ef1bup_imon=3.08505E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28985E0
cs_ionrep_imon=1.16218E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93409E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01995E1
cs_anode1_imon=2.89621E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=7.4048E-10
tplens_vset=1.4E-1
tplens_vmon=1.63317E0
tplens_imon=-4.12148E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26585E1
iondef3_imon=1.50338E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26621E1
iondef2_imon=1.56461E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02934E2
lens6_imon=2.98555E-4
ql6_vset=1.0E-1
ql6_vmon=9.37939E-2
ql6_imon=3.45874E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.21257E0
ionrepsh_imon=1.73061E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34094E1
lens5b_imon=2.17127E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74525E1
cs_ef2b_imon=3.13659E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.26259E-1
os_ea2_imon=-6.3867E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06147E2
lens4b_imon=2.00577E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71336E1
cs_ef2a_imon=3.18164E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60236E0
os_ef2alow_imon=-2.55463E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.29549E-1
os_ef2bup_imon=-5.18553E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10937E1
os_restr2_imon=2.8717E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23029E2
cs_ionfoca_imon=6.30388E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01839E1
cs_anode2_imon=2.2392E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73496E1
iondef1_imon=1.08573E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68505E1
iondef4_imon=1.09674E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=1.97412E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=2.64502E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10972E0
cs_ionaccel_imon=-1.87709E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47172E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56141E1
einzel_imon=7.74911E-6
window_vset=0.0E0
window_vmon=2.22148E-1
window_imon=-9.58075E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82614E2
mask1_imon=2.39246E-4
mask2_vset=0.0E0
mask2_vmon=-1.86861E1
mask2_imon=-7.45441E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92621E3
multa_neg_imon=7.1091E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.91797E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50152E3
multb_neg_imon=7.07724E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.46907E0
defgridb_imon=6.1216E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33879E1
os_fil1_imon=5.19068E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.4852E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62235E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30695E1
cs_fil1_imon=9.95951E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6287E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62339E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.34493E-2
os_fil2_imon=-2.40168E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.89945E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.45532E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31206E-1
cs_fil2_imon=-2.5098E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.69813E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21575E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29157E-3
inlet_lpb_pmon=3.02621E-1
chamber_ion_pmon=1.19891E-7
chamber_cvt_pmon=2.51603E-3
foreline_cvt_pmon=2.51603E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.19959E-1
res40_imon=-2.47174E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09302E0	-8.16584E-1	-7.98631E-1	-9.13119E0	-9.14171E0	4.86374E-3	9.36747E-2	2.7334E1	-3.26779E1	-3.2636E1	2.68001E1	1.20106E-7	2.51847E-3	2.51847E-3	6.33436E-3	2.9892E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09348E0	-8.16369E-1	-7.98655E-1	-9.13148E0	-9.14161E0	4.86374E-3	9.33886E-2	2.73314E1	-3.26413E1	-3.2615E1	2.68082E1	1.20004E-7	2.52599E-3	2.52599E-3	6.32356E-3	2.99175E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.15964E-1	-7.98607E-1	-9.13122E0	-9.14216E0	5.126E-3	9.377E-2	2.72833E1	-3.2626E1	-3.2672E1	2.68118E1	1.19861E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00563E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.16083E-1	-7.98798E-1	-9.13129E0	-9.14185E0	4.31538E-3	9.35793E-2	2.72402E1	-3.26813E1	-3.26627E1	2.67974E1	1.20106E-7	2.51954E-3	2.51954E-3	6.29665E-3	3.01995E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.16131E-1	-7.98726E-1	-9.13122E0	-9.14195E0	4.64916E-3	9.3627E-2	2.73517E1	-3.26649E1	-3.26083E1	2.68111E1	1.19913E-7	2.52099E-3	2.52099E-3	6.34037E-3	2.9874E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09426E0	-8.16083E-1	-7.99084E-1	-9.13155E0	-9.14199E0	4.673E-3	9.37939E-2	2.73155E1	-3.26747E1	-3.26266E1	2.68036E1	1.20414E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.97901E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.16083E-1	-7.98917E-1	-9.13141E0	-9.14195E0	4.8399E-3	9.39608E-2	2.72689E1	-3.26454E1	-3.26229E1	2.67998E1	1.19891E-7	2.52448E-3	2.52448E-3	6.2863E-3	2.98342E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.15964E-1	-7.98821E-1	-9.13141E0	-9.14166E0	4.91142E-3	9.37462E-2	2.72366E1	-3.26518E1	-3.26536E1	2.68036E1	1.19785E-7	2.52686E-3	2.52686E-3	6.29002E-3	3.00639E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.1594E-1	-7.98702E-1	-9.13134E0	-9.14164E0	4.93526E-3	9.36747E-2	2.72957E1	-3.26703E1	-3.2613E1	2.68148E1	1.198E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.01223E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.16035E-1	-7.98631E-1	-9.13124E0	-9.14178E0	4.41074E-3	9.32932E-2	2.73393E1	-3.26218E1	-3.2653E1	2.67938E1	1.19861E-7	2.52428E-3	2.52428E-3	6.3074E-3	3.00302E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.16464E-1	-7.98368E-1	-9.13153E0	-9.14185E0	4.86374E-3	9.36985E-2	2.72709E1	-3.26645E1	-3.26434E1	2.68088E1	1.20226E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.01347E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-8.16393E-1	-7.98655E-1	-9.13126E0	-9.1419E0	4.60148E-3	9.37223E-2	2.7301E1	-3.26508E1	-3.26325E1	2.68088E1	1.20158E-7	2.51203E-3	2.51203E-3	6.31817E-3	2.9892E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09588E0	-8.16274E-1	-7.98726E-1	-9.13138E0	-9.14211E0	4.76837E-3	9.38177E-2	2.73411E1	-3.26651E1	-3.25936E1	2.67824E1	1.19851E-7	2.52384E-3	2.52384E-3	6.31278E-3	3.00966E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09588E0	-8.15821E-1	-7.98821E-1	-9.13146E0	-9.14173E0	4.88758E-3	9.35793E-2	2.73435E1	-3.26512E1	-3.26398E1	2.68007E1	1.20137E-7	2.51248E-3	2.51248E-3	6.3074E-3	3.00942E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0958E0	-8.16083E-1	-7.98655E-1	-9.13122E0	-9.1419E0	4.76837E-3	9.36985E-2	2.72927E1	-3.26579E1	-3.26431E1	2.68142E1	1.19851E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.0071E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.16202E-1	-7.98631E-1	-9.13129E0	-9.14168E0	4.43459E-3	9.37223E-2	2.73081E1	-3.26873E1	-3.2629E1	2.68364E1	1.20069E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.9926E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.15678E-1	-7.98893E-1	-9.13134E0	-9.1418E0	4.43459E-3	9.38177E-2	2.72739E1	-3.2638E1	-3.26458E1	2.68142E1	1.20174E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.15988E-1	-7.98154E-1	-9.13131E0	-9.14192E0	4.64916E-3	9.37939E-2	2.73429E1	-3.26524E1	-3.26272E1	2.6804E1	1.19902E-7	2.5131E-3	2.5131E-3	6.31817E-3	2.99175E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.16011E-1	-7.98297E-1	-9.13138E0	-9.14216E0	4.62532E-3	9.35793E-2	2.73175E1	-3.27239E1	-3.25812E1	2.67848E1	1.19925E-7	2.52921E-3	2.52921E-3	6.30182E-3	3.0041E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.15964E-1	-7.9875E-1	-9.13146E0	-9.14195E0	4.72069E-3	9.37939E-2	2.73496E1	-3.26621E1	-3.26585E1	2.68505E1	1.19891E-7	2.51603E-3	2.51603E-3	6.29157E-3	3.02621E-1