[Scan]
initial_time=2016-01-27T22:59:07
final_time=2016-01-27T22:59:26
ip_count=19
run=1025
dataset=6
scan=432
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08724E-4
ql1_vset=
ql1_vmon=-8.15773E-1
ql1_imon=6.74355E-10
ql2_vset=
ql2_vmon=-7.98798E-1
ql2_imon=3.11542E-10
ql3_vset=
ql3_vmon=-9.13143E0
ql3_imon=7.2118E-10
ql4_vset=
ql4_vmon=-9.14214E0
ql4_imon=5.4183E-10
mult1=-9.45141E-9
mult2=-2.6747E-9
rf_tmon=-5.04115E-3
rf_agc=3.32014E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=3.847E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65052E0
bslens_imon=2.60264E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19664E1
lens5a_imon=1.98559E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12462E2
lens4a_imon=2.04869E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53493E1
cs_ef1b_imon=2.74134E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.02298E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0518E1
cs_ea1_imon=2.56852E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34192E0
lens1_imon=2.70719E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64817E1
os_ef1alow_imon=2.98009E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04549E1
cs_ea2_imon=1.50289E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84064E1
cs_ef1a_imon=2.87618E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=4.01759E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11511E1
os_restr1_imon=2.88417E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15456E1
os_ea1_imon=1.9189E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63734E1
os_ef1bup_imon=3.084E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23287E0
cs_ionrep_imon=1.17809E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93672E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0167E1
cs_anode1_imon=2.88695E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20492E0
olens4_imon=7.056E-10
tplens_vset=1.4E-1
tplens_vmon=1.63963E0
tplens_imon=-3.35395E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2641E1
iondef3_imon=1.51911E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26326E1
iondef2_imon=1.57824E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02916E2
lens6_imon=2.98641E-4
ql6_vset=1.0E-1
ql6_vmon=9.38654E-2
ql6_imon=3.73876E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2563E0
ionrepsh_imon=1.74623E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33706E1
lens5b_imon=2.16116E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74611E1
cs_ef2b_imon=3.10798E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.95847E-1
os_ea2_imon=-6.63446E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00695E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71281E1
cs_ef2a_imon=3.2032E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62682E0
os_ef2alow_imon=-2.58153E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.47419E-1
os_ef2bup_imon=-5.29223E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10747E1
os_restr2_imon=2.8727E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23032E2
cs_ionfoca_imon=6.28739E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01798E1
cs_anode2_imon=2.24333E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73039E1
iondef1_imon=1.09265E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67944E1
iondef4_imon=1.08955E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=1.97457E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=2.75326E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12377E0
cs_ionaccel_imon=-1.71967E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02067E2
cs_ionfocb_imon=1.47285E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56411E1
einzel_imon=7.62876E-6
window_vset=0.0E0
window_vmon=2.13631E-1
window_imon=-1.09412E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82665E2
mask1_imon=2.39032E-4
mask2_vset=0.0E0
mask2_vmon=-1.86553E1
mask2_imon=-5.97163E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.63876E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.26167E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.24222E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.54268E0
defgridb_imon=6.17155E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33855E1
os_fil1_imon=4.54196E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.33954E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62147E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30701E1
cs_fil1_imon=9.97729E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62922E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62036E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.23448E-2
os_fil2_imon=-2.61706E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.42354E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.55813E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30526E-1
cs_fil2_imon=-2.56493E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.33493E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21586E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.35601E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.24657E-1
res40_imon=-2.4599E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09333E0	-8.16154E-1	-7.98702E-1	-9.13138E0	-9.14195E0	4.36306E-3	9.36747E-2	2.72939E1	-3.27009E1	-3.25995E1	2.67842E1	1.2033E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.9874E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09379E0	-8.16226E-1	-7.98321E-1	-9.13141E0	-9.14168E0	4.69685E-3	9.35316E-2	2.73341E1	-3.267E1	-3.2633E1	2.68215E1	1.19953E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.99686E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09364E0	-8.15797E-1	-7.98368E-1	-9.13131E0	-9.14199E0	4.72069E-3	9.36985E-2	2.72826E1	-3.26616E1	-3.26429E1	2.68001E1	1.19941E-7	2.51603E-3	2.51603E-3	6.33919E-3	3.00852E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-8.16178E-1	-7.98559E-1	-9.13119E0	-9.14223E0	4.50611E-3	9.38654E-2	2.7346E1	-3.26903E1	-3.25966E1	2.68136E1	1.20045E-7	2.51838E-3	2.51838E-3	6.3074E-3	3.01065E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09387E0	-8.16321E-1	-7.98273E-1	-9.13115E0	-9.14173E0	4.62532E-3	9.3627E-2	2.73466E1	-3.26729E1	-3.26284E1	2.6783E1	1.20226E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.98481E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09426E0	-8.16441E-1	-7.98297E-1	-9.13131E0	-9.14178E0	4.31538E-3	9.37223E-2	2.72892E1	-3.26966E1	-3.25964E1	2.68059E1	1.19913E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-8.16536E-1	-7.98011E-1	-9.13167E0	-9.14197E0	4.22001E-3	9.37223E-2	2.73027E1	-3.26689E1	-3.2634E1	2.68172E1	1.20127E-7	2.51575E-3	2.51575E-3	6.29703E-3	3.01733E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.16226E-1	-7.98464E-1	-9.13155E0	-9.14161E0	4.22001E-3	9.35555E-2	2.72612E1	-3.2644E1	-3.2626E1	2.68472E1	1.20297E-7	2.51804E-3	2.51804E-3	6.29624E-3	3.00144E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-8.16345E-1	-7.98154E-1	-9.13138E0	-9.14187E0	4.3869E-3	9.377E-2	2.73117E1	-3.26386E1	-3.26254E1	2.68064E1	1.20226E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.01347E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.16131E-1	-7.98798E-1	-9.13117E0	-9.14211E0	4.64916E-3	9.38416E-2	2.72534E1	-3.26629E1	-3.26227E1	2.68356E1	1.20209E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.02769E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09426E0	-8.15988E-1	-7.98368E-1	-9.13122E0	-9.14207E0	4.24385E-3	9.37223E-2	2.73255E1	-3.26717E1	-3.26386E1	2.67692E1	1.20356E-7	2.51447E-3	2.51447E-3	6.3074E-3	3.00635E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.15892E-1	-7.98678E-1	-9.13134E0	-9.14168E0	4.673E-3	9.38892E-2	2.7269E1	-3.26783E1	-3.26326E1	2.67688E1	1.19965E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0934E0	-8.16035E-1	-7.98416E-1	-9.13143E0	-9.14199E0	4.76837E-3	9.38416E-2	2.72787E1	-3.2632E1	-3.25713E1	2.68007E1	1.19913E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09402E0	-8.16131E-1	-7.98535E-1	-9.13143E0	-9.14178E0	4.60148E-3	9.37939E-2	2.73761E1	-3.26585E1	-3.26334E1	2.68076E1	1.20122E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.00563E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09402E0	-8.16154E-1	-7.98535E-1	-9.13117E0	-9.14199E0	4.69685E-3	9.35793E-2	2.7248E1	-3.26524E1	-3.26609E1	2.68046E1	1.20137E-7	2.51693E-3	2.51693E-3	6.33538E-3	3.0041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.15868E-1	-7.98392E-1	-9.13138E0	-9.14207E0	4.48227E-3	9.377E-2	2.72732E1	-3.26667E1	-3.26248E1	2.68526E1	1.19913E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00563E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09402E0	-8.15845E-1	-7.98869E-1	-9.13126E0	-9.14211E0	4.673E-3	9.37223E-2	2.73664E1	-3.26868E1	-3.2616E1	2.67943E1	1.20517E-7	2.51203E-3	2.51203E-3	6.31278E-3	3.00966E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.16035E-1	-7.98821E-1	-9.13134E0	-9.14223E0	4.50611E-3	9.39608E-2	2.72991E1	-3.26368E1	-3.26819E1	2.67944E1	1.20158E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.00197E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.15916E-1	-7.98678E-1	-9.13124E0	-9.14207E0	4.93526E-3	9.39846E-2	2.72367E1	-3.26632E1	-3.26354E1	2.6822E1	1.20017E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.9978E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.15773E-1	-7.98798E-1	-9.13143E0	-9.14214E0	4.86374E-3	9.38654E-2	2.73039E1	-3.26326E1	-3.2641E1	2.67944E1	1.19902E-7	2.51954E-3	2.51954E-3	6.35601E-3	3.00966E-1