[Scan]
initial_time=2016-01-27T23:00:00
final_time=2016-01-27T23:00:19
ip_count=19
run=1025
dataset=6
scan=434
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08716E-4
ql1_vset=
ql1_vmon=-8.16512E-1
ql1_imon=6.66392E-10
ql2_vset=
ql2_vmon=-7.98178E-1
ql2_imon=2.96175E-10
ql3_vset=
ql3_vmon=-9.13122E0
ql3_imon=6.67894E-10
ql4_vset=
ql4_vmon=-9.14166E0
ql4_imon=5.37431E-10
mult1=-9.83585E-9
mult2=-2.85477E-9
rf_tmon=-5.01068E-3
rf_agc=3.21384E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=3.89671E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68536E0
bslens_imon=2.70358E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19833E1
lens5a_imon=1.99857E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12462E2
lens4a_imon=2.04974E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5367E1
cs_ef1b_imon=2.74808E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.02193E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05204E1
cs_ea1_imon=2.59195E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38818E0
lens1_imon=2.70719E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64554E1
os_ef1alow_imon=2.99531E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03696E1
cs_ea2_imon=1.53281E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84316E1
cs_ef1a_imon=2.88395E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=3.89576E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11496E1
os_restr1_imon=2.87422E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14957E1
os_ea1_imon=1.88213E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63611E1
os_ef1bup_imon=3.09334E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26772E0
cs_ionrep_imon=1.21089E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91904E2
cs_nozzle_imon=1.93575E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01803E1
cs_anode1_imon=2.89981E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20451E0
olens4_imon=7.16841E-10
tplens_vset=1.4E-1
tplens_vmon=1.63903E0
tplens_imon=-1.58753E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26086E1
iondef3_imon=1.48811E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26532E1
iondef2_imon=1.57535E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02931E2
lens6_imon=2.98288E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=3.50177E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28815E0
ionrepsh_imon=1.74046E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3379E1
lens5b_imon=2.17954E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74802E1
cs_ef2b_imon=3.13154E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.26489E-1
os_ea2_imon=-4.86804E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00598E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7121E1
cs_ef2a_imon=3.18596E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62278E0
os_ef2alow_imon=-2.49697E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.28348E-1
os_ef2bup_imon=-5.34771E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10787E1
os_restr2_imon=2.86809E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.2863E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01695E1
cs_anode2_imon=2.23884E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72674E1
iondef1_imon=1.09553E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68047E1
iondef4_imon=1.09891E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=1.97245E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=2.71428E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13194E0
cs_ionaccel_imon=-1.69328E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02109E2
cs_ionfocb_imon=1.47305E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56345E1
einzel_imon=7.6518E-6
window_vset=0.0E0
window_vmon=2.29356E-1
window_imon=-9.29243E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.86746E1
mask2_imon=-7.13005E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9266E3
multa_neg_imon=7.78656E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.41308E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.14488E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.48553E0
defgridb_imon=6.11387E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3386E1
os_fil1_imon=4.82427E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.61735E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62278E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30727E1
cs_fil1_imon=9.97441E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63633E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62545E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.1442E-2
os_fil2_imon=-2.49178E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.47899E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.30678E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30299E-1
cs_fil2_imon=-2.5098E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.62024E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21677E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.98819E-1
chamber_ion_pmon=1.20137E-7
chamber_cvt_pmon=2.51136E-3
foreline_cvt_pmon=2.51136E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.04942E-1
res40_imon=-2.50057E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=199
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09387E0	-8.16011E-1	-7.9844E-1	-9.13124E0	-9.1419E0	4.31538E-3	9.34839E-2	2.73552E1	-3.26632E1	-3.26036E1	2.67989E1	1.19913E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.98222E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09387E0	-8.15701E-1	-7.9844E-1	-9.13117E0	-9.14152E0	4.57764E-3	9.36747E-2	2.72456E1	-3.26524E1	-3.2653E1	2.68046E1	1.19851E-7	2.51096E-3	2.51096E-3	6.31817E-3	2.9892E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09387E0	-8.15749E-1	-7.98416E-1	-9.13131E0	-9.14168E0	4.3869E-3	9.35793E-2	2.73027E1	-3.27041E1	-3.26561E1	2.67904E1	1.20278E-7	2.5199E-3	2.5199E-3	6.29645E-3	2.9926E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.15868E-1	-7.98845E-1	-9.13148E0	-9.14164E0	4.26769E-3	9.37223E-2	2.73718E1	-3.26735E1	-3.26362E1	2.67893E1	1.20278E-7	2.51116E-3	2.51116E-3	6.32386E-3	3.00041E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.16059E-1	-7.98321E-1	-9.13134E0	-9.14164E0	4.52995E-3	9.35793E-2	2.73151E1	-3.26449E1	-3.26543E1	2.67854E1	1.2026E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.03027E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.16035E-1	-7.98678E-1	-9.1315E0	-9.14183E0	4.74453E-3	9.34601E-2	2.72829E1	-3.26627E1	-3.26224E1	2.6795E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.16107E-1	-7.98607E-1	-9.13143E0	-9.14204E0	4.43459E-3	9.37462E-2	2.72811E1	-3.26603E1	-3.26627E1	2.67998E1	1.20017E-7	2.52099E-3	2.52099E-3	6.33486E-3	2.97963E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.15392E-1	-7.9844E-1	-9.13138E0	-9.1418E0	4.62532E-3	9.36747E-2	2.72673E1	-3.26413E1	-3.26189E1	2.6795E1	1.20004E-7	2.52169E-3	2.52169E-3	6.32896E-3	3.0071E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.15868E-1	-7.98965E-1	-9.13126E0	-9.14183E0	4.64916E-3	9.36508E-2	2.73222E1	-3.26652E1	-3.26083E1	2.68088E1	1.20069E-7	2.52209E-3	2.52209E-3	6.33486E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.16035E-1	-7.98488E-1	-9.13129E0	-9.14183E0	4.64916E-3	9.35316E-2	2.72618E1	-3.27051E1	-3.26465E1	2.68334E1	1.19978E-7	2.5147E-3	2.5147E-3	6.34661E-3	2.99613E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.16202E-1	-7.98345E-1	-9.13136E0	-9.14185E0	4.673E-3	9.36508E-2	2.72898E1	-3.2675E1	-3.26171E1	2.67952E1	1.20127E-7	2.52093E-3	2.52093E-3	6.3126E-3	3.00741E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.16202E-1	-7.98488E-1	-9.13165E0	-9.14192E0	4.79221E-3	9.377E-2	2.73243E1	-3.26681E1	-3.25797E1	2.68052E1	1.2006E-7	2.51642E-3	2.51642E-3	6.32483E-3	3.00916E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09364E0	-8.15868E-1	-7.98225E-1	-9.13138E0	-9.14221E0	4.95911E-3	9.34839E-2	2.73381E1	-3.26708E1	-3.26254E1	2.68274E1	1.20435E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00824E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.15773E-1	-7.98035E-1	-9.13143E0	-9.14202E0	4.95911E-3	9.37462E-2	2.73216E1	-3.2649E1	-3.26461E1	2.67937E1	1.20414E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.0148E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-8.16154E-1	-7.98631E-1	-9.13138E0	-9.14202E0	4.93526E-3	9.39369E-2	2.72498E1	-3.26645E1	-3.26549E1	2.68118E1	1.20106E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.99941E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.16107E-1	-7.98273E-1	-9.13138E0	-9.14168E0	5.05447E-3	9.33886E-2	2.73204E1	-3.26514E1	-3.26195E1	2.6801E1	1.20226E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.02659E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.1594E-1	-7.97844E-1	-9.13115E0	-9.14171E0	4.72069E-3	9.35793E-2	2.73393E1	-3.26726E1	-3.26201E1	2.68157E1	1.198E-7	2.51203E-3	2.51203E-3	6.31817E-3	3.00197E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.16131E-1	-7.98631E-1	-9.1311E0	-9.14171E0	4.43459E-3	9.39608E-2	2.73252E1	-3.2659E1	-3.2649E1	2.68209E1	1.20055E-7	2.51847E-3	2.51847E-3	6.33436E-3	2.99175E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.16369E-1	-7.98631E-1	-9.13146E0	-9.14164E0	4.52995E-3	9.38654E-2	2.73082E1	-3.26389E1	-3.26181E1	2.67976E1	1.20209E-7	2.51739E-3	2.51739E-3	6.29128E-3	2.9943E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.16512E-1	-7.98178E-1	-9.13122E0	-9.14166E0	4.76837E-3	9.36747E-2	2.72674E1	-3.26532E1	-3.26086E1	2.68047E1	1.20137E-7	2.51136E-3	2.51136E-3	6.3074E-3	2.98819E-1