[Scan]
initial_time=2016-01-27T23:00:53
final_time=2016-01-27T23:01:13
ip_count=19
run=1025
dataset=6
scan=436
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08766E-4
ql1_vset=
ql1_vmon=-8.16298E-1
ql1_imon=6.63924E-10
ql2_vset=
ql2_vmon=-7.98678E-1
ql2_imon=2.9887E-10
ql3_vset=
ql3_vmon=-9.13105E0
ql3_imon=6.69503E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=5.23949E-10
mult1=-9.51035E-9
mult2=-2.79635E-9
rf_tmon=-4.1339E-3
rf_agc=3.36043E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=3.83413E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63259E0
bslens_imon=2.70607E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19665E1
lens5a_imon=1.9943E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.0498E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53789E1
cs_ef1b_imon=2.74725E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.02241E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05082E1
cs_ea1_imon=2.57299E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35132E0
lens1_imon=2.46893E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64724E1
os_ef1alow_imon=2.98878E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04091E1
cs_ea2_imon=1.52639E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83827E1
cs_ef1a_imon=2.88278E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=3.79741E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11065E1
os_restr1_imon=2.88E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15353E1
os_ea1_imon=1.87325E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63751E1
os_ef1bup_imon=3.09095E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26449E0
cs_ionrep_imon=1.1728E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.93296E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01885E1
cs_anode1_imon=2.91302E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20449E0
olens4_imon=7.17223E-10
tplens_vset=1.4E-1
tplens_vmon=1.62551E0
tplens_imon=-3.4136E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26158E1
iondef3_imon=1.4963E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26738E1
iondef2_imon=1.60178E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02887E2
lens6_imon=2.98441E-4
ql6_vset=1.0E-1
ql6_vmon=9.41038E-2
ql6_imon=3.87788E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.34471E0
ionrepsh_imon=1.74052E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33799E1
lens5b_imon=2.19569E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74658E1
cs_ef2b_imon=3.11875E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.2331E-1
os_ea2_imon=-6.03276E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00481E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71374E1
cs_ef2a_imon=3.19382E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61118E0
os_ef2alow_imon=-2.62671E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.22513E-1
os_ef2bup_imon=-5.33393E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11065E1
os_restr2_imon=2.86193E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.2968E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01711E1
cs_anode2_imon=2.23638E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73114E1
iondef1_imon=1.10839E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68132E1
iondef4_imon=1.08156E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.96289E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=2.75087E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13072E0
cs_ionaccel_imon=-1.71619E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02096E2
cs_ionfocb_imon=1.47254E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56307E1
einzel_imon=7.82685E-6
window_vset=0.0E0
window_vmon=1.76562E-1
window_imon=-1.1671E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82618E2
mask1_imon=2.39289E-4
mask2_vset=0.0E0
mask2_vmon=-1.86738E1
mask2_imon=-7.18797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=7.54798E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.59588E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.19404E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.59014E0
defgridb_imon=6.00834E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33855E1
os_fil1_imon=4.25815E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.61177E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.624E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30704E1
cs_fil1_imon=9.95939E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63351E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62723E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.18031E-2
os_fil2_imon=-2.40854E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.6978E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.34521E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31649E-1
cs_fil2_imon=-2.37379E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28681E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2168E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40083E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.87008E-1
res40_imon=-2.4738E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.16035E-1	-7.9844E-1	-9.13131E0	-9.14235E0	4.60148E-3	9.377E-2	2.72915E1	-3.26537E1	-3.25953E1	2.68058E1					
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.16178E-1	-7.98249E-1	-9.13136E0	-9.14216E0	4.48227E-3	9.40084E-2	2.73472E1	-3.26536E1	-3.26206E1	2.68214E1	1.20243E-7	2.51919E-3	2.51919E-3	6.33388E-3	2.98092E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.16226E-1	-7.98202E-1	-9.13131E0	-9.14202E0	4.50611E-3	9.40084E-2	2.73171E1	-3.26747E1	-3.26518E1	2.67692E1	1.2051E-7	2.51804E-3	2.51804E-3	6.31299E-3	2.99613E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-8.16131E-1	-7.98726E-1	-9.13122E0	-9.14168E0	4.72069E-3	9.39846E-2	2.72408E1	-3.26703E1	-3.2659E1	2.67821E1	1.20004E-7	2.51096E-3	2.51096E-3	6.32896E-3	2.99686E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09387E0	-8.16107E-1	-7.98512E-1	-9.13098E0	-9.14202E0	4.69685E-3	9.36508E-2	2.73177E1	-3.26669E1	-3.26014E1	2.68058E1	1.20004E-7	2.52169E-3	2.52169E-3	6.30202E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09426E0	-8.16178E-1	-7.98464E-1	-9.13126E0	-9.14211E0	4.3869E-3	9.32693E-2	2.73021E1	-3.26446E1	-3.2599E1	2.68016E1	1.20137E-7	2.52027E-3	2.52027E-3	6.3074E-3	2.99613E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09333E0	-8.16131E-1	-7.98345E-1	-9.13112E0	-9.14216E0	4.8399E-3	9.34839E-2	2.73015E1	-3.26723E1	-3.26146E1	2.68148E1	1.20278E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09364E0	-8.16131E-1	-7.98392E-1	-9.13112E0	-9.14204E0	4.62532E-3	9.33409E-2	2.72835E1	-3.26801E1	-3.26008E1	2.68154E1	1.19749E-7	2.5131E-3	2.5131E-3	6.32356E-3	2.99686E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09348E0	-8.16154E-1	-7.98488E-1	-9.13119E0	-9.14178E0	4.88758E-3	9.36747E-2	2.72672E1	-3.2635E1	-3.26422E1	2.68142E1	1.19978E-7	2.51804E-3	2.51804E-3	6.32418E-3	3.00676E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09364E0	-8.16298E-1	-7.98512E-1	-9.13138E0	-9.14197E0	4.95911E-3	9.39608E-2	2.73116E1	-3.26402E1	-3.26124E1	2.67986E1	1.20004E-7	2.51417E-3	2.51417E-3	6.33977E-3	3.00453E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09426E0	-8.1594E-1	-7.98368E-1	-9.13124E0	-9.1418E0	4.62532E-3	9.3627E-2	2.7357E1	-3.26596E1	-3.26248E1	2.68082E1	1.20174E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.98222E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-8.15868E-1	-7.98535E-1	-9.13148E0	-9.14202E0	4.64916E-3	9.36747E-2	2.73123E1	-3.26663E1	-3.26506E1	2.68088E1	1.20192E-7	2.51814E-3	2.51814E-3	6.31269E-3	2.99845E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.15725E-1	-7.98345E-1	-9.13141E0	-9.14192E0	4.95911E-3	9.39846E-2	2.7269E1	-3.26338E1	-3.26074E1	2.68041E1	1.20084E-7	2.51693E-3	2.51693E-3	6.31299E-3	3.01475E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09379E0	-8.16083E-1	-7.98345E-1	-9.13134E0	-9.14211E0	5.05447E-3	9.38416E-2	2.72732E1	-3.26549E1	-3.26449E1	2.6813E1	1.19953E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.0148E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-8.1594E-1	-7.98416E-1	-9.13122E0	-9.14173E0	5.03063E-3	9.38654E-2	2.73566E1	-3.26663E1	-3.26087E1	2.68043E1	1.19705E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.16131E-1	-7.98655E-1	-9.13124E0	-9.14197E0	4.79221E-3	9.38654E-2	2.73195E1	-3.26428E1	-3.25972E1	2.68064E1	1.19967E-7	2.51549E-3	2.51549E-3	6.29211E-3	3.01853E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09348E0	-8.16059E-1	-7.98917E-1	-9.13119E0	-9.14204E0	5.126E-3	9.40323E-2	2.72331E1	-3.26378E1	-3.2593E1	2.6785E1	1.19809E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.9926E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09364E0	-8.16107E-1	-7.9844E-1	-9.13134E0	-9.14197E0	4.93526E-3	9.377E-2	2.72703E1	-3.26738E1	-3.2652E1	2.68232E1	1.20142E-7	2.51814E-3	2.51814E-3	6.33388E-3	3.00097E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.16393E-1	-7.98154E-1	-9.13124E0	-9.14192E0	4.98295E-3	9.36508E-2	2.73033E1	-3.26723E1	-3.26128E1	2.68106E1	1.19965E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.00302E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.16298E-1	-7.98678E-1	-9.13105E0	-9.14199E0	5.03063E-3	9.41038E-2	2.73114E1	-3.26738E1	-3.26158E1	2.68132E1	1.20055E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.01738E-1