[Scan]
initial_time=2016-01-27T23:03:07
final_time=2016-01-27T23:03:26
ip_count=19
run=1025
dataset=6
scan=441
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08753E-4
ql1_vset=
ql1_vmon=-8.16178E-1
ql1_imon=6.50382E-10
ql2_vset=
ql2_vmon=-7.98392E-1
ql2_imon=3.09575E-10
ql3_vset=
ql3_vmon=-9.13131E0
ql3_imon=6.39844E-10
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=5.4369E-10
mult1=-1.01132E-8
mult2=-2.71379E-9
rf_tmon=-4.61955E-3
rf_agc=3.2606E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=3.90303E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62009E0
bslens_imon=2.51612E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20057E1
lens5a_imon=1.98263E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12468E2
lens4a_imon=2.05024E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53749E1
cs_ef1b_imon=2.7484E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.02209E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05128E1
cs_ea1_imon=2.57999E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38337E0
lens1_imon=2.63063E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6479E1
os_ef1alow_imon=2.98233E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03856E1
cs_ea2_imon=1.51428E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84491E1
cs_ef1a_imon=2.90098E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=3.95536E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11441E1
os_restr1_imon=2.86906E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15325E1
os_ea1_imon=1.87384E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63694E1
os_ef1bup_imon=3.09287E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2521E0
cs_ionrep_imon=1.18449E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93336E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01867E1
cs_anode1_imon=2.88268E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20434E0
olens4_imon=7.35843E-10
tplens_vset=1.4E-1
tplens_vmon=1.65352E0
tplens_imon=-2.6266E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2678E1
iondef3_imon=1.51657E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2678E1
iondef2_imon=1.57955E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02929E2
lens6_imon=2.98395E-4
ql6_vset=1.0E-1
ql6_vmon=9.40323E-2
ql6_imon=3.68881E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.21584E0
ionrepsh_imon=1.73643E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33722E1
lens5b_imon=2.18722E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74579E1
cs_ef2b_imon=3.14269E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.98603E-1
os_ea2_imon=-5.10766E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00508E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71251E1
cs_ef2a_imon=3.18589E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62153E0
os_ef2alow_imon=-2.62282E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.46608E-1
os_ef2bup_imon=-5.38245E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11072E1
os_restr2_imon=2.87996E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.28821E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02049E1
cs_anode2_imon=2.24279E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72647E1
iondef1_imon=1.08983E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67812E1
iondef4_imon=1.08484E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.94687E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=2.81382E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13274E0
cs_ionaccel_imon=-1.77041E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47308E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56178E1
einzel_imon=7.67227E-6
window_vset=0.0E0
window_vmon=1.84787E-1
window_imon=-1.04644E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39189E-4
mask2_vset=0.0E0
mask2_vmon=-1.86707E1
mask2_imon=-4.47032E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92661E3
multa_neg_imon=7.87902E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9369E3
defgrida_imon=6.47436E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=6.98202E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.55152E0
defgridb_imon=6.04304E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33846E1
os_fil1_imon=4.93768E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.46766E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6211E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30638E1
cs_fil1_imon=9.9662E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64195E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62692E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.09564E-2
os_fil2_imon=-2.25007E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.09166E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.61098E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31889E-1
cs_fil2_imon=-1.87382E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.74038E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21564E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.20209E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40094E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.45861E-1
res40_imon=-2.49827E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.16202E-1	-7.98941E-1	-9.13138E0	-9.1418E0	5.10216E-3	9.37462E-2	2.71927E1	-3.26807E1	-3.26272E1	2.67944E1	1.20019E-7	2.51321E-3	2.51321E-3	6.31332E-3	3.01892E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.16512E-1	-7.98488E-1	-9.13088E0	-9.14192E0	4.81606E-3	9.38654E-2	2.73489E1	-3.26676E1	-3.26402E1	2.67903E1	1.20158E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.0071E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.16417E-1	-7.98225E-1	-9.13107E0	-9.14207E0	5.03063E-3	9.35555E-2	2.74062E1	-3.26553E1	-3.26292E1	2.68264E1	1.20325E-7	2.51783E-3	2.51783E-3	6.29703E-3	2.98522E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09588E0	-8.16202E-1	-7.98559E-1	-9.13126E0	-9.14221E0	4.69685E-3	9.35316E-2	2.73435E1	-3.26554E1	-3.26392E1	2.68334E1	1.20337E-7	2.5257E-3	2.5257E-3	6.32483E-3	2.9926E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.16083E-1	-7.98678E-1	-9.13155E0	-9.14216E0	4.8399E-3	9.34601E-2	2.72855E1	-3.2635E1	-3.25757E1	2.68144E1	1.20069E-7	2.51334E-3	2.51334E-3	6.34588E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09634E0	-8.16274E-1	-7.98535E-1	-9.13134E0	-9.14204E0	4.8399E-3	9.36031E-2	2.74018E1	-3.26539E1	-3.26299E1	2.68088E1	1.1993E-7	2.51783E-3	2.51783E-3	6.3074E-3	3.00494E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.16417E-1	-7.98392E-1	-9.13167E0	-9.1423E0	4.91142E-3	9.36508E-2	2.7263E1	-3.26609E1	-3.26146E1	2.6816E1	1.1995E-7	2.5118E-3	2.5118E-3	6.32483E-3	2.9871E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.16059E-1	-7.98464E-1	-9.13148E0	-9.14192E0	4.98295E-3	9.37223E-2	2.72196E1	-3.26372E1	-3.25865E1	2.67818E1	1.19965E-7	2.52428E-3	2.52428E-3	6.34037E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.16464E-1	-7.98368E-1	-9.13146E0	-9.14185E0	4.88758E-3	9.37223E-2	2.72991E1	-3.26422E1	-3.26188E1	2.67926E1	1.2033E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.16202E-1	-7.9844E-1	-9.13129E0	-9.14216E0	5.34058E-3	9.377E-2	2.72919E1	-3.26645E1	-3.26344E1	2.6831E1	1.20311E-7	2.51954E-3	2.51954E-3	6.2752E-3	3.00197E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.16226E-1	-7.98392E-1	-9.13134E0	-9.14218E0	5.22137E-3	9.37939E-2	2.72907E1	-3.26819E1	-3.26308E1	2.68046E1	1.19757E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.01609E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.15988E-1	-7.98273E-1	-9.13138E0	-9.14207E0	4.88758E-3	9.38416E-2	2.73694E1	-3.26651E1	-3.26482E1	2.68124E1	1.19965E-7	2.51116E-3	2.51116E-3	6.31837E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.1625E-1	-7.98607E-1	-9.13146E0	-9.14228E0	4.62532E-3	9.3627E-2	2.7209E1	-3.26128E1	-3.26567E1	2.67812E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.98481E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.15868E-1	-7.98082E-1	-9.13112E0	-9.14245E0	4.91142E-3	9.38654E-2	2.73027E1	-3.26644E1	-3.26301E1	2.68298E1	1.20435E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00302E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.16083E-1	-7.98512E-1	-9.13136E0	-9.14209E0	5.00679E-3	9.3627E-2	2.73718E1	-3.26633E1	-3.26434E1	2.67884E1	1.19953E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.0148E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.15916E-1	-7.98297E-1	-9.13115E0	-9.14192E0	4.69685E-3	9.36508E-2	2.72538E1	-3.26638E1	-3.26231E1	2.6807E1	1.19757E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.02396E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-8.15988E-1	-7.98321E-1	-9.13129E0	-9.1418E0	4.93526E-3	9.36508E-2	2.73562E1	-3.26765E1	-3.26338E1	2.68065E1	1.19913E-7	2.51771E-3	2.51771E-3	6.28552E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09603E0	-8.16345E-1	-7.98535E-1	-9.13146E0	-9.14192E0	4.98295E-3	9.32932E-2	2.72648E1	-3.26416E1	-3.26062E1	2.68124E1	1.19851E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.0148E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.15868E-1	-7.98249E-1	-9.13136E0	-9.1419E0	4.95911E-3	9.36031E-2	2.7341E1	-3.26706E1	-3.26052E1	2.67998E1	1.2033E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00563E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.16178E-1	-7.98392E-1	-9.13131E0	-9.1419E0	5.26905E-3	9.40323E-2	2.72647E1	-3.2678E1	-3.2678E1	2.67812E1	1.20209E-7	2.51632E-3	2.51632E-3	6.33977E-3	3.0071E-1