[Scan]
initial_time=2016-01-27T23:03:33
final_time=2016-01-27T23:03:53
ip_count=19
run=1025
dataset=6
scan=442
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09426E0
qbias_imon=-1.08821E-4
ql1_vset=
ql1_vmon=-8.15988E-1
ql1_imon=6.18207E-10
ql2_vset=
ql2_vmon=-7.98607E-1
ql2_imon=3.01409E-10
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=6.78194E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=5.37241E-10
mult1=-9.05407E-9
mult2=-2.68468E-9
rf_tmon=-4.47637E-3
rf_agc=3.28289E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.33922E-3
ql5_imon=4.01115E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65592E0
bslens_imon=2.59183E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20061E1
lens5a_imon=1.99064E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12465E2
lens4a_imon=2.05032E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53598E1
cs_ef1b_imon=2.76646E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.02139E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05048E1
cs_ea1_imon=2.56816E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36895E0
lens1_imon=2.51252E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64422E1
os_ef1alow_imon=2.97802E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03955E1
cs_ea2_imon=1.53029E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83793E1
cs_ef1a_imon=2.90089E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=4.05407E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1134E1
os_restr1_imon=2.86593E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15059E1
os_ea1_imon=1.89078E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63599E1
os_ef1bup_imon=3.08902E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24128E0
cs_ionrep_imon=1.19106E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91855E2
cs_nozzle_imon=1.9351E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01959E1
cs_anode1_imon=2.89765E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20451E0
olens4_imon=7.26795E-10
tplens_vset=1.4E-1
tplens_vmon=1.6186E0
tplens_imon=-2.41667E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26116E1
iondef3_imon=1.49568E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26705E1
iondef2_imon=1.57896E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02909E2
lens6_imon=2.98519E-4
ql6_vset=1.0E-1
ql6_vmon=9.37939E-2
ql6_imon=3.70502E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23287E0
ionrepsh_imon=1.7455E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33658E1
lens5b_imon=2.18639E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74471E1
cs_ef2b_imon=3.12001E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.55328E-1
os_ea2_imon=-4.83199E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00583E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71156E1
cs_ef2a_imon=3.18308E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61558E0
os_ef2alow_imon=-2.53661E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.19939E-1
os_ef2bup_imon=-5.29725E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10787E1
os_restr2_imon=2.86305E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.31046E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01581E1
cs_anode2_imon=2.24245E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72793E1
iondef1_imon=1.115E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68064E1
iondef4_imon=1.08701E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.99702E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=2.82681E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13615E0
cs_ionaccel_imon=-1.66445E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0211E2
cs_ionfocb_imon=1.47399E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56249E1
einzel_imon=7.71667E-6
window_vset=0.0E0
window_vmon=2.24551E-1
window_imon=-1.14909E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.86933E1
mask2_imon=-7.23817E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92669E3
multa_neg_imon=8.04612E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.66542E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.14849E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.6329E0
defgridb_imon=5.96606E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33875E1
os_fil1_imon=4.74018E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.37108E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62333E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30721E1
cs_fil1_imon=9.96912E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63928E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62397E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.1442E-2
os_fil2_imon=-2.59389E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.59912E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.60969E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30299E-1
cs_fil2_imon=-2.52181E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2083E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21502E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=3.00041E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.06744E-1
res40_imon=-2.56905E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.16154E-1	-7.97987E-1	-9.13153E0	-9.14218E0	4.79221E-3	9.36747E-2	2.72518E1	-3.26787E1	-3.2615E1	2.68366E1	1.20158E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.99175E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.16488E-1	-7.98011E-1	-9.13122E0	-9.14202E0	4.43459E-3	9.39131E-2	2.73473E1	-3.26529E1	-3.26162E1	2.6786E1	1.19991E-7	2.51709E-3	2.51709E-3	6.29684E-3	3.00852E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.16584E-1	-7.97772E-1	-9.13124E0	-9.14195E0	5.26905E-3	9.36985E-2	2.73051E1	-3.26624E1	-3.26294E1	2.68204E1	1.20031E-7	2.51915E-3	2.51915E-3	6.32418E-3	3.03887E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09603E0	-8.16202E-1	-7.98321E-1	-9.13141E0	-9.14197E0	4.81606E-3	9.36747E-2	2.73331E1	-3.26635E1	-3.26642E1	2.6792E1	1.19979E-7	2.5199E-3	2.5199E-3	6.30221E-3	3.01485E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09603E0	-8.16131E-1	-7.98726E-1	-9.13124E0	-9.14218E0	4.91142E-3	9.38892E-2	2.72953E1	-3.26523E1	-3.26383E1	2.68064E1	1.20019E-7	2.51439E-3	2.51439E-3	6.33706E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09611E0	-8.15797E-1	-7.98726E-1	-9.13146E0	-9.14209E0	4.76837E-3	9.39608E-2	2.72654E1	-3.26903E1	-3.25966E1	2.6807E1	1.19861E-7	2.51771E-3	2.51771E-3	6.34588E-3	2.9926E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.16083E-1	-7.98345E-1	-9.13126E0	-9.14159E0	5.10216E-3	9.38177E-2	2.73063E1	-3.2662E1	-3.26655E1	2.67885E1	1.19965E-7	2.51007E-3	2.51007E-3	6.34037E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.16011E-1	-7.98368E-1	-9.13115E0	-9.14185E0	4.72069E-3	9.36985E-2	2.73766E1	-3.26645E1	-3.25635E1	2.68052E1	1.20158E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.01738E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.16178E-1	-7.98345E-1	-9.13136E0	-9.14204E0	5.03063E-3	9.39369E-2	2.7248E1	-3.26633E1	-3.26104E1	2.681E1	1.20069E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.16059E-1	-7.98011E-1	-9.13131E0	-9.14168E0	4.76837E-3	9.39131E-2	2.73529E1	-3.26614E1	-3.26602E1	2.6798E1	1.19965E-7	2.52318E-3	2.52318E-3	6.32936E-3	2.9874E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-8.15964E-1	-7.98011E-1	-9.13148E0	-9.14192E0	5.00679E-3	9.43422E-2	2.72228E1	-3.26879E1	-3.26092E1	2.67854E1	1.20414E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.01995E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.16131E-1	-7.98512E-1	-9.1315E0	-9.14192E0	4.93526E-3	9.377E-2	2.72084E1	-3.26627E1	-3.2632E1	2.67956E1	1.20084E-7	2.51693E-3	2.51693E-3	6.34661E-3	3.00144E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.1594E-1	-7.98583E-1	-9.13146E0	-9.14183E0	4.8399E-3	9.37939E-2	2.73346E1	-3.26384E1	-3.25924E1	2.68016E1	1.20004E-7	2.52061E-3	2.52061E-3	6.29665E-3	3.01738E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.16131E-1	-7.9844E-1	-9.13129E0	-9.14161E0	4.98295E-3	9.40323E-2	2.72781E1	-3.26681E1	-3.26645E1	2.67891E1	1.20017E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.9978E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.16226E-1	-7.98368E-1	-9.13143E0	-9.14209E0	4.86374E-3	9.38177E-2	2.73021E1	-3.26831E1	-3.26446E1	2.6786E1	1.2026E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.01223E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.16083E-1	-7.98059E-1	-9.13105E0	-9.14185E0	4.55379E-3	9.36985E-2	2.72763E1	-3.26422E1	-3.26549E1	2.68136E1	1.20122E-7	2.51116E-3	2.51116E-3	6.36244E-3	3.00563E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.15916E-1	-7.98821E-1	-9.13095E0	-9.1418E0	4.88758E-3	9.37223E-2	2.72918E1	-3.267E1	-3.26376E1	2.67792E1	1.20122E-7	2.52099E-3	2.52099E-3	6.3514E-3	3.01609E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.15701E-1	-7.98607E-1	-9.13115E0	-9.14166E0	4.33922E-3	9.3627E-2	2.73724E1	-3.26817E1	-3.25795E1	2.6787E1	1.1974E-7	2.51919E-3	2.51919E-3	6.31269E-3	3.00097E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.15725E-1	-7.98321E-1	-9.13095E0	-9.14195E0	4.64916E-3	9.39369E-2	2.72949E1	-3.26639E1	-3.26615E1	2.68016E1	1.19766E-7	2.51581E-3	2.51581E-3	6.31858E-3	2.99879E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09426E0	-8.15988E-1	-7.98607E-1	-9.1311E0	-9.14197E0	4.33922E-3	9.37939E-2	2.72793E1	-3.26705E1	-3.26116E1	2.68064E1	1.19913E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00041E-1