[Scan]
initial_time=2016-01-27T23:04:00
final_time=2016-01-27T23:04:19
ip_count=19
run=1025
dataset=6
scan=443
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08835E-4
ql1_vset=
ql1_vmon=-8.16107E-1
ql1_imon=6.84094E-10
ql2_vset=
ql2_vmon=-7.98488E-1
ql2_imon=3.1606E-10
ql3_vset=
ql3_vmon=-9.13167E0
ql3_imon=6.67262E-10
ql4_vset=
ql4_vmon=-9.14178E0
ql4_imon=5.65875E-10
mult1=-9.81834E-9
mult2=-2.88523E-9
rf_tmon=-4.02576E-3
rf_agc=3.33595E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=4.08006E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66031E0
bslens_imon=2.72377E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19465E1
lens5a_imon=1.98687E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.125E2
lens4a_imon=2.05256E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53622E1
cs_ef1b_imon=2.75493E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0459E2
lens23_imon=1.02107E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05059E1
cs_ea1_imon=2.58963E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36548E0
lens1_imon=2.50432E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64452E1
os_ef1alow_imon=2.97765E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03903E1
cs_ea2_imon=1.51082E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84004E1
cs_ef1a_imon=2.90341E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=4.02975E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11322E1
os_restr1_imon=2.86737E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1494E1
os_ea1_imon=1.91218E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63851E1
os_ef1bup_imon=3.09947E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22437E0
cs_ionrep_imon=1.17245E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93367E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01923E1
cs_anode1_imon=2.89008E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=7.71832E-10
tplens_vset=1.4E-1
tplens_vmon=1.63435E0
tplens_imon=-3.05966E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25958E1
iondef3_imon=1.5048E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26493E1
iondef2_imon=1.58337E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02915E2
lens6_imon=2.98424E-4
ql6_vset=1.0E-1
ql6_vmon=9.40084E-2
ql6_imon=3.89814E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.34353E0
ionrepsh_imon=1.74406E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3354E1
lens5b_imon=2.1872E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74507E1
cs_ef2b_imon=3.12722E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.40417E-1
os_ea2_imon=-7.51931E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0605E2
lens4b_imon=2.00403E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71246E1
cs_ef2a_imon=3.19281E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60897E0
os_ef2alow_imon=-2.59428E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.851E-1
os_ef2bup_imon=-5.11705E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10799E1
os_restr2_imon=2.8699E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.31025E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01839E1
cs_anode2_imon=2.24857E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72761E1
iondef1_imon=1.08007E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68204E1
iondef4_imon=1.08413E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.96998E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=2.85244E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12474E0
cs_ionaccel_imon=-1.72212E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.47356E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56309E1
einzel_imon=7.73109E-6
window_vset=0.0E0
window_vmon=2.09534E-1
window_imon=-1.03376E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.39077E-4
mask2_vset=0.0E0
mask2_vmon=-1.86897E1
mask2_imon=-6.12094E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.55506E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.33396E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.04185E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.47793E0
defgridb_imon=6.11098E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33836E1
os_fil1_imon=4.68612E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.5693E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62367E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30702E1
cs_fil1_imon=9.95254E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63525E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62673E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.95238E-2
os_fil2_imon=-2.4257E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.95952E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.2427E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30817E-1
cs_fil2_imon=-2.35362E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0341E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21609E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.7551E-1
res40_imon=-2.46453E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09619E0	-8.15678E-1	-7.98392E-1	-9.13112E0	-9.14192E0	4.26769E-3	9.35555E-2	2.73196E1	-3.26926E1	-3.26324E1	2.6825E1	1.19902E-7	2.52169E-3	2.52169E-3	6.35059E-3	2.9892E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09418E0	-8.15797E-1	-7.98607E-1	-9.13131E0	-9.14197E0	4.60148E-3	9.3627E-2	2.73271E1	-3.26725E1	-3.26511E1	2.67963E1	1.20042E-7	2.51498E-3	2.51498E-3	6.3074E-3	2.99343E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.15988E-1	-7.98321E-1	-9.13129E0	-9.14221E0	4.41074E-3	9.37223E-2	2.73045E1	-3.26873E1	-3.26452E1	2.684E1	1.20045E-7	2.52521E-3	2.52521E-3	6.30171E-3	3.01065E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09394E0	-8.15558E-1	-7.98082E-1	-9.13105E0	-9.14211E0	4.72069E-3	9.38416E-2	2.73139E1	-3.26455E1	-3.26095E1	2.68076E1	1.20311E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.15344E-1	-7.98154E-1	-9.13107E0	-9.1419E0	4.64916E-3	9.36985E-2	2.72546E1	-3.26693E1	-3.26116E1	2.67926E1	1.20055E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.01738E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-8.15916E-1	-7.9813E-1	-9.13129E0	-9.14183E0	4.48227E-3	9.38416E-2	2.73075E1	-3.26296E1	-3.26512E1	2.68202E1	1.20174E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.02396E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.15678E-1	-7.97915E-1	-9.13119E0	-9.14197E0	4.43459E-3	9.35793E-2	2.73129E1	-3.26464E1	-3.26657E1	2.68178E1	1.2033E-7	2.52154E-3	2.52154E-3	6.30466E-3	3.00693E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.15511E-1	-7.98416E-1	-9.13103E0	-9.14207E0	4.79221E-3	9.33886E-2	2.72702E1	-3.26344E1	-3.26074E1	2.68046E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09333E0	-8.15344E-1	-7.98297E-1	-9.13107E0	-9.14183E0	4.45843E-3	9.36985E-2	2.72668E1	-3.26502E1	-3.26101E1	2.68166E1	1.20069E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.99E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09387E0	-8.15582E-1	-7.98416E-1	-9.13143E0	-9.14178E0	4.55379E-3	9.36985E-2	2.73161E1	-3.26517E1	-3.26352E1	2.68016E1	1.19913E-7	2.51225E-3	2.51225E-3	6.32936E-3	2.98222E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09418E0	-8.16154E-1	-7.98082E-1	-9.13105E0	-9.14152E0	4.76837E-3	9.38416E-2	2.72054E1	-3.26744E1	-3.25658E1	2.67914E1	1.20122E-7	2.51334E-3	2.51334E-3	6.30192E-3	2.97704E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09356E0	-8.16321E-1	-7.98249E-1	-9.13146E0	-9.14149E0	4.8399E-3	9.36985E-2	2.73634E1	-3.26879E1	-3.26621E1	2.68112E1	1.19697E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.0071E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09294E0	-8.15988E-1	-7.98464E-1	-9.13141E0	-9.14154E0	5.05447E-3	9.36985E-2	2.72319E1	-3.26679E1	-3.27115E1	2.68259E1	1.20174E-7	2.51116E-3	2.51116E-3	6.31837E-3	3.01871E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09348E0	-8.16178E-1	-7.98464E-1	-9.13134E0	-9.14159E0	4.74453E-3	9.35555E-2	2.73189E1	-3.26308E1	-3.2611E1	2.67893E1	1.19953E-7	2.51847E-3	2.51847E-3	6.35059E-3	3.02511E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-8.16059E-1	-7.98655E-1	-9.13136E0	-9.1419E0	4.52995E-3	9.35555E-2	2.73243E1	-3.26332E1	-3.26188E1	2.68358E1	1.19653E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09402E0	-8.16298E-1	-7.97963E-1	-9.13119E0	-9.14183E0	4.86374E-3	9.35555E-2	2.73098E1	-3.26862E1	-3.26231E1	2.68004E1	1.2054E-7	2.52647E-3	2.52647E-3	6.33486E-3	3.00563E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-8.16345E-1	-7.98464E-1	-9.1311E0	-9.14147E0	4.52995E-3	9.37939E-2	2.73104E1	-3.26797E1	-3.26307E1	2.68175E1	1.2026E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.99941E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.16274E-1	-7.98559E-1	-9.1315E0	-9.1418E0	4.62532E-3	9.39846E-2	2.73528E1	-3.27129E1	-3.26089E1	2.68151E1	1.20106E-7	2.52169E-3	2.52169E-3	6.33436E-3	2.9943E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.16154E-1	-7.98631E-1	-9.13177E0	-9.14168E0	5.03063E-3	9.40323E-2	2.72815E1	-3.26384E1	-3.26119E1	2.67937E1	1.19978E-7	2.52362E-3	2.52362E-3	6.33538E-3	3.00676E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.16107E-1	-7.98488E-1	-9.13167E0	-9.14178E0	4.93526E-3	9.40084E-2	2.72761E1	-3.26493E1	-3.25958E1	2.68204E1	1.20158E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.99941E-1