[Scan]
initial_time=2016-01-27T23:04:53
final_time=2016-01-27T23:05:13
ip_count=19
run=1025
dataset=6
scan=445
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.0876E-4
ql1_vset=
ql1_vmon=-8.15821E-1
ql1_imon=6.3498E-10
ql2_vset=
ql2_vmon=-7.98774E-1
ql2_imon=3.24965E-10
ql3_vset=
ql3_vmon=-9.13122E0
ql3_imon=6.43611E-10
ql4_vset=
ql4_vmon=-9.14178E0
ql4_imon=5.23627E-10
mult1=-8.98563E-9
mult2=-2.64885E-9
rf_tmon=-3.1378E-3
rf_agc=3.36043E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=3.7694E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65014E0
bslens_imon=2.74507E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19743E1
lens5a_imon=1.9773E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12481E2
lens4a_imon=2.04828E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53586E1
cs_ef1b_imon=2.75241E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02352E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04976E1
cs_ea1_imon=2.58738E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36705E0
lens1_imon=2.60183E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64698E1
os_ef1alow_imon=2.9827E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03978E1
cs_ea2_imon=1.52809E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8401E1
cs_ef1a_imon=2.89188E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=3.97611E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11117E1
os_restr1_imon=2.87963E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15208E1
os_ea1_imon=1.88694E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6381E1
os_ef1bup_imon=3.09298E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.257E0
cs_ionrep_imon=1.17659E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91839E2
cs_nozzle_imon=1.93391E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01833E1
cs_anode1_imon=2.90053E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20482E0
olens4_imon=7.25973E-10
tplens_vset=1.4E-1
tplens_vmon=1.59736E0
tplens_imon=-2.8513E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26351E1
iondef3_imon=1.47961E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26266E1
iondef2_imon=1.58319E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02906E2
lens6_imon=2.98353E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=3.68285E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.38004E0
ionrepsh_imon=1.75765E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33358E1
lens5b_imon=2.16278E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.12506E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.2183E-1
os_ea2_imon=-3.65936E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0605E2
lens4b_imon=2.00461E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71102E1
cs_ef2a_imon=3.19281E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64501E0
os_ef2alow_imon=-2.60148E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.22942E-1
os_ef2bup_imon=-5.35852E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10859E1
os_restr2_imon=2.85908E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.2912E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01929E1
cs_anode2_imon=2.23199E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73239E1
iondef1_imon=1.08366E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68032E1
iondef4_imon=1.09026E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.96073E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=2.68996E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13194E0
cs_ionaccel_imon=-1.7978E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47233E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56351E1
einzel_imon=7.77794E-6
window_vset=0.0E0
window_vmon=2.04128E-1
window_imon=-1.00853E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39095E-4
mask2_vset=0.0E0
mask2_vmon=-1.86873E1
mask2_imon=-6.6255E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92662E3
multa_neg_imon=7.41709E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93687E3
defgrida_imon=6.38131E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.59339E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.46584E0
defgridb_imon=6.12788E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3388E1
os_fil1_imon=4.99847E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=6.98665E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62409E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30703E1
cs_fil1_imon=9.97152E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63417E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62746E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.04102E-2
os_fil2_imon=-2.49178E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.578E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.2971E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30299E-1
cs_fil2_imon=-2.34161E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.22632E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21637E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.20363E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.88724E-1
res40_imon=-2.45012E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09418E0	-8.16059E-1	-7.98655E-1	-9.13143E0	-9.14199E0	4.62532E-3	9.37223E-2	2.729E1	-3.2673E1	-3.26165E1	2.67864E1	1.19872E-7	2.51804E-3	2.51804E-3	6.31858E-3	3.00676E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09449E0	-8.16345E-1	-7.98464E-1	-9.13117E0	-9.14207E0	4.52995E-3	9.36031E-2	2.72979E1	-3.26777E1	-3.2647E1	2.68136E1	1.2021E-7	2.51956E-3	2.51956E-3	6.31761E-3	2.99663E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.16154E-1	-7.98512E-1	-9.13126E0	-9.14197E0	4.48227E-3	9.3627E-2	2.74107E1	-3.2685E1	-3.26178E1	2.68123E1	1.19809E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9874E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.15821E-1	-7.98082E-1	-9.13131E0	-9.14211E0	4.41074E-3	9.408E-2	2.72909E1	-3.26561E1	-3.26408E1	2.68271E1	1.20158E-7	2.51847E-3	2.51847E-3	6.33436E-3	2.99686E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.16083E-1	-7.98345E-1	-9.13141E0	-9.14183E0	4.88758E-3	9.39846E-2	2.7218E1	-3.26669E1	-3.26422E1	2.68076E1	1.20004E-7	2.51847E-3	2.51847E-3	6.33977E-3	2.99175E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.16131E-1	-7.98607E-1	-9.13103E0	-9.14199E0	4.64916E-3	9.41038E-2	2.72781E1	-3.26561E1	-3.26182E1	2.68262E1	1.20122E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.16107E-1	-7.98154E-1	-9.13134E0	-9.14176E0	4.50611E-3	9.39369E-2	2.72721E1	-3.26735E1	-3.26005E1	2.67943E1	1.20226E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.01609E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.16059E-1	-7.98345E-1	-9.1316E0	-9.14173E0	4.79221E-3	9.377E-2	2.73045E1	-3.26638E1	-3.26437E1	2.68221E1	1.20042E-7	2.52025E-3	2.52025E-3	6.28103E-3	3.00348E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.15964E-1	-7.98559E-1	-9.13165E0	-9.14187E0	5.126E-3	9.36747E-2	2.73586E1	-3.26687E1	-3.26104E1	2.68069E1	1.20158E-7	2.52492E-3	2.52492E-3	6.31278E-3	2.97901E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.15892E-1	-7.98225E-1	-9.13138E0	-9.14176E0	4.673E-3	9.36031E-2	2.73153E1	-3.26567E1	-3.26194E1	2.67931E1	1.20017E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.9926E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.15988E-1	-7.98082E-1	-9.13103E0	-9.1419E0	4.55379E-3	9.408E-2	2.72895E1	-3.26609E1	-3.26332E1	2.68032E1	1.2033E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.98222E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.16035E-1	-7.98106E-1	-9.13112E0	-9.14204E0	4.36306E-3	9.37223E-2	2.72564E1	-3.26825E1	-3.26903E1	2.68175E1	1.20122E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.16226E-1	-7.98202E-1	-9.13119E0	-9.14187E0	4.41074E-3	9.39846E-2	2.73057E1	-3.26327E1	-3.26303E1	2.67895E1	1.20226E-7	2.52428E-3	2.52428E-3	6.29645E-3	3.02133E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.15821E-1	-7.98631E-1	-9.13088E0	-9.14197E0	4.64916E-3	9.39608E-2	2.73363E1	-3.26302E1	-3.26248E1	2.68106E1	1.19978E-7	2.5147E-3	2.5147E-3	6.32418E-3	3.02545E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.16274E-1	-7.98631E-1	-9.13105E0	-9.14185E0	4.3869E-3	9.37939E-2	2.73327E1	-3.26897E1	-3.25671E1	2.6792E1	1.20069E-7	2.52538E-3	2.52538E-3	6.3074E-3	3.04505E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.16131E-1	-7.98464E-1	-9.13107E0	-9.14176E0	4.74453E-3	9.36031E-2	2.72432E1	-3.26627E1	-3.27005E1	2.68046E1	1.19809E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.02659E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.16154E-1	-7.98178E-1	-9.13117E0	-9.1418E0	4.76837E-3	9.40323E-2	2.73546E1	-3.26585E1	-3.2613E1	2.67914E1	1.2033E-7	2.5199E-3	2.5199E-3	6.28006E-3	3.01347E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.15701E-1	-7.98488E-1	-9.13105E0	-9.14149E0	4.69685E-3	9.34362E-2	2.73045E1	-3.26518E1	-3.26098E1	2.6787E1	1.19851E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.00453E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.15845E-1	-7.98821E-1	-9.13136E0	-9.14152E0	5.05447E-3	9.34839E-2	2.7308E1	-3.26809E1	-3.26413E1	2.67752E1	1.20017E-7	2.5199E-3	2.5199E-3	6.34037E-3	3.00563E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.15821E-1	-7.98774E-1	-9.13122E0	-9.14178E0	5.03063E-3	9.35078E-2	2.73239E1	-3.26266E1	-3.26351E1	2.68032E1	1.20363E-7	2.51525E-3	2.51525E-3	6.29128E-3	3.00966E-1