[Scan]
initial_time=2016-01-27T23:05:20
final_time=2016-01-27T23:05:39
ip_count=19
run=1025
dataset=6
scan=446
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08765E-4
ql1_vset=
ql1_vmon=-8.16178E-1
ql1_imon=6.11973E-10
ql2_vset=
ql2_vmon=-7.98488E-1
ql2_imon=2.82919E-10
ql3_vset=
ql3_vmon=-9.13131E0
ql3_imon=5.77939E-10
ql4_vset=
ql4_vmon=-9.1418E0
ql4_imon=5.20539E-10
mult1=-1.01141E-8
mult2=-2.78009E-9
rf_tmon=-5.34714E-3
rf_agc=3.29375E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=3.72219E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65855E0
bslens_imon=2.55388E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19995E1
lens5a_imon=1.98368E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12473E2
lens4a_imon=2.05139E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53628E1
cs_ef1b_imon=2.75673E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.02125E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0477E1
cs_ea1_imon=2.58184E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36666E0
lens1_imon=2.50079E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64716E1
os_ef1alow_imon=2.99387E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03631E1
cs_ea2_imon=1.52957E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83727E1
cs_ef1a_imon=2.88611E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=4.05765E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=2.88828E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15252E1
os_ea1_imon=1.88918E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63557E1
os_ef1bup_imon=3.09514E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24561E0
cs_ionrep_imon=1.18767E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93477E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=2.90161E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=6.89101E-10
tplens_vset=1.4E-1
tplens_vmon=1.63376E0
tplens_imon=-3.97991E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26272E1
iondef3_imon=1.51577E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26307E1
iondef2_imon=1.58337E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02923E2
lens6_imon=2.98293E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=4.02403E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22083E0
ionrepsh_imon=1.71185E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33363E1
lens5b_imon=2.18189E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74711E1
cs_ef2b_imon=3.12434E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.2331E-1
os_ea2_imon=-5.8204E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06085E2
lens4b_imon=2.00715E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71108E1
cs_ef2a_imon=3.1856E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6396E0
os_ef2alow_imon=-2.50057E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.52374E-1
os_ef2bup_imon=-5.27563E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10979E1
os_restr2_imon=2.86881E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23046E2
cs_ionfoca_imon=6.30211E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01761E1
cs_anode2_imon=2.24713E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72845E1
iondef1_imon=1.10945E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68022E1
iondef4_imon=1.10539E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.9528E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81569E-1
olens1_imon=2.96569E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10011E0
cs_ionaccel_imon=-1.83384E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47284E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56153E1
einzel_imon=7.70946E-6
window_vset=0.0E0
window_vmon=2.41369E-1
window_imon=-1.12386E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82611E2
mask1_imon=2.39117E-4
mask2_vset=0.0E0
mask2_vmon=-1.87041E1
mask2_imon=-5.7245E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.29314E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93688E3
defgrida_imon=6.59588E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.13387E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.40706E0
defgridb_imon=6.26672E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33829E1
os_fil1_imon=4.6621E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.3891E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62338E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30736E1
cs_fil1_imon=9.9639E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63513E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62566E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.06635E-2
os_fil2_imon=-2.44973E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.13972E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.28194E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29522E-1
cs_fil2_imon=-2.26953E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.37998E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21642E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.2026E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40039E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.18757E-1
res40_imon=-2.40327E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.16274E-1	-7.98202E-1	-9.13119E0	-9.14187E0	4.62532E-3	9.36508E-2	2.73201E1	-3.26729E1	-3.26284E1	2.68124E1	1.19697E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.00197E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.16202E-1	-7.98559E-1	-9.13107E0	-9.14178E0	4.86374E-3	9.36508E-2	2.74001E1	-3.26708E1	-3.25989E1	2.68148E1	1.2033E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00302E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.15701E-1	-7.98368E-1	-9.13138E0	-9.14173E0	4.64916E-3	9.36031E-2	2.73285E1	-3.26693E1	-3.26236E1	2.67995E1	1.20158E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.00453E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-8.15749E-1	-7.9844E-1	-9.13138E0	-9.14173E0	4.79221E-3	9.32455E-2	2.72709E1	-3.26693E1	-3.25972E1	2.68214E1	1.20278E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.01085E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.15988E-1	-7.98225E-1	-9.13141E0	-9.14166E0	4.64916E-3	9.37462E-2	2.73311E1	-3.26579E1	-3.26272E1	2.68034E1	1.19653E-7	2.52428E-3	2.52428E-3	6.33486E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.15606E-1	-7.98082E-1	-9.13134E0	-9.14199E0	4.91142E-3	9.38892E-2	2.72859E1	-3.26711E1	-3.26038E1	2.68082E1	1.20158E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.15535E-1	-7.98297E-1	-9.13148E0	-9.14183E0	4.45843E-3	9.36747E-2	2.73375E1	-3.26669E1	-3.26591E1	2.68322E1	1.20069E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01871E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.15892E-1	-7.97772E-1	-9.13148E0	-9.14192E0	4.69685E-3	9.36747E-2	2.72919E1	-3.26711E1	-3.2614E1	2.68142E1	1.19861E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.02659E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.15749E-1	-7.98392E-1	-9.13146E0	-9.14166E0	4.86374E-3	9.34124E-2	2.72775E1	-3.26591E1	-3.2632E1	2.6804E1	1.20278E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.01871E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.15773E-1	-7.98345E-1	-9.13129E0	-9.14159E0	4.62532E-3	9.39131E-2	2.72793E1	-3.26428E1	-3.26332E1	2.68028E1	1.20278E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9926E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.15749E-1	-7.98488E-1	-9.13146E0	-9.14173E0	4.72069E-3	9.35793E-2	2.72862E1	-3.26608E1	-3.26231E1	2.68041E1	1.19902E-7	2.51203E-3	2.51203E-3	6.3074E-3	2.98156E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-8.1594E-1	-7.97987E-1	-9.13131E0	-9.14168E0	5.19753E-3	9.32932E-2	2.72955E1	-3.26404E1	-3.26536E1	2.67878E1	1.19913E-7	2.52045E-3	2.52045E-3	6.29919E-3	3.00171E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.15845E-1	-7.98225E-1	-9.13126E0	-9.1419E0	4.88758E-3	9.35316E-2	2.73435E1	-3.26813E1	-3.25701E1	2.67998E1					
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.15582E-1	-7.98297E-1	-9.13136E0	-9.14176E0	5.10216E-3	9.35793E-2	2.72865E1	-3.26585E1	-3.26344E1	2.67956E1	1.20122E-7	2.52428E-3	2.52428E-3	6.29098E-3	3.01085E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.16059E-1	-7.9875E-1	-9.13146E0	-9.1419E0	4.60148E-3	9.38416E-2	2.73364E1	-3.26863E1	-3.26306E1	2.68094E1	1.20069E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.16107E-1	-7.98345E-1	-9.13134E0	-9.14202E0	5.05447E-3	9.37223E-2	2.72467E1	-3.26435E1	-3.26695E1	2.68088E1	1.20226E-7	2.51265E-3	2.51265E-3	6.33863E-3	3.01237E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.16011E-1	-7.98607E-1	-9.13105E0	-9.1418E0	5.45979E-3	9.35316E-2	2.73393E1	-3.26498E1	-3.25924E1	2.68059E1	1.1984E-7	2.51296E-3	2.51296E-3	6.31902E-3	3.0147E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.16417E-1	-7.98154E-1	-9.13131E0	-9.14173E0	4.88758E-3	9.37223E-2	2.73117E1	-3.26909E1	-3.26266E1	2.67968E1	1.20363E-7	2.51632E-3	2.51632E-3	6.29665E-3	2.9943E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.16393E-1	-7.98154E-1	-9.13153E0	-9.14173E0	5.126E-3	9.3627E-2	2.73328E1	-3.26596E1	-3.26042E1	2.68123E1	1.20069E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.9874E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.16178E-1	-7.98488E-1	-9.13131E0	-9.1418E0	4.93526E-3	9.36031E-2	2.72845E1	-3.26307E1	-3.26272E1	2.68022E1	1.2026E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.00966E-1