[Scan]
initial_time=2016-01-27T23:06:40
final_time=2016-01-27T23:06:59
ip_count=19
run=1025
dataset=6
scan=449
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09673E0
qbias_imon=-1.0879E-4
ql1_vset=
ql1_vmon=-8.15654E-1
ql1_imon=6.80113E-10
ql2_vset=
ql2_vmon=-7.98345E-1
ql2_imon=3.08037E-10
ql3_vset=
ql3_vmon=-9.1316E0
ql3_imon=5.88739E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=5.46432E-10
mult1=-9.26292E-9
mult2=-2.72914E-9
rf_tmon=-5.12887E-3
rf_agc=3.39875E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=4.01628E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63369E0
bslens_imon=2.54136E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19833E1
lens5a_imon=1.99893E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.04981E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53995E1
cs_ef1b_imon=2.75709E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02233E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04982E1
cs_ea1_imon=2.59375E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40921E0
lens1_imon=2.58822E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64548E1
os_ef1alow_imon=2.98847E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03762E1
cs_ea2_imon=1.53678E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84004E1
cs_ef1a_imon=2.89512E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=3.98088E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11159E1
os_restr1_imon=2.87314E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15035E1
os_ea1_imon=1.89223E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63761E1
os_ef1bup_imon=3.09478E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2515E0
cs_ionrep_imon=1.17088E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93535E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01863E1
cs_anode1_imon=2.90666E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2048E0
olens4_imon=7.32315E-10
tplens_vset=1.4E-1
tplens_vmon=1.621E0
tplens_imon=-3.49815E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26124E1
iondef3_imon=1.50902E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26638E1
iondef2_imon=1.57787E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02935E2
lens6_imon=2.98411E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=3.77643E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23768E0
ionrepsh_imon=1.73145E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33447E1
lens5b_imon=2.19612E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7476E1
cs_ef2b_imon=3.12037E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.33699E-1
os_ea2_imon=-6.52631E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00522E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71246E1
cs_ef2a_imon=3.18596E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62579E0
os_ef2alow_imon=-2.45012E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.4877E-1
os_ef2bup_imon=-5.3405E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11165E1
os_restr2_imon=2.85872E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.2982E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01965E1
cs_anode2_imon=2.24064E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72862E1
iondef1_imon=1.09625E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68052E1
iondef4_imon=1.08918E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.95911E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82594E-1
olens1_imon=2.8528E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11272E0
cs_ionaccel_imon=-1.8879E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02045E2
cs_ionfocb_imon=1.47244E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56255E1
einzel_imon=7.62657E-6
window_vset=0.0E0
window_vmon=2.10735E-1
window_imon=-1.02295E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.39149E-4
mask2_vset=0.0E0
mask2_vmon=-1.86927E1
mask2_imon=-5.43619E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92621E3
multa_neg_imon=7.8875E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93743E3
defgrida_imon=6.49239E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.24222E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.52764E0
defgridb_imon=6.067E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33862E1
os_fil1_imon=3.91728E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.68342E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62387E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3075E1
cs_fil1_imon=9.98924E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6439E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62637E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.95074E-2
os_fil2_imon=-2.52782E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.2176E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.26295E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30688E-1
cs_fil2_imon=-2.29956E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.25985E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21737E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.20122E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.89325E-1
res40_imon=-2.51499E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09394E0	-8.16393E-1	-7.98106E-1	-9.13126E0	-9.14135E0	4.8399E-3	9.35555E-2	2.74007E1	-3.26729E1	-3.2659E1	2.68153E1	1.20106E-7	2.51525E-3	2.51525E-3	6.33436E-3	3.01995E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.15678E-1	-7.9813E-1	-9.131E0	-9.14168E0	5.03063E-3	9.37939E-2	2.74E1	-3.26206E1	-3.25773E1	2.68058E1	1.19851E-7	2.51203E-3	2.51203E-3	6.32896E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09371E0	-8.15678E-1	-7.98345E-1	-9.13124E0	-9.14173E0	4.86374E-3	9.36508E-2	2.73123E1	-3.26627E1	-3.26512E1	2.68016E1	1.20122E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.97704E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.16154E-1	-7.9813E-1	-9.13136E0	-9.14178E0	4.86374E-3	9.36031E-2	2.72282E1	-3.26518E1	-3.26579E1	2.67836E1	1.19653E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.97963E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.15749E-1	-7.98202E-1	-9.1315E0	-9.14192E0	4.76837E-3	9.39369E-2	2.72518E1	-3.26741E1	-3.25878E1	2.67926E1	1.20017E-7	2.52428E-3	2.52428E-3	6.29645E-3	2.98481E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-8.15558E-1	-7.98273E-1	-9.13107E0	-9.14207E0	4.88758E-3	9.36985E-2	2.7321E1	-3.26572E1	-3.2619E1	2.68251E1	1.20028E-7	2.5199E-3	2.5199E-3	6.323E-3	3.01237E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09704E0	-8.16464E-1	-7.97987E-1	-9.13122E0	-9.14171E0	4.45843E-3	9.38177E-2	2.73098E1	-3.27121E1	-3.26018E1	2.68105E1	1.19785E-7	2.51874E-3	2.51874E-3	6.31902E-3	3.00363E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09688E0	-8.15916E-1	-7.98392E-1	-9.13157E0	-9.14185E0	4.45843E-3	9.38177E-2	2.72274E1	-3.26419E1	-3.26432E1	2.67832E1	1.20122E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09634E0	-8.15535E-1	-7.97963E-1	-9.13141E0	-9.14209E0	4.3869E-3	9.36031E-2	2.73735E1	-3.26683E1	-3.26011E1	2.68221E1	1.19809E-7	2.5188E-3	2.5188E-3	6.34588E-3	2.97963E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09665E0	-8.15892E-1	-7.98321E-1	-9.13134E0	-9.14183E0	4.55379E-3	9.3627E-2	2.72996E1	-3.26701E1	-3.25789E1	2.67998E1	1.19991E-7	2.51709E-3	2.51709E-3	6.31798E-3	2.98342E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0965E0	-8.15415E-1	-7.97868E-1	-9.13157E0	-9.14156E0	5.03063E-3	9.34601E-2	2.72943E1	-3.26837E1	-3.26398E1	2.68106E1	1.19991E-7	2.51725E-3	2.51725E-3	6.29035E-3	2.9917E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09742E0	-8.15487E-1	-7.97868E-1	-9.13193E0	-9.14156E0	4.62532E-3	9.37462E-2	2.7263E1	-3.26188E1	-3.26368E1	2.6792E1	1.20106E-7	2.51525E-3	2.51525E-3	6.30202E-3	2.9943E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09603E0	-8.1594E-1	-7.97963E-1	-9.13134E0	-9.14185E0	5.07832E-3	9.36985E-2	2.73093E1	-3.26416E1	-3.2629E1	2.68238E1	1.20191E-7	2.51359E-3	2.51359E-3	6.32418E-3	3.01209E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09634E0	-8.1594E-1	-7.97915E-1	-9.13153E0	-9.14176E0	4.86374E-3	9.36031E-2	2.72967E1	-3.26771E1	-3.26488E1	2.68176E1	1.20278E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.9952E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09627E0	-8.1563E-1	-7.98225E-1	-9.13136E0	-9.14171E0	4.79221E-3	9.38177E-2	2.72871E1	-3.26482E1	-3.26224E1	2.6803E1	1.20174E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9926E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09688E0	-8.15558E-1	-7.98082E-1	-9.13138E0	-9.14145E0	5.05447E-3	9.36747E-2	2.73165E1	-3.26723E1	-3.26314E1	2.68256E1	1.19965E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.9952E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09665E0	-8.15558E-1	-7.98321E-1	-9.13141E0	-9.14145E0	5.24521E-3	9.35316E-2	2.7326E1	-3.26556E1	-3.26469E1	2.68157E1	1.20158E-7	2.52169E-3	2.52169E-3	6.33977E-3	2.97901E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09588E0	-8.15892E-1	-7.98535E-1	-9.13138E0	-9.14161E0	5.00679E-3	9.35555E-2	2.72745E1	-3.265E1	-3.25966E1	2.67884E1	1.19851E-7	2.52276E-3	2.52276E-3	6.32356E-3	2.9943E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0965E0	-8.15821E-1	-7.98488E-1	-9.1316E0	-9.14168E0	4.81606E-3	9.37223E-2	2.73249E1	-3.27041E1	-3.2635E1	2.6843E1	1.20004E-7	2.51203E-3	2.51203E-3	6.31817E-3	2.9943E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09673E0	-8.15654E-1	-7.98345E-1	-9.1316E0	-9.14185E0	4.64916E-3	9.35793E-2	2.72862E1	-3.26638E1	-3.26124E1	2.68052E1	1.20122E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00302E-1