[Scan]
initial_time=2016-01-27T23:08:26
final_time=2016-01-27T23:08:46
ip_count=19
run=1025
dataset=6
scan=453
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08831E-4
ql1_vset=
ql1_vmon=-8.15821E-1
ql1_imon=6.82545E-10
ql2_vset=
ql2_vmon=-7.98488E-1
ql2_imon=3.00419E-10
ql3_vset=
ql3_vmon=-9.13141E0
ql3_imon=5.84066E-10
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=5.61166E-10
mult1=-9.00591E-9
mult2=-2.64476E-9
rf_tmon=-4.5665E-3
rf_agc=3.32735E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.98295E-3
ql5_imon=3.92008E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66253E0
bslens_imon=2.44402E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19725E1
lens5a_imon=1.97875E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12459E2
lens4a_imon=2.04815E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53526E1
cs_ef1b_imon=2.74268E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04567E2
lens23_imon=1.02085E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05337E1
cs_ea1_imon=2.57753E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33291E0
lens1_imon=2.69637E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64602E1
os_ef1alow_imon=2.99567E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03979E1
cs_ea2_imon=1.52524E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84322E1
cs_ef1a_imon=2.88287E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=4.80855E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11262E1
os_restr1_imon=2.88359E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15348E1
os_ea1_imon=1.89331E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63587E1
os_ef1bup_imon=3.07352E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26291E0
cs_ionrep_imon=1.17772E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93344E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02019E1
cs_anode1_imon=2.91026E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=7.16543E-10
tplens_vset=1.4E-1
tplens_vmon=1.6204E0
tplens_imon=-4.25519E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25906E1
iondef3_imon=1.5083E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26681E1
iondef2_imon=1.58472E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02944E2
lens6_imon=2.98447E-4
ql6_vset=1.0E-1
ql6_vmon=9.37939E-2
ql6_imon=3.85392E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27373E0
ionrepsh_imon=1.74767E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33688E1
lens5b_imon=2.17846E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74561E1
cs_ef2b_imon=3.12217E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.84431E-1
os_ea2_imon=-6.52631E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06081E2
lens4b_imon=2.00612E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71162E1
cs_ef2a_imon=3.18885E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61738E0
os_ef2alow_imon=-2.60148E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.41562E-1
os_ef2bup_imon=-5.27202E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10925E1
os_restr2_imon=2.87638E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.31767E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02061E1
cs_anode2_imon=2.24245E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73994E1
iondef1_imon=1.08616E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67692E1
iondef4_imon=1.07368E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.97266E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=2.97773E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11032E0
cs_ionaccel_imon=-1.75095E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02093E2
cs_ionfocb_imon=1.47262E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56369E1
einzel_imon=7.72028E-6
window_vset=0.0E0
window_vmon=2.13739E-1
window_imon=-1.15629E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82657E2
mask1_imon=2.39196E-4
mask2_vset=0.0E0
mask2_vmon=-1.86909E1
mask2_imon=-6.6255E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.85866E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.4996E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.3756E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.57576E0
defgridb_imon=6.20759E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33862E1
os_fil1_imon=4.68012E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.4792E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62285E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30763E1
cs_fil1_imon=9.9699E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63321E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62766E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.98943E-2
os_fil2_imon=-2.45574E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.23872E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.3622E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32371E-1
cs_fil2_imon=-2.5098E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2083E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21773E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33592E-3
inlet_lpb_pmon=3.00522E-1
chamber_ion_pmon=1.201E-7
chamber_cvt_pmon=2.51611E-3
foreline_cvt_pmon=2.51611E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.55688E-1
res40_imon=-2.49697E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=175
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0965E0	-8.15701E-1	-7.98082E-1	-9.13117E0	-9.14154E0	4.88758E-3	9.36508E-2	2.73546E1	-3.26567E1	-3.2662E1	2.6818E1	1.19913E-7	2.51007E-3	2.51007E-3	6.32386E-3	2.97704E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09719E0	-8.15964E-1	-7.98392E-1	-9.13153E0	-9.14166E0	4.74453E-3	9.36985E-2	2.73039E1	-3.26651E1	-3.26128E1	2.68214E1	1.20004E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.98665E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09665E0	-8.15678E-1	-7.98917E-1	-9.13167E0	-9.14197E0	5.24521E-3	9.36747E-2	2.73228E1	-3.2682E1	-3.26319E1	2.68166E1	1.19965E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.97963E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09642E0	-8.15558E-1	-7.98798E-1	-9.13146E0	-9.14176E0	5.19753E-3	9.36508E-2	2.72084E1	-3.26801E1	-3.26038E1	2.67938E1	1.20278E-7	2.52318E-3	2.52318E-3	6.3074E-3	2.98222E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09619E0	-8.1563E-1	-7.98559E-1	-9.13129E0	-9.14173E0	4.64916E-3	9.35555E-2	2.73213E1	-3.26735E1	-3.2635E1	2.67782E1	1.2033E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.97963E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.15821E-1	-7.9844E-1	-9.13129E0	-9.14183E0	4.98295E-3	9.33886E-2	2.72986E1	-3.2649E1	-3.25835E1	2.6763E1	1.20311E-7	2.52492E-3	2.52492E-3	6.31817E-3	2.99941E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-8.16298E-1	-7.98178E-1	-9.13143E0	-9.14166E0	5.03063E-3	9.32932E-2	2.72616E1	-3.26682E1	-3.26229E1	2.67677E1	1.20174E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09634E0	-8.16131E-1	-7.98225E-1	-9.13107E0	-9.14197E0	4.673E-3	9.38654E-2	2.73267E1	-3.26783E1	-3.2632E1	2.67644E1	1.19965E-7	2.51662E-3	2.51662E-3	6.28006E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09719E0	-8.1625E-1	-7.98202E-1	-9.13148E0	-9.1419E0	4.91142E-3	9.40084E-2	2.72811E1	-3.26813E1	-3.26218E1	2.6852E1	1.19913E-7	2.52428E-3	2.52428E-3	6.33486E-3	3.02659E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0968E0	-8.16226E-1	-7.98082E-1	-9.13148E0	-9.14202E0	4.8399E-3	9.36031E-2	2.72829E1	-3.26669E1	-3.25924E1	2.6786E1	1.20137E-7	2.5147E-3	2.5147E-3	6.31299E-3	3.01475E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.15511E-1	-7.98202E-1	-9.13148E0	-9.1418E0	4.98295E-3	9.34839E-2	2.73105E1	-3.2644E1	-3.26428E1	2.68202E1	1.2026E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.01738E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09688E0	-8.15797E-1	-7.98011E-1	-9.13165E0	-9.14183E0	4.673E-3	9.36508E-2	2.72991E1	-3.27167E1	-3.26002E1	2.67956E1	1.20069E-7	2.52867E-3	2.52867E-3	6.31837E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09588E0	-8.15654E-1	-7.98368E-1	-9.13162E0	-9.14197E0	4.64916E-3	9.36985E-2	2.73231E1	-3.27005E1	-3.26392E1	2.67938E1	1.19766E-7	2.51359E-3	2.51359E-3	6.29067E-3	3.01209E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09603E0	-8.15678E-1	-7.98059E-1	-9.13155E0	-9.14183E0	4.98295E-3	9.36508E-2	2.73009E1	-3.26729E1	-3.26302E1	2.68118E1	1.19809E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.9978E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09611E0	-8.15797E-1	-7.98559E-1	-9.13136E0	-9.14168E0	4.55379E-3	9.36985E-2	2.73159E1	-3.26639E1	-3.25984E1	2.68238E1	1.19757E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.15558E-1	-7.98225E-1	-9.1315E0	-9.14187E0	4.88758E-3	9.37939E-2	2.73015E1	-3.26747E1	-3.26206E1	2.681E1	1.20106E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.01223E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.15725E-1	-7.98202E-1	-9.13138E0	-9.14164E0	4.79221E-3	9.35793E-2	2.73086E1	-3.26457E1	-3.26434E1	2.68036E1	1.2033E-7	2.51225E-3	2.51225E-3	6.31288E-3	2.97963E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.15845E-1	-7.98154E-1	-9.13141E0	-9.14154E0	4.72069E-3	9.377E-2	2.73287E1	-3.26555E1	-3.258E1	2.67908E1	1.20055E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.97901E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-8.15701E-1	-7.9844E-1	-9.1316E0	-9.14142E0	4.74453E-3	9.377E-2	2.72267E1	-3.26664E1	-3.26205E1	2.68144E1	1.20042E-7	2.51709E-3	2.51709E-3	6.31269E-3	2.98342E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.15821E-1	-7.98488E-1	-9.13141E0	-9.14183E0	4.98295E-3	9.37939E-2	2.73994E1	-3.26681E1	-3.25906E1	2.67692E1	1.201E-7	2.51611E-3	2.51611E-3	6.33592E-3	3.00522E-1