[Scan]
initial_time=2016-01-27T23:09:47
final_time=2016-01-27T23:10:06
ip_count=19
run=1025
dataset=6
scan=456
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08804E-4
ql1_vset=
ql1_vmon=-8.16035E-1
ql1_imon=6.37805E-10
ql2_vset=
ql2_vmon=-7.97677E-1
ql2_imon=3.1662E-10
ql3_vset=
ql3_vmon=-9.13107E0
ql3_imon=6.04534E-10
ql4_vset=
ql4_vmon=-9.1418E0
ql4_imon=5.72777E-10
mult1=-1.04164E-8
mult2=-2.81435E-9
rf_tmon=-3.55647E-3
rf_agc=3.39634E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=3.61323E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64402E0
bslens_imon=2.58713E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19627E1
lens5a_imon=1.98207E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12462E2
lens4a_imon=2.05177E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53857E1
cs_ef1b_imon=2.75529E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04604E2
lens23_imon=1.02253E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05208E1
cs_ea1_imon=2.57048E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37807E0
lens1_imon=2.82588E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64614E1
os_ef1alow_imon=2.98558E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03513E1
cs_ea2_imon=1.53617E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84238E1
cs_ef1a_imon=2.89368E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=3.65579E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11418E1
os_restr1_imon=2.88215E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15049E1
os_ea1_imon=1.88143E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63683E1
os_ef1bup_imon=3.08974E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20129E0
cs_ionrep_imon=1.16557E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91901E2
cs_nozzle_imon=1.93482E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01851E1
cs_anode1_imon=2.89008E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20482E0
olens4_imon=7.05135E-10
tplens_vset=1.4E-1
tplens_vmon=1.6702E0
tplens_imon=-2.74111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26463E1
iondef3_imon=1.49797E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26364E1
iondef2_imon=1.57547E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02922E2
lens6_imon=2.98416E-4
ql6_vset=1.0E-1
ql6_vmon=9.38177E-2
ql6_imon=3.80468E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24659E0
ionrepsh_imon=1.72496E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33499E1
lens5b_imon=2.15984E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74531E1
cs_ef2b_imon=3.14055E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.20605E-1
os_ea2_imon=-4.43068E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00487E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71035E1
cs_ef2a_imon=3.19173E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.642E0
os_ef2alow_imon=-2.60509E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.49972E-1
os_ef2bup_imon=-5.23598E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10937E1
os_restr2_imon=2.87314E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23086E2
cs_ionfoca_imon=6.31397E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01731E1
cs_anode2_imon=2.24245E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73822E1
iondef1_imon=1.08807E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68343E1
iondef4_imon=1.09674E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.88975E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=3.04437E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13314E0
cs_ionaccel_imon=-1.82303E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47381E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56333E1
einzel_imon=7.62297E-6
window_vset=0.0E0
window_vmon=2.11336E-1
window_imon=-1.10223E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82632E2
mask1_imon=2.39264E-4
mask2_vset=0.0E0
mask2_vmon=-1.87029E1
mask2_imon=-5.86866E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92665E3
multa_neg_imon=8.01946E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.46579E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50099E3
multb_neg_imon=7.27752E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.46278E0
defgridb_imon=6.09849E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33815E1
os_fil1_imon=4.40381E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.49121E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62008E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30564E1
cs_fil1_imon=9.97038E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63273E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62184E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.22499E-2
os_fil2_imon=-2.34762E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.17866E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.40216E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29134E-1
cs_fil2_imon=-1.96319E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04612E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21451E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.01866E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.24764E-1
res40_imon=-2.51859E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=150
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.15964E-1	-7.97844E-1	-9.131E0	-9.14178E0	4.8399E-3	9.40323E-2	2.7324E1	-3.26437E1	-3.26673E1	2.68082E1	1.20137E-7	2.51804E-3	2.51804E-3	6.32418E-3	3.01209E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.15892E-1	-7.98297E-1	-9.13115E0	-9.14187E0	4.86374E-3	9.36985E-2	2.72501E1	-3.26922E1	-3.26211E1	2.68213E1	1.20106E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.01738E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09387E0	-8.15916E-1	-7.98345E-1	-9.13112E0	-9.14164E0	4.79221E-3	9.36747E-2	2.73724E1	-3.2656E1	-3.26352E1	2.67944E1	1.2003E-7	2.51908E-3	2.51908E-3	6.32386E-3	3.00628E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-8.15964E-1	-7.98368E-1	-9.13119E0	-9.14195E0	4.79221E-3	9.38654E-2	2.73039E1	-3.26325E1	-3.26024E1	2.67848E1	1.20084E-7	2.51693E-3	2.51693E-3	6.34099E-3	3.01742E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09402E0	-8.15582E-1	-7.98726E-1	-9.13124E0	-9.14178E0	4.57764E-3	9.38892E-2	2.72861E1	-3.26799E1	-3.26529E1	2.68502E1	1.20158E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.01223E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.16107E-1	-7.98583E-1	-9.13146E0	-9.14195E0	4.62532E-3	9.40323E-2	2.71446E1	-3.26527E1	-3.26104E1	2.68112E1	1.20084E-7	2.52473E-3	2.52473E-3	6.32418E-3	3.0041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09379E0	-8.15821E-1	-7.98392E-1	-9.13138E0	-9.14195E0	4.95911E-3	9.41753E-2	2.73235E1	-3.26634E1	-3.26646E1	2.68004E1	1.20106E-7	2.51203E-3	2.51203E-3	6.3074E-3	3.02253E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09402E0	-8.15749E-1	-7.98583E-1	-9.13148E0	-9.14197E0	4.50611E-3	9.408E-2	2.72684E1	-3.26506E1	-3.25828E1	2.68178E1	1.20174E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.02396E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.15845E-1	-7.98631E-1	-9.13153E0	-9.14204E0	4.45843E-3	9.408E-2	2.72672E1	-3.26573E1	-3.26356E1	2.68022E1	1.20226E-7	2.52099E-3	2.52099E-3	6.34037E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.15487E-1	-7.9875E-1	-9.13136E0	-9.14195E0	4.98295E-3	9.40084E-2	2.74084E1	-3.26759E1	-3.26506E1	2.67938E1	1.20174E-7	2.51334E-3	2.51334E-3	6.32661E-3	2.9939E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.15344E-1	-7.98464E-1	-9.13105E0	-9.14202E0	4.72069E-3	9.39131E-2	2.72747E1	-3.26734E1	-3.26669E1	2.68158E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-8.15868E-1	-7.98535E-1	-9.13136E0	-9.14156E0	4.673E-3	9.41277E-2	2.72711E1	-3.26834E1	-3.26434E1	2.68111E1	1.19947E-7	2.51406E-3	2.51406E-3	6.32129E-3	2.99845E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09356E0	-8.15773E-1	-7.98225E-1	-9.13105E0	-9.1418E0	4.3869E-3	9.41038E-2	2.73382E1	-3.26787E1	-3.2615E1	2.68094E1	1.20119E-7	2.51498E-3	2.51498E-3	6.29396E-3	3.00325E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09394E0	-8.15725E-1	-7.98702E-1	-9.13098E0	-9.14218E0	4.673E-3	9.41515E-2	2.72542E1	-3.26596E1	-3.25818E1	2.67959E1	1.19978E-7	2.52027E-3	2.52027E-3	6.32978E-3	3.01209E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-8.15535E-1	-7.98702E-1	-9.13138E0	-9.14211E0	4.57764E-3	9.42945E-2	2.72993E1	-3.26299E1	-3.26241E1	2.6805E1	1.20356E-7	2.51244E-3	2.51244E-3	6.31251E-3	3.00149E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09418E0	-8.15439E-1	-7.98464E-1	-9.13134E0	-9.14216E0	4.74453E-3	9.3627E-2	2.72552E1	-3.26711E1	-3.26392E1	2.68232E1	1.20188E-7	2.51085E-3	2.51085E-3	6.33112E-3	3.00479E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09426E0	-8.15773E-1	-7.9875E-1	-9.13129E0	-9.14185E0	4.86374E-3	9.40323E-2	2.72827E1	-3.26496E1	-3.26296E1	2.67932E1	1.20122E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.15916E-1	-7.98273E-1	-9.13136E0	-9.1418E0	4.64916E-3	9.38654E-2	2.72837E1	-3.26487E1	-3.26682E1	2.67974E1	1.20106E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.00966E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.16083E-1	-7.98225E-1	-9.13131E0	-9.14209E0	5.05447E-3	9.38416E-2	2.73541E1	-3.26567E1	-3.2626E1	2.67854E1	1.20137E-7	2.50914E-3	2.50914E-3	6.32418E-3	3.01475E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.16035E-1	-7.97677E-1	-9.13107E0	-9.1418E0	4.64916E-3	9.38177E-2	2.73822E1	-3.26364E1	-3.26463E1	2.68343E1	1.20106E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.01866E-1