[Scan]
initial_time=2016-01-27T23:11:33
final_time=2016-01-27T23:11:53
ip_count=19
run=1025
dataset=6
scan=460
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08767E-4
ql1_vset=
ql1_vmon=-8.16417E-1
ql1_imon=6.40261E-10
ql2_vset=
ql2_vmon=-7.98464E-1
ql2_imon=2.93326E-10
ql3_vset=
ql3_vmon=-9.13172E0
ql3_imon=5.71919E-10
ql4_vset=
ql4_vmon=-9.14209E0
ql4_imon=5.52964E-10
mult1=-9.36713E-9
mult2=-2.79646E-9
rf_tmon=-3.52707E-3
rf_agc=3.37301E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=3.9537E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63672E0
bslens_imon=2.47601E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19925E1
lens5a_imon=1.99784E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12468E2
lens4a_imon=2.05104E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53841E1
cs_ef1b_imon=2.75003E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04635E2
lens23_imon=1.02277E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04711E1
cs_ea1_imon=2.57795E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35958E0
lens1_imon=2.67776E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64539E1
os_ef1alow_imon=2.9926E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0395E1
cs_ea2_imon=1.52781E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84122E1
cs_ef1a_imon=2.8873E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=3.96359E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10996E1
os_restr1_imon=2.88452E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15783E1
os_ea1_imon=1.88104E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63641E1
os_ef1bup_imon=3.08087E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21493E0
cs_ionrep_imon=1.18696E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.9347E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01844E1
cs_anode1_imon=2.90606E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=7.45833E-10
tplens_vset=1.4E-1
tplens_vmon=1.64084E0
tplens_imon=-2.63493E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26344E1
iondef3_imon=1.50303E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26807E1
iondef2_imon=1.5816E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02925E2
lens6_imon=2.98477E-4
ql6_vset=1.0E-1
ql6_vmon=9.40084E-2
ql6_imon=3.68941E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23794E0
ionrepsh_imon=1.74619E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33823E1
lens5b_imon=2.17799E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74727E1
cs_ef2b_imon=3.13578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.87326E-1
os_ea2_imon=-5.2187E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06133E2
lens4b_imon=2.00393E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71153E1
cs_ef2a_imon=3.19694E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62971E0
os_ef2alow_imon=-2.54331E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.33518E-1
os_ef2bup_imon=-5.26095E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10863E1
os_restr2_imon=2.87305E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23022E2
cs_ionfoca_imon=6.3099E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02029E1
cs_anode2_imon=2.24472E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73484E1
iondef1_imon=1.09423E-5
iondef4_vset=2.691E1
iondef4_vmon=2.681E1
iondef4_imon=1.07878E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=2.05435E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=3.20804E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11798E0
cs_ionaccel_imon=-1.66407E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47376E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56446E1
einzel_imon=7.7921E-6
window_vset=0.0E0
window_vmon=2.2174E-1
window_imon=-1.0976E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8265E2
mask1_imon=2.39234E-4
mask2_vset=0.0E0
mask2_vmon=-1.86553E1
mask2_imon=-7.43124E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.65416E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.52863E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50151E3
multb_neg_imon=6.93212E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.63148E0
defgridb_imon=6.41183E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33778E1
os_fil1_imon=4.43191E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.52489E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62147E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30452E1
cs_fil1_imon=9.97231E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62493E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62202E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.2183E-2
os_fil2_imon=-2.32166E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.94483E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.3642E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31275E-1
cs_fil2_imon=-2.00889E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25785E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21374E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.15389E-1
res40_imon=-2.48075E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.15511E-1	-7.98512E-1	-9.13143E0	-9.14135E0	4.72069E-3	9.39608E-2	2.73045E1	-3.26756E1	-3.26042E1	2.68082E1	1.20158E-7	2.51686E-3	2.51686E-3	6.3074E-3	3.01223E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.15964E-1	-7.98273E-1	-9.13141E0	-9.14168E0	4.98295E-3	9.38892E-2	2.73242E1	-3.26903E1	-3.26202E1	2.6803E1					
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.15701E-1	-7.98583E-1	-9.13115E0	-9.14166E0	5.19753E-3	9.408E-2	2.72115E1	-3.26666E1	-3.26023E1	2.68101E1	1.19841E-7	2.52131E-3	2.52131E-3	6.33919E-3	3.02621E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.15797E-1	-7.98249E-1	-9.13103E0	-9.14154E0	5.43594E-3	9.38892E-2	2.74725E1	-3.26625E1	-3.26388E1	2.68099E1	1.20045E-7	2.52066E-3	2.52066E-3	6.3245E-3	3.01609E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.15964E-1	-7.98106E-1	-9.13119E0	-9.14176E0	4.93526E-3	9.36747E-2	2.72271E1	-3.26778E1	-3.26404E1	2.68238E1	1.20344E-7	2.51709E-3	2.51709E-3	6.3074E-3	2.99093E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.1594E-1	-7.98559E-1	-9.13126E0	-9.14168E0	4.8399E-3	9.3627E-2	2.731E1	-3.26621E1	-3.25813E1	2.68238E1	1.20425E-7	2.52066E-3	2.52066E-3	6.31879E-3	3.01337E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.15701E-1	-7.98368E-1	-9.13119E0	-9.14159E0	4.93526E-3	9.36031E-2	2.73605E1	-3.26673E1	-3.26349E1	2.68076E1	1.19913E-7	2.5188E-3	2.5188E-3	6.29098E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.15654E-1	-7.98225E-1	-9.13136E0	-9.14173E0	4.79221E-3	9.35555E-2	2.71891E1	-3.26591E1	-3.26314E1	2.68058E1	1.20017E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.15535E-1	-7.98392E-1	-9.13146E0	-9.1418E0	4.69685E-3	9.36508E-2	2.73952E1	-3.26627E1	-3.26122E1	2.6813E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.03449E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.15773E-1	-7.98392E-1	-9.13126E0	-9.14211E0	4.72069E-3	9.36031E-2	2.72957E1	-3.26573E1	-3.26927E1	2.67902E1	1.19861E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00041E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.1594E-1	-7.98559E-1	-9.13131E0	-9.14147E0	4.88758E-3	9.36747E-2	2.73033E1	-3.26682E1	-3.26217E1	2.67801E1	1.20363E-7	2.52061E-3	2.52061E-3	6.28056E-3	2.98156E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.16274E-1	-7.9813E-1	-9.13136E0	-9.14152E0	5.14984E-3	9.37223E-2	2.72909E1	-3.26549E1	-3.26431E1	2.67937E1	1.20122E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.9874E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.1594E-1	-7.98273E-1	-9.13136E0	-9.14164E0	5.00679E-3	9.40084E-2	2.72781E1	-3.26699E1	-3.26062E1	2.67758E1	1.20226E-7	2.52538E-3	2.52538E-3	6.31837E-3	2.9926E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.15892E-1	-7.98249E-1	-9.13136E0	-9.1418E0	4.81606E-3	9.37462E-2	2.7108E1	-3.26651E1	-3.26164E1	2.67914E1	1.20017E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.01085E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09619E0	-8.15773E-1	-7.98655E-1	-9.13167E0	-9.14187E0	4.673E-3	9.40323E-2	2.73588E1	-3.26632E1	-3.26484E1	2.67968E1	1.20466E-7	2.51847E-3	2.51847E-3	6.29128E-3	3.01738E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09611E0	-8.16178E-1	-7.98345E-1	-9.13169E0	-9.14197E0	5.00679E-3	9.377E-2	2.72757E1	-3.26783E1	-3.25665E1	2.68088E1	1.19861E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.00302E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09588E0	-8.1563E-1	-7.98297E-1	-9.13153E0	-9.1419E0	4.86374E-3	9.39131E-2	2.74119E1	-3.26301E1	-3.26561E1	2.67972E1	1.20435E-7	2.52647E-3	2.52647E-3	6.33486E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.15511E-1	-7.98273E-1	-9.13165E0	-9.14209E0	5.05447E-3	9.37223E-2	2.72576E1	-3.26867E1	-3.26338E1	2.68202E1	1.19953E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.9943E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0958E0	-8.16131E-1	-7.98249E-1	-9.13162E0	-9.14187E0	4.88758E-3	9.35316E-2	2.72078E1	-3.26573E1	-3.26101E1	2.67872E1	1.20278E-7	2.52647E-3	2.52647E-3	6.33486E-3	2.99E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.16417E-1	-7.98464E-1	-9.13172E0	-9.14209E0	4.93526E-3	9.40084E-2	2.73484E1	-3.26807E1	-3.26344E1	2.681E1	1.20055E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.00453E-1