[Scan]
initial_time=2016-01-27T23:12:27
final_time=2016-01-27T23:12:46
ip_count=19
run=1025
dataset=6
scan=462
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09603E0
qbias_imon=-1.08786E-4
ql1_vset=
ql1_vmon=-8.15701E-1
ql1_imon=7.05385E-10
ql2_vset=
ql2_vmon=-7.98559E-1
ql2_imon=3.13723E-10
ql3_vset=
ql3_vmon=-9.13129E0
ql3_imon=6.46329E-10
ql4_vset=
ql4_vmon=-9.14173E0
ql4_imon=5.83208E-10
mult1=-9.99324E-9
mult2=-2.75853E-9
rf_tmon=-3.89357E-3
rf_agc=3.2901E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=3.87108E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63023E0
bslens_imon=2.59989E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20013E1
lens5a_imon=1.99571E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.05114E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53778E1
cs_ef1b_imon=2.77402E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02015E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04764E1
cs_ea1_imon=2.55883E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40264E0
lens1_imon=2.41938E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64611E1
os_ef1alow_imon=2.975E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0369E1
cs_ea2_imon=1.52179E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8425E1
cs_ef1a_imon=2.89857E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=3.90565E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11165E1
os_restr1_imon=2.87911E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15382E1
os_ea1_imon=1.89413E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63727E1
os_ef1bup_imon=3.07762E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22673E0
cs_ionrep_imon=1.18271E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91897E2
cs_nozzle_imon=1.93576E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01803E1
cs_anode1_imon=2.91839E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20477E0
olens4_imon=7.1348E-10
tplens_vset=1.4E-1
tplens_vmon=1.63258E0
tplens_imon=-2.59954E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26609E1
iondef3_imon=1.51365E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26464E1
iondef2_imon=1.56568E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02904E2
lens6_imon=2.98356E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=3.83449E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24561E0
ionrepsh_imon=1.75397E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33799E1
lens5b_imon=2.17622E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74543E1
cs_ef2b_imon=3.12822E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.17411E-1
os_ea2_imon=-5.39567E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06066E2
lens4b_imon=2.00513E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71311E1
cs_ef2a_imon=3.19509E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62395E0
os_ef2alow_imon=-2.46394E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.5339E-1
os_ef2bup_imon=-5.24162E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10781E1
os_restr2_imon=2.86672E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.30459E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01721E1
cs_anode2_imon=2.24113E-5
iondef1_vset=2.763E1
iondef1_vmon=2.71957E1
iondef1_imon=1.08538E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6783E1
iondef4_imon=1.08441E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.99906E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=2.85745E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1213E0
cs_ionaccel_imon=-1.86241E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02099E2
cs_ionfocb_imon=1.47318E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56104E1
einzel_imon=7.67722E-6
window_vset=0.0E0
window_vmon=2.01889E-1
window_imon=-1.19718E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39342E-4
mask2_vset=0.0E0
mask2_vmon=-1.8678E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92626E3
multa_neg_imon=7.50905E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.63128E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.31084E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.74074E0
defgridb_imon=6.11806E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33778E1
os_fil1_imon=4.56261E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.54079E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63047E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30436E1
cs_fil1_imon=9.96883E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63846E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62906E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.93972E-2
os_fil2_imon=-2.4612E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.41346E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.10856E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31749E-1
cs_fil2_imon=-2.46709E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25416E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21383E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32858E-3
inlet_lpb_pmon=3.01862E-1
chamber_ion_pmon=1.19941E-7
chamber_cvt_pmon=2.52131E-3
foreline_cvt_pmon=2.52131E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.20031E-1
res40_imon=-2.55948E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09426E0	-8.1656E-1	-7.97963E-1	-9.13117E0	-9.14195E0	4.95911E-3	9.38416E-2	2.72915E1	-3.26938E1	-3.26054E1	2.67999E1	1.19749E-7	2.52492E-3	2.52492E-3	6.3074E-3	2.99686E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.16464E-1	-7.9813E-1	-9.1315E0	-9.14171E0	4.8399E-3	9.38416E-2	2.7311E1	-3.26537E1	-3.26119E1	2.68123E1	1.20004E-7	2.51739E-3	2.51739E-3	6.28592E-3	2.9943E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.16345E-1	-7.98273E-1	-9.13124E0	-9.14187E0	5.00679E-3	9.40084E-2	2.73387E1	-3.26669E1	-3.26518E1	2.68034E1	1.19953E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.02253E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0941E0	-8.16274E-1	-7.98392E-1	-9.13105E0	-9.14161E0	5.126E-3	9.37223E-2	2.72066E1	-3.26464E1	-3.26158E1	2.68118E1	1.20137E-7	2.52027E-3	2.52027E-3	6.31299E-3	3.00942E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.15964E-1	-7.98726E-1	-9.13107E0	-9.14223E0	4.86374E-3	9.40323E-2	2.73532E1	-3.26506E1	-3.26296E1	2.67998E1	1.19913E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.02396E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09402E0	-8.16035E-1	-7.98559E-1	-9.13138E0	-9.14178E0	4.86374E-3	9.41515E-2	2.73105E1	-3.26488E1	-3.2623E1	2.67752E1	1.20174E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09263E0	-8.1625E-1	-7.98249E-1	-9.13136E0	-9.14204E0	5.05447E-3	9.39846E-2	2.72835E1	-3.26543E1	-3.26651E1	2.6819E1	1.20069E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09348E0	-8.1625E-1	-7.97725E-1	-9.13157E0	-9.14199E0	4.86374E-3	9.41038E-2	2.72885E1	-3.26581E1	-3.26045E1	2.67875E1	1.20174E-7	2.52209E-3	2.52209E-3	6.33486E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09379E0	-8.16321E-1	-7.98178E-1	-9.13126E0	-9.14216E0	5.24521E-3	9.36031E-2	2.72518E1	-3.26229E1	-3.26866E1	2.68257E1	1.20203E-7	2.51941E-3	2.51941E-3	6.3111E-3	2.98267E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09348E0	-8.16083E-1	-7.98273E-1	-9.13126E0	-9.14216E0	4.81606E-3	9.35316E-2	2.72645E1	-3.26605E1	-3.26503E1	2.67798E1	1.19872E-7	2.52362E-3	2.52362E-3	6.30182E-3	3.01475E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.16035E-1	-7.98416E-1	-9.13103E0	-9.14209E0	4.88758E-3	9.39131E-2	2.73184E1	-3.26724E1	-3.25988E1	2.68001E1	1.198E-7	2.52169E-3	2.52169E-3	6.32536E-3	3.00539E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.16178E-1	-7.97987E-1	-9.13141E0	-9.14211E0	5.05447E-3	9.35793E-2	2.73021E1	-3.26741E1	-3.26386E1	2.6792E1	1.19953E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.03286E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.15916E-1	-7.98178E-1	-9.13134E0	-9.14218E0	5.03063E-3	9.36508E-2	2.73057E1	-3.26573E1	-3.26482E1	2.68155E1	1.20124E-7	2.52096E-3	2.52096E-3	6.31808E-3	3.0002E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.15487E-1	-7.98464E-1	-9.13134E0	-9.14204E0	4.88758E-3	9.3627E-2	2.72995E1	-3.26585E1	-3.25942E1	2.68182E1					
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.15845E-1	-7.98512E-1	-9.13124E0	-9.14204E0	5.14984E-3	9.41992E-2	2.73327E1	-3.26506E1	-3.26284E1	2.68238E1	1.20045E-7	2.51045E-3	2.51045E-3	6.33021E-3	2.9863E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09426E0	-8.15701E-1	-7.98464E-1	-9.13119E0	-9.14176E0	4.98295E-3	9.39846E-2	2.73147E1	-3.26813E1	-3.26524E1	2.67962E1	1.20122E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.9926E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.15892E-1	-7.98106E-1	-9.13138E0	-9.14183E0	5.07832E-3	9.38892E-2	2.73086E1	-3.2666E1	-3.26057E1	2.68186E1	1.19913E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.98222E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.15606E-1	-7.98631E-1	-9.13138E0	-9.14187E0	4.8399E-3	9.35078E-2	2.7171E1	-3.26297E1	-3.27019E1	2.68163E1	1.19991E-7	2.51182E-3	2.51182E-3	6.31269E-3	3.00097E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.15511E-1	-7.98464E-1	-9.13112E0	-9.14183E0	4.79221E-3	9.377E-2	2.73942E1	-3.26679E1	-3.26042E1	2.68053E1	1.20191E-7	2.51693E-3	2.51693E-3	6.32978E-3	3.02813E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09603E0	-8.15701E-1	-7.98559E-1	-9.13129E0	-9.14173E0	4.55379E-3	9.35793E-2	2.71957E1	-3.26464E1	-3.26609E1	2.6783E1	1.19941E-7	2.52131E-3	2.52131E-3	6.32858E-3	3.01862E-1