[Scan]
initial_time=2016-01-27T23:13:47
final_time=2016-01-27T23:14:06
ip_count=19
run=1025
dataset=6
scan=465
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08841E-4
ql1_vset=
ql1_vmon=-8.15582E-1
ql1_imon=6.16896E-10
ql2_vset=
ql2_vmon=-7.98392E-1
ql2_imon=2.96903E-10
ql3_vset=
ql3_vmon=-9.13153E0
ql3_imon=5.70846E-10
ql4_vset=
ql4_vmon=-9.1418E0
ql4_imon=5.6504E-10
mult1=-1.02205E-8
mult2=-2.6723E-9
rf_tmon=-5.14067E-3
rf_agc=3.3026E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.43594E-3
ql5_imon=4.01127E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64793E0
bslens_imon=2.40168E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19748E1
lens5a_imon=2.0035E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12464E2
lens4a_imon=2.05008E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53526E1
cs_ef1b_imon=2.76646E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04626E2
lens23_imon=1.02025E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04616E1
cs_ea1_imon=2.57512E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37669E0
lens1_imon=2.55034E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6453E1
os_ef1alow_imon=2.99567E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03826E1
cs_ea2_imon=1.53665E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84538E1
cs_ef1a_imon=2.89224E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=3.98946E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11195E1
os_restr1_imon=2.88215E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15294E1
os_ea1_imon=1.87785E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63785E1
os_ef1bup_imon=3.08649E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2226E0
cs_ionrep_imon=1.1859E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93165E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01803E1
cs_anode1_imon=2.90558E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2047E0
olens4_imon=7.2782E-10
tplens_vset=1.4E-1
tplens_vmon=1.63966E0
tplens_imon=-1.14838E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26602E1
iondef3_imon=1.48073E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26366E1
iondef2_imon=1.5763E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02918E2
lens6_imon=2.98339E-4
ql6_vset=1.0E-1
ql6_vmon=9.39608E-2
ql6_imon=4.15254E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29988E0
ionrepsh_imon=1.75008E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33481E1
lens5b_imon=2.17375E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74543E1
cs_ef2b_imon=3.11965E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.07383E-1
os_ea2_imon=-5.32488E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06072E2
lens4b_imon=2.00655E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70921E1
cs_ef2a_imon=3.18705E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61798E0
os_ef2alow_imon=-2.56905E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.34955E-1
os_ef2bup_imon=-5.14228E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10775E1
os_restr2_imon=2.88756E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.30671E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01785E1
cs_anode2_imon=2.25398E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73063E1
iondef1_imon=1.10237E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68082E1
iondef4_imon=1.09386E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.02951E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=2.95961E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10972E0
cs_ionaccel_imon=-1.71851E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47158E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56111E1
einzel_imon=7.56891E-6
window_vset=0.0E0
window_vmon=2.20947E-1
window_imon=-1.08782E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39095E-4
mask2_vset=0.0E0
mask2_vmon=-1.86915E1
mask2_imon=-6.6255E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92581E3
multa_neg_imon=7.89484E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.32689E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.21882E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.53109E0
defgridb_imon=6.18885E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33746E1
os_fil1_imon=4.8483E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.16685E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63061E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3045E1
cs_fil1_imon=9.96017E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62816E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63112E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.01569E-2
os_fil2_imon=-2.53983E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.95952E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.09843E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32112E-1
cs_fil2_imon=-2.40168E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.83939E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21391E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.41272E-1
res40_imon=-2.47895E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.16011E-1	-7.98512E-1	-9.13165E0	-9.14216E0	4.86374E-3	9.38892E-2	2.72821E1	-3.26325E1	-3.26343E1	2.6785E1	1.19953E-7	2.52492E-3	2.52492E-3	6.30202E-3	2.99686E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09603E0	-8.16202E-1	-7.98106E-1	-9.13141E0	-9.14223E0	5.05447E-3	9.35793E-2	2.72618E1	-3.26873E1	-3.26176E1	2.67752E1	1.20004E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.01223E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.15868E-1	-7.98488E-1	-9.13148E0	-9.14197E0	5.07832E-3	9.38892E-2	2.72396E1	-3.26516E1	-3.26385E1	2.68163E1	1.20069E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.02396E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.1594E-1	-7.98011E-1	-9.13117E0	-9.14171E0	5.50747E-3	9.36508E-2	2.72907E1	-3.26491E1	-3.26429E1	2.67982E1	1.20064E-7	2.51142E-3	2.51142E-3	6.32784E-3	3.02097E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.16011E-1	-7.97939E-1	-9.13115E0	-9.14199E0	4.86374E-3	9.36985E-2	2.72853E1	-3.26561E1	-3.26326E1	2.68166E1	1.20171E-7	2.52106E-3	2.52106E-3	6.32483E-3	3.02303E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.15701E-1	-7.98106E-1	-9.13136E0	-9.14197E0	4.64916E-3	9.36985E-2	2.73284E1	-3.26579E1	-3.26277E1	2.68149E1	1.20004E-7	2.5131E-3	2.5131E-3	6.30202E-3	2.97647E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-8.15487E-1	-7.98011E-1	-9.13122E0	-9.14183E0	4.93526E-3	9.37223E-2	2.72745E1	-3.26787E1	-3.2634E1	2.68038E1	1.19941E-7	2.51919E-3	2.51919E-3	6.32328E-3	2.97095E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09611E0	-8.15487E-1	-7.98368E-1	-9.13122E0	-9.1419E0	4.76837E-3	9.37939E-2	2.7288E1	-3.26561E1	-3.26349E1	2.68499E1	1.19653E-7	2.51552E-3	2.51552E-3	6.29645E-3	2.97704E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.15392E-1	-7.98035E-1	-9.13126E0	-9.14161E0	5.05447E-3	9.36747E-2	2.73051E1	-3.26561E1	-3.25665E1	2.6822E1	1.20106E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.9943E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.15415E-1	-7.98011E-1	-9.13124E0	-9.1418E0	5.19753E-3	9.38177E-2	2.73484E1	-3.26969E1	-3.26314E1	2.6795E1	1.19809E-7	2.5188E-3	2.5188E-3	6.34588E-3	3.00563E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.15916E-1	-7.98416E-1	-9.13129E0	-9.14185E0	5.36442E-3	9.39608E-2	2.72672E1	-3.26627E1	-3.25834E1	2.68172E1	1.20084E-7	2.51804E-3	2.51804E-3	6.31858E-3	3.00144E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09642E0	-8.15654E-1	-7.97963E-1	-9.13143E0	-9.14197E0	4.98295E-3	9.39846E-2	2.73628E1	-3.26669E1	-3.26368E1	2.67968E1	1.20174E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.02659E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.15654E-1	-7.98392E-1	-9.13153E0	-9.1418E0	4.8399E-3	9.4223E-2	2.73033E1	-3.27101E1	-3.262E1	2.68124E1	1.20004E-7	2.50989E-3	2.50989E-3	6.33436E-3	3.00453E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.15868E-1	-7.98368E-1	-9.13131E0	-9.14209E0	4.64916E-3	9.41515E-2	2.72943E1	-3.2653E1	-3.26627E1	2.67818E1	1.20069E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.9952E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0958E0	-8.15368E-1	-7.9844E-1	-9.13126E0	-9.14185E0	4.91142E-3	9.38892E-2	2.73086E1	-3.26549E1	-3.26815E1	2.68148E1	1.19913E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.15678E-1	-7.98392E-1	-9.13141E0	-9.14166E0	4.74453E-3	9.36985E-2	2.72845E1	-3.26691E1	-3.26354E1	2.67902E1	1.19913E-7	2.51225E-3	2.51225E-3	6.30192E-3	2.9952E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.15797E-1	-7.98559E-1	-9.13117E0	-9.14164E0	4.8399E-3	9.35793E-2	2.73664E1	-3.26585E1	-3.26526E1	2.67962E1	1.19697E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.9943E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09595E0	-8.15988E-1	-7.98464E-1	-9.13131E0	-9.14171E0	4.88758E-3	9.39608E-2	2.72451E1	-3.26615E1	-3.26285E1	2.67956E1	1.19749E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.9943E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.15678E-1	-7.98392E-1	-9.13141E0	-9.14173E0	4.95911E-3	9.39608E-2	2.7347E1	-3.26779E1	-3.26573E1	2.68004E1	1.20252E-7	2.51552E-3	2.51552E-3	6.30466E-3	2.9978E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.15582E-1	-7.98392E-1	-9.13153E0	-9.1418E0	5.43594E-3	9.39608E-2	2.73063E1	-3.26366E1	-3.26602E1	2.68082E1