[Scan]
initial_time=2016-01-27T23:14:40
final_time=2016-01-27T23:15:00
ip_count=19
run=1025
dataset=6
scan=467
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08819E-4
ql1_vset=
ql1_vmon=-8.15654E-1
ql1_imon=6.3796E-10
ql2_vset=
ql2_vmon=-7.98082E-1
ql2_imon=3.05581E-10
ql3_vset=
ql3_vmon=-9.13188E0
ql3_imon=5.69677E-10
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=5.3947E-10
mult1=-9.17448E-9
mult2=-2.90225E-9
rf_tmon=-4.72271E-3
rf_agc=3.33216E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=4.04382E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65773E0
bslens_imon=2.46926E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19803E1
lens5a_imon=1.9719E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.05151E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53586E1
cs_ef1b_imon=2.77763E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04595E2
lens23_imon=1.02002E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04898E1
cs_ea1_imon=2.57284E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33411E0
lens1_imon=2.48007E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64765E1
os_ef1alow_imon=2.98054E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04111E1
cs_ea2_imon=1.55048E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84208E1
cs_ef1a_imon=2.90197E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=3.93951E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1122E1
os_restr1_imon=2.88251E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15288E1
os_ea1_imon=1.85654E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63497E1
os_ef1bup_imon=3.07893E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2545E0
cs_ionrep_imon=1.20404E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93449E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01755E1
cs_anode1_imon=2.93008E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=7.39634E-10
tplens_vset=1.4E-1
tplens_vmon=1.64564E0
tplens_imon=-3.42605E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26326E1
iondef3_imon=1.48775E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26609E1
iondef2_imon=1.56345E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02902E2
lens6_imon=2.98422E-4
ql6_vset=1.0E-1
ql6_vmon=9.36508E-2
ql6_imon=3.91018E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28695E0
ionrepsh_imon=1.74082E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33435E1
lens5b_imon=2.17666E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74621E1
cs_ef2b_imon=3.12722E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.43913E-1
os_ea2_imon=-3.20976E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06066E2
lens4b_imon=2.00406E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.713E1
cs_ef2a_imon=3.21119E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64681E0
os_ef2alow_imon=-2.53661E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.69793E-1
os_ef2bup_imon=-5.23598E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10955E1
os_restr2_imon=2.86701E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.32416E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01869E1
cs_anode2_imon=2.23812E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7257E1
iondef1_imon=1.09697E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6804E1
iondef4_imon=1.10035E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.02914E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=2.72727E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10792E0
cs_ionaccel_imon=-1.85907E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02111E2
cs_ionfocb_imon=1.47378E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56177E1
einzel_imon=7.58693E-6
window_vset=0.0E0
window_vmon=2.07131E-1
window_imon=-9.32847E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.39088E-4
mask2_vset=0.0E0
mask2_vmon=-1.86446E1
mask2_imon=-5.68847E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92569E3
multa_neg_imon=8.35615E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.63658E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=6.99347E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.41035E0
defgridb_imon=6.0634E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33747E1
os_fil1_imon=4.99847E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.77953E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63574E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30468E1
cs_fil1_imon=9.97218E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64324E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63724E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.75727E-2
os_fil2_imon=-2.35362E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.31991E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.73963E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31594E-1
cs_fil2_imon=-2.19145E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.17866E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21438E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34164E-3
inlet_lpb_pmon=2.99981E-1
chamber_ion_pmon=1.19829E-7
chamber_cvt_pmon=2.51611E-3
foreline_cvt_pmon=2.51611E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.2085E-1
res40_imon=-2.44291E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09634E0	-8.16083E-1	-7.97796E-1	-9.13122E0	-9.14171E0	4.50611E-3	9.39369E-2	2.73021E1	-3.26608E1	-3.26419E1	2.67862E1	1.20004E-7	2.52492E-3	2.52492E-3	6.31278E-3	2.99175E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.15487E-1	-7.97892E-1	-9.1315E0	-9.14156E0	4.88758E-3	9.37939E-2	2.72654E1	-3.26717E1	-3.26494E1	2.67992E1	1.20278E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00563E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.15821E-1	-7.98178E-1	-9.13165E0	-9.14161E0	4.76837E-3	9.34839E-2	2.7298E1	-3.26602E1	-3.26301E1	2.68105E1	1.20158E-7	2.52169E-3	2.52169E-3	6.33436E-3	2.99941E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.15892E-1	-7.98273E-1	-9.13174E0	-9.14197E0	4.64916E-3	9.34839E-2	2.73193E1	-3.26561E1	-3.2636E1	2.67944E1	1.19902E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.01738E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.15773E-1	-7.98345E-1	-9.13134E0	-9.1418E0	4.98295E-3	9.3627E-2	2.72787E1	-3.26554E1	-3.25383E1	2.68112E1	1.20226E-7	2.5199E-3	2.5199E-3	6.28552E-3	3.02922E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0958E0	-8.15916E-1	-7.98059E-1	-9.13148E0	-9.14183E0	4.91142E-3	9.38892E-2	2.73267E1	-3.26675E1	-3.25876E1	2.67842E1	1.19809E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.03449E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.16035E-1	-7.98392E-1	-9.13112E0	-9.14202E0	4.69685E-3	9.377E-2	2.73189E1	-3.26711E1	-3.2602E1	2.68166E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.03185E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09418E0	-8.15988E-1	-7.97844E-1	-9.13105E0	-9.14195E0	4.673E-3	9.36508E-2	2.72665E1	-3.26572E1	-3.26303E1	2.68325E1	1.20226E-7	2.52318E-3	2.52318E-3	6.32936E-3	3.02659E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.16035E-1	-7.97892E-1	-9.13117E0	-9.14207E0	4.72069E-3	9.37939E-2	2.73016E1	-3.26655E1	-3.26054E1	2.67931E1	1.19913E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.02133E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0941E0	-8.15797E-1	-7.98178E-1	-9.13141E0	-9.14202E0	4.57764E-3	9.36985E-2	2.7347E1	-3.26874E1	-3.26596E1	2.68046E1	1.198E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.00453E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.15916E-1	-7.98273E-1	-9.1315E0	-9.14195E0	4.45843E-3	9.34839E-2	2.73345E1	-3.2641E1	-3.25984E1	2.68214E1	1.20055E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.00453E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.15964E-1	-7.98392E-1	-9.13122E0	-9.1419E0	4.45843E-3	9.35793E-2	2.73057E1	-3.26476E1	-3.26729E1	2.68308E1	1.20226E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.1594E-1	-7.98392E-1	-9.13124E0	-9.14202E0	4.93526E-3	9.3627E-2	2.73936E1	-3.26467E1	-3.26148E1	2.67974E1	1.20017E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.01871E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.15701E-1	-7.98321E-1	-9.13153E0	-9.14195E0	4.88758E-3	9.36508E-2	2.72931E1	-3.26374E1	-3.26338E1	2.6801E1	1.19902E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.03027E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.15463E-1	-7.98297E-1	-9.13172E0	-9.14166E0	5.17368E-3	9.37462E-2	2.72835E1	-3.26693E1	-3.26621E1	2.68526E1	1.19872E-7	2.52362E-3	2.52362E-3	6.31858E-3	3.01475E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.15558E-1	-7.98464E-1	-9.13186E0	-9.14173E0	4.50611E-3	9.36747E-2	2.72865E1	-3.26897E1	-3.26699E1	2.67872E1	1.20062E-7	2.51918E-3	2.51918E-3	6.32099E-3	3.01544E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.15725E-1	-7.98392E-1	-9.13179E0	-9.14159E0	4.93526E-3	9.377E-2	2.72813E1	-3.26585E1	-3.25924E1	2.68041E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.1563E-1	-7.98583E-1	-9.13169E0	-9.14161E0	4.64916E-3	9.36031E-2	2.73022E1	-3.26666E1	-3.26341E1	2.68134E1	1.20074E-7	2.51777E-3	2.51777E-3	6.32342E-3	2.98628E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.15392E-1	-7.98535E-1	-9.13181E0	-9.14176E0	4.98295E-3	9.35555E-2	2.73113E1	-3.26647E1	-3.26491E1	2.68076E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.15654E-1	-7.98082E-1	-9.13188E0	-9.14192E0	4.55379E-3	9.36508E-2	2.7257E1	-3.26609E1	-3.26326E1	2.6804E1	1.19829E-7	2.51611E-3	2.51611E-3	6.34164E-3	2.99981E-1