[Scan]
initial_time=2016-01-27T23:17:20
final_time=2016-01-27T23:17:40
ip_count=19
run=1025
dataset=6
scan=473
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08796E-4
ql1_vset=
ql1_vmon=-8.15821E-1
ql1_imon=6.66654E-10
ql2_vset=
ql2_vmon=-7.98154E-1
ql2_imon=3.40199E-10
ql3_vset=
ql3_vmon=-9.13174E0
ql3_imon=6.03378E-10
ql4_vset=
ql4_vmon=-9.14156E0
ql4_imon=5.66971E-10
mult1=-9.55388E-9
mult2=-2.84212E-9
rf_tmon=-5.13814E-3
rf_agc=3.32325E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=3.90899E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65172E0
bslens_imon=2.49449E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19676E1
lens5a_imon=1.98343E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.05183E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53502E1
cs_ef1b_imon=2.81512E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02254E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05577E1
cs_ea1_imon=2.53138E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37196E0
lens1_imon=2.43321E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64602E1
os_ef1alow_imon=2.99171E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03762E1
cs_ea2_imon=1.54363E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84586E1
cs_ef1a_imon=2.91603E-5
olens2_vset=9.7E-1
olens2_vmon=9.69839E-1
olens2_imon=4.14073E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11484E1
os_restr1_imon=2.87674E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1527E1
os_ea1_imon=1.87168E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63767E1
os_ef1bup_imon=3.09226E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22086E0
cs_ionrep_imon=1.18205E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91905E2
cs_nozzle_imon=1.93503E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01617E1
cs_anode1_imon=2.95531E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20458E0
olens4_imon=7.33161E-10
tplens_vset=1.4E-1
tplens_vmon=1.61079E0
tplens_imon=-2.45272E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26545E1
iondef3_imon=1.4827E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2677E1
iondef2_imon=1.57643E-5
lens6_vset=-6.0E2
lens6_vmon=-6.029E2
lens6_imon=2.98371E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=3.85416E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22386E0
ionrepsh_imon=1.7848E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33489E1
lens5b_imon=2.19901E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74699E1
cs_ef2b_imon=3.11965E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.30695E-1
os_ea2_imon=-6.34607E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.00392E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71065E1
cs_ef2a_imon=3.18236E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61858E0
os_ef2alow_imon=-2.41408E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.46968E-1
os_ef2bup_imon=-5.37293E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10829E1
os_restr2_imon=2.86629E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.28883E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.24965E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72369E1
iondef1_imon=1.0703E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68332E1
iondef4_imon=1.09674E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.10247E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=2.57051E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12534E0
cs_ionaccel_imon=-1.90952E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02027E2
cs_ionfocb_imon=1.47197E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56339E1
einzel_imon=7.64459E-6
window_vset=0.0E0
window_vmon=2.38966E-1
window_imon=-1.01574E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82636E2
mask1_imon=2.39077E-4
mask2_vset=0.0E0
mask2_vmon=-1.86686E1
mask2_imon=-7.16609E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9262E3
multa_neg_imon=7.64597E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.47076E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=6.96103E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.41035E0
defgridb_imon=6.03816E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33768E1
os_fil1_imon=5.00447E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.55728E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64708E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30393E1
cs_fil1_imon=9.97777E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63495E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65682E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.6154E-2
os_fil2_imon=-2.52782E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=6.13641E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.4803E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31723E-1
cs_fil2_imon=-2.27554E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04612E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21839E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32684E-3
inlet_lpb_pmon=2.99874E-1
chamber_ion_pmon=1.20072E-7
chamber_cvt_pmon=2.5157E-3
foreline_cvt_pmon=2.5157E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.18157E-1
res40_imon=-2.53301E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=183
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.16107E-1	-7.98059E-1	-9.13169E0	-9.1418E0	4.8399E-3	9.35793E-2	2.73033E1	-3.26703E1	-3.26172E1	2.68047E1	1.19965E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01347E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.15725E-1	-7.98011E-1	-9.13122E0	-9.14164E0	5.03063E-3	9.3627E-2	2.73135E1	-3.26446E1	-3.2653E1	2.6807E1	1.20004E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0941E0	-8.15272E-1	-7.98225E-1	-9.13124E0	-9.14185E0	4.62532E-3	9.37223E-2	2.73016E1	-3.27051E1	-3.26225E1	2.67902E1	1.19965E-7	2.52538E-3	2.52538E-3	6.33486E-3	3.01085E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09387E0	-8.15845E-1	-7.97892E-1	-9.13141E0	-9.14149E0	4.88758E-3	9.36747E-2	2.72848E1	-3.26392E1	-3.26108E1	2.68077E1	1.20158E-7	2.51525E-3	2.51525E-3	6.29128E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09364E0	-8.16011E-1	-7.97725E-1	-9.13138E0	-9.14178E0	4.64916E-3	9.36985E-2	2.73213E1	-3.26864E1	-3.26468E1	2.67939E1	1.19859E-7	2.51129E-3	2.51129E-3	6.31203E-3	2.99626E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09348E0	-8.15749E-1	-7.98273E-1	-9.13122E0	-9.14164E0	4.76837E-3	9.38416E-2	2.73132E1	-3.26728E1	-3.26616E1	2.67707E1	1.20005E-7	2.51642E-3	2.51642E-3	6.3016E-3	2.9871E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.15511E-1	-7.98225E-1	-9.13122E0	-9.14166E0	4.81606E-3	9.408E-2	2.73104E1	-3.26732E1	-3.25806E1	2.68123E1	1.19883E-7	2.51498E-3	2.51498E-3	6.33592E-3	2.97286E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09418E0	-8.15344E-1	-7.98154E-1	-9.1311E0	-9.14173E0	4.86374E-3	9.38416E-2	2.73271E1	-3.26762E1	-3.25954E1	2.67818E1	1.19902E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.00453E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-8.15535E-1	-7.97892E-1	-9.13129E0	-9.14173E0	4.95911E-3	9.37223E-2	2.72561E1	-3.26567E1	-3.26384E1	2.68112E1	1.20084E-7	2.51581E-3	2.51581E-3	6.3074E-3	3.01209E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-8.15749E-1	-7.98392E-1	-9.13141E0	-9.14159E0	5.10216E-3	9.3627E-2	2.73177E1	-3.26392E1	-3.26098E1	2.67842E1	1.20122E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.00824E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.15868E-1	-7.98202E-1	-9.13136E0	-9.1419E0	4.673E-3	9.36985E-2	2.72588E1	-3.26891E1	-3.26002E1	2.68028E1	1.20017E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.02396E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.15821E-1	-7.98583E-1	-9.13134E0	-9.14183E0	4.48227E-3	9.36985E-2	2.72678E1	-3.26765E1	-3.26188E1	2.6813E1	1.19809E-7	2.52209E-3	2.52209E-3	6.30192E-3	3.00824E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-8.15821E-1	-7.98583E-1	-9.1315E0	-9.14185E0	4.76837E-3	9.39369E-2	2.74119E1	-3.26472E1	-3.25145E1	2.68058E1	1.20017E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01871E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.16178E-1	-7.98345E-1	-9.1316E0	-9.14159E0	5.14984E-3	9.35555E-2	2.73592E1	-3.26518E1	-3.2635E1	2.67992E1	1.1969E-7	2.52025E-3	2.52025E-3	6.31269E-3	2.99845E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.15892E-1	-7.98368E-1	-9.13157E0	-9.14204E0	4.55379E-3	9.37939E-2	2.73135E1	-3.26573E1	-3.26122E1	2.68198E1	1.20137E-7	2.51248E-3	2.51248E-3	6.3074E-3	3.00144E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09426E0	-8.15558E-1	-7.98631E-1	-9.13141E0	-9.14168E0	4.55379E-3	9.39131E-2	2.72522E1	-3.26693E1	-3.25852E1	2.6813E1	1.20106E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.02769E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.15487E-1	-7.9844E-1	-9.13143E0	-9.1419E0	4.22001E-3	9.40084E-2	2.73841E1	-3.26655E1	-3.26419E1	2.6789E1	1.20278E-7	2.52538E-3	2.52538E-3	6.27461E-3	3.01871E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-8.15892E-1	-7.98464E-1	-9.13155E0	-9.14147E0	4.69685E-3	9.36747E-2	2.73267E1	-3.26194E1	-3.26723E1	2.67992E1	1.19953E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00197E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.15749E-1	-7.98607E-1	-9.1315E0	-9.14185E0	4.76837E-3	9.36031E-2	2.73338E1	-3.2646E1	-3.26444E1	2.68406E1	1.20297E-7	2.51693E-3	2.51693E-3	6.34099E-3	2.9829E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.15821E-1	-7.98154E-1	-9.13174E0	-9.14156E0	5.05447E-3	9.3627E-2	2.72369E1	-3.2677E1	-3.26545E1	2.68332E1	1.20072E-7	2.5157E-3	2.5157E-3	6.32684E-3	2.99874E-1