[Scan]
initial_time=2016-01-27T23:17:47
final_time=2016-01-27T23:18:06
ip_count=19
run=1025
dataset=6
scan=474
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08747E-4
ql1_vset=
ql1_vmon=-8.15845E-1
ql1_imon=7.2639E-10
ql2_vset=
ql2_vmon=-7.98488E-1
ql2_imon=3.28529E-10
ql3_vset=
ql3_vmon=-9.13148E0
ql3_imon=6.25837E-10
ql4_vset=
ql4_vmon=-9.14166E0
ql4_imon=6.27649E-10
mult1=-9.93676E-9
mult2=-2.80557E-9
rf_tmon=-4.02576E-3
rf_agc=3.32029E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.22137E-3
ql5_imon=3.99804E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65889E0
bslens_imon=2.56956E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19777E1
lens5a_imon=1.99293E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1251E2
lens4a_imon=2.05165E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53562E1
cs_ef1b_imon=2.83132E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02079E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05071E1
cs_ea1_imon=2.54411E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35602E0
lens1_imon=2.46268E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64646E1
os_ef1alow_imon=2.98177E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03913E1
cs_ea2_imon=1.55321E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84469E1
cs_ef1a_imon=2.94173E-5
olens2_vset=9.7E-1
olens2_vmon=9.69839E-1
olens2_imon=4.20737E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11061E1
os_restr1_imon=2.86014E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15141E1
os_ea1_imon=1.89102E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63673E1
os_ef1bup_imon=3.08844E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22729E0
cs_ionrep_imon=1.19441E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93435E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01753E1
cs_anode1_imon=2.95894E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2048E0
olens4_imon=7.64847E-10
tplens_vset=1.4E-1
tplens_vmon=1.59627E0
tplens_imon=-1.71052E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26219E1
iondef3_imon=1.48336E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26502E1
iondef2_imon=1.57459E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02937E2
lens6_imon=2.9838E-4
ql6_vset=1.0E-1
ql6_vmon=9.38177E-2
ql6_imon=4.01139E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.32717E0
ionrepsh_imon=1.78376E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34154E1
lens5b_imon=2.19065E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.13933E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.19597E-1
os_ea2_imon=-6.7108E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06085E2
lens4b_imon=2.00627E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71208E1
cs_ef2a_imon=3.19996E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6409E0
os_ef2alow_imon=-2.51443E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.67691E-1
os_ef2bup_imon=-5.36254E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10793E1
os_restr2_imon=2.87399E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.28516E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0164E1
cs_anode2_imon=2.2471E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72485E1
iondef1_imon=1.07876E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6801E1
iondef4_imon=1.09626E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.09502E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=3.15011E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12765E0
cs_ionaccel_imon=-1.89317E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02143E2
cs_ionfocb_imon=1.4763E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55987E1
einzel_imon=7.54936E-6
window_vset=0.0E0
window_vmon=2.15725E-1
window_imon=-1.04734E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.3917E-4
mask2_vset=0.0E0
mask2_vmon=-1.87142E1
mask2_imon=-6.05718E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=7.4706E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.60796E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50154E3
multb_neg_imon=6.94767E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.60884E0
defgridb_imon=6.169E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33764E1
os_fil1_imon=4.50454E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.25959E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64999E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30338E1
cs_fil1_imon=9.96232E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63507E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65938E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.63133E-2
os_fil2_imon=-2.24458E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=6.99582E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.36179E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30862E-1
cs_fil2_imon=-2.16973E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.21107E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2183E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40076E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.29444E-1
res40_imon=-2.47327E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.16059E-1	-7.98059E-1	-9.13153E0	-9.14209E0	4.57764E-3	9.35793E-2	2.72852E1	-3.26419E1	-3.26135E1	2.68071E1	1.20045E-7	2.51952E-3	2.51952E-3	6.3131E-3	3.02154E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.1594E-1	-7.98345E-1	-9.13157E0	-9.14242E0	4.62532E-3	9.33886E-2	2.73516E1	-3.26701E1	-3.26138E1	2.68244E1	1.20016E-7	2.51345E-3	2.51345E-3	6.32273E-3	3.01609E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.15868E-1	-7.98392E-1	-9.1316E0	-9.14218E0	4.57764E-3	9.35793E-2	2.74142E1	-3.26431E1	-3.26001E1	2.68285E1	1.19991E-7	2.51952E-3	2.51952E-3	6.33021E-3	2.9863E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.15964E-1	-7.98297E-1	-9.13157E0	-9.14204E0	4.72069E-3	9.35078E-2	2.72172E1	-3.26419E1	-3.26148E1	2.67962E1	1.20209E-7	2.51203E-3	2.51203E-3	6.34518E-3	2.9892E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.16178E-1	-7.98249E-1	-9.13167E0	-9.14202E0	4.72069E-3	9.38654E-2	2.73826E1	-3.26597E1	-3.26386E1	2.68012E1	1.20055E-7	2.51203E-3	2.51203E-3	6.33436E-3	2.99686E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.16083E-1	-7.98178E-1	-9.13172E0	-9.14204E0	4.93526E-3	9.35555E-2	2.7275E1	-3.26608E1	-3.2639E1	2.68088E1	1.20209E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.9943E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.16751E-1	-7.98249E-1	-9.13141E0	-9.14209E0	4.81606E-3	9.37223E-2	2.73529E1	-3.26508E1	-3.26172E1	2.68022E1	1.20122E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.16321E-1	-7.98416E-1	-9.13141E0	-9.14173E0	4.98295E-3	9.34601E-2	2.72971E1	-3.26707E1	-3.26297E1	2.68238E1	1.198E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.9943E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.16965E-1	-7.98273E-1	-9.13146E0	-9.14156E0	5.07832E-3	9.36508E-2	2.73004E1	-3.26455E1	-3.26726E1	2.6807E1	1.20031E-7	2.52139E-3	2.52139E-3	6.3074E-3	3.01475E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.16107E-1	-7.9813E-1	-9.13155E0	-9.14226E0	4.8399E-3	9.37939E-2	2.72979E1	-3.26368E1	-3.26386E1	2.68001E1	1.20004E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.00197E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.15654E-1	-7.98249E-1	-9.131E0	-9.14154E0	4.60148E-3	9.36031E-2	2.73213E1	-3.26452E1	-3.25179E1	2.68063E1	1.19851E-7	2.52384E-3	2.52384E-3	6.3074E-3	3.00453E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.15821E-1	-7.98392E-1	-9.13143E0	-9.14199E0	4.93526E-3	9.36031E-2	2.73275E1	-3.26891E1	-3.26697E1	2.67758E1	1.20137E-7	2.51581E-3	2.51581E-3	6.31858E-3	3.01742E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.15868E-1	-7.98273E-1	-9.13141E0	-9.14199E0	4.93526E-3	9.37939E-2	2.72433E1	-3.26499E1	-3.26113E1	2.68188E1	1.20106E-7	2.51954E-3	2.51954E-3	6.33436E-3	2.9943E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.15821E-1	-7.98702E-1	-9.13138E0	-9.14178E0	5.07832E-3	9.34839E-2	2.72927E1	-3.26396E1	-3.26083E1	2.67879E1	1.19965E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.00041E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.15701E-1	-7.98702E-1	-9.13155E0	-9.14178E0	4.72069E-3	9.36747E-2	2.73207E1	-3.26524E1	-3.25918E1	2.6804E1	1.20122E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.9926E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.15845E-1	-7.98798E-1	-9.13165E0	-9.1418E0	5.22137E-3	9.39608E-2	2.73103E1	-3.26868E1	-3.26249E1	2.68111E1	1.20017E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.00041E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.15535E-1	-7.98512E-1	-9.13155E0	-9.1418E0	4.74453E-3	9.35793E-2	2.73259E1	-3.26676E1	-3.2634E1	2.67932E1	1.20226E-7	2.51783E-3	2.51783E-3	6.33863E-3	3.00989E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09364E0	-8.15439E-1	-7.98154E-1	-9.13146E0	-9.14202E0	5.05447E-3	9.34839E-2	2.73088E1	-3.26738E1	-3.26211E1	2.68052E1	1.19937E-7	2.52179E-3	2.52179E-3	6.3074E-3	3.02154E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-8.15773E-1	-7.98249E-1	-9.13141E0	-9.14173E0	4.72069E-3	9.38892E-2	2.73139E1	-3.26661E1	-3.25877E1	2.6829E1	1.19809E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.02133E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.15845E-1	-7.98488E-1	-9.13148E0	-9.14166E0	5.22137E-3	9.38177E-2	2.72485E1	-3.26502E1	-3.26219E1	2.6801E1	1.20158E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.0148E-1