[Scan]
initial_time=2016-01-27T23:18:40
final_time=2016-01-27T23:19:00
ip_count=19
run=1025
dataset=6
scan=476
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08795E-4
ql1_vset=
ql1_vmon=-8.15773E-1
ql1_imon=6.53732E-10
ql2_vset=
ql2_vmon=-7.98154E-1
ql2_imon=3.26729E-10
ql3_vset=
ql3_vmon=-9.13177E0
ql3_imon=5.76556E-10
ql4_vset=
ql4_vmon=-9.14154E0
ql4_imon=6.07407E-10
mult1=-9.43937E-9
mult2=-2.65474E-9
rf_tmon=-5.52181E-3
rf_agc=3.19457E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=4.02582E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66444E0
bslens_imon=2.50079E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20013E1
lens5a_imon=2.0035E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.05008E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53383E1
cs_ef1b_imon=2.82683E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.02043E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04717E1
cs_ea1_imon=2.5199E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38849E0
lens1_imon=2.83349E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64742E1
os_ef1alow_imon=2.9919E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03932E1
cs_ea2_imon=1.54125E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84191E1
cs_ef1a_imon=2.92066E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=4.38666E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11343E1
os_restr1_imon=2.87201E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15258E1
os_ea1_imon=1.89413E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63589E1
os_ef1bup_imon=3.08817E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24561E0
cs_ionrep_imon=1.1997E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91856E2
cs_nozzle_imon=1.93562E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01699E1
cs_anode1_imon=2.96236E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=7.37023E-10
tplens_vset=1.4E-1
tplens_vmon=1.61902E0
tplens_imon=-3.05966E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2653E1
iondef3_imon=1.50091E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26831E1
iondef2_imon=1.57948E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02939E2
lens6_imon=2.98576E-4
ql6_vset=1.0E-1
ql6_vmon=9.38416E-2
ql6_imon=4.07171E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26626E0
ionrepsh_imon=1.77132E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33351E1
lens5b_imon=2.18932E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74507E1
cs_ef2b_imon=3.12431E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.51035E-1
os_ea2_imon=-5.96198E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00449E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71194E1
cs_ef2a_imon=3.19312E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60712E0
os_ef2alow_imon=-2.49465E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.43364E-1
os_ef2bup_imon=-5.20882E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10909E1
os_restr2_imon=2.86784E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.30141E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01705E1
cs_anode2_imon=2.24681E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73237E1
iondef1_imon=1.10201E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67914E1
iondef4_imon=1.09998E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.13739E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=3.15201E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13651E0
cs_ionaccel_imon=-1.8413E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02022E2
cs_ionfocb_imon=1.47257E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56399E1
einzel_imon=7.63571E-6
window_vset=0.0E0
window_vmon=2.17107E-1
window_imon=-1.0559E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.86715E1
mask2_imon=-5.65886E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9266E3
multa_neg_imon=7.5409E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.53571E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.47719E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.62558E0
defgridb_imon=6.14638E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33772E1
os_fil1_imon=4.90687E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.00939E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65515E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30338E1
cs_fil1_imon=9.97289E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63791E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66243E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.58515E-2
os_fil2_imon=-2.368E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.24978E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.47601E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30775E-1
cs_fil2_imon=-2.02626E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.33894E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21687E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.19646E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.23498E-1
res40_imon=-2.37997E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=198
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09418E0	-8.15821E-1	-7.98416E-1	-9.1315E0	-9.14178E0	5.07832E-3	9.3627E-2	2.73231E1	-3.26597E1	-3.26314E1	2.681E1	1.19902E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.0071E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09402E0	-8.16226E-1	-7.98392E-1	-9.13155E0	-9.1418E0	4.72069E-3	9.3627E-2	2.72532E1	-3.26461E1	-3.26431E1	2.6804E1	1.19809E-7	2.51225E-3	2.51225E-3	6.32386E-3	3.01609E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.15988E-1	-7.98297E-1	-9.13157E0	-9.14176E0	4.55379E-3	9.38892E-2	2.73273E1	-3.26573E1	-3.26338E1	2.68028E1	1.19749E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.03545E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0941E0	-8.16393E-1	-7.98178E-1	-9.13162E0	-9.1418E0	4.8399E-3	9.36747E-2	2.73075E1	-3.26549E1	-3.26398E1	2.67872E1	1.20226E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00041E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-8.1625E-1	-7.98464E-1	-9.13148E0	-9.14168E0	5.29289E-3	9.35793E-2	2.7329E1	-3.26517E1	-3.26389E1	2.68226E1	1.20278E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.99E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.16417E-1	-7.98607E-1	-9.1315E0	-9.14195E0	4.98295E-3	9.39131E-2	2.72803E1	-3.26874E1	-3.26042E1	2.68094E1	1.20174E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.98222E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.16202E-1	-7.98488E-1	-9.1315E0	-9.14195E0	4.91142E-3	9.39846E-2	2.72552E1	-3.26639E1	-3.26627E1	2.68124E1	1.19809E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.15916E-1	-7.98273E-1	-9.13146E0	-9.14223E0	4.55379E-3	9.37462E-2	2.72781E1	-3.26242E1	-3.25641E1	2.68322E1	1.20017E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.01871E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.16107E-1	-7.98059E-1	-9.13143E0	-9.14173E0	4.98295E-3	9.38416E-2	2.73523E1	-3.26626E1	-3.26779E1	2.67885E1	1.19913E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.02922E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.1625E-1	-7.9813E-1	-9.13157E0	-9.14176E0	4.74453E-3	9.37223E-2	2.73486E1	-3.26695E1	-3.2637E1	2.6816E1	1.19953E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.00966E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-8.1625E-1	-7.98297E-1	-9.13129E0	-9.14161E0	4.43459E-3	9.40084E-2	2.73222E1	-3.26809E1	-3.27098E1	2.67824E1	1.20383E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.97963E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.16154E-1	-7.98678E-1	-9.13141E0	-9.14168E0	4.673E-3	9.38654E-2	2.72499E1	-3.26602E1	-3.25349E1	2.67989E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9874E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.16011E-1	-7.98368E-1	-9.13148E0	-9.14161E0	4.62532E-3	9.38177E-2	2.73294E1	-3.26491E1	-3.26634E1	2.68257E1	1.19585E-7	2.52093E-3	2.52093E-3	6.30221E-3	3.0E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.15845E-1	-7.98321E-1	-9.13138E0	-9.14176E0	4.74453E-3	9.37223E-2	2.72955E1	-3.27023E1	-3.26392E1	2.68012E1	1.19829E-7	2.51952E-3	2.51952E-3	6.3245E-3	3.00794E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.16178E-1	-7.98488E-1	-9.13126E0	-9.14166E0	4.8399E-3	9.36985E-2	2.73321E1	-3.26512E1	-3.26338E1	2.68052E1	1.2026E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.01223E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09418E0	-8.16011E-1	-7.98297E-1	-9.13126E0	-9.14178E0	4.50611E-3	9.36031E-2	2.72237E1	-3.26874E1	-3.2544E1	2.67752E1	1.20122E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.00824E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.15558E-1	-7.98059E-1	-9.13138E0	-9.14183E0	4.62532E-3	9.36747E-2	2.73971E1	-3.26467E1	-3.27322E1	2.68292E1	1.19965E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.9926E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09394E0	-8.1563E-1	-7.97987E-1	-9.13153E0	-9.14168E0	4.91142E-3	9.35316E-2	2.72133E1	-3.26995E1	-3.25972E1	2.68058E1	1.19646E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.0148E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.16011E-1	-7.9813E-1	-9.13184E0	-9.14176E0	4.72069E-3	9.35793E-2	2.73588E1	-3.26638E1	-3.26195E1	2.67884E1	1.20244E-7	2.51581E-3	2.51581E-3	6.3074E-3	3.00942E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.15773E-1	-7.98154E-1	-9.13177E0	-9.14154E0	4.57764E-3	9.38416E-2	2.73237E1	-3.26831E1	-3.2653E1	2.67914E1	1.19646E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.99686E-1