[Scan]
initial_time=2016-01-27T23:20:27
final_time=2016-01-27T23:20:46
ip_count=19
run=1025
dataset=6
scan=480
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08776E-4
ql1_vset=
ql1_vmon=-8.15678E-1
ql1_imon=6.63328E-10
ql2_vset=
ql2_vmon=-7.98607E-1
ql2_imon=3.10063E-10
ql3_vset=
ql3_vmon=-9.13155E0
ql3_imon=6.11925E-10
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=6.3951E-10
mult1=-1.0185E-8
mult2=-2.83105E-9
rf_tmon=-4.55667E-3
rf_agc=3.32855E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=4.35591E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61489E0
bslens_imon=2.56095E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1986E1
lens5a_imon=1.97342E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.04884E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53878E1
cs_ef1b_imon=2.82285E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04604E2
lens23_imon=1.02383E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05035E1
cs_ea1_imon=2.53017E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38908E0
lens1_imon=2.71669E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64753E1
os_ef1alow_imon=2.99446E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0382E1
cs_ea2_imon=1.5363E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84627E1
cs_ef1a_imon=2.90423E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=4.47309E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1133E1
os_restr1_imon=2.89079E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15176E1
os_ea1_imon=1.88422E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63355E1
os_ef1bup_imon=3.08398E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26685E0
cs_ionrep_imon=1.17457E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91824E2
cs_nozzle_imon=1.93604E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01833E1
cs_anode1_imon=2.95979E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20513E0
olens4_imon=8.05271E-10
tplens_vset=1.4E-1
tplens_vmon=1.63022E0
tplens_imon=-4.15688E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25434E1
iondef3_imon=1.50303E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26343E1
iondef2_imon=1.57382E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02909E2
lens6_imon=2.98541E-4
ql6_vset=1.0E-1
ql6_vmon=9.38177E-2
ql6_imon=3.93009E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23263E0
ionrepsh_imon=1.75008E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33298E1
lens5b_imon=2.19923E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74554E1
cs_ef2b_imon=3.12432E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.03253E-1
os_ea2_imon=-8.47495E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06076E2
lens4b_imon=2.00715E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71452E1
cs_ef2a_imon=3.18695E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62218E0
os_ef2alow_imon=-2.53825E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.42775E-1
os_ef2bup_imon=-5.22393E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10811E1
os_restr2_imon=2.87239E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23084E2
cs_ionfoca_imon=6.2915E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01868E1
cs_anode2_imon=2.24502E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72697E1
iondef1_imon=1.10201E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67943E1
iondef4_imon=1.09255E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.23354E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=3.03352E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13781E0
cs_ionaccel_imon=-1.93672E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02104E2
cs_ionfocb_imon=1.47212E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56323E1
einzel_imon=7.50738E-6
window_vset=0.0E0
window_vmon=2.27248E-1
window_imon=-9.35337E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39091E-4
mask2_vset=0.0E0
mask2_vmon=-1.86633E1
mask2_imon=-4.64725E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.40995E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.54633E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.49135E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.77913E0
defgridb_imon=6.3552E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33817E1
os_fil1_imon=5.13465E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.64694E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65835E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30345E1
cs_fil1_imon=9.97219E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63575E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66612E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.57249E-2
os_fil2_imon=-2.52017E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.2391E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.09382E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32766E-1
cs_fil2_imon=-2.34325E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.45468E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2191E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.13799E-1
res40_imon=-2.58071E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.16417E-1	-7.97868E-1	-9.13115E0	-9.14171E0	4.673E-3	9.35316E-2	2.73405E1	-3.26655E1	-3.26467E1	2.68112E1	1.20069E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.9952E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.16488E-1	-7.97892E-1	-9.13129E0	-9.14149E0	4.62532E-3	9.40561E-2	2.73405E1	-3.26603E1	-3.25695E1	2.6801E1	1.19941E-7	2.51603E-3	2.51603E-3	6.31798E-3	3.00852E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.15916E-1	-7.98249E-1	-9.13117E0	-9.14161E0	5.10216E-3	9.40323E-2	2.72727E1	-3.26801E1	-3.26579E1	2.67833E1	1.2035E-7	2.52139E-3	2.52139E-3	6.30182E-3	3.00676E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09418E0	-8.15821E-1	-7.98345E-1	-9.13138E0	-9.14156E0	4.93526E-3	9.36747E-2	2.73069E1	-3.27185E1	-3.26038E1	2.67974E1	1.198E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-8.16154E-1	-7.97963E-1	-9.13129E0	-9.14178E0	4.93526E-3	9.37223E-2	2.72349E1	-3.26437E1	-3.26343E1	2.68178E1	1.19965E-7	2.52318E-3	2.52318E-3	6.32936E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.15845E-1	-7.98345E-1	-9.13146E0	-9.14211E0	5.34058E-3	9.377E-2	2.73016E1	-3.26654E1	-3.26816E1	2.6807E1	1.20106E-7	2.51954E-3	2.51954E-3	6.29128E-3	2.99941E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.15821E-1	-7.9813E-1	-9.13119E0	-9.14218E0	4.93526E-3	9.41277E-2	2.7299E1	-3.26487E1	-3.26444E1	2.67957E1	1.20055E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.0148E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.15582E-1	-7.98249E-1	-9.1315E0	-9.14218E0	5.43594E-3	9.37223E-2	2.72818E1	-3.26619E1	-3.25782E1	2.67881E1	1.19757E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.9926E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.15892E-1	-7.9813E-1	-9.13143E0	-9.14187E0	5.19753E-3	9.39608E-2	2.7299E1	-3.26609E1	-3.25819E1	2.68007E1	1.20127E-7	2.51575E-3	2.51575E-3	6.3126E-3	3.01981E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.15916E-1	-7.97939E-1	-9.13141E0	-9.14197E0	4.86374E-3	9.39608E-2	2.73204E1	-3.26699E1	-3.26292E1	2.67895E1	1.2035E-7	2.51693E-3	2.51693E-3	6.31858E-3	2.99879E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.15487E-1	-7.98297E-1	-9.13136E0	-9.14187E0	5.05447E-3	9.39846E-2	2.72868E1	-3.26579E1	-3.26596E1	2.67998E1	1.19785E-7	2.51642E-3	2.51642E-3	6.3016E-3	3.00639E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.16011E-1	-7.98059E-1	-9.13157E0	-9.14171E0	4.98295E-3	9.39846E-2	2.71759E1	-3.2648E1	-3.26552E1	2.68001E1	1.19902E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.01995E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09379E0	-8.15821E-1	-7.98368E-1	-9.13191E0	-9.14202E0	4.72069E-3	9.38177E-2	2.73235E1	-3.26444E1	-3.26376E1	2.68088E1	1.20113E-7	2.51854E-3	2.51854E-3	6.32784E-3	3.01853E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.15916E-1	-7.98154E-1	-9.1316E0	-9.14192E0	5.22137E-3	9.38892E-2	2.72462E1	-3.26651E1	-3.25779E1	2.67898E1	1.19757E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.00041E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.15177E-1	-7.98202E-1	-9.13138E0	-9.14211E0	5.03063E-3	9.41515E-2	2.72997E1	-3.27065E1	-3.26627E1	2.68256E1	1.20383E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.9952E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.15177E-1	-7.98345E-1	-9.13148E0	-9.14221E0	5.00679E-3	9.39608E-2	2.73844E1	-3.26879E1	-3.26398E1	2.6801E1	1.19965E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.00824E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.15177E-1	-7.98249E-1	-9.13134E0	-9.14223E0	4.81606E-3	9.38654E-2	2.72564E1	-3.26783E1	-3.25413E1	2.68052E1	1.2033E-7	2.51552E-3	2.51552E-3	6.3514E-3	3.01347E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-8.1532E-1	-7.98249E-1	-9.13131E0	-9.14202E0	4.74453E-3	9.39369E-2	2.73181E1	-3.26773E1	-3.26638E1	2.68099E1	1.19913E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.01085E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.1594E-1	-7.98368E-1	-9.13126E0	-9.14214E0	5.26905E-3	9.36985E-2	2.73069E1	-3.26549E1	-3.26313E1	2.67956E1	1.19697E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.02769E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.15678E-1	-7.98607E-1	-9.13155E0	-9.14183E0	4.88758E-3	9.38177E-2	2.72697E1	-3.26343E1	-3.25434E1	2.67943E1	1.20055E-7	2.51632E-3	2.51632E-3	6.33977E-3	3.00966E-1