[Scan]
initial_time=2016-01-28T17:19:48
final_time=2016-01-28T17:20:07
ip_count=19
run=1026
dataset=0
scan=161
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.40967E-2
qbias_imon=-3.80964E-6
ql1_vset=
ql1_vmon=-8.79982E1
ql1_imon=-2.48115E-9
ql2_vset=
ql2_vmon=-4.76837E-5
ql2_imon=1.56399E-9
ql3_vset=
ql3_vmon=-8.80009E1
ql3_imon=-6.73792E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=1.65754E-8
mult1=-9.58843E-9
mult2=-2.84216E-9
rf_tmon=-3.86353E-3
rf_agc=3.41134E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=7.21419E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68599E0
bslens_imon=2.59723E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19932E1
lens5a_imon=1.97558E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12446E2
lens4a_imon=2.0493E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53586E1
cs_ef1b_imon=3.11805E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04595E2
lens23_imon=1.02382E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05144E1
cs_ea1_imon=1.15867E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04524E0
lens1_imon=1.20328E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65217E1
os_ef1alow_imon=2.97626E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03708E1
cs_ea2_imon=1.42112E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8422E1
cs_ef1a_imon=3.00893E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.26714E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11372E1
os_restr1_imon=4.31076E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15694E1
os_ea1_imon=2.40489E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63583E1
os_ef1bup_imon=3.07531E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24572E0
cs_ionrep_imon=9.44884E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93333E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02116E1
cs_anode1_imon=2.01431E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20475E0
olens4_imon=3.95305E-8
tplens_vset=1.4E-1
tplens_vmon=1.61131E0
tplens_imon=-2.15016E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25097E1
iondef3_imon=1.4969E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26926E1
iondef2_imon=1.57025E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0291E2
lens6_imon=2.98269E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=9.57417E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27759E0
ionrepsh_imon=9.16031E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33495E1
lens5b_imon=2.16329E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7464E1
cs_ef2b_imon=3.12257E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45372E0
os_ea2_imon=-7.08637E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06123E2
lens4b_imon=2.00553E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70777E1
cs_ef2a_imon=3.1813E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03313E0
os_ef2alow_imon=-2.63714E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.6885E-1
os_ef2bup_imon=-5.23315E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10944E1
os_restr2_imon=3.40407E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.30936E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01995E1
cs_anode2_imon=2.10015E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72911E1
iondef1_imon=1.08358E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68121E1
iondef4_imon=1.08225E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=6.59752E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=7.77882E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14115E0
cs_ionaccel_imon=-1.08717E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02054E2
cs_ionfocb_imon=1.47205E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56301E1
einzel_imon=7.50365E-6
window_vset=0.0E0
window_vmon=1.59765E-1
window_imon=-9.62065E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.38973E-4
mask2_vset=0.0E0
mask2_vmon=-1.86442E1
mask2_imon=-6.1454E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.927E3
multa_neg_imon=7.48478E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.46973E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=7.1893E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3166E0
defgridb_imon=6.07344E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3319E1
os_fil1_imon=9.42739E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07144E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62033E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30524E1
cs_fil1_imon=9.10309E2
cs_fil1_emis_iset=3.0E0
cs_fil1_emis_imon=4.2596E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64706E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.19531E-2
os_fil2_imon=-2.65181E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.79651E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.18408E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34396E-1
cs_fil2_imon=-2.77344E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1478E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21723E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=6.8274E-2
chamber_ion_pmon=2.15706E-9
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.21761E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=201
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.62E2	0.0E0	1.47E2	4.1E1	-7.32464E-2	-8.79978E1	-1.0252E-3	-8.8001E1	5.72205E-4	4.93526E-3	9.35316E-2	2.72426E1	-3.26543E1	-3.25824E1	2.68154E1	2.15907E-9	2.52448E-3	2.52448E-3	6.3074E-3	6.88676E-2
2.0E0	9.7E1	0.0E0	3.16E2	1.6E2	-7.3401E-2	-8.7998E1	-7.15256E-4	-8.80011E1	7.39098E-4	4.673E-3	9.35316E-2	2.72805E1	-3.26699E1	-3.26915E1	2.68052E1	2.15349E-9	2.51954E-3	2.51954E-3	6.33977E-3	6.89862E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.26282E-2	-8.79976E1	-5.96046E-4	-8.8001E1	5.72205E-4	4.76837E-3	9.34362E-2	2.73474E1	-3.26793E1	-3.256E1	2.68259E1	2.15425E-9	2.52209E-3	2.52209E-3	6.32386E-3	6.88099E-2
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.32464E-2	-8.79978E1	-2.6226E-4	-8.80012E1	4.29153E-4	4.93526E-3	9.3317E-2	2.72913E1	-3.26512E1	-3.2587E1	2.67949E1	2.15817E-9	2.52448E-3	2.52448E-3	6.31798E-3	6.85797E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.34782E-2	-8.7998E1	-2.6226E-4	-8.8001E1	6.4373E-4	5.07832E-3	9.36031E-2	2.73148E1	-3.26767E1	-3.26977E1	2.67752E1	2.15624E-9	2.52276E-3	2.52276E-3	6.31817E-3	6.84003E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.33239E-2	-8.79978E1	-6.67572E-4	-8.80013E1	4.29153E-4	4.88758E-3	9.37462E-2	2.72883E1	-3.26728E1	-3.24906E1	2.68319E1	2.15825E-9	2.52405E-3	2.52405E-3	6.31779E-3	6.80216E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40192E-2	-8.79978E1	-8.34465E-4	-8.80011E1	5.48363E-4	5.19753E-3	9.36508E-2	2.73045E1	-3.26705E1	-3.2629E1	2.68262E1	2.15872E-9	2.51527E-3	2.51527E-3	6.31321E-3	6.83683E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.46377E-2	-8.79981E1	-5.72205E-4	-8.80013E1	1.66893E-4	4.8399E-3	9.38177E-2	2.73021E1	-3.26437E1	-3.27233E1	2.6825E1	2.15624E-9	2.52061E-3	2.52061E-3	6.32896E-3	6.8342E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.37874E-2	-8.7998E1	-6.91414E-4	-8.80011E1	1.43051E-4	5.00679E-3	9.39131E-2	2.725E1	-3.26695E1	-3.27846E1	2.6825E1	2.15613E-9	2.52428E-3	2.52428E-3	6.32386E-3	6.83927E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.37103E-2	-8.79982E1	-6.19888E-4	-8.80011E1	1.90735E-4	4.88758E-3	9.38177E-2	2.72856E1	-3.26543E1	-3.26101E1	2.67914E1	2.158E-9	2.5188E-3	2.5188E-3	6.31288E-3	6.83333E-2
1.4E1	4.0E0	0.0E0	5.66E2	3.82E2	-7.40192E-2	-8.79981E1	-6.19888E-4	-8.80011E1	3.57628E-4	5.05447E-3	9.37223E-2	2.73246E1	-3.26856E1	-3.25045E1	2.68082E1	2.15441E-9	2.53031E-3	2.53031E-3	6.32356E-3	6.79931E-2
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-7.43285E-2	-8.79981E1	-6.91414E-4	-8.80013E1	4.52995E-4	5.00679E-3	9.34601E-2	2.73265E1	-3.26933E1	-3.24913E1	2.67986E1	2.15613E-9	2.52209E-3	2.52209E-3	6.34037E-3	6.84522E-2
1.6E1	1.1E1	0.0E0	6.47E2	4.41E2	-7.35556E-2	-8.7998E1	-7.39098E-4	-8.8001E1	9.53674E-5	4.8399E-3	9.34839E-2	2.72825E1	-3.26683E1	-3.24395E1	2.67872E1	2.15987E-9	2.5199E-3	2.5199E-3	6.33486E-3	6.83333E-2
1.7E1	3.0E1	0.0E0	6.87E2	4.7E2	-7.37874E-2	-8.79982E1	-7.39098E-4	-8.8001E1	2.14577E-4	5.07832E-3	9.35078E-2	2.72733E1	-3.26903E1	-3.24956E1	2.67992E1	2.15533E-9	2.52492E-3	2.52492E-3	6.31817E-3	6.8342E-2
1.8E1	1.1E2	1.0E0	7.27E2	5.0E2	-7.40192E-2	-8.79982E1	-6.19888E-4	-8.8001E1	3.09944E-4	4.74453E-3	9.32693E-2	2.73045E1	-3.26561E1	-3.25125E1	2.6807E1	2.15624E-9	2.51632E-3	2.51632E-3	6.3074E-3	6.81673E-2
1.9E1	2.12E2	0.0E0	7.68E2	5.29E2	-7.34782E-2	-8.79983E1	-2.6226E-4	-8.80007E1	2.14577E-4	4.69685E-3	9.33409E-2	2.73345E1	-3.26452E1	-3.24824E1	2.68052E1	2.15659E-9	2.52318E-3	2.52318E-3	6.32112E-3	6.85117E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-7.40967E-2	-8.79984E1	-3.33786E-4	-8.80008E1	2.86102E-4	4.673E-3	9.3627E-2	2.73222E1	-3.26809E1	-3.26136E1	2.67962E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.34782E-2	-8.79982E1	-4.29153E-4	-8.80011E1	2.86102E-4	4.673E-3	9.34362E-2	2.72877E1	-3.26938E1	-3.26683E1	2.68256E1	2.158E-9	2.51662E-3	2.51662E-3	6.30192E-3	6.79781E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.39421E-2	-8.79982E1	-2.6226E-4	-8.80007E1	1.90735E-4	4.69685E-3	9.34124E-2	2.73135E1	-3.26687E1	-3.2626E1	2.68022E1	2.15825E-9	2.52093E-3	2.52093E-3	6.33863E-3	6.82459E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.40967E-2	-8.79982E1	-4.76837E-5	-8.80009E1	3.09944E-4	4.74453E-3	9.32693E-2	2.72911E1	-3.26926E1	-3.25097E1	2.68121E1	2.15706E-9	2.5188E-3	2.5188E-3	6.3074E-3	6.8274E-2
