[Scan]
initial_time=2016-01-28T15:43:18
final_time=2016-01-28T15:43:37
ip_count=19
run=1026
dataset=1
scan=3
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.201E-2
qbias_imon=-3.81964E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-5.54156E-10
ql2_vset=
ql2_vmon=-1.19209E-3
ql2_imon=1.26176E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-1.49552E-9
ql4_vset=
ql4_vmon=-4.76837E-5
ql4_imon=1.44183E-8
mult1=-9.33101E-9
mult2=-2.7266E-9
rf_tmon=-4.0558E-3
rf_agc=3.33997E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=5.94008E-10
bslens_vset=-6.2E0
bslens_vmon=-6.70411E0
bslens_imon=3.2736E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20886E1
lens5a_imon=1.96416E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12324E2
lens4a_imon=2.04E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53172E1
cs_ef1b_imon=3.09053E-5
lens23_vset=-2.05E2
lens23_vmon=-2.046E2
lens23_imon=1.02733E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0618E1
cs_ea1_imon=1.26296E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99616E0
lens1_imon=5.28395E-7
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64764E1
os_ef1alow_imon=2.97493E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03214E1
cs_ea2_imon=1.41154E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84232E1
cs_ef1a_imon=3.0084E-5
olens2_vset=0.0E0
olens2_vmon=8.58307E-4
olens2_imon=1.00849E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11292E1
os_restr1_imon=4.31699E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.16829E1
os_ea1_imon=2.50565E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63707E1
os_ef1bup_imon=3.06873E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2574E0
cs_ionrep_imon=9.0302E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91772E2
cs_nozzle_imon=1.92927E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01835E1
cs_anode1_imon=2.04701E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99979E1
olens4_imon=4.38966E-9
tplens_vset=0.0E0
tplens_vmon=-1.65799E0
tplens_imon=5.12504E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.98476E1
iondef3_imon=8.41044E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98579E1
iondef2_imon=8.80375E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02899E2
lens6_imon=2.99017E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=8.19457E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3885E0
ionrepsh_imon=9.44337E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.32678E1
lens5b_imon=2.1183E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74657E1
cs_ef2b_imon=3.11972E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.19648E0
os_ea2_imon=-2.97948E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06203E2
lens4b_imon=2.00873E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71044E1
cs_ef2a_imon=3.18083E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.12073E0
os_ef2alow_imon=-2.79797E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.85531E-1
os_ef2bup_imon=-5.51479E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10903E1
os_restr2_imon=3.34976E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23111E2
cs_ionfoca_imon=6.22777E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01899E1
cs_anode2_imon=2.09839E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58528E1
iondef1_imon=5.26001E-6
iondef4_vset=1.53E1
iondef4_vmon=1.51199E1
iondef4_imon=5.23181E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27963E1
olens3_imon=2.67058E-8
olens1_vset=0.0E0
olens1_vmon=1.57356E-3
olens1_imon=1.21653E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15285E0
cs_ionaccel_imon=-9.68598E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02095E2
cs_ionfocb_imon=1.47246E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56113E1
einzel_imon=7.61389E-6
window_vset=0.0E0
window_vmon=1.84138E-1
window_imon=-1.08926E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.38991E-4
mask2_vset=0.0E0
mask2_vmon=-1.86247E1
mask2_imon=-7.85661E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92571E3
multa_neg_imon=6.96831E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=5.99895E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5017E3
multb_neg_imon=7.90192E-5
defgridb_vset=0.0E0
defgridb_vmon=-6.69867E-1
defgridb_imon=5.34741E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33169E1
os_fil1_imon=9.41402E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07102E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59786E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30483E1
cs_fil1_imon=9.23523E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29327E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61792E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.51512E-2
os_fil2_imon=-2.72363E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85629E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.7232E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33707E-1
cs_fil2_imon=-2.50956E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.20109E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21364E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.16436E-2
chamber_ion_pmon=2.15533E-9
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40094E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.63278E-1
res40_imon=-2.45934E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=222
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.08E2	2.0E0	1.47E2	4.1E1	-7.35556E-2	-8.80027E1	-1.00136E-3	-8.79999E1	2.86102E-4	5.36442E-3	9.31978E-2	1.58533E1	-1.98788E1	-2.00534E1	1.50088E1	2.15339E-9	2.5207E-3	2.5207E-3	6.33161E-3	2.1749E-2
2.0E0	1.62E2	0.0E0	3.16E2	1.6E2	-7.3401E-2	-8.80028E1	-6.91414E-4	-8.80001E1	3.57628E-4	4.8399E-3	9.35078E-2	1.58056E1	-1.9871E1	-2.01232E1	1.5007E1	2.15716E-9	2.51632E-3	2.51632E-3	6.33977E-3	2.17547E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80028E1	-9.29832E-4	-8.80002E1	4.29153E-4	5.29289E-3	9.33886E-2	1.57643E1	-1.98753E1	-2.00074E1	1.50034E1	2.16078E-9	2.52362E-3	2.52362E-3	6.3074E-3	2.17337E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.40192E-2	-8.80027E1	-5.72205E-4	-8.8E1	0.0E0	4.98295E-3	9.31025E-2	1.58113E1	-1.98224E1	-2.00051E1	1.50088E1	2.15808E-9	2.53246E-3	2.53246E-3	6.32356E-3	2.16991E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.39421E-2	-8.80026E1	-7.15256E-4	-8.80003E1	4.05312E-4	4.88758E-3	9.34839E-2	1.58014E1	-1.98417E1	-1.97921E1	1.50184E1	2.15425E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.16501E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.37103E-2	-8.80028E1	-8.82149E-4	-8.79998E1	3.33786E-4	5.19753E-3	9.32217E-2	1.58008E1	-1.98641E1	-1.99189E1	1.5007E1	2.15624E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.17176E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80027E1	-7.86781E-4	-8.79999E1	-2.38419E-5	4.62532E-3	9.35555E-2	1.57933E1	-1.98543E1	-2.01048E1	1.50028E1	2.15624E-9	2.52061E-3	2.52061E-3	6.33436E-3	2.16067E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80028E1	-5.00679E-4	-8.8E1	-1.19209E-4	5.10216E-3	9.33409E-2	1.57843E1	-1.98493E1	-1.99437E1	1.50167E1	2.16081E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.16501E-2
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.80023E1	-6.67572E-4	-8.80001E1	-1.90735E-4	5.00679E-3	9.34601E-2	1.58256E1	-1.98482E1	-1.99738E1	1.5016E1	2.15533E-9	2.51739E-3	2.51739E-3	6.30202E-3	2.16252E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.39421E-2	-8.80026E1	-1.26362E-3	-8.80001E1	-3.09944E-4	4.86374E-3	9.35078E-2	1.58162E1	-1.98605E1	-1.99207E1	1.50207E1	2.15716E-9	2.51417E-3	2.51417E-3	6.32356E-3	2.16252E-2
1.4E1	5.0E0	0.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80026E1	-1.5974E-3	-8.79999E1	9.53674E-5	5.126E-3	9.33409E-2	1.58168E1	-1.98464E1	-1.99567E1	1.49956E1	2.15425E-9	2.52318E-3	2.52318E-3	6.29645E-3	2.17444E-2
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-7.38649E-2	-8.80024E1	-1.21593E-3	-8.8E1	-4.76837E-5	4.98295E-3	9.32932E-2	1.57755E1	-1.98417E1	-2.00316E1	1.49918E1	2.15533E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.16252E-2
1.6E1	1.8E1	0.0E0	6.47E2	4.41E2	-7.33239E-2	-8.80025E1	-1.26362E-3	-8.8E1	2.86102E-4	5.126E-3	9.34839E-2	1.57686E1	-1.98657E1	-1.98705E1	1.5016E1	2.15992E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.16991E-2
1.7E1	4.3E1	0.0E0	6.87E2	4.7E2	-7.35556E-2	-8.80023E1	-1.04904E-3	-8.80002E1	2.86102E-4	5.55515E-3	9.35316E-2	1.58657E1	-1.98617E1	-1.99968E1	1.50064E1	2.15441E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.16252E-2
1.8E1	2.03E2	0.0E0	7.27E2	5.0E2	-7.37874E-2	-8.80025E1	-1.00136E-3	-8.80003E1	2.86102E-4	5.126E-3	9.35078E-2	1.57849E1	-1.98711E1	-1.98807E1	1.5007E1	2.15624E-9	2.51847E-3	2.51847E-3	6.32896E-3	2.15883E-2
1.9E1	3.57E2	0.0E0	7.68E2	5.29E2	-7.23964E-2	-8.80023E1	-1.14441E-3	-8.80002E1	2.38419E-4	5.45979E-3	9.3627E-2	1.58124E1	-1.98618E1	-2.00357E1	1.50244E1	2.15706E-9	2.52538E-3	2.52538E-3	6.31837E-3	2.17633E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.201E-2	-8.80021E1	-8.34465E-4	-8.80003E1	1.90735E-4	4.95911E-3	9.32455E-2	1.57855E1	-1.98735E1	-1.99201E1	1.50211E1	2.15696E-9	2.52473E-3	2.52473E-3	6.3074E-3	2.17145E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.20871E-2	-8.80022E1	-1.0252E-3	-8.80004E1	2.38419E-4	5.4121E-3	9.33647E-2	1.57938E1	-1.98611E1	-1.99007E1	1.49804E1	2.15624E-9	2.52384E-3	2.52384E-3	6.33436E-3	2.16436E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-7.22418E-2	-8.80023E1	-9.05991E-4	-8.80005E1	9.53674E-5	5.19753E-3	9.32455E-2	1.57855E1	-1.98623E1	-2.00068E1	1.50785E1	2.15349E-9	2.52384E-3	2.52384E-3	6.33436E-3	2.16621E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.201E-2	-8.80023E1	-1.19209E-3	-8.80007E1	-4.76837E-5	5.19753E-3	9.31978E-2	1.58528E1	-1.98579E1	-1.98476E1	1.51199E1	2.15533E-9	2.52384E-3	2.52384E-3	6.32896E-3	2.16436E-2
