[Scan]
initial_time=2016-01-28T15:44:11
final_time=2016-01-28T15:44:31
ip_count=19
run=1026
dataset=1
scan=5
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.26282E-2
qbias_imon=-3.78597E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-5.63121E-10
ql2_vset=
ql2_vmon=-1.28746E-3
ql2_imon=1.27459E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-1.41388E-9
ql4_vset=
ql4_vmon=9.53674E-5
ql4_imon=1.444E-8
mult1=-8.80251E-9
mult2=-2.67962E-9
rf_tmon=-5.96664E-3
rf_agc=3.22369E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=6.26791E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67266E0
bslens_imon=2.559E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20164E1
lens5a_imon=1.9728E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12458E2
lens4a_imon=2.05131E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53818E1
cs_ef1b_imon=3.10242E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.01989E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04988E1
cs_ea1_imon=1.24975E-5
lens1_vset=-2.7E0
lens1_vmon=-3.09796E0
lens1_imon=1.29018E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64597E1
os_ef1alow_imon=2.96445E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03777E1
cs_ea2_imon=1.40583E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84348E1
cs_ef1a_imon=2.99712E-5
olens2_vset=0.0E0
olens2_vmon=1.23978E-3
olens2_imon=1.00818E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11199E1
os_restr1_imon=4.3198E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15317E1
os_ea1_imon=2.43027E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63705E1
os_ef1bup_imon=3.07218E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23819E0
cs_ionrep_imon=9.6296E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93291E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=2.03551E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99978E1
olens4_imon=4.42593E-9
tplens_vset=0.0E0
tplens_vmon=-1.57712E0
tplens_imon=-3.40159E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.98313E1
iondef3_imon=8.69102E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98521E1
iondef2_imon=9.33412E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02896E2
lens6_imon=2.9844E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=8.34191E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28512E0
ionrepsh_imon=9.37931E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33669E1
lens5b_imon=2.17059E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74652E1
cs_ef2b_imon=3.11736E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.22834E0
os_ea2_imon=-1.00064E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.0605E2
lens4b_imon=2.00421E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71119E1
cs_ef2a_imon=3.18756E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.1258E0
os_ef2alow_imon=-2.68579E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.49156E-1
os_ef2bup_imon=-5.38954E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10897E1
os_restr2_imon=3.36098E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.29754E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01861E1
cs_anode2_imon=2.09529E-5
iondef1_vset=1.6E1
iondef1_vmon=1.59234E1
iondef1_imon=5.02015E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50161E1
iondef4_imon=5.16828E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27958E1
olens3_imon=2.67618E-8
olens1_vset=0.0E0
olens1_vmon=1.23978E-3
olens1_imon=1.21517E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1481E0
cs_ionaccel_imon=-1.10108E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.47209E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56359E1
einzel_imon=7.5384E-6
window_vset=0.0E0
window_vmon=1.89305E-1
window_imon=-1.042E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.3914E-4
mask2_vset=0.0E0
mask2_vmon=-1.86327E1
mask2_imon=-7.5355E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.39092E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93741E3
defgrida_imon=6.61225E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.22754E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3021E0
defgridb_imon=5.85096E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33156E1
os_fil1_imon=9.38829E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07236E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59913E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30457E1
cs_fil1_imon=9.22304E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.3349E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61704E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.66791E-2
os_fil2_imon=-2.5881E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.74439E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.48295E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36768E-1
cs_fil2_imon=-2.62864E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.30419E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21234E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=2.16689E-2
chamber_ion_pmon=2.15519E-9
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.7137E-1
res40_imon=-2.49118E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.21E2	0.0E0	1.47E2	4.1E1	-7.20871E-2	-8.80022E1	-6.67572E-4	-8.80003E1	3.09944E-4	5.19753E-3	9.33886E-2	1.58065E1	-1.98368E1	-1.99949E1	1.49908E1	2.159E-9	2.52492E-3	2.52492E-3	6.29665E-3	2.16067E-2
2.0E0	1.37E2	0.0E0	3.16E2	1.6E2	-7.201E-2	-8.8002E1	-6.19888E-4	-8.80002E1	1.90735E-4	5.24521E-3	9.35793E-2	1.58173E1	-1.98496E1	-1.99181E1	1.49992E1	2.15533E-9	2.51954E-3	2.51954E-3	6.32896E-3	2.15699E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80023E1	-5.72205E-4	-8.80003E1	2.38419E-5	5.29289E-3	9.32455E-2	1.58128E1	-1.98851E1	-1.98313E1	1.50213E1	2.15219E-9	2.51248E-3	2.51248E-3	6.3074E-3	2.1676E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.35556E-2	-8.80023E1	-5.72205E-4	-8.80005E1	7.15256E-5	5.38826E-3	9.31978E-2	1.57662E1	-1.98657E1	-2.00651E1	1.49998E1	2.15808E-9	2.52061E-3	2.52061E-3	6.33436E-3	2.17547E-2
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80025E1	-7.15256E-4	-8.80003E1	2.86102E-4	5.05447E-3	9.3317E-2	1.58132E1	-1.98682E1	-2.01077E1	1.5004E1	2.15716E-9	2.51632E-3	2.51632E-3	6.30202E-3	2.18104E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.19325E-2	-8.80024E1	-8.10623E-4	-8.80004E1	2.14577E-4	5.03063E-3	9.31025E-2	1.58395E1	-1.98531E1	-2.00603E1	1.50196E1	2.16081E-9	2.52538E-3	2.52538E-3	6.34037E-3	2.16689E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80024E1	-9.53674E-4	-8.80002E1	1.19209E-4	5.05447E-3	9.32455E-2	1.57879E1	-1.98712E1	-1.98883E1	1.50178E1	2.15624E-9	2.52599E-3	2.52599E-3	6.33436E-3	2.17361E-2
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.18554E-2	-8.80025E1	-1.19209E-3	-8.80001E1	1.90735E-4	5.07832E-3	9.31501E-2	1.5815E1	-1.98541E1	-1.99579E1	1.49866E1	2.15716E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.15883E-2
1.2E1	5.0E0	0.0E0	4.85E2	3.23E2	-7.13143E-2	-8.80026E1	-1.26362E-3	-8.80003E1	2.38419E-4	4.95911E-3	9.34601E-2	1.57767E1	-1.98682E1	-1.98617E1	1.50132E1	2.159E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.16991E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.17779E-2	-8.80026E1	-1.00136E-3	-8.80001E1	2.38419E-4	4.93526E-3	9.34124E-2	1.58313E1	-1.98435E1	-1.98575E1	1.50034E1	2.158E-9	2.52209E-3	2.52209E-3	6.30466E-3	2.17255E-2
1.4E1	1.1E1	0.0E0	5.66E2	3.82E2	-7.23189E-2	-8.80026E1	-9.29832E-4	-8.80001E1	2.38419E-4	4.98295E-3	9.33647E-2	1.57971E1	-1.98707E1	-1.9855E1	1.50051E1					
1.5E1	2.0E0	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80027E1	-1.16825E-3	-8.80004E1	1.66893E-4	4.88758E-3	9.33409E-2	1.57428E1	-1.98489E1	-1.99366E1	1.5001E1	2.15624E-9	2.52384E-3	2.52384E-3	6.29665E-3	2.16991E-2
1.6E1	2.4E1	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80026E1	-5.72205E-4	-8.80003E1	7.15256E-5	5.05447E-3	9.33647E-2	1.58638E1	-1.98533E1	-2.00902E1	1.49902E1	2.15624E-9	2.52276E-3	2.52276E-3	6.35059E-3	2.16621E-2
1.7E1	4.8E1	0.0E0	6.87E2	4.7E2	-7.24736E-2	-8.80024E1	-1.16825E-3	-8.80004E1	2.86102E-4	4.8399E-3	9.31263E-2	1.57944E1	-1.98989E1	-1.99398E1	1.5003E1	2.15314E-9	2.51804E-3	2.51804E-3	6.30182E-3	2.16952E-2
1.8E1	1.87E2	0.0E0	7.27E2	5.0E2	-7.24736E-2	-8.80024E1	-1.38283E-3	-8.80006E1	7.15256E-5	4.81606E-3	9.35793E-2	1.57862E1	-1.98585E1	-1.98328E1	1.49915E1	2.15416E-9	2.51886E-3	2.51886E-3	6.31987E-3	2.15815E-2
1.9E1	3.49E2	0.0E0	7.68E2	5.29E2	-7.23964E-2	-8.80024E1	-1.40667E-3	-8.80007E1	-4.76837E-5	4.79221E-3	9.36508E-2	1.59136E1	-1.98857E1	-2.00317E1	1.5034E1	2.15658E-9	2.51549E-3	2.51549E-3	6.3074E-3	2.1643E-2
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-7.25507E-2	-8.80024E1	-1.19209E-3	-8.80004E1	0.0E0	4.76837E-3	9.37223E-2	1.57725E1	-1.98912E1	-1.99868E1	1.50057E1	2.15365E-9	2.52131E-3	2.52131E-3	6.27577E-3	2.18011E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.23189E-2	-8.80024E1	-1.16825E-3	-8.80003E1	1.43051E-4	4.88758E-3	9.35078E-2	1.56599E1	-1.98855E1	-2.00399E1	1.50076E1	2.15519E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.16501E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.22418E-2	-8.80026E1	-1.14441E-3	-8.80004E1	0.0E0	5.07832E-3	9.32455E-2	1.58167E1	-1.98446E1	-1.99498E1	1.50274E1	2.15624E-9	2.51954E-3	2.51954E-3	6.3074E-3	2.17361E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.26282E-2	-8.80025E1	-1.28746E-3	-8.80006E1	9.53674E-5	4.64916E-3	9.32932E-2	1.59234E1	-1.98521E1	-1.98313E1	1.50161E1	2.15519E-9	2.51662E-3	2.51662E-3	6.29098E-3	2.16689E-2
