[Scan]
initial_time=2016-01-28T15:48:11
final_time=2016-01-28T15:48:31
ip_count=19
run=1026
dataset=1
scan=14
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.45602E-2
qbias_imon=-3.89237E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-5.45251E-10
ql2_vset=
ql2_vmon=-1.38283E-3
ql2_imon=1.29721E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-1.48695E-9
ql4_vset=
ql4_vmon=-1.43051E-4
ql4_imon=1.43013E-8
mult1=-9.16244E-9
mult2=-2.67869E-9
rf_tmon=-5.90634E-3
rf_agc=3.19877E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=5.93436E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64734E0
bslens_imon=2.59989E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19759E1
lens5a_imon=1.98651E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12491E2
lens4a_imon=2.04859E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53667E1
cs_ef1b_imon=3.10693E-5
lens23_vset=-2.05E2
lens23_vmon=-2.046E2
lens23_imon=1.01979E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04858E1
cs_ea1_imon=1.262E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05897E0
lens1_imon=1.20536E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64626E1
os_ef1alow_imon=2.98183E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04139E1
cs_ea2_imon=1.42198E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84319E1
cs_ef1a_imon=3.00198E-5
olens2_vset=0.0E0
olens2_vmon=1.21593E-3
olens2_imon=1.02107E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11581E1
os_restr1_imon=4.30624E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14993E1
os_ea1_imon=2.43319E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63699E1
os_ef1bup_imon=3.07461E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22968E0
cs_ionrep_imon=9.88045E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.933E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01844E1
cs_anode1_imon=2.04003E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99976E1
olens4_imon=4.50919E-9
tplens_vset=0.0E0
tplens_vmon=-1.61784E0
tplens_imon=-1.32535E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.98825E1
iondef3_imon=8.59919E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98639E1
iondef2_imon=9.24336E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02921E2
lens6_imon=2.98484E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=8.16226E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25564E0
ionrepsh_imon=9.26106E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33888E1
lens5b_imon=2.16207E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74646E1
cs_ef2b_imon=3.11666E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.20255E0
os_ea2_imon=-7.5901E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.00446E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71217E1
cs_ef2a_imon=3.18374E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09394E0
os_ef2alow_imon=-2.64756E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.38152E-1
os_ef2bup_imon=-5.43472E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10938E1
os_restr2_imon=3.36063E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23084E2
cs_ionfoca_imon=6.28725E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02093E1
cs_anode2_imon=2.09494E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58041E1
iondef1_imon=5.02792E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49908E1
iondef4_imon=5.24821E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27962E1
olens3_imon=2.67116E-8
olens1_vset=0.0E0
olens1_vmon=1.07288E-3
olens1_imon=1.22232E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16895E0
cs_ionaccel_imon=-9.75966E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02101E2
cs_ionfocb_imon=1.47223E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56116E1
einzel_imon=7.60096E-6
window_vset=0.0E0
window_vmon=1.82933E-1
window_imon=-1.08022E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.39032E-4
mask2_vset=0.0E0
mask2_vmon=-1.86136E1
mask2_imon=-4.89431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.27899E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.37998E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=6.98168E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.16933E0
defgridb_imon=5.84199E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3318E1
os_fil1_imon=9.39136E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06958E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60198E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30471E1
cs_fil1_imon=9.22912E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29957E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62217E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.45852E-2
os_fil2_imon=-2.68077E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.79072E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.04528E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3552E-1
cs_fil2_imon=-2.2232E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.43161E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21409E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29372E-3
inlet_lpb_pmon=2.16595E-2
chamber_ion_pmon=2.15519E-9
chamber_cvt_pmon=2.52264E-3
foreline_cvt_pmon=2.52264E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.42988E-1
res40_imon=-2.54331E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.15E2	0.0E0	1.47E2	4.1E1	-7.40192E-2	-8.80025E1	-1.09673E-3	-8.80003E1	-3.33786E-4	5.34058E-3	9.34362E-2	1.58238E1	-1.9866E1	-2.00607E1	1.49947E1	2.15455E-9	2.51709E-3	2.51709E-3	6.29684E-3	2.16555E-2
2.0E0	2.1E2	0.0E0	3.16E2	1.6E2	-7.40192E-2	-8.80025E1	-9.77516E-4	-8.8E1	-1.19209E-4	5.14984E-3	9.35793E-2	1.58209E1	-1.98692E1	-1.9882E1	1.50153E1	2.15808E-9	2.52492E-3	2.52492E-3	6.32356E-3	2.17176E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.44059E-2	-8.80025E1	-1.43051E-3	-8.80002E1	-2.38419E-4	5.126E-3	9.35555E-2	1.57843E1	-1.98428E1	-2.00169E1	1.50045E1	2.156E-9	2.51915E-3	2.51915E-3	6.33538E-3	2.16569E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.41738E-2	-8.80027E1	-1.45435E-3	-8.8E1	-2.86102E-4	4.93526E-3	9.34601E-2	1.57949E1	-1.98676E1	-1.99744E1	1.50382E1	2.15716E-9	2.51417E-3	2.51417E-3	6.32356E-3	2.16621E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80026E1	-1.14441E-3	-8.79999E1	-4.05312E-4	4.93526E-3	9.37462E-2	1.58155E1	-1.98687E1	-1.99612E1	1.50004E1	2.159E-9	2.50989E-3	2.50989E-3	6.35601E-3	2.15699E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.45602E-2	-8.80026E1	-1.3113E-3	-8.80003E1	-3.8147E-4	4.79221E-3	9.37223E-2	1.58071E1	-1.98717E1	-1.99011E1	1.50497E1	2.15987E-9	2.51662E-3	2.51662E-3	6.34037E-3	2.16689E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.39421E-2	-8.80025E1	-1.19209E-3	-8.80006E1	-4.29153E-4	4.76837E-3	9.38892E-2	1.5746E1	-1.9847E1	-1.99974E1	1.50022E1	2.15894E-9	2.5188E-3	2.5188E-3	6.33486E-3	2.16501E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.42513E-2	-8.80023E1	-1.28746E-3	-8.80005E1	-1.66893E-4	4.86374E-3	9.36747E-2	1.58185E1	-1.98489E1	-1.97888E1	1.5004E1	2.15808E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.16991E-2
1.2E1	4.0E0	0.0E0	4.85E2	3.23E2	-7.38649E-2	-8.80026E1	-1.12057E-3	-8.80004E1	-3.57628E-4	4.8399E-3	9.35078E-2	1.57993E1	-1.98567E1	-1.98452E1	1.50094E1	2.15425E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.16313E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80024E1	-1.26362E-3	-8.80005E1	-9.53674E-5	5.126E-3	9.38177E-2	1.5779E1	-1.98653E1	-1.99986E1	1.50322E1	2.16175E-9	2.5188E-3	2.5188E-3	6.29098E-3	2.16689E-2
1.4E1	1.1E1	0.0E0	5.66E2	3.82E2	-7.37103E-2	-8.80023E1	-1.28746E-3	-8.80006E1	-3.09944E-4	4.95911E-3	9.35316E-2	1.57903E1	-1.98257E1	-1.99438E1	1.49746E1	2.15992E-9	2.52061E-3	2.52061E-3	6.29665E-3	2.16436E-2
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-7.40967E-2	-8.80023E1	-1.0252E-3	-8.80004E1	-2.6226E-4	4.93526E-3	9.35316E-2	1.58197E1	-1.98753E1	-1.97497E1	1.50124E1	2.15987E-9	2.51662E-3	2.51662E-3	6.30192E-3	2.16501E-2
1.6E1	2.2E1	0.0E0	6.47E2	4.41E2	-7.40967E-2	-8.80025E1	-1.28746E-3	-8.80003E1	-3.33786E-4	5.03063E-3	9.36985E-2	1.58144E1	-1.98617E1	-1.98576E1	1.49926E1	2.15987E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.17066E-2
1.7E1	3.7E1	0.0E0	6.87E2	4.7E2	-7.41738E-2	-8.80024E1	-1.3113E-3	-8.80001E1	-2.86102E-4	4.88758E-3	9.36747E-2	1.57495E1	-1.98482E1	-2.00428E1	1.4997E1	2.15706E-9	2.52538E-3	2.52538E-3	6.28552E-3	2.15938E-2
1.8E1	1.78E2	0.0E0	7.27E2	5.0E2	-7.37874E-2	-8.80025E1	-1.35899E-3	-8.80002E1	0.0E0	5.03063E-3	9.36508E-2	1.58377E1	-1.98446E1	-2.00309E1	1.50118E1	2.16088E-9	2.51603E-3	2.51603E-3	6.30212E-3	2.16736E-2
1.9E1	3.37E2	1.0E0	7.68E2	5.29E2	-7.32464E-2	-8.80024E1	-1.23978E-3	-8.80003E1	7.15256E-5	5.126E-3	9.36747E-2	1.58061E1	-1.98659E1	-2.01461E1	1.4998E1	2.15332E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.15938E-2
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-7.37103E-2	-8.80022E1	-1.12057E-3	-8.80005E1	2.14577E-4	5.24521E-3	9.32217E-2	1.57488E1	-1.98717E1	-2.00898E1	1.50094E1	2.15894E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.16878E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.36328E-2	-8.80023E1	-1.09673E-3	-8.80007E1	1.43051E-4	5.14984E-3	9.34839E-2	1.58132E1	-1.98664E1	-2.00328E1	1.4986E1	2.15716E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.16806E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.46377E-2	-8.80026E1	-1.4782E-3	-8.80007E1	9.53674E-5	5.05447E-3	9.35793E-2	1.58389E1	-1.98675E1	-2.00117E1	1.49668E1	2.15349E-9	2.52492E-3	2.52492E-3	6.32356E-3	2.15883E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.45602E-2	-8.80022E1	-1.38283E-3	-8.80007E1	-1.43051E-4	5.126E-3	9.37462E-2	1.58041E1	-1.98639E1	-1.98825E1	1.49908E1	2.15519E-9	2.52264E-3	2.52264E-3	6.29372E-3	2.16595E-2
