[Scan]
initial_time=2016-01-28T15:50:24
final_time=2016-01-28T15:50:44
ip_count=19
run=1026
dataset=1
scan=19
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.78125E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-5.67079E-10
ql2_vset=
ql2_vmon=-9.77516E-4
ql2_imon=1.21657E-9
ql3_vset=
ql3_vmon=-8.79997E1
ql3_imon=-1.45974E-9
ql4_vset=
ql4_vmon=-7.15256E-5
ql4_imon=1.42693E-8
mult1=-1.00173E-8
mult2=-2.66272E-9
rf_tmon=-4.44633E-3
rf_agc=3.37782E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=6.43337E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66133E0
bslens_imon=2.37913E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20079E1
lens5a_imon=1.97406E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12461E2
lens4a_imon=2.05176E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53231E1
cs_ef1b_imon=3.07721E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02089E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05024E1
cs_ea1_imon=1.24694E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08281E0
lens1_imon=1.25799E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.63985E1
os_ef1alow_imon=2.95183E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03967E1
cs_ea2_imon=1.40808E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84706E1
cs_ef1a_imon=3.03941E-5
olens2_vset=0.0E0
olens2_vmon=1.43051E-3
olens2_imon=1.03013E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11473E1
os_restr1_imon=4.29355E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1521E1
os_ea1_imon=2.41458E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.62987E1
os_ef1bup_imon=3.06748E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26051E0
cs_ionrep_imon=9.51334E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91868E2
cs_nozzle_imon=1.93287E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01697E1
cs_anode1_imon=2.0727E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99979E1
olens4_imon=4.43058E-9
tplens_vset=0.0E0
tplens_vmon=-1.6168E0
tplens_imon=-4.36334E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.01637E1
iondef3_imon=8.56523E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98831E1
iondef2_imon=9.26099E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02898E2
lens6_imon=2.98303E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=8.00753E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2521E0
ionrepsh_imon=9.42321E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33538E1
lens5b_imon=2.19036E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75312E1
cs_ef2b_imon=3.13035E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.22686E0
os_ea2_imon=-8.07644E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00504E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70827E1
cs_ef2a_imon=3.13746E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04084E0
os_ef2alow_imon=-2.50695E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.02622E-1
os_ef2bup_imon=-5.03319E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1118E1
os_restr2_imon=3.39682E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.30433E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02302E1
cs_anode2_imon=2.10788E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57741E1
iondef1_imon=4.9747E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49974E1
iondef4_imon=4.92207E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27958E1
olens3_imon=2.67651E-8
olens1_vset=0.0E0
olens1_vmon=9.29832E-4
olens1_imon=1.23354E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11392E0
cs_ionaccel_imon=-1.07728E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02146E2
cs_ionfocb_imon=1.47694E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56299E1
einzel_imon=7.28364E-6
window_vset=0.0E0
window_vmon=2.40676E-1
window_imon=-1.17833E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82684E2
mask1_imon=2.39488E-4
mask2_vset=0.0E0
mask2_vmon=-1.86937E1
mask2_imon=-7.92847E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92621E3
multa_neg_imon=7.41886E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.64379E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.18814E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33841E0
defgridb_imon=6.09945E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33192E1
os_fil1_imon=9.41609E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06967E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61248E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30492E1
cs_fil1_imon=9.23021E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.23835E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63122E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.31876E-2
os_fil2_imon=-2.66874E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.51047E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.78603E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33551E-1
cs_fil2_imon=-2.32567E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.47305E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21451E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.16878E-2
chamber_ion_pmon=2.15706E-9
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-1.34206E-1
res40_imon=-2.13643E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=206
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.64E2	0.0E0	1.47E2	4.1E1	-7.37874E-2	-8.80026E1	-1.09673E-3	-8.79999E1	2.14577E-4	5.65052E-3	9.3317E-2	1.58539E1	-1.98741E1	-2.0067E1	1.50763E1	2.15894E-9	2.52209E-3	2.52209E-3	6.32936E-3	2.15563E-2
2.0E0	1.75E2	0.0E0	3.16E2	1.6E2	-7.38649E-2	-8.80024E1	-1.12057E-3	-8.79999E1	0.0E0	5.31673E-3	9.30786E-2	1.58113E1	-1.98837E1	-2.00958E1	1.50028E1	2.15441E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.17361E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.80028E1	-1.35899E-3	-8.80001E1	-1.43051E-4	5.29289E-3	9.3174E-2	1.58005E1	-1.98483E1	-1.99654E1	1.50106E1	2.15219E-9	2.52139E-3	2.52139E-3	6.31858E-3	2.17145E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.23189E-2	-8.80027E1	-1.19209E-3	-8.79998E1	-3.33786E-4	5.126E-3	9.32217E-2	1.5756E1	-1.98399E1	-1.98641E1	1.50298E1	2.15624E-9	2.52599E-3	2.52599E-3	6.32356E-3	2.16252E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80024E1	-1.26362E-3	-8.8E1	-1.90735E-4	4.8399E-3	9.3317E-2	1.58203E1	-1.98645E1	-1.98753E1	1.49887E1	2.159E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.16252E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80023E1	-1.14441E-3	-8.80002E1	9.53674E-5	5.24521E-3	9.31501E-2	1.57847E1	-1.98257E1	-1.98225E1	1.50269E1	2.15381E-9	2.52093E-3	2.52093E-3	6.30221E-3	2.15957E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.80027E1	-1.12057E-3	-8.8E1	-4.76837E-5	5.00679E-3	9.34601E-2	1.58286E1	-1.98735E1	-1.99915E1	1.50109E1	2.15574E-9	2.52222E-3	2.52222E-3	6.31902E-3	2.16512E-2
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80026E1	-1.09673E-3	-8.80001E1	-2.38419E-5	4.8399E-3	9.32217E-2	1.57957E1	-1.98651E1	-2.00381E1	1.50112E1	2.15425E-9	2.52209E-3	2.52209E-3	6.28552E-3	2.17066E-2
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80025E1	-1.09673E-3	-8.80001E1	-1.19209E-4	4.91142E-3	9.33886E-2	1.57759E1	-1.98687E1	-2.01114E1	1.50124E1	2.15716E-9	2.52492E-3	2.52492E-3	6.32356E-3	2.1829E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80023E1	-1.0252E-3	-8.80001E1	1.43051E-4	5.22137E-3	9.33886E-2	1.57843E1	-1.98699E1	-2.00958E1	1.50064E1	2.15613E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.15563E-2
1.4E1	6.0E0	0.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80021E1	-1.38283E-3	-8.80001E1	-1.43051E-4	5.48363E-3	9.32455E-2	1.58233E1	-1.98837E1	-1.98302E1	1.50178E1	2.15409E-9	2.53033E-3	2.53033E-3	6.31858E-3	2.16186E-2
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-7.32464E-2	-8.80019E1	-1.12057E-3	-8.8E1	-2.38419E-5	5.03063E-3	9.30309E-2	1.58023E1	-1.98519E1	-1.98434E1	1.501E1	2.15808E-9	2.52707E-3	2.52707E-3	6.31817E-3	2.16621E-2
1.6E1	1.2E1	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.8002E1	-1.26362E-3	-8.80003E1	-1.90735E-4	4.62532E-3	9.32932E-2	1.58371E1	-1.9847E1	-1.99462E1	1.50058E1	2.15894E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.17633E-2
1.7E1	3.9E1	0.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80021E1	-1.4782E-3	-8.80001E1	-2.14577E-4	4.8399E-3	9.35078E-2	1.57843E1	-1.98428E1	-1.99864E1	1.5028E1	2.15894E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.16501E-2
1.8E1	1.84E2	0.0E0	7.27E2	5.0E2	-7.29374E-2	-8.80022E1	-1.3113E-3	-8.80002E1	-4.76837E-5	4.88758E-3	9.35078E-2	1.58109E1	-1.9857E1	-2.00534E1	1.50016E1	2.15613E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.16689E-2
1.9E1	3.35E2	0.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80021E1	-1.71661E-3	-8.80003E1	-1.43051E-4	5.05447E-3	9.32455E-2	1.57678E1	-1.9844E1	-1.99549E1	1.50136E1	2.15533E-9	2.53031E-3	2.53031E-3	6.31817E-3	2.16806E-2
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-7.29374E-2	-8.80022E1	-1.28746E-3	-8.80001E1	-2.14577E-4	4.93526E-3	9.35316E-2	1.58244E1	-1.98682E1	-1.98369E1	1.50094E1	2.159E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.17732E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.8002E1	-1.40667E-3	-8.80002E1	2.38419E-5	5.17368E-3	9.36031E-2	1.58238E1	-1.98747E1	-1.97409E1	1.49935E1	2.159E-9	2.52492E-3	2.52492E-3	6.29128E-3	2.18663E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.25507E-2	-8.80022E1	-9.53674E-4	-8.79999E1	0.0E0	5.19753E-3	9.34124E-2	1.58252E1	-1.98508E1	-1.98771E1	1.50064E1	2.15624E-9	2.52169E-3	2.52169E-3	6.33436E-3	2.18104E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80024E1	-9.77516E-4	-8.79997E1	-7.15256E-5	5.24521E-3	9.35793E-2	1.57741E1	-1.98831E1	-2.01637E1	1.49974E1	2.15706E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.16878E-2
