[Scan]
initial_time=2016-01-28T15:50:51
final_time=2016-01-28T15:51:10
ip_count=19
run=1026
dataset=1
scan=20
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.83498E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-5.44357E-10
ql2_vset=
ql2_vmon=-1.40667E-3
ql2_imon=1.21793E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.49155E-9
ql4_vset=
ql4_vmon=0.0E0
ql4_imon=1.42403E-8
mult1=-9.78855E-9
mult2=-2.8284E-9
rf_tmon=-5.97243E-3
rf_agc=3.29611E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=6.13046E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65501E0
bslens_imon=2.51494E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20119E1
lens5a_imon=1.9805E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12473E2
lens4a_imon=2.05058E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54067E1
cs_ef1b_imon=3.1056E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02238E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04823E1
cs_ea1_imon=1.24465E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06958E0
lens1_imon=1.29031E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6453E1
os_ef1alow_imon=2.96216E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04133E1
cs_ea2_imon=1.40817E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84292E1
cs_ef1a_imon=2.99279E-5
olens2_vset=0.0E0
olens2_vmon=1.28746E-3
olens2_imon=1.03368E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11226E1
os_restr1_imon=4.31112E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15583E1
os_ea1_imon=2.4116E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63731E1
os_ef1bup_imon=3.0728E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23794E0
cs_ionrep_imon=9.69994E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91909E2
cs_nozzle_imon=1.93409E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01773E1
cs_anode1_imon=2.04279E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99977E1
olens4_imon=4.42117E-9
tplens_vset=0.0E0
tplens_vmon=-1.6373E0
tplens_imon=-3.55518E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.01727E1
iondef3_imon=8.69121E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98561E1
iondef2_imon=9.55483E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02887E2
lens6_imon=2.98162E-4
ql6_vset=1.0E-1
ql6_vmon=9.37223E-2
ql6_imon=8.05223E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26449E0
ionrepsh_imon=9.29645E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3361E1
lens5b_imon=2.17906E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74585E1
cs_ef2b_imon=3.11713E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.23617E0
os_ea2_imon=-6.28052E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00375E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71186E1
cs_ef2a_imon=3.18524E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07919E0
os_ef2alow_imon=-2.73843E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.55978E-1
os_ef2bup_imon=-5.33689E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10901E1
os_restr2_imon=3.36832E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23032E2
cs_ionfoca_imon=6.28088E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01869E1
cs_anode2_imon=2.08279E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57987E1
iondef1_imon=5.13057E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50136E1
iondef4_imon=5.21191E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27959E1
olens3_imon=2.68466E-8
olens1_vset=0.0E0
olens1_vmon=1.12057E-3
olens1_imon=1.23494E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14996E0
cs_ionaccel_imon=-1.10223E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47151E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56141E1
einzel_imon=7.66982E-6
window_vset=0.0E0
window_vmon=1.73494E-1
window_imon=-1.0734E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.39095E-4
mask2_vset=0.0E0
mask2_vmon=-1.8614E1
mask2_imon=-5.43619E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.31792E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=6.34104E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50147E3
multb_neg_imon=6.88611E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30516E0
defgridb_imon=6.16407E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3321E1
os_fil1_imon=9.41765E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07299E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61097E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30491E1
cs_fil1_imon=9.22628E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.28902E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63133E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.79811E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82698E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.74661E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.67798E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.05813E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21483E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28511E-3
inlet_lpb_pmon=2.1676E-2
chamber_ion_pmon=2.15409E-9
chamber_cvt_pmon=2.51581E-3
foreline_cvt_pmon=2.51581E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.39781E-1
res40_imon=-2.59428E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=208
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.56E2	0.0E0	1.47E2	4.1E1	-7.37874E-2	-8.80024E1	-1.33514E-3	-8.80002E1	-1.19209E-4	5.05447E-3	9.35078E-2	1.57891E1	-1.98464E1	-1.98687E1	1.5008E1	2.159E-9	2.52492E-3	2.52492E-3	6.32896E-3	2.15883E-2
2.0E0	1.62E2	0.0E0	3.16E2	1.6E2	-7.38649E-2	-8.80024E1	-1.35899E-3	-8.80003E1	7.15256E-5	5.03063E-3	9.34124E-2	1.58264E1	-1.98581E1	-2.01018E1	1.50103E1	2.158E-9	2.52538E-3	2.52538E-3	6.31837E-3	2.17255E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.3401E-2	-8.80024E1	-1.3113E-3	-8.8E1	-4.76837E-5	4.93526E-3	9.33647E-2	1.58446E1	-1.98654E1	-2.00566E1	1.50016E1	2.15505E-9	2.52809E-3	2.52809E-3	6.34099E-3	2.16952E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.286E-2	-8.80025E1	-1.50204E-3	-8.80002E1	4.76837E-5	5.03063E-3	9.38654E-2	1.57932E1	-1.98605E1	-1.98717E1	1.50106E1	2.15817E-9	2.52236E-3	2.52236E-3	6.31269E-3	2.16555E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.16233E-2	-8.80025E1	-1.50204E-3	-8.80005E1	1.43051E-4	5.17368E-3	9.34124E-2	1.58239E1	-1.99071E1	-2.00225E1	1.50118E1	2.15533E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.16991E-2
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.13915E-2	-8.80025E1	-1.04904E-3	-8.80002E1	1.19209E-4	5.05447E-3	9.34601E-2	1.58083E1	-1.98747E1	-1.99324E1	1.50124E1	2.15613E-9	2.51334E-3	2.51334E-3	6.31837E-3	2.17822E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.80025E1	-1.16825E-3	-8.80002E1	9.53674E-5	4.88758E-3	9.34839E-2	1.57975E1	-1.98404E1	-2.00183E1	1.50172E1	2.15987E-9	2.52428E-3	2.52428E-3	6.3074E-3	2.17633E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.80025E1	-1.00136E-3	-8.80002E1	7.15256E-5	5.10216E-3	9.32932E-2	1.58137E1	-1.98392E1	-2.00477E1	1.5007E1	2.15519E-9	2.51662E-3	2.51662E-3	6.34588E-3	2.17444E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.08504E-2	-8.80024E1	-7.15256E-4	-8.80002E1	-2.14577E-4	4.93526E-3	9.3174E-2	1.57719E1	-1.98564E1	-1.99372E1	1.5023E1	2.15706E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.15938E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.16233E-2	-8.80024E1	-1.04904E-3	-8.80001E1	2.14577E-4	4.74453E-3	9.32455E-2	1.58415E1	-1.98641E1	-1.99625E1	1.50142E1	2.15441E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.17176E-2
1.4E1	9.0E0	0.0E0	5.66E2	3.82E2	-7.10051E-2	-8.80023E1	-1.23978E-3	-8.80004E1	3.57628E-4	5.05447E-3	9.35793E-2	1.57601E1	-1.98685E1	-2.00232E1	1.49928E1	2.15697E-9	2.5269E-3	2.5269E-3	6.32174E-3	2.17188E-2
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80023E1	-1.21593E-3	-8.80002E1	0.0E0	5.17368E-3	9.33886E-2	1.58431E1	-1.98398E1	-1.98693E1	1.49975E1	2.15706E-9	2.51203E-3	2.51203E-3	6.29426E-3	2.16765E-2
1.6E1	1.3E1	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.80025E1	-1.45435E-3	-8.80005E1	-2.38419E-5	5.17368E-3	9.34124E-2	1.58089E1	-1.98513E1	-1.9802E1	1.50199E1	2.15894E-9	2.52428E-3	2.52428E-3	6.30192E-3	2.17066E-2
1.7E1	4.0E1	0.0E0	6.87E2	4.7E2	-7.286E-2	-8.80023E1	-1.50204E-3	-8.80002E1	1.19209E-4	5.14984E-3	9.3317E-2	1.58327E1	-1.98263E1	-1.98175E1	1.49896E1	2.15613E-9	2.52318E-3	2.52318E-3	6.30192E-3	2.15376E-2
1.8E1	1.81E2	0.0E0	7.27E2	5.0E2	-7.22418E-2	-8.80024E1	-1.88351E-3	-8.80004E1	1.90735E-4	5.19753E-3	9.34124E-2	1.57977E1	-1.98692E1	-1.99671E1	1.50226E1	2.15716E-9	2.51739E-3	2.51739E-3	6.34518E-3	2.16252E-2
1.9E1	3.48E2	0.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80024E1	-1.52588E-3	-8.80003E1	1.19209E-4	4.98295E-3	9.32932E-2	1.57981E1	-1.9844E1	-1.99708E1	1.49968E1	2.15887E-9	2.52473E-3	2.52473E-3	6.31858E-3	2.16377E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-7.17779E-2	-8.80023E1	-1.35899E-3	-8.80001E1	2.86102E-4	5.17368E-3	9.35793E-2	1.58179E1	-1.98579E1	-1.98729E1	1.50262E1	2.15706E-9	2.51443E-3	2.51443E-3	6.31837E-3	2.17255E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.18554E-2	-8.80027E1	-1.50204E-3	-8.8E1	9.53674E-5	5.26905E-3	9.35078E-2	1.57682E1	-1.98428E1	-1.98249E1	1.50264E1	2.15894E-9	2.51225E-3	2.51225E-3	6.31837E-3	2.16878E-2
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80024E1	-1.33514E-3	-8.80001E1	7.15256E-5	5.10216E-3	9.35555E-2	1.58142E1	-1.98967E1	-1.99592E1	1.50236E1	2.15636E-9	2.51709E-3	2.51709E-3	6.32858E-3	2.18194E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80023E1	-1.40667E-3	-8.80002E1	0.0E0	5.45979E-3	9.37223E-2	1.57987E1	-1.98561E1	-2.01727E1	1.50136E1	2.15409E-9	2.51581E-3	2.51581E-3	6.28511E-3	2.1676E-2
