[Scan]
initial_time=2016-01-28T15:53:31
final_time=2016-01-28T15:53:50
ip_count=19
run=1026
dataset=1
scan=26
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.85948E-6
ql1_vset=
ql1_vmon=-8.80028E1
ql1_imon=-5.916E-10
ql2_vset=
ql2_vmon=-1.09673E-3
ql2_imon=1.2491E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.44533E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.42746E-8
mult1=-9.93304E-9
mult2=-2.64875E-9
rf_tmon=-3.81547E-3
rf_agc=3.37481E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.91142E-3
ql5_imon=5.74994E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61107E0
bslens_imon=2.57852E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.198E1
lens5a_imon=1.96718E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.05093E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54229E1
cs_ef1b_imon=3.10776E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02042E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04714E1
cs_ea1_imon=1.22745E-5
lens1_vset=-2.7E0
lens1_vmon=-3.11017E0
lens1_imon=1.47041E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64729E1
os_ef1alow_imon=2.97333E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04146E1
cs_ea2_imon=1.3989E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8449E1
cs_ef1a_imon=2.99207E-5
olens2_vset=0.0E0
olens2_vmon=9.77516E-4
olens2_imon=1.03046E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11147E1
os_restr1_imon=4.31905E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15306E1
os_ea1_imon=2.41941E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63767E1
os_ef1bup_imon=3.08001E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22215E0
cs_ionrep_imon=9.68388E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93472E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01881E1
cs_anode1_imon=2.05324E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99979E1
olens4_imon=4.35587E-9
tplens_vset=0.0E0
tplens_vmon=-1.65766E0
tplens_imon=-7.23344E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.97912E1
iondef3_imon=8.68808E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98404E1
iondef2_imon=9.45178E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02891E2
lens6_imon=2.98335E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=7.8932E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28641E0
ionrepsh_imon=9.24213E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33727E1
lens5b_imon=2.17982E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74489E1
cs_ef2b_imon=3.10632E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.30326E0
os_ea2_imon=-6.85908E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06076E2
lens4b_imon=2.00338E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7115E1
cs_ef2a_imon=3.19894E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06597E0
os_ef2alow_imon=-2.71681E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.71595E-1
os_ef2bup_imon=-5.18913E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11183E1
os_restr2_imon=3.37806E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23033E2
cs_ionfoca_imon=6.33559E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01749E1
cs_anode2_imon=2.09324E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58413E1
iondef1_imon=4.73109E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50286E1
iondef4_imon=5.18308E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27959E1
olens3_imon=2.68385E-8
olens1_vset=0.0E0
olens1_vmon=1.0252E-3
olens1_imon=1.22954E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16918E0
cs_ionaccel_imon=-1.02295E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.47064E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56051E1
einzel_imon=7.73109E-6
window_vset=0.0E0
window_vmon=1.75897E-1
window_imon=-1.13107E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.39124E-4
mask2_vset=0.0E0
mask2_vmon=-1.86386E1
mask2_imon=-8.75184E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92656E3
multa_neg_imon=7.31043E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.89489E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=6.92484E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43997E0
defgridb_imon=6.17986E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3316E1
os_fil1_imon=9.409E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07317E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60808E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30449E1
cs_fil1_imon=9.22995E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29202E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62312E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.38474E-2
os_fil2_imon=-2.67798E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89305E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.85737E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35867E-1
cs_fil2_imon=-2.72603E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.40051E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21238E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.15938E-2
chamber_ion_pmon=2.15706E-9
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.45787E-1
res40_imon=-2.57986E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.45E2	2.0E0	1.47E2	4.1E1	-7.41738E-2	-8.80026E1	-9.53674E-4	-8.80002E1	-4.52995E-4	5.26905E-3	9.36031E-2	1.57971E1	-1.98521E1	-2.00143E1	1.4983E1	2.156E-9	2.52027E-3	2.52027E-3	6.3074E-3	2.17915E-2
2.0E0	1.63E2	0.0E0	3.16E2	1.6E2	-7.42513E-2	-8.80026E1	-1.14441E-3	-8.80003E1	4.76837E-5	5.29289E-3	9.37223E-2	1.5786E1	-1.98502E1	-1.9819E1	1.49902E1	2.15716E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.16621E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80027E1	-1.19209E-3	-8.80002E1	-1.66893E-4	5.10216E-3	9.33886E-2	1.57814E1	-1.98871E1	-2.00216E1	1.49914E1	2.15791E-9	2.5147E-3	2.5147E-3	6.33538E-3	2.15803E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.36328E-2	-8.80027E1	-1.19209E-3	-8.80001E1	9.53674E-5	5.6982E-3	9.36747E-2	1.57873E1	-1.98651E1	-2.00676E1	1.5019E1	2.15992E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.16621E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.34782E-2	-8.80028E1	-1.07288E-3	-8.80004E1	2.38419E-5	5.14984E-3	9.38177E-2	1.58407E1	-1.98248E1	-1.99864E1	1.50039E1	2.15706E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.16501E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80028E1	-1.23978E-3	-8.80003E1	7.15256E-5	5.17368E-3	9.37223E-2	1.58113E1	-1.98537E1	-1.99258E1	1.50076E1	2.15808E-9	2.52384E-3	2.52384E-3	6.31817E-3	2.17547E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80028E1	-1.35899E-3	-8.80003E1	2.38419E-5	5.14984E-3	9.40323E-2	1.58174E1	-1.98894E1	-2.00133E1	1.50214E1	2.15613E-9	2.52647E-3	2.52647E-3	6.3074E-3	2.1839E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.34782E-2	-8.80031E1	-1.04904E-3	-8.80005E1	0.0E0	5.14984E-3	9.38416E-2	1.57819E1	-1.98452E1	-1.98873E1	1.49722E1	2.15808E-9	2.51525E-3	2.51525E-3	6.32896E-3	2.15883E-2
1.2E1	5.0E0	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.80027E1	-1.00136E-3	-8.80004E1	-1.43051E-4	5.24521E-3	9.33886E-2	1.58005E1	-1.98308E1	-1.99786E1	1.50112E1	2.15887E-9	2.51915E-3	2.51915E-3	6.3074E-3	2.16377E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.29374E-2	-8.80027E1	-1.14441E-3	-8.80004E1	-2.6226E-4	4.74453E-3	9.36031E-2	1.57999E1	-1.98513E1	-1.99083E1	1.50202E1	2.15441E-9	2.51847E-3	2.51847E-3	6.29665E-3	2.16621E-2
1.4E1	4.0E0	0.0E0	5.66E2	3.82E2	-7.35556E-2	-8.80028E1	-1.19209E-3	-8.80002E1	-2.14577E-4	5.05447E-3	9.35555E-2	1.57532E1	-1.98621E1	-2.00722E1	1.49792E1	2.15987E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.15938E-2
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.37874E-2	-8.80027E1	-1.23978E-3	-8.80001E1	7.15256E-5	5.14984E-3	9.3627E-2	1.58567E1	-1.9874E1	-1.9924E1	1.50211E1	2.15919E-9	2.51956E-3	2.51956E-3	6.3023E-3	2.16605E-2
1.6E1	1.7E1	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80026E1	-1.50204E-3	-8.80003E1	-1.43051E-4	5.34058E-3	9.33886E-2	1.57783E1	-1.98861E1	-2.00213E1	1.49935E1	2.15459E-9	2.51911E-3	2.51911E-3	6.34897E-3	2.16178E-2
1.7E1	4.3E1	0.0E0	6.87E2	4.7E2	-7.33239E-2	-8.8003E1	-1.35899E-3	-8.80004E1	-2.14577E-4	5.126E-3	9.3627E-2	1.57765E1	-1.98681E1	-2.01006E1	1.50148E1	2.15716E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.16806E-2
1.8E1	1.68E2	0.0E0	7.27E2	5.0E2	-7.27053E-2	-8.80026E1	-1.4782E-3	-8.80002E1	2.38419E-5	5.31673E-3	9.36985E-2	1.58365E1	-1.98741E1	-2.00838E1	1.49818E1	2.15706E-9	2.51443E-3	2.51443E-3	6.29645E-3	2.16125E-2
1.9E1	3.17E2	0.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80028E1	-1.28746E-3	-8.79999E1	3.57628E-4	5.07832E-3	9.33409E-2	1.57608E1	-1.98489E1	-1.99997E1	1.50147E1	2.15314E-9	2.51025E-3	2.51025E-3	6.32418E-3	2.1676E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.23189E-2	-8.80028E1	-1.35899E-3	-8.80002E1	4.76837E-5	5.00679E-3	9.36747E-2	1.58293E1	-1.98416E1	-1.99258E1	1.50205E1	2.15706E-9	2.51443E-3	2.51443E-3	6.31288E-3	2.17255E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.80031E1	-1.5974E-3	-8.80003E1	1.90735E-4	4.81606E-3	9.37939E-2	1.57786E1	-1.98793E1	-2.01146E1	1.50158E1	2.15716E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.16436E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80028E1	-1.43051E-3	-8.80003E1	1.43051E-4	4.72069E-3	9.35316E-2	1.58083E1	-1.98567E1	-1.9948E1	1.50106E1	2.15349E-9	2.51632E-3	2.51632E-3	6.32356E-3	2.16067E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80028E1	-1.09673E-3	-8.80001E1	2.14577E-4	4.91142E-3	9.3627E-2	1.58413E1	-1.98404E1	-1.97912E1	1.50286E1	2.15706E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.15938E-2
