[Scan]
initial_time=2016-01-28T15:54:24
final_time=2016-01-28T15:54:43
ip_count=19
run=1026
dataset=1
scan=28
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.26282E-2
qbias_imon=-3.76682E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-5.63514E-10
ql2_vset=
ql2_vmon=-1.33514E-3
ql2_imon=1.14468E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-1.48365E-9
ql4_vset=
ql4_vmon=0.0E0
ql4_imon=1.4303E-8
mult1=-9.75243E-9
mult2=-2.71462E-9
rf_tmon=-4.37423E-3
rf_agc=3.38022E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=6.12521E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68391E0
bslens_imon=2.47601E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19718E1
lens5a_imon=1.96775E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.05065E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54968E1
cs_ef1b_imon=3.12434E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.01958E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05212E1
cs_ea1_imon=1.25173E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04068E0
lens1_imon=1.47082E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64951E1
os_ef1alow_imon=2.9672E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04003E1
cs_ea2_imon=1.42056E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84304E1
cs_ef1a_imon=3.00108E-5
olens2_vset=0.0E0
olens2_vmon=8.10623E-4
olens2_imon=1.02767E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11328E1
os_restr1_imon=4.30464E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15099E1
os_ea1_imon=2.42398E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63533E1
os_ef1bup_imon=3.08397E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25505E0
cs_ionrep_imon=9.53359E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93452E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01719E1
cs_anode1_imon=2.03882E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99983E1
olens4_imon=4.4039E-9
tplens_vset=0.0E0
tplens_vmon=-1.64438E0
tplens_imon=-3.62597E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.00633E1
iondef3_imon=8.49654E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98633E1
iondef2_imon=9.27521E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02891E2
lens6_imon=2.98289E-4
ql6_vset=1.0E-1
ql6_vmon=9.37223E-2
ql6_imon=7.88248E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27628E0
ionrepsh_imon=9.28937E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33663E1
lens5b_imon=2.17693E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74844E1
cs_ef2b_imon=3.12181E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.26862E0
os_ea2_imon=-6.4221E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06091E2
lens4b_imon=2.00513E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70993E1
cs_ef2a_imon=3.19353E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06837E0
os_ef2alow_imon=-2.7096E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.58982E-1
os_ef2bup_imon=-5.39816E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11081E1
os_restr2_imon=3.36905E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.29822E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.09504E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58335E1
iondef1_imon=4.98191E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50135E1
iondef4_imon=5.02451E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27962E1
olens3_imon=2.6851E-8
olens1_vset=0.0E0
olens1_vmon=7.86781E-4
olens1_imon=1.23055E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15477E0
cs_ionaccel_imon=-9.14827E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47104E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56657E1
einzel_imon=7.66261E-6
window_vset=0.0E0
window_vmon=1.789E-1
window_imon=-1.09503E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.39077E-4
mask2_vset=0.0E0
mask2_vmon=-1.86236E1
mask2_imon=-7.05797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92665E3
multa_neg_imon=7.62585E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9368E3
defgrida_imon=7.31438E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50089E3
multb_neg_imon=7.70018E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3465E0
defgridb_imon=6.0048E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33187E1
os_fil1_imon=9.41621E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06614E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61079E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30482E1
cs_fil1_imon=9.22088E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.38152E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6261E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.4332E-2
os_fil2_imon=-2.65395E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88104E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.84279E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35608E-1
cs_fil2_imon=-2.22749E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.53866E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21502E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31563E-3
inlet_lpb_pmon=2.17255E-2
chamber_ion_pmon=2.15613E-9
chamber_cvt_pmon=2.52045E-3
foreline_cvt_pmon=2.52045E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.19048E-1
res40_imon=-2.53301E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=178
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.17E2	0.0E0	1.47E2	4.1E1	-7.23189E-2	-8.80026E1	-1.09673E-3	-8.80002E1	9.53674E-5	4.98295E-3	9.32455E-2	1.57705E1	-1.9855E1	-2.00335E1	1.50062E1	2.15257E-9	2.52061E-3	2.52061E-3	6.29128E-3	2.16067E-2
2.0E0	1.51E2	1.0E0	3.16E2	1.6E2	-7.27828E-2	-8.80025E1	-1.3113E-3	-8.79999E1	-1.19209E-4	4.88758E-3	9.31501E-2	1.58453E1	-1.98684E1	-2.00606E1	1.49879E1	2.15533E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.17361E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.20871E-2	-8.80028E1	-1.23978E-3	-8.80003E1	-4.76837E-5	4.72069E-3	9.32455E-2	1.57925E1	-1.98631E1	-1.99008E1	1.50213E1	2.15505E-9	2.52585E-3	2.52585E-3	6.31299E-3	2.15231E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.29374E-2	-8.80028E1	-1.45435E-3	-8.80002E1	2.14577E-4	5.10216E-3	9.3317E-2	1.5824E1	-1.98269E1	-1.98367E1	1.50166E1	2.15455E-9	2.52025E-3	2.52025E-3	6.31798E-3	2.16011E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80028E1	-1.38283E-3	-8.8E1	-9.53674E-5	5.19753E-3	9.30786E-2	1.5857E1	-1.98699E1	-1.99726E1	1.50016E1	2.15696E-9	2.52473E-3	2.52473E-3	6.34661E-3	2.1676E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.38649E-2	-8.80026E1	-1.28746E-3	-8.80002E1	1.90735E-4	5.19753E-3	9.34124E-2	1.58351E1	-1.98045E1	-1.98682E1	1.49878E1	2.15706E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.17822E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.29374E-2	-8.80027E1	-1.40667E-3	-8.8E1	2.38419E-5	5.126E-3	9.3317E-2	1.57979E1	-1.98505E1	-1.98576E1	1.50178E1	2.15441E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.17918E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80028E1	-1.33514E-3	-8.79998E1	9.53674E-5	4.95911E-3	9.34362E-2	1.58089E1	-1.98813E1	-1.98897E1	1.50172E1	2.15894E-9	2.52867E-3	2.52867E-3	6.30192E-3	2.18201E-2
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.80028E1	-1.52588E-3	-8.80003E1	1.66893E-4	4.98295E-3	9.31263E-2	1.57867E1	-1.98537E1	-1.98855E1	1.50051E1	2.15519E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.16878E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80028E1	-1.19209E-3	-8.80003E1	-1.43051E-4	5.26905E-3	9.32217E-2	1.58067E1	-1.98411E1	-1.98275E1	1.50004E1	2.16085E-9	2.51954E-3	2.51954E-3	6.33436E-3	2.16991E-2
1.4E1	4.0E0	0.0E0	5.66E2	3.82E2	-7.33239E-2	-8.80031E1	-1.09673E-3	-8.80005E1	-2.38419E-5	5.03063E-3	9.34124E-2	1.57969E1	-1.9844E1	-1.98184E1	1.50028E1	2.15533E-9	2.51417E-3	2.51417E-3	6.32896E-3	2.17918E-2
1.5E1	5.0E0	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80028E1	-1.23978E-3	-8.80003E1	7.15256E-5	4.81606E-3	9.35316E-2	1.59508E1	-1.98571E1	-1.97857E1	1.50029E1	2.15997E-9	2.51814E-3	2.51814E-3	6.3074E-3	2.16011E-2
1.6E1	1.6E1	0.0E0	6.47E2	4.41E2	-7.39421E-2	-8.80024E1	-1.3113E-3	-8.80005E1	2.86102E-4	4.41074E-3	9.34601E-2	1.57422E1	-1.98483E1	-2.00183E1	1.49968E1	2.15574E-9	2.51874E-3	2.51874E-3	6.33648E-3	2.16712E-2
1.7E1	3.2E1	0.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80027E1	-1.3113E-3	-8.80005E1	1.43051E-4	4.76837E-3	9.32217E-2	1.58249E1	-1.98724E1	-1.98162E1	1.50028E1	2.15425E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.1575E-2
1.8E1	1.84E2	0.0E0	7.27E2	5.0E2	-7.33239E-2	-8.80028E1	-1.40667E-3	-8.80002E1	1.43051E-4	4.86374E-3	9.31978E-2	1.58474E1	-1.98513E1	-2.0079E1	1.49926E1	2.15808E-9	2.52384E-3	2.52384E-3	6.31278E-3	2.16621E-2
1.9E1	3.04E2	0.0E0	7.68E2	5.29E2	-7.34782E-2	-8.80028E1	-1.43051E-3	-8.80003E1	-1.19209E-4	4.45843E-3	9.32455E-2	1.57572E1	-1.98681E1	-2.00555E1	1.50201E1	2.15706E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.17066E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-7.23189E-2	-8.8003E1	-1.50204E-3	-8.80005E1	4.76837E-5	4.93526E-3	9.32932E-2	1.57548E1	-1.98981E1	-1.99888E1	1.49914E1	2.15349E-9	2.52276E-3	2.52276E-3	6.3074E-3	2.18663E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.20871E-2	-8.80026E1	-1.26362E-3	-8.80002E1	1.19209E-4	4.57764E-3	9.33647E-2	1.57955E1	-1.9824E1	-1.98476E1	1.50052E1	2.15894E-9	2.52209E-3	2.52209E-3	6.29645E-3	2.18011E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80028E1	-1.40667E-3	-8.80006E1	2.38419E-5	4.52995E-3	9.34601E-2	1.57991E1	-1.98688E1	-2.00116E1	1.50033E1	2.15441E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.16436E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.26282E-2	-8.80025E1	-1.33514E-3	-8.80006E1	0.0E0	5.05447E-3	9.37223E-2	1.58335E1	-1.98633E1	-2.00633E1	1.50135E1	2.15613E-9	2.52045E-3	2.52045E-3	6.31563E-3	2.17255E-2
