[Scan]
initial_time=2016-01-28T15:54:50
final_time=2016-01-28T15:55:10
ip_count=19
run=1026
dataset=1
scan=29
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.74127E-6
ql1_vset=
ql1_vmon=-8.8003E1
ql1_imon=-5.08666E-10
ql2_vset=
ql2_vmon=-1.0252E-3
ql2_imon=1.19387E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.44911E-9
ql4_vset=
ql4_vmon=-2.38419E-5
ql4_imon=1.43312E-8
mult1=-9.74761E-9
mult2=-2.61743E-9
rf_tmon=-3.99626E-3
rf_agc=3.36984E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=6.29342E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64851E0
bslens_imon=2.51862E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20025E1
lens5a_imon=1.98627E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12471E2
lens4a_imon=2.04831E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5295E1
cs_ef1b_imon=3.09218E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02289E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04464E1
cs_ea1_imon=1.22445E-5
lens1_vset=-2.7E0
lens1_vmon=-3.10393E0
lens1_imon=1.53405E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64702E1
os_ef1alow_imon=2.96568E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03771E1
cs_ea2_imon=1.39441E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84382E1
cs_ef1a_imon=3.00984E-5
olens2_vset=0.0E0
olens2_vmon=1.00136E-3
olens2_imon=1.0256E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11211E1
os_restr1_imon=4.31001E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15512E1
os_ea1_imon=2.42802E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63642E1
os_ef1bup_imon=3.08544E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21591E0
cs_ionrep_imon=9.71008E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91913E2
cs_nozzle_imon=1.93353E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0189E1
cs_anode1_imon=2.04463E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9998E1
olens4_imon=4.43159E-9
tplens_vset=0.0E0
tplens_vmon=-1.6015E0
tplens_imon=-3.86419E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.00458E1
iondef3_imon=8.65439E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.9857E1
iondef2_imon=9.33572E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02944E2
lens6_imon=2.98417E-4
ql6_vset=1.0E-1
ql6_vmon=9.38892E-2
ql6_imon=8.03864E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24835E0
ionrepsh_imon=9.25336E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33883E1
lens5b_imon=2.16484E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74751E1
cs_ef2b_imon=3.11576E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.20717E0
os_ea2_imon=-6.97139E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06118E2
lens4b_imon=2.00372E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71251E1
cs_ef2a_imon=3.17826E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0845E0
os_ef2alow_imon=-2.73525E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.45859E-1
os_ef2bup_imon=-5.39622E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10961E1
os_restr2_imon=3.36726E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23037E2
cs_ionfoca_imon=6.29554E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01759E1
cs_anode2_imon=2.09815E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58504E1
iondef1_imon=5.06801E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50034E1
iondef4_imon=5.13166E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.6763E-8
olens1_vset=0.0E0
olens1_vmon=1.0252E-3
olens1_imon=1.22862E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15509E0
cs_ionaccel_imon=-1.096E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47222E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56355E1
einzel_imon=7.65416E-6
window_vset=0.0E0
window_vmon=1.71438E-1
window_imon=-1.03986E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39084E-4
mask2_vset=0.0E0
mask2_vmon=-1.86257E1
mask2_imon=-6.46886E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92601E3
multa_neg_imon=5.97397E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.78633E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=8.08162E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35564E0
defgridb_imon=6.11622E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33191E1
os_fil1_imon=9.42133E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07024E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60739E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30519E1
cs_fil1_imon=9.22859E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.28514E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62552E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.61243E-2
os_fil2_imon=-2.80597E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96582E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.761E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34223E-1
cs_fil2_imon=-2.32567E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.35453E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21432E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.1575E-2
chamber_ion_pmon=2.15332E-9
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40102E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.73731E-1
res40_imon=-2.48075E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.62E2	0.0E0	1.47E2	4.1E1	-7.19325E-2	-8.80028E1	-9.05991E-4	-8.8E1	-2.6226E-4	4.50611E-3	9.35316E-2	1.57849E1	-1.98505E1	-2.00234E1	1.49993E1					
2.0E0	1.53E2	0.0E0	3.16E2	1.6E2	-7.23189E-2	-8.80026E1	-1.28746E-3	-8.79999E1	-1.43051E-4	4.88758E-3	9.37223E-2	1.58038E1	-1.98318E1	-1.99169E1	1.50334E1	2.159E-9	2.51525E-3	2.51525E-3	6.29665E-3	2.1829E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.17007E-2	-8.80027E1	-1.12057E-3	-8.80002E1	-7.15256E-5	4.79221E-3	9.32455E-2	1.57902E1	-1.98475E1	-1.98683E1	1.49941E1	2.15409E-9	2.51693E-3	2.51693E-3	6.31299E-3	2.17529E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.201E-2	-8.80025E1	-1.0252E-3	-8.80002E1	-9.53674E-5	4.76837E-3	9.38892E-2	1.58315E1	-1.98741E1	-2.0044E1	1.49986E1	2.15455E-9	2.51603E-3	2.51603E-3	6.32328E-3	2.15831E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.14689E-2	-8.80026E1	-1.45435E-3	-8.80002E1	-3.09944E-4	5.24521E-3	9.34839E-2	1.58071E1	-1.98452E1	-1.98675E1	1.50033E1	2.15257E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.15699E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.24736E-2	-8.80028E1	-1.14441E-3	-8.79999E1	7.15256E-5	5.19753E-3	9.34601E-2	1.57314E1	-1.98597E1	-1.99179E1	1.50088E1	2.15894E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.17255E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80028E1	-1.23978E-3	-8.8E1	2.38419E-4	5.03063E-3	9.36031E-2	1.5857E1	-1.9832E1	-2.00946E1	1.49979E1	2.15613E-9	2.52428E-3	2.52428E-3	6.3514E-3	2.16125E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.80027E1	-1.26362E-3	-8.80001E1	1.90735E-4	5.126E-3	9.39846E-2	1.57945E1	-1.98645E1	-1.98867E1	1.50178E1	2.156E-9	2.51693E-3	2.51693E-3	6.29624E-3	2.15803E-2
1.2E1	4.0E0	0.0E0	4.85E2	3.23E2	-7.31692E-2	-8.80025E1	-1.28746E-3	-8.8E1	1.43051E-4	4.86374E-3	9.377E-2	1.58209E1	-1.98487E1	-1.99791E1	1.50242E1	2.15165E-9	2.52492E-3	2.52492E-3	6.31817E-3	2.16436E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.37103E-2	-8.80027E1	-1.23978E-3	-8.80002E1	1.66893E-4	4.8399E-3	9.3627E-2	1.58059E1	-1.98555E1	-1.99222E1	1.49962E1	2.15624E-9	2.51847E-3	2.51847E-3	6.32896E-3	2.17547E-2
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-7.29374E-2	-8.80024E1	-1.33514E-3	-8.80004E1	-2.38419E-5	5.03063E-3	9.35078E-2	1.57885E1	-1.98537E1	-2.01162E1	1.50016E1	2.15505E-9	2.52027E-3	2.52027E-3	6.28511E-3	2.16952E-2
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.8003E1	-1.14441E-3	-8.80003E1	-9.53674E-5	4.88758E-3	9.36031E-2	1.57224E1	-1.97996E1	-1.99342E1	1.498E1	2.16175E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.16313E-2
1.6E1	1.6E1	0.0E0	6.47E2	4.41E2	-7.33239E-2	-8.80029E1	-1.14441E-3	-8.80001E1	4.76837E-5	5.126E-3	9.32932E-2	1.57732E1	-1.98759E1	-2.00002E1	1.50022E1	2.15894E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.16689E-2
1.7E1	3.1E1	0.0E0	6.87E2	4.7E2	-7.35556E-2	-8.80027E1	-9.29832E-4	-8.80004E1	1.90735E-4	5.07832E-3	9.36508E-2	1.5792E1	-1.98594E1	-2.00458E1	1.50064E1	2.15519E-9	2.51662E-3	2.51662E-3	6.29645E-3	2.17444E-2
1.8E1	1.84E2	0.0E0	7.27E2	5.0E2	-7.31692E-2	-8.80025E1	-1.00136E-3	-8.80003E1	-2.86102E-4	5.43594E-3	9.35316E-2	1.58437E1	-1.98681E1	-1.98561E1	1.49938E1	2.15624E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.16806E-2
1.9E1	3.54E2	0.0E0	7.68E2	5.29E2	-7.19325E-2	-8.80028E1	-1.04904E-3	-8.80002E1	1.66893E-4	5.07832E-3	9.33409E-2	1.58089E1	-1.98609E1	-1.99564E1	1.50148E1	2.15519E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.16689E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.22418E-2	-8.80029E1	-1.09673E-3	-8.80001E1	9.53674E-5	5.24521E-3	9.35078E-2	1.58238E1	-1.98405E1	-1.98959E1	1.49932E1	2.16081E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.17066E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80028E1	-1.16825E-3	-8.79999E1	7.15256E-5	5.05447E-3	9.37939E-2	1.58089E1	-1.98537E1	-1.99816E1	1.49808E1	2.16081E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.16125E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.33239E-2	-8.80028E1	-6.67572E-4	-8.80003E1	4.76837E-5	5.34058E-3	9.39131E-2	1.57753E1	-1.98591E1	-2.01691E1	1.49626E1	2.15624E-9	2.52707E-3	2.52707E-3	6.32356E-3	2.16621E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.8003E1	-1.0252E-3	-8.80004E1	-2.38419E-5	5.45979E-3	9.38892E-2	1.58504E1	-1.9857E1	-2.00458E1	1.50034E1	2.15332E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.1575E-2
