[Scan]
initial_time=2016-01-28T15:55:17
final_time=2016-01-28T15:55:37
ip_count=19
run=1026
dataset=1
scan=30
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.78504E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-5.70369E-10
ql2_vset=
ql2_vmon=-8.82149E-4
ql2_imon=1.23823E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.46767E-9
ql4_vset=
ql4_vmon=-2.38419E-5
ql4_imon=1.42514E-8
mult1=-9.57182E-9
mult2=-2.66072E-9
rf_tmon=-3.42493E-3
rf_agc=3.34357E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.31673E-3
ql5_imon=6.02651E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68837E0
bslens_imon=2.36471E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19989E1
lens5a_imon=1.96541E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.05075E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54223E1
cs_ef1b_imon=3.10704E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04622E2
lens23_imon=1.02027E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05228E1
cs_ea1_imon=1.23576E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05157E0
lens1_imon=1.53558E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64596E1
os_ef1alow_imon=2.97838E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04009E1
cs_ea2_imon=1.40087E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84058E1
cs_ef1a_imon=3.00324E-5
olens2_vset=0.0E0
olens2_vmon=8.82149E-4
olens2_imon=1.02645E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11304E1
os_restr1_imon=4.31941E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15378E1
os_ea1_imon=2.41783E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63515E1
os_ef1bup_imon=3.08037E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2533E0
cs_ionrep_imon=9.61067E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93471E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01857E1
cs_anode1_imon=2.04279E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99974E1
olens4_imon=4.40892E-9
tplens_vset=0.0E0
tplens_vmon=-1.64564E0
tplens_imon=-3.5342E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.0076E1
iondef3_imon=8.66617E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98873E1
iondef2_imon=9.46287E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02889E2
lens6_imon=2.98371E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=8.30019E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2557E0
ionrepsh_imon=9.25739E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33568E1
lens5b_imon=2.18098E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74513E1
cs_ef2b_imon=3.12974E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.24849E0
os_ea2_imon=-5.73322E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06072E2
lens4b_imon=2.00424E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71378E1
cs_ef2a_imon=3.17551E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05095E0
os_ef2alow_imon=-2.53661E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.58982E-1
os_ef2bup_imon=-5.35491E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10973E1
os_restr2_imon=3.36364E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23046E2
cs_ionfoca_imon=6.2845E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01911E1
cs_anode2_imon=2.0936E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57554E1
iondef1_imon=5.09006E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50136E1
iondef4_imon=5.34887E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27959E1
olens3_imon=2.67929E-8
olens1_vset=0.0E0
olens1_vmon=1.23978E-3
olens1_imon=1.23167E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13254E0
cs_ionaccel_imon=-1.0698E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47324E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56153E1
einzel_imon=7.53287E-6
window_vset=0.0E0
window_vmon=1.80702E-1
window_imon=-1.01574E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39275E-4
mask2_vset=0.0E0
mask2_vmon=-1.86416E1
mask2_imon=-7.59857E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92669E3
multa_neg_imon=7.72167E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9374E3
defgrida_imon=6.33737E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.12686E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36547E0
defgridb_imon=5.67406E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.332E1
os_fil1_imon=9.40882E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07047E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60894E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30531E1
cs_fil1_imon=9.23824E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.28001E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62923E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.29297E-2
os_fil2_imon=-2.71402E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.79094E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.92782E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35219E-1
cs_fil2_imon=-2.50379E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.07014E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21527E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.15938E-2
chamber_ion_pmon=2.15238E-9
chamber_cvt_pmon=2.52538E-3
foreline_cvt_pmon=2.52538E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.07946E-1
res40_imon=-2.54742E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=205
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.52E2	0.0E0	1.47E2	4.1E1	-7.286E-2	-8.80027E1	-1.00136E-3	-8.8E1	4.05312E-4	4.98295E-3	9.34362E-2	1.58179E1	-1.98843E1	-2.00063E1	1.50004E1	2.15613E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.16125E-2
2.0E0	1.54E2	0.0E0	3.16E2	1.6E2	-7.286E-2	-8.80025E1	-1.0252E-3	-8.80004E1	-2.38419E-5	5.03063E-3	9.32932E-2	1.58167E1	-1.98575E1	-1.99145E1	1.49914E1	2.15716E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.16067E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80026E1	-9.77516E-4	-8.80002E1	2.38419E-4	4.76837E-3	9.34601E-2	1.58058E1	-1.98556E1	-1.99338E1	1.50346E1	2.15887E-9	2.52139E-3	2.52139E-3	6.29624E-3	2.17337E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.33239E-2	-8.80029E1	-9.05991E-4	-8.80002E1	9.53674E-5	4.8399E-3	9.33886E-2	1.58109E1	-1.98293E1	-1.98552E1	1.49932E1	2.15817E-9	2.52342E-3	2.52342E-3	6.31798E-3	2.16011E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80029E1	-1.43051E-3	-8.80005E1	9.53674E-5	4.74453E-3	9.34839E-2	1.57743E1	-1.98712E1	-2.00493E1	1.4997E1	2.14982E-9	2.52492E-3	2.52492E-3	6.31817E-3	2.17361E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80026E1	-1.35899E-3	-8.80006E1	2.14577E-4	4.95911E-3	9.37223E-2	1.58383E1	-1.9847E1	-1.99282E1	1.50172E1	2.15519E-9	2.52318E-3	2.52318E-3	6.33486E-3	2.17255E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.80025E1	-8.82149E-4	-8.80001E1	-7.15256E-5	4.88758E-3	9.35078E-2	1.58522E1	-1.98485E1	-1.97762E1	1.50122E1	2.1541E-9	2.52131E-3	2.52131E-3	6.31269E-3	2.16464E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.80025E1	-1.07288E-3	-8.80003E1	3.09944E-4	5.00679E-3	9.34124E-2	1.57911E1	-1.98378E1	-1.99803E1	1.50301E1					
1.2E1	4.0E0	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.80027E1	-1.12057E-3	-8.80004E1	9.53674E-5	5.19753E-3	9.35793E-2	1.58011E1	-1.98711E1	-1.9963E1	1.4995E1	2.15872E-9	2.52106E-3	2.52106E-3	6.29581E-3	2.17911E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80026E1	-1.04904E-3	-8.80003E1	1.90735E-4	5.38826E-3	9.33647E-2	1.5792E1	-1.98735E1	-1.99054E1	1.50052E1	2.15894E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.17822E-2
1.4E1	1.4E1	0.0E0	5.66E2	3.82E2	-7.16233E-2	-8.80028E1	-8.34465E-4	-8.80002E1	1.19209E-4	5.03063E-3	9.33886E-2	1.572E1	-1.99029E1	-2.00159E1	1.50256E1	2.15349E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.18104E-2
1.5E1	2.0E0	0.0E0	6.06E2	4.11E2	-7.17007E-2	-8.80024E1	-1.12057E-3	-8.80005E1	4.76837E-5	5.29289E-3	9.34839E-2	1.58708E1	-1.99047E1	-1.98681E1	1.49976E1	2.156E-9	2.51581E-3	2.51581E-3	6.32418E-3	2.17722E-2
1.6E1	1.7E1	0.0E0	6.47E2	4.41E2	-7.201E-2	-8.80025E1	-9.05991E-4	-8.80003E1	4.76837E-5	5.57899E-3	9.34839E-2	1.57548E1	-1.98765E1	-1.99912E1	1.49974E1	2.15624E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.15883E-2
1.7E1	4.8E1	0.0E0	6.87E2	4.7E2	-7.17779E-2	-8.80027E1	-1.19209E-3	-8.80006E1	0.0E0	5.19753E-3	9.38654E-2	1.58425E1	-1.98458E1	-1.98567E1	1.50292E1	2.15519E-9	2.51552E-3	2.51552E-3	6.3074E-3	2.16878E-2
1.8E1	1.97E2	0.0E0	7.27E2	5.0E2	-7.13915E-2	-8.80026E1	-1.14441E-3	-8.80006E1	3.09944E-4	5.24521E-3	9.38177E-2	1.57692E1	-1.98867E1	-1.99918E1	1.50066E1	2.158E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.17255E-2
1.9E1	3.28E2	0.0E0	7.68E2	5.29E2	-7.13143E-2	-8.80026E1	-1.21593E-3	-8.80005E1	3.57628E-4	5.45979E-3	9.36747E-2	1.57501E1	-1.98877E1	-1.99467E1	1.499E1	2.16081E-9	2.52647E-3	2.52647E-3	6.28006E-3	2.16313E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.25507E-2	-8.80027E1	-9.29832E-4	-8.8E1	4.05312E-4	5.65052E-3	9.35555E-2	1.5873E1	-1.98679E1	-2.00136E1	1.50142E1	2.15238E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.1575E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30146E-2	-8.80027E1	-1.26362E-3	-8.80001E1	1.90735E-4	5.67436E-3	9.33886E-2	1.58173E1	-1.98824E1	-2.01725E1	1.49952E1	2.15987E-9	2.52538E-3	2.52538E-3	6.31288E-3	2.15563E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80026E1	-9.29832E-4	-8.80004E1	3.57628E-4	5.19753E-3	9.33647E-2	1.58137E1	-1.98717E1	-2.01222E1	1.501E1	2.15599E-9	2.51932E-3	2.51932E-3	6.32047E-3	2.15767E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80026E1	-8.82149E-4	-8.80003E1	-2.38419E-5	5.31673E-3	9.33647E-2	1.57554E1	-1.98873E1	-2.0076E1	1.50136E1	2.15238E-9	2.52538E-3	2.52538E-3	6.32386E-3	2.15938E-2
