[Scan]
initial_time=2016-01-28T15:55:44
final_time=2016-01-28T15:56:03
ip_count=19
run=1026
dataset=1
scan=31
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.41738E-2
qbias_imon=-3.80563E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-5.39505E-10
ql2_vset=
ql2_vmon=-1.04904E-3
ql2_imon=1.21471E-9
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-1.40508E-9
ql4_vset=
ql4_vmon=-7.15256E-5
ql4_imon=1.42897E-8
mult1=-9.9812E-9
mult2=-2.85834E-9
rf_tmon=-6.18873E-3
rf_agc=3.2919E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=6.12474E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65893E0
bslens_imon=2.24215E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19881E1
lens5a_imon=1.99749E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12501E2
lens4a_imon=2.04945E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.534E1
cs_ef1b_imon=3.08145E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04592E2
lens23_imon=1.02085E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05072E1
cs_ea1_imon=1.2592E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05337E0
lens1_imon=1.51395E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64686E1
os_ef1alow_imon=2.9791E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04123E1
cs_ea2_imon=1.39691E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84352E1
cs_ef1a_imon=2.99423E-5
olens2_vset=0.0E0
olens2_vmon=1.14441E-3
olens2_imon=1.03058E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11376E1
os_restr1_imon=4.32806E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15534E1
os_ea1_imon=2.46325E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.0746E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24969E0
cs_ionrep_imon=9.57102E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91898E2
cs_nozzle_imon=1.93499E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02061E1
cs_anode1_imon=2.05468E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99977E1
olens4_imon=4.42125E-9
tplens_vset=0.0E0
tplens_vmon=-1.59637E0
tplens_imon=-4.39939E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.98603E1
iondef3_imon=8.84282E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98729E1
iondef2_imon=9.3439E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02907E2
lens6_imon=2.984E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=8.47626E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29836E0
ionrepsh_imon=9.06272E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33814E1
lens5b_imon=2.17666E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74585E1
cs_ef2b_imon=3.11641E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.24969E0
os_ea2_imon=-7.10311E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06097E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71354E1
cs_ef2a_imon=3.1838E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05156E0
os_ef2alow_imon=-2.54742E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.67391E-1
os_ef2bup_imon=-5.28283E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10811E1
os_restr2_imon=3.35895E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23087E2
cs_ionfoca_imon=6.28306E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01671E1
cs_anode2_imon=2.08856E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58425E1
iondef1_imon=5.17297E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50148E1
iondef4_imon=5.37049E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27967E1
olens3_imon=2.68314E-8
olens1_vset=0.0E0
olens1_vmon=1.00136E-3
olens1_imon=1.22963E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15717E0
cs_ionaccel_imon=-1.26802E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47259E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56207E1
einzel_imon=7.63378E-6
window_vset=0.0E0
window_vmon=1.44663E-1
window_imon=-1.02295E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82613E2
mask1_imon=2.39149E-4
mask2_vset=0.0E0
mask2_vmon=-1.8632E1
mask2_imon=-8.13916E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.40804E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93735E3
defgrida_imon=6.38063E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50146E3
multb_neg_imon=7.20977E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35044E0
defgridb_imon=6.12108E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33184E1
os_fil1_imon=9.37086E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07605E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.606E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30473E1
cs_fil1_imon=9.23848E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30524E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62388E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.53802E-2
os_fil2_imon=-2.59389E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82097E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.84532E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35867E-1
cs_fil2_imon=-2.44372E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.29879E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21389E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.16991E-2
chamber_ion_pmon=2.15624E-9
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40038E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.98335E-1
res40_imon=-2.64113E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.33E2	0.0E0	1.47E2	4.1E1	-7.30146E-2	-8.80024E1	-1.07288E-3	-8.80005E1	-1.66893E-4	5.34058E-3	9.35793E-2	1.57554E1	-1.98621E1	-1.9948E1	1.4986E1	2.15706E-9	2.52099E-3	2.52099E-3	6.29645E-3	2.16878E-2
2.0E0	1.76E2	0.0E0	3.16E2	1.6E2	-7.30146E-2	-8.80025E1	-1.14441E-3	-8.80004E1	1.19209E-4	5.17368E-3	9.3627E-2	1.59339E1	-1.98497E1	-1.99502E1	1.50303E1	2.15987E-9	2.51771E-3	2.51771E-3	6.34037E-3	2.15938E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.37874E-2	-8.80026E1	-1.38283E-3	-8.80002E1	1.19209E-4	4.86374E-3	9.36031E-2	1.56814E1	-1.98343E1	-2.00085E1	1.50145E1	2.15782E-9	2.51498E-3	2.51498E-3	6.34737E-3	2.15469E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.34782E-2	-8.80023E1	-1.23978E-3	-8.80002E1	4.76837E-5	5.07832E-3	9.34362E-2	1.5872E1	-1.98525E1	-1.99558E1	1.50172E1	2.15204E-9	2.5199E-3	2.5199E-3	6.323E-3	2.15957E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37874E-2	-8.80023E1	-1.04904E-3	-8.80004E1	7.15256E-5	4.98295E-3	9.34601E-2	1.57837E1	-1.9844E1	-1.99803E1	1.50052E1	2.15613E-9	2.52318E-3	2.52318E-3	6.34037E-3	2.15189E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.39421E-2	-8.80022E1	-9.29832E-4	-8.80005E1	-3.09944E-4	4.81606E-3	9.33886E-2	1.57826E1	-1.98753E1	-2.00104E1	1.50202E1	2.15425E-9	2.52428E-3	2.52428E-3	6.30192E-3	2.16313E-2
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.33239E-2	-8.80022E1	-1.43051E-3	-8.80007E1	-2.86102E-4	5.14984E-3	9.34362E-2	1.58368E1	-1.98393E1	-1.98452E1	1.49825E1	2.15817E-9	2.52553E-3	2.52553E-3	6.32328E-3	2.15831E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.34782E-2	-8.80021E1	-1.28746E-3	-8.80003E1	1.66893E-4	5.22137E-3	9.35316E-2	1.56942E1	-1.98508E1	-2.00185E1	1.49908E1	2.15716E-9	2.51847E-3	2.51847E-3	6.33436E-3	2.16621E-2
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-7.3401E-2	-8.80024E1	-1.04904E-3	-8.80004E1	7.15256E-5	5.07832E-3	9.34601E-2	1.58089E1	-1.98507E1	-1.993E1	1.50232E1	2.156E-9	2.51693E-3	2.51693E-3	6.32418E-3	2.16186E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80023E1	-7.86781E-4	-8.80004E1	0.0E0	5.19753E-3	9.3317E-2	1.58575E1	-1.98594E1	-1.98741E1	1.50196E1	2.15519E-9	2.52318E-3	2.52318E-3	6.33486E-3	2.15938E-2
1.4E1	9.0E0	0.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80025E1	-1.04904E-3	-8.80002E1	7.15256E-5	5.31673E-3	9.34124E-2	1.5805E1	-1.98529E1	-2.00558E1	1.50118E1	2.15441E-9	2.51096E-3	2.51096E-3	6.31817E-3	2.16806E-2
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-7.40192E-2	-8.80027E1	-1.00136E-3	-8.80004E1	4.76837E-5	5.05447E-3	9.3317E-2	1.58497E1	-1.98508E1	-1.99273E1	1.50166E1	2.15987E-9	2.52757E-3	2.52757E-3	6.33486E-3	2.15938E-2
1.6E1	2.6E1	0.0E0	6.47E2	4.41E2	-7.29374E-2	-8.80027E1	-9.53674E-4	-8.80002E1	7.15256E-5	5.07832E-3	9.33886E-2	1.57699E1	-1.98399E1	-1.98417E1	1.50201E1	2.15706E-9	2.52867E-3	2.52867E-3	6.32386E-3	2.16313E-2
1.7E1	3.9E1	0.0E0	6.87E2	4.7E2	-7.36328E-2	-8.80028E1	-1.04904E-3	-8.80003E1	2.6226E-4	5.31673E-3	9.3317E-2	1.57861E1	-1.98883E1	-2.00157E1	1.5041E1	2.15624E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.16252E-2
1.8E1	1.86E2	0.0E0	7.27E2	5.0E2	-7.37874E-2	-8.80028E1	-1.26362E-3	-8.80001E1	2.86102E-4	5.14984E-3	9.31978E-2	1.57915E1	-1.98356E1	-2.0112E1	1.50082E1	2.15455E-9	2.52448E-3	2.52448E-3	6.31798E-3	2.16736E-2
1.9E1	3.29E2	0.0E0	7.68E2	5.29E2	-7.35556E-2	-8.80023E1	-1.14441E-3	-8.80004E1	1.19209E-4	4.98295E-3	9.33647E-2	1.57725E1	-1.98824E1	-1.987E1	1.49818E1	2.15238E-9	2.52318E-3	2.52318E-3	6.30192E-3	2.17444E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-7.43285E-2	-8.80027E1	-1.14441E-3	-8.8E1	1.19209E-4	4.93526E-3	9.32932E-2	1.57925E1	-1.98388E1	-2.00537E1	1.50004E1	2.15533E-9	2.52707E-3	2.52707E-3	6.31817E-3	2.16436E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.43285E-2	-8.80024E1	-8.58307E-4	-8.79999E1	1.90735E-4	4.88758E-3	9.32455E-2	1.57698E1	-1.98622E1	-1.99246E1	1.50216E1	2.15636E-9	2.52448E-3	2.52448E-3	6.31798E-3	2.16555E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80022E1	-1.04904E-3	-8.79999E1	1.43051E-4	4.8399E-3	9.33886E-2	1.58018E1	-1.98562E1	-1.98145E1	1.50109E1	2.15587E-9	2.51725E-3	2.51725E-3	6.3245E-3	2.16443E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.41738E-2	-8.80023E1	-1.04904E-3	-8.79999E1	-7.15256E-5	4.93526E-3	9.33647E-2	1.58425E1	-1.98729E1	-1.98603E1	1.50148E1	2.15624E-9	2.51417E-3	2.51417E-3	6.3074E-3	2.16991E-2
