[Scan]
initial_time=2016-01-28T15:56:37
final_time=2016-01-28T15:56:56
ip_count=19
run=1026
dataset=1
scan=33
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.86257E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-5.46694E-10
ql2_vset=
ql2_vmon=-1.16825E-3
ql2_imon=1.29776E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.44804E-9
ql4_vset=
ql4_vmon=-1.43051E-4
ql4_imon=1.42447E-8
mult1=-9.88488E-9
mult2=-2.67669E-9
rf_tmon=-2.57777E-3
rf_agc=3.52382E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=5.93424E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65953E0
bslens_imon=2.55217E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19713E1
lens5a_imon=1.98379E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.0496E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53532E1
cs_ef1b_imon=3.10199E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.01977E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05192E1
cs_ea1_imon=1.24334E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08281E0
lens1_imon=1.53918E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64494E1
os_ef1alow_imon=2.96612E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0375E1
cs_ea2_imon=1.41673E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84472E1
cs_ef1a_imon=3.01442E-5
olens2_vset=0.0E0
olens2_vmon=1.12057E-3
olens2_imon=1.02468E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11021E1
os_restr1_imon=4.30391E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15306E1
os_ea1_imon=2.44523E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63749E1
os_ef1bup_imon=3.08722E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2527E0
cs_ionrep_imon=9.75487E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91859E2
cs_nozzle_imon=1.93413E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01737E1
cs_anode1_imon=2.04279E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99978E1
olens4_imon=4.49039E-9
tplens_vset=0.0E0
tplens_vmon=-1.60418E0
tplens_imon=-3.6784E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.98464E1
iondef3_imon=8.70943E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98452E1
iondef2_imon=9.35832E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02905E2
lens6_imon=2.98461E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=8.48031E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30137E0
ionrepsh_imon=9.36914E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33718E1
lens5b_imon=2.18134E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74766E1
cs_ef2b_imon=3.12542E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.26171E0
os_ea2_imon=-7.42755E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00457E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70879E1
cs_ef2a_imon=3.18056E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07438E0
os_ef2alow_imon=-2.62671E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.55378E-1
os_ef2bup_imon=-5.44862E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10733E1
os_restr2_imon=3.36724E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.29856E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01653E1
cs_anode2_imon=2.08892E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58167E1
iondef1_imon=5.07203E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50202E1
iondef4_imon=5.25516E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.67899E-8
olens1_vset=0.0E0
olens1_vmon=6.67572E-4
olens1_imon=1.23513E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16378E0
cs_ionaccel_imon=-1.1635E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47266E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56261E1
einzel_imon=7.57251E-6
window_vset=0.0E0
window_vmon=1.55475E-1
window_imon=-1.02655E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82623E2
mask1_imon=2.39117E-4
mask2_vset=0.0E0
mask2_vmon=-1.86356E1
mask2_imon=-6.84173E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=7.11965E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.68705E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.40083E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34442E0
defgridb_imon=5.99851E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33175E1
os_fil1_imon=9.40023E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06416E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6071E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30445E1
cs_fil1_imon=9.22772E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.2692E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62449E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.69279E-2
os_fil2_imon=-2.68999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88104E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.17015E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32759E-1
cs_fil2_imon=-2.43171E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.59873E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21376E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32644E-3
inlet_lpb_pmon=2.16096E-2
chamber_ion_pmon=2.15758E-9
chamber_cvt_pmon=2.52243E-3
foreline_cvt_pmon=2.52243E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.36777E-1
res40_imon=-2.55103E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=206
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.07E2	0.0E0	1.47E2	4.1E1	-7.3401E-2	-8.80027E1	-1.26362E-3	-8.8E1	1.66893E-4	4.72069E-3	9.36508E-2	1.58126E1	-1.98546E1	-1.98623E1	1.50004E1	2.15706E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.15938E-2
2.0E0	1.7E2	0.0E0	3.16E2	1.6E2	-7.22418E-2	-8.80026E1	-1.28746E-3	-8.80002E1	-4.76837E-5	4.8399E-3	9.34362E-2	1.58341E1	-1.98801E1	-2.00736E1	1.50478E1	2.15257E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.15699E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80027E1	-1.14441E-3	-8.80004E1	7.15256E-5	4.8399E-3	9.37939E-2	1.57891E1	-1.98951E1	-1.98879E1	1.50051E1	2.15753E-9	2.52373E-3	2.52373E-3	6.32112E-3	2.16032E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.20871E-2	-8.80025E1	-1.26362E-3	-8.80005E1	-9.53674E-5	4.8399E-3	9.34839E-2	1.58392E1	-1.98458E1	-1.98334E1	1.501E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.16233E-2	-8.80026E1	-1.21593E-3	-8.80001E1	-1.43051E-4	4.74453E-3	9.36508E-2	1.57951E1	-1.98633E1	-1.99732E1	1.50064E1	2.15624E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.17918E-2
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.16233E-2	-8.80025E1	-1.35899E-3	-8.80001E1	1.19209E-4	4.8399E-3	9.32932E-2	1.58035E1	-1.98555E1	-2.00555E1	1.50274E1	2.15987E-9	2.52867E-3	2.52867E-3	6.32936E-3	2.18011E-2
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80023E1	-1.19209E-3	-8.80001E1	1.19209E-4	4.74453E-3	9.3317E-2	1.58005E1	-1.98561E1	-1.98615E1	1.5004E1	2.15987E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.16313E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80022E1	-1.33514E-3	-8.80006E1	-9.53674E-5	4.74453E-3	9.31978E-2	1.57713E1	-1.98375E1	-2.00169E1	1.49902E1	2.15519E-9	2.52099E-3	2.52099E-3	6.29645E-3	2.15938E-2
1.2E1	5.0E0	0.0E0	4.85E2	3.23E2	-7.13143E-2	-8.80021E1	-1.28746E-3	-8.79999E1	2.38419E-5	4.8399E-3	9.32217E-2	1.58035E1	-1.98074E1	-1.99167E1	1.49987E1	2.15349E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.15883E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.20871E-2	-8.80023E1	-1.35899E-3	-8.80001E1	-2.38419E-5	5.126E-3	9.32932E-2	1.57579E1	-1.98477E1	-1.99934E1	1.50047E1	2.15238E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.16878E-2
1.4E1	4.0E0	0.0E0	5.66E2	3.82E2	-7.26282E-2	-8.80023E1	-1.16825E-3	-8.80001E1	2.38419E-5	5.05447E-3	9.34601E-2	1.57867E1	-1.98517E1	-1.99632E1	1.5016E1	2.15887E-9	2.51915E-3	2.51915E-3	6.31858E-3	2.1676E-2
1.5E1	5.0E0	0.0E0	6.06E2	4.11E2	-7.201E-2	-8.80022E1	-1.0252E-3	-8.80002E1	0.0E0	5.07832E-3	9.34124E-2	1.58287E1	-1.98464E1	-1.9987E1	1.49908E1	2.15533E-9	2.52492E-3	2.52492E-3	6.3074E-3	2.16436E-2
1.6E1	1.3E1	0.0E0	6.47E2	4.41E2	-7.22418E-2	-8.80023E1	-9.53674E-4	-8.80003E1	-2.6226E-4	5.00679E-3	9.36031E-2	1.57753E1	-1.98229E1	-2.01007E1	1.50251E1	2.15894E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.16313E-2
1.7E1	5.6E1	0.0E0	6.87E2	4.7E2	-7.24736E-2	-8.80023E1	-1.09673E-3	-8.80002E1	-1.90735E-4	4.52995E-3	9.38416E-2	1.58191E1	-1.98428E1	-1.99224E1	1.4986E1	2.15381E-9	2.52509E-3	2.52509E-3	6.33863E-3	2.17205E-2
1.8E1	1.83E2	1.0E0	7.27E2	5.0E2	-7.31692E-2	-8.80022E1	-1.28746E-3	-8.80003E1	-1.66893E-4	5.126E-3	9.33886E-2	1.586E1	-1.98543E1	-1.99774E1	1.49938E1	2.15574E-9	2.51874E-3	2.51874E-3	6.31902E-3	2.17711E-2
1.9E1	3.32E2	0.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80023E1	-9.05991E-4	-8.80001E1	-2.38419E-4	5.00679E-3	9.33647E-2	1.58714E1	-1.98555E1	-1.98963E1	1.49998E1	2.15613E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.17255E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.286E-2	-8.80025E1	-1.19209E-3	-8.79998E1	-2.38419E-5	5.17368E-3	9.36747E-2	1.57708E1	-1.98051E1	-1.98853E1	1.49902E1	2.15706E-9	2.52099E-3	2.52099E-3	6.30192E-3	2.17255E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80027E1	-8.34465E-4	-8.8E1	1.90735E-4	5.126E-3	9.34601E-2	1.58227E1	-1.98819E1	-2.00339E1	1.50052E1	2.15992E-9	2.52384E-3	2.52384E-3	6.33436E-3	2.16252E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.25507E-2	-8.80022E1	-9.05991E-4	-8.80004E1	1.90735E-4	5.29289E-3	9.35316E-2	1.57631E1	-1.98499E1	-1.99803E1	1.50259E1	2.15332E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.16689E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80023E1	-1.16825E-3	-8.80002E1	-1.43051E-4	5.17368E-3	9.34362E-2	1.58167E1	-1.98452E1	-1.98464E1	1.50202E1	2.15758E-9	2.52243E-3	2.52243E-3	6.32644E-3	2.16096E-2
